基于黑硅为吸收层的热电堆红外探测器

基于黑硅对部分波长红外光的高吸收效率,结合红外探测器对吸收层材料的要求,针对以黑硅为红外吸收层的设计与测试进行了研究;设计采用工艺中刻蚀出现的"黑色"物质为吸收层材料,研究对不同波长红外光的吸收效率。根据红外基本理论,结合MEMS工艺可行性和兼容性设计一种微机械热电堆红外探测器,热偶对的排布位置进行上下设计;突破原有的硅衬底的释放困难和SOI衬底的成本过高的问题,提出一种氧化层上的多晶硅作衬底,最后器件以正面干法释放器件的方法,在提高探测器性能的同时节约成本。     

微机械光读出红外成像阵列器件 机械特性对其性能的影响

研究了具有"双材料梁-微镜一体化"特征结构的光读出红外成像阵列器件的机械特性对其性能的影响。通过理论计算和ANSYS模拟,分析了器件的热-机械灵敏度,对器件的结构参数进行了优化,并得到其热-机械灵敏度为2.14×10^-3 rad/K;从器件的频率和阻尼特性出发,研究了器件的机械特性对热振动噪声和机械稳定性能的影响。研究结果表明:绝热梁断裂所需冲击载荷为8 945 g;器件的工作气压确定在50~200 Pa时,其热机械噪声和外界机械振动引起的噪声对器件性能的影响可忽略。该器件基本满足红外成像阵列器件的高灵敏度、低噪声的要求。     

碳纳米管压阻微悬臂梁红外热探测器的研究

研究了压阻复合层微机械悬臂梁红外探测器的热挠曲理论模型。利用IC工艺和微机械加工技术设计制作了一种硅/铝/碳纳米管三层微机械悬臂梁红外探测器,该探测器基于硅和铝两种材料热膨胀系数的差异,存在双物质效应,不同温度下梁的挠度不同,其形变可通过梁根部的压敏电桥检测。为提高探测器的红外吸收特性,实验探索出了在微机械悬臂梁上涂敷碳纳米管吸热层的工艺方法。实验研究了具有碳纳米管薄膜吸热层的三层微机械悬臂梁红外热探测器对红外辐射的响应规律,结果表明涂敷碳纳米管吸热层使响应灵敏度提高近一倍。     

微特征结构对导光板翘曲变形的影响

为研究不同微特征结构对导光板翘曲变形的影响,以导光板翘曲变形为质量目标,利用Moldflow MPI5,首次仿真研究了尺寸规格为11×3×0.8的导光板上5种不同微特征结构阵列(V型凹槽阵列、U型凸槽阵列、金字塔阵列、圆环阵列以及微透镜阵列)在不同工艺参数下对导光板翘曲变形的影响。仿真结果表明,微凸点微结构阵列影响最大,微圆凸点阵列导光板最大翘曲量为0.039 7 mm, 圆环微结构阵列影响最小,相同工艺参数下圆环微结构阵列导光板最小翘曲量为0.028 2 mm,两者相差最大达40.78%,而且凹结构微特征阵列对导光板翘曲量的影响幅度总是小于凸结构微特征阵列。结论认为,在导光板设计阶段就应考虑不同微结构特征对导光板注射成型翘曲变形的影响并优先选用圆环等凹结构微特征阵列,以减少导光板注射成型的翘曲量。     

薄膜型辐射热电堆探测器的机理与工艺改进

辐射热电堆探测器是一种常用的热探测器。薄膜型辐射热电堆探测器是利用真空镀膜的方法,通过掩模在基底上淀积而成的。本文在对该探测器机理进行分析的基础上,进一步介绍了工艺方面的改进。其中,各种腐蚀液、感光胶的配方及具体使用方法,对从事该方面研究的人员无疑会有很大的帮助。图2。     

金硅共晶键合在微机械Golay-cell红外探测器中的应用

利用硅微机械加工技术制备微机械Golay-cell红外探测器硅可动敏感薄膜,探测器气室由带薄膜结构硅片与带孔结构硅片键合密闭形成,气室中敏感气体吸收红外辐射而膨胀,使硅膜产生形变,借助硅膜电极板与金属电极板形成的平行板电容反映该形变变化量.运用Si/Ti/Au/Au/Ti/Si实现对探测器的金/硅共晶键合封装,形成气室,制备出探测器样品并初步得到响应.该键合方法能够进行选择区域键合,实验证明键合强度达到体硅强度.     

晶圆级热电堆探测器测试技术的研究

MEMS热电堆红外探测器在消费电子、医疗保健、智能家居、工业等领域的应用越来越广泛,其需求量也日益增加。因此如何降低器件的生产成本争取市场份额便成了器件生产商最关心问题。当前MEMS热电堆红外探测器的测试成本占据了其总成本的一半以上。由于目前测试技术及设备的限制,其测试基本都是由人工逐一完成,从而限制了其成本。针对这一产业需求,研制一种热电堆探测器的批量化自动测试系统具有明确的市场价值。围绕热电堆红外探测器的工作特性,特别是环境温度及激励温度对器件工作的影响,构建了一套针对晶圆级红外热电堆探测器特殊测试需求的批量化测试系统。     

薄膜型辐射热电堆探测器

本文所介绍的是用真空镀膜方法制作的热探测器-辐射热电堆器件的基本原理、性能指标、设计方法和制作工艺。     

一种新型红外测温仪

本文叙述了一种利用热电堆探测器的红外测温仪。依据黑体辐射定律导出了关系式。通过引入单片机的软件实现了仪器的智能化。从而使仪器的调试方法简化,利用简易设备即可达到较高的标定精度。仪器不需要调制与恒温系统,故结构简单轻便、使用方便、价格低廉。除适用于植物叶片及群体温度测量外,也可广泛用于其它物体表面温度的测量。     

大视场并列型仿生复眼光学系统

为了实现大视场微型仿生复眼系统的增材制造,对仿生复眼的成像原理、微透镜阵列与中继系统的设计以及复眼系统的机械结构进行了研究。根据仿生复眼的光学原理设计出单个微透镜,并完成微透镜阵列。通过设计中继系统,使曲面阵列所成的曲面像转换成平面像,从而被平面探测所接收。将微透镜阵列与中继系统组合并对其进行优化。为了满足复眼系统3D增材制造工艺,对其机械结构进行设计。整个复眼系由3481个紧密拼接的正六边形微透镜组成,每个微透镜的视场为4°,通光口径为110μm,整个复眼的视场为123.7°。在120 lp/mm处,复眼各视场的MTF值均大于0.3,各视场点列图的RMS半径均小于艾里斑半径。该系统成像质量良好,公差分析结果表明其像质满足成像要求,满足增材制备工艺需求。     

Minimal Realization of Linear Graph Models for Multi-physics Systems

An engineering system may consist of several different types of components,belonging to such physical"domains"as mechanical,electrical,fluid,and thermal.It is t...     

INTEGRAL EQUATION METHOD＇S APPLICATION IN HOLE-EDGE STRESS OF COMPOSITE MATERIAL PLATE WITH DIFFERENT SHAPED HOLES

The strength of composite plate with different hole-shapes is always one of the most important but complicated issues in the application of the composite material. The holes will lead to mutations and discontinuity to the structure. So the hole-edge stress concentration is always a serious phenomenon. And the phenomenon makes the structure strength decrease very quickly to form dangerous weak points. Most partial damage begins from these weak points. According to the complex variable functions theory, the accurate boundary condition of composite plate with different hole-shapes is founded by conformal mapping method to settle the boundary condition problem of complex hole-shapes. Composite plate with commonly hole-shapes in engineering is studied by several complex variable stress fimction. The boundary integral equations are founded based on exact boundary conditions. Then the exact hole-edge stress analytic solution of composite plate with rectangle holes and wing manholes is resolved. Both of offset axis loadings and its influences on the stress concentration coefficient of the hole-edge are discussed. And comparisons of different loads along various offset axis on the hole-edge stress distribution of orthotropic plate with rectangle hole or wing manhole are made. It can be concluded that hole-edge with continuous variable curvatures might help to decrease the stress concentration coefficient; and smaller angle of outer load and fiber can decrease the stress peak value.     

Non-monotonic material contrast in scanning ion and scanning electron images

30 keV Ga⁺ focused ion beam induced secondary electron (iSE) imaging was used to determine the relative contrast between several materials. The iSE signal compared from C, Si, Al, Ti, Cr, Ni, Cu, Mo, Ag, and W metal layers does not decrease with an increase in target atomic number Z₂, and shows a non-monotonic relationship between contrast and Z₂. The non-monotonic relationship is attributed to periodic fluctuations of the stopping power and sputter yield inherent to the ion–solid interactions. In addition, material contrast from electron-induced secondary electron (eSE) and backscattered electron (BSE) images using scanning electron microscopy (SEM) also shows non-monotonic contrast as a function of Z₂, following the periodic behavior of the stopping power for electron–solid interactions. A comparison of the iSE and eSE results shows similar relative contrast between the metal layers, and not complementary contrast as conventionally understood. These similarities in the contrast behavior can be attributed to similarities in the periodic and non-monotonic function defined by incident particle–solid interaction theory.     

Application of Feature Extraction through Convolution Neural Networks and SVM Classifier for Robust Grading of Apples

This paper proposes a novel grading method of apples,in an automated grading device that uses convolutional neural networks to extract the size,color,texture,an...     

分布动态载荷识别的抗噪处理

针对正交多项式频域法在用多种响应对矩形薄板进行载荷识别中抗噪性较差的问题,综合运用平均法、矩阵预处理和奇异值截断法等方法对之进行改善,并引入空间映射的思想,将该方法的应用范围拓展为复杂的模型.利用仿真算例,证实了该方法具有较好的抗噪性.     

基于MELTAC-N平台的核电厂安全级DCS环网研究与测试

针对工程实践中环网通讯相关问题的处理缺乏理论基础及国产化安全级DCS平台的开发缺乏成熟经验借鉴问题,对基于MELTAC-N平台核电厂安全级DCS环网的软硬件实现进行了研究。提出了安全级DCS环网双环网冗余设计、光切换开关设计等硬件设计方法,以及以RPR协议为基础,采用全数据收发策略的软件设计方法。在CPR1000安全级DCS平台上对安全级DCS环网的可靠性及实时性进行了评价,并进行了容错能力、响应时间及响应时间稳定性测试验证实验。结果表明,基于MELTAC-N平台安全级DCS环网软硬件设计具有较好的容错能力及响应时间稳定性。     

Short-Term Relay Quality Prediction Algorithm Based on Long and Short-Term Memory

The fraction defective of semi-finished products is predicted to optimize the process of relay production lines, by which production quality and productivity ar...     

End-to-End Multiview Gesture Recognition for Autonomous Car Parking System

The use of hand gestures can be the most intuitive human-machine interaction medium.The early approaches for hand gesture recognition used device-based methods....     

The laboratory simulation of abrasive wear

Abrasive wear has long been recognised as one of the most potentially serious tribological problems facing the operators of many types of plant and machinery; several industrial surveys have indicated that wear by abrasion can be responsible for more than 50% of unscheduled machine and plant stoppages. Locating the operating point of a tribological contact in an appropriate operational ‚map’︁ can provide a useful guide to the likely nature and origins of the surface degradation experienced in use, though care must be exercised in choosing the most suitable parameters for the axes of the plot. Laboratory testing of materials and simulations of machine contacts are carried out for a number of purposes; at one level for the very practical aims of ranking candidate materials or surface hardening treatments in order of their wear resistance, or in an attempt to predict wear lives under field conditions. More fundamentally, tests may be aimed at elucidating the essential physical mechanisms of surface damage and loss, with the longer term aim of building an analytical and predictive model of the wear process itself. In many cases, component surface damage is brought about by the ingress of hard, particulate matter into machine bearing or sealing clearances. These may be running dry although, more usually, a lubricant or service fluid is present at the interface. A number of standardised wear test geometries and procedures have been established for both two- and three-body wear situations, and these are briefly described. Although abrasive wear is often modelled as following an ‚Archard’︁ equation (i.e. a linear increase in material loss with both load and time, and an inverse dependence on specimen hardness) both industrial experience and laboratory tests of particularly lubricated contacts show that this is not always the case: increasing the hardness differential in an abrasively contaminated lubricated pair may not always reduce the rate of damage to the harder surface.     

ANGULAR DISTORTION ALLOWABLE VALUE AND ASSESS METHOD OF WELD ON COKE TOWER

A graph as the new engineering method for estimate the safety of bulging deformation of coke tower is proposed. Through stresses analysis of circumferential weld of coke tower and comparing the stresses produced by pressure with heat stress of steady state, residual stress, bending stress produced by both itself weight and wind loads, it showed that the stresses produced by pressure on the angle distortion are the main factor of equivalent stress of the combined stress. After comparing four kinds of stress controlling conditions, the relation to stress with depth of angular distortion, grade of curvature of angular distortion and half of region of angular distortion has been inferred. Graph of deformation allowable value of coke tower for different condition by angular distortion and half of region of angular distortion has been plotted. The five steps for its engineering use have been explained. The lighter the grade of curvature is, the larger of bulge allowance, may be, and the bigger of depth of angular distortion may pose too. For the coke tower with a popular structure of Dg 5 400 mm×28 mm, the result by graph is nearly more than the result of two formulas formed by other research, the error is less than 7.0%. But, the graph can be easily applied to different size of angular distortion.