高精度表面粗糙度图像识别系统的研制

本文研究的是一套通过干涉显微镜成像,利用CCD相机提取干涉条纹进行图像识别和处理,实现高精度工件表面粗糙度快速、非接触、自动化的检测系统。该系统在干涉显微镜的结构基础上,安装了CCD相机,将干涉图像采集到计算机中,然后对采集到的图像进行滤波、判别、二值化处理、提取边缘轮廓,并按照GB/T 1031-2009《产品几何技术规范(GPS)表面结构轮廓法表面粗糙度参数及其数值》的要求进行计算,得到被测工件的表面粗糙度。经实验验证,该检测系统满足Ra值(0.01~0.1)μm和Rz值(0.1~1.0)μm测量要求,适用于高精度工件的表面粗糙度测量。     

表面粗糙度干涉图像处理系统

介绍了表面粗糙度干涉图像处理和该系统以静态干涉图像处理技术对表面粗糙度检测的过程。该系统通过对一帧白光干涉图像的处理，可对Ｒａ值≤０．２μｍ的多刻线样板，试件表面粗糙度绝对、非接触、快速、自动地测量；该系统通过对白光和纳光二帧干涉图象的联合处理，以白光定位、纳光定度可对沟槽深度Ｈ≤５μｍ的标准单位刻线深度绝对，非接触，准确地测量。     

一种干涉测温的新方法

针对前后表面平行抛光的物质，干涉测温是一种非常有效的非侵入性测量方法，本文中对常规干涉测温法进行改进，提出了一种新方法－－弱相干法，该方法利用光源的弱相干性抑制背景反射光，选择所需信号光进行干涉测量，从而提高测量精度。文中描述了弱相干法的基本原理及相应的实验。     

用外差偏振干涉法测量保偏光纤双折射率

提出一种基于半导体激光调频外差干涉原理的保偏光纤双折射率的测量方法，即通过测量由保偏光纤构成的偏振干涉仪输出的外差信号的频率，求得保偏光纤的相对双折射率，此方法具有较高的分辨率和潜在的高精度，以及系统结构简单，无运动部件和非破坏测量等优点。     

气体脉冲压力的激光干涉法测量

对气体动态压力的非接触测量和溯源方法进行了研究。研制了基于激光干涉法测量气体脉冲压力的实验装置,通过光程与压力关系计算分析出气体脉冲压力的幅值和脉宽。建立了动态压力测量模型,并对测量不确定度进行了分析。开展了气体脉冲压力激光干涉测量实验,使用动态压力传感器和激光器进行同步测量,激光干涉法测量结果偏差较小,验证了装置测量的准确性。结果表明：本装置产生的脉冲压力信号稳定可靠,光学测量信号准确度高,具有实时性、非接触、可溯源等优点,可实现气体脉冲压力的测量,装置测量结果的相对标准偏差小于0.8%,测量结果的不确定度小于2%(k=2)。     

基于分数傅里叶域信号处理的迈克尔逊干涉法测量波长北大核心CSCD

建立了迈克尔逊干涉法测量波长所得条纹图的数学模型,揭示了其线性调频信号(chirp信号)特性,提出了基于分数傅里叶变换信号处理方法对迈克尔逊干涉条纹进行处理,实现了激光波长测量。实验结果表明:该测量方法具有可行性,对于波长范围为400~635 nm的激光,波长测量的平均相对误差约为0.39%。在干涉条纹图被高斯白噪声污损情况下,波长测量的平均相对误差仍然小于1%。     

双衍射光栅位移传感器原理及应用

介绍了一种双衍射光栅位移传感器,给出了其基本结构,并从多普勒效应的角度分析了其工作原理,给出了双衍射光栅产生的干涉条纹的接收方式和相应的光电信号的处理方法。该传感器与精密位移工作台组合成的表面粗糙度测量系统,对粗糙度样板进行了实测,结果表明该传感器能满足表面粗糙度测量要求。     

激光多普勒效应测量内位移一些问题的研究

本文采用散斑干涉理论研究固体表面内位移测量的激光多谱勒效应方法，理论和实验表明测量结果中存在一项随机相位误差，尽管该误差可在一定程度上补偿，但不能消除，因而限制了测量精度的是提高，此外，本文还给出了测量过程中信号随机消失的原因以及延长信号不间断距离的方法。     

融合循环自相关函数的小波分析算法在微裂缝检测中的应用

针对激光超声信号中存在大量的噪声成分,信号自身的频谱结构比较复杂,单一算法检测效果不佳的问题,为了提高激光外差干涉法检测材料表面微裂缝的能力,研究了将小波分析算法与循环自相关函数算法相结合实现激光外差干涉检测微裂缝的算法.该算法利用循环自相关函数判断激光超声信号中的微裂缝信息成分的频带,并由此选取合适的小波基函数,改善了小波分析算法对包含微裂缝信息的信号的提取能力.利用该算法进行实验,提取了包含微裂缝信息的信号,得到了被测样件微裂缝的位置信息.实验结果表明,利用该算法得到的被测样件微裂缝的距离与实际距离的误差率为1.04%,验证了算法的可行性和准确性.     

激光多普勒效应测量面内位移一些问题的研究

本文采用散斑干涉理论研究固体表面面内位移测量的激光多普勒效应方法。理论和实验表明测量结果中存在一项随机相让误差，尽管该误差可在一定程度上补偿，但不能消除，因而限制了测量精皮的提高。此外，本文还给出了测量过程中信号随机消失的原因以及延长信号不间断距离的方法。     

激光自混合变速测量的多项式相位参数提取

激光自混合能有效用于匀速运动物体的速度测量,为了加速激光自混合用于物体速度测量的实用化进程,对激光自混合用于变速运动物体的速度测量进行了探索.引入了基于多项式相位参数提取的信号处理算法;基于激光自混合的测速原理,推导了激光自混合用于变速测量时输出信号的多项式相位表示式,也即建立了激光自混合用于变速测量的仿真模型.通过仿真分析证明:在激光自混合变速测量中采用基于相位多项式参数提取的方法,可以获得物体运动的速度和加速度信息;该方法在较低信噪比的情况下仍然适用.     

Effect of multiple transverse modes in self-mixing sensors based on vertical-cavity surface-emitting lasers

We investigate the effect of coexisting transverse modes on the operation of self-mixing sensors based on vertical-cavity surface-emitting lasers (VCSELs). The effect of multiple transverse modes on the measurement of displacement and distance were examined by simulation and in laboratory experiment. The simulation model shows that the periodic change in the shape and magnitude of the self-mixing signal with modulation current can be properly explained by the different frequency-modulation coefficients of the respective transverse modes in VCSELs. The simulation results are in excellent agreement with measurements performed on single-mode and multimode VCSELs and on self-mixing sensors based on these VCSELs.     

Roughness measurement using a shearing interference microscope

A shearing interference microscope has high image stability even under vibration. This paper proposes a method of rms roughness measurement of smooth surfaces using shearing interference microscope images which include interference fringes. It makes use of the fact that, when the shearing length is extended in comparison with the autocorrelation length of the rough surface, the shearing interference image has a close relationship with the rms roughness of the measured surface. Principle and theory are discussed as well as the result of measurements of precision-finish surfaces 20-100-A rms.     

Self-mixing vibrometer with real-time digital signal elaboration

This work describes the development of an optical sensor for measurement of vibration without contact. The realized vibrometer is based on real-time digital elaboration of the signal obtained by a self-mixing interferometer, with an embedded autofocus system. Two different algorithms are implemented, for the continuous working on diffusive surfaces, with different levels of optical reflectivity. Thanks to the autofocus and the digital processing, the proposed sensor is easy to use and requires no assistance of a skilled operator.     

Micro-displacement measurement based on multiple self-mixing interference technology

Multiple self-mixing (MSM) interferometry, a high-precision and effective method for measuring micro-displacement, is proposed in this paper. First, a triangular wave is used to drive an electro-optic modulator for the phase modulation of MSM interference signals. Then, the five-step phase-shifting algorithm is used to demodulate the modulated MSM interference signals. Finally, the displacement curves of the vibrating target are reconstructed. MSM interferometry is used to measure the displacement of sinusoidal motion with a peak-to-peak value of 2000 nm and a frequency of 10 Hz. Simulation results show that the maximum reconstruction error of MSM interferometry is 0.074 nm. Experimental results show that the maximum reconstruction errors of MSM interferometry are less than 4 nm. Therefore, MSM interferometry satisfies the high precision required by displacement measurement systems.     

A displacement-measuring instrument utilizing self-mixing interferometry

We develop a self-mixing laser interferometer for the measurement of displacements on a generic target surface. The measurement is based on the bright-speckle tracking, a technique we have recently proposed to solve amplitude fading associated with the speckle statistics when the displacement to be covered is well in excess of the speckle longitudinal size. We implement the dynamical tracking of speckle maxima with piezo actuators and a phase-sensing loop. Also, we use an automatic gain control, based on a liquid crystal attenuator, to improve the amplitude statistics. Details of digital signal acquisition with adaptive signal processing through a field programmable gate array are discussed. The resulting instrument offers sub-/spl mu/m resolution in the measurement of displacement up to 500 mm of total shift, has virtually no need for alignment, and has very relaxed target-surface requisites, yet works with a very simple and inexpensive set-up.     

Absolute distance measurement with heterodyne optical feedback on a Yb:Er glass laser

Absolute distance measurement based on optical feedback using a single-frequency Yb:Er glass laser is demonstrated via the combination of heterodyne detection and frequency sweep. The technique allows for the enhancement of the sensitivity of the laser response to self-mixing thanks to resonant excitation close to the relaxation-oscillation frequency peak. The experimental results on noncooperative targets are in good agreement with the theory, and the shape of the resulting signal is analyzed in both the temporal and the frequency domains considering the specific dynamic of the class B solid-state laser. Suggestions are provided for further improvements on the signal processing.     

Self-mixing laser speckle velocimeter for blood flow measurement

A velocimeter using speckle phenomena in self-mixing laser diodes (SM-LDs) is used to evaluate the blood flow noninvasively. The mean frequency of the speckle signal obtained from the self-mixing laser diode reflects the activity of the blood flow in a certain probing area. The experimental results show that this new type of speckle velocimeter can be useful for the relative evaluation of blood flow in human tissues     

Correlation-based speckle velocimeter with self-mixing interference in a semiconductor laser diode

We propose a novel self-mixing laser diode speckle velocimeter based on autocorrelation. The self-mixing laser diode launches and receives reflected light from a moving surface that has a random reflection profile. Some portion of the scattered light backcouples into the laser cavity and causes random intensity variations in the form of speckle signals. These speckle signals obtained from a self-mixing laser diode are processed by use of autocorrelation. The linear relation between the velocity and the reciprocal of the correlation time of the speckle intensity fluctuations allows us to determine the velocity easily if proper calibration is performed. The range of the investigated velocity is 20-450 mm/s. For an aluminum target that moves at a velocity of 350 mm/s, the measurement error is less than 2%.     

A Comparative Study for the Assessment on Blood Flow Measurement Using Self-Mixing Laser Speckle Interferometer

We study a self-mixing laser diode (SM-LD) as a low-cost compact optical sensor for noninvasive blood flow measurement over the surface of the skin. We compare the SM-LD system with a commercially available Doppler flowmeter to assess the accuracy and feasibility of the SM-LD sensors for such applications. For the SM-LD flowmeter, we apply two different signal processing methods: (1) the counting method, i.e., counting the intensity fluctuations of the signal to obtain a frequency value, and (2) the autocorrelation method, i.e., measuring the autocorrelation time of the signal. In vitro measurements show good agreement with the commercially available flowmeter. In vivo measurements performed on test subjects revealed that the autocorrelation technique shows much better results. The results of in vitro and in vivo studies and the comparison with the commercial flowmeter confirm the applicability of the SM-LD flowmeter.