Experimental investigation of the electromagnetic effect and improvement of the plasma radial uniformity in a large-area,very-high frequency capacitive argon discharge

We performed an experimental investigation on the electromagnetic effect and the plasma radial uniformity in a larger-area, cylindrical capacitively coupled plasma reactor. By utilizing a floating hairpin probe, dependences of the plasma radial density on the driving frequency and the radio-frequency power over a wide pressure range of 5–40 Pa were presented. At a relatively low frequency(LF, e.g. 27 MHz), an evident peak generally appears near the electrode edge for all pressures investigated here due to the edge field effect, while at a very high frequency(VHF, e.g.60 or 100 MHz), the plasma density shows a sharp peak at the discharge center at lower pressures, indicating a strong standing wave effect. As the RF power increases, the center-peak structure of plasma density becomes more evident. With increasing the pressure, the standing wave effect is gradually overwhelmed by the ‘stop band' effect, resulting in a transition in the plasma density profile from a central peak to an edge peak. To improve the plasma radial uniformity, a LF source is introduced into the VHF plasma by balancing the standing wave effect with the edge effect. A much better plasma uniformity can be obtained if one chooses appropriate LF powers, pressures and other corresponding discharge parameters.     

Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas

In this paper,the double-discharge plasma generated by radio frequency(RF) and direct current(DC) has been investigated.In comparison with their single-frequency counterpart,the interaction between the two excitations is significant and beneficial.The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage;meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate.The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density.     

Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges

It is recognized that standing wave effects appearing in large-area,very-high-frequency capacitively coupled plasma(CCP)reactors cause center-high plasma non-uniformity.Using a high-frequency magnetic probe,we present a direct experimental diagnostic of the nonlinear standing waves and bulk ohmic electron power absorption dynamics in low pressure CCP discharges for different driving frequencies of 13.56,30,and 60 MHz.The design,principle,calibration,and validation of the probe are described in detail.Spatial structures of the harmonics of the magnetic field,determined by the magnetic probe,were used to calculate the distributions of the harmonic current and the corresponding ohmic electron power deposition,providing insights into the behavior of nonlinear harmonics.At a low driving frequency,i.e.13.56 MHz,no remarkable nonlinear standing waves were identified and the bulk ohmic electron power absorption was observed to be negligible.The harmonic magnetic field/current was found to increase dramatically with the driving frequency,due to decreased sheath reactance and more remarkable nonlinear standing waves at a higher driving frequency,leading to the enhancements of the ohmic heating and the plasma density in the bulk,specifically at the electrode center.At a high driving frequency,i.e.60 MHz,the high-order harmonic current density and the corresponding ohmic electron power absorption exhibited a similar node structure,with the main peak on axis,and one or more minor peaks between the electrode center and the edge,contributing to the center-high profile of the plasma density.     

中国散裂中子源快循环同步加速器射频系统的设计与研制进展

研制了大功率宽带快速扫频射频系统,其用于中国散裂中子源（CSNS）快循环同步加速器（RCS）中,主要包括铁氧体加载谐振腔、射频功率源、偏流源和低电平控制系统。射频系统工作重复频率为25 Hz,扫频范围为1.022～2.444 MHz,单个腔体（双加速间隙）可提供最大30 kV加速电压。两级的调谐控制能解决快速扫频过程中的系统失谐问题,采用束流前馈、直接反馈等多种技术手段可对束流负载效应进行补偿。     

Temporal evolution of atmospheric cascade glow discharge with pulsed discharge and radio frequency discharge

Atmospheric cascade discharges with pulsed discharge and radio frequency(RF)discharge were experimentally investigated by the temporal evolution of discharge spatial profile and intensity.The indium tin oxide(ITO)coated glass was employed as the transparent electrode to capture the discharge distribution above the electrode surface.It is demonstrated that in the pulsed discharge with dielectric barrier,the first discharge at the rising edge of pulse voltage is uniformly ignited and then forms an expanding plasma ring on the ITO electrode surface,which shrinks to the same diameter as that of bare stainless steel electrode with the generation of second discharge at the falling edge of pulse voltage.The discharge profiles along the electrode surface and discharge gap of the successive RF discharge are dependent on the intensity and spatial distribution of residual plasma species generated by the pulsed discharge,which is determined by the time interval between the pulsed discharge and RF discharge.It is demonstrated that the residual plasma species before the RF discharge ignition help to achieve the stable operation of RF discharge with elevated intensity.     

Discharge Characteristics of Large-Area High-Power RF Ion Source for Positive and Negative Neutral Beam Injectors

A large-area high-power radio-frequency(RF) driven ion source was developed for positive and negative neutral beam injectors at the Korea Atomic Energy Research Institute(KAERI). The RF ion source consists of a driver region, including a helical antenna and a discharge chamber, and an expansion region. RF power can be transferred at up to 10 kW with a fixed frequency of 2 MHz through an optimized RF matching system. An actively water-cooled Faraday shield is located inside the driver region of the ion source for the stable and steady-state operations of high-power RF discharge. Plasma ignition of the ion source is initiated by the injection of argongas without a starter-filament heating, and the argon-gas is then slowly exchanged by the injection of hydrogen-gas to produce pure hydrogen plasmas. The uniformities of the plasma parameter,such as a plasma density and an electron temperature, are measured at the lowest area of the driver region using two RF-compensated electrostatic probes along the direction of the shortand long-dimensions of the driver region. The plasma parameters will be compared with those obtained at the lowest area of the expansion bucket to analyze the plasma expansion properties from the driver region to the expansion region.     

铁氧体定向耦合器及其在加速器高频控制中的应用

设计了一种６ＭＨｚ、３ｄＢ铁氧体定向耦合器，并用于制作加速器高频系统的控制单元。此种定向耦合器是用紧密绞合的双股漆包线绕在射频铁氧体磁环或磁芯上做成，具有尺寸小、结构简单和频带宽等优点，工作范围一般在几个ＭＨｚ到几十个ＭＨｚ。在此基础上设计制作了鉴相器、反设式电调移相器、电调衰减器和ＡＬＣ等线路，使加速器高频谐振腔实现了自动调谐。     

Experimental study of a single tube high RF power amplifier for ICRF heating system

A concept of a single tube high RF power amplifier was developed for ion cyclotron range of frequency (ICRF) plasma heating system. In the concept, a tetrode was used with a grounded cathode and input power to drive a control grid of the tetrode was provided by a switching circuit. As the new amplifier arrangement can eliminate a low power (10 kW level) and an intermediate power (100 kW level) tetrode amplifiers, their high voltage DC (HVDC) power supplies, and control and monitor system for these amplifiers and HVDC power supplies in a conventional high RF power source of the ICRF heating system, this new high RF power source is more flexible on frequency change and more mechanically reliable than the conventional one. A test amplifier composed of the tetrode and a field effect transistor (FET) switching circuit was constructed. The FET switching circuit was so compact that it could be mounted close to the tetrode socket. The maximum output RF power of 8.5 kW was obtained with a plate efficiency of 82% at 70 MHz. The feasibility of the single tube high RF power amplifier was experimentally proved. The plate efficiency of 82% could not be explained by the standard class-C amplification but by high efficiency amplification under assumptions of a flat-topped plate current pattern and double resonance of an output cavity at the fundamental frequency and the third higher harmonic frequency.     

Experimental Status of the HANBIT Facility

HANBIT is a magnetic mirror confinement device. Recent physics experiments have been mainly focused on identifying discharge characteristics and on getting stable plasma production and operation modes, by using a 500 kW slot antenna system at a fixed RF frequency of 3.5 MHz and varying discharge conditions such as fueling rate, RF power, and B-field intensity in central cell. Two distinct operation modes are found to be very sensitive to the RF power as well as the ratio of the RF frequency to the ion cyclotron frequency. A MHD interchange mode of m- -1 is clearly observed and the stabilizing mechanism can be explained by the sideband coupling theory.     

Optical Characterization of Amorphous Hydrogenated Carbon(a-C:H)Thin Films Prepared by Single RF Plasma Method

Methane(CH4) plasma was used to produce amorphous hydrogenated carbon(aC:H) films by a single capacitively coupled radio frequency(RF) powered plasma system.The system consists of two parallel electrodes:the upper electrode is connected to 13.56 MHz RF power and the lower one is connected to the ground.Thin films were deposited on glass slides with different sizes and on silicon wafers.The influence of the plasma species on film characteristics was studied by changing the plasma parameters.The changes of plasma species during the deposition were investigated by optical emission spectroscopy(OES).The structural and optical properties were analyzed via Fourier transform infrared(FTIR) spectroscopy,X-ray diffraction(XRD) and UV-visible spectroscopy,and the thicknesses of the samples were measured by a profilometer.The sp~3/sp~2 ratio and the existing H atoms play a significant role in the determination of the chemical properties of thin films in the plasma.The film quality and deposition rate were both increased by raising the power and the flow rate.     

Plasma characteristics of direct current enhanced cylindrical inductively coupled plasma source

Experimental results of a direct current enhanced inductively coupled plasma (DCE-ICP) source which consists of a typical cylindrical ICP source and a plate-to-grid DC electrode are reported.With the use of this new source,the plasma characteristic parameters,namely,electron density,electron temperature and plasma uniformity,are measured by Langmuir floating double probe.It is found that DC discharge enhances the electron density and decreases the electron temperature,dramatically.Moreover,the plasma uniformity is obviously improved with the operation of DC and radio frequency (RF) hybrid discharge.Furthermore,the nonlinear enhancement effect of electron density with DC + RF hybrid discharge is confirmed.The presented observation indicates that the DCE-ICP source provides an effective method to obtain high-density uniform plasma,which is desirable for practical industrial applications.     

Effect of gas pressure on ion energy at substrate side of Ag target radio-frequency and very-high-frequency magnetron sputtering discharge

The effect of gas pressure on ion energy distribution at the substrate side of Ag target radio-frequency (RF) and very-high-frequency (VHF) magnetron sputtering discharge was investigated. At lower pressure, the evolution of maximum ion energy (E) with discharge voltage (V) varied with the excitation frequency, due to the joint contribution of the ion generation in the bulk plasma and the ion movement across the sheath related to the ion transit sheath time τi and RF period τ_RF. At higher pressure, the evolution of E–V relationships did not vary with the excitation frequency, due to the balance between the energy lost through collisions and the energy gained by acceleration in the electric field. Therefore, for RF and VHF magnetron discharge, lower gas pressure can have a clear influence on the E–V relationship.     

Experimental study of a low-pressure hybrid RF discharge

Experimental study of the low-pressure hybrid RF discharge with both inductive and capacitive channels was carried out. The RF power unit consists of inductor(antenna) and capacitor plates connected in parallel to the same RF power source. A separating capacitor Csepis included into the circuit between the antenna ends and the lead connected to the discharge capacitor plate in order to prevent the closing of the capacitive circuit through direct current by inductor and to control the contribution of capacitive channel to discharge sustaining. It is shown that at low power of the RF power source, power coupling to the discharge mainly occurs through the capacitive channel. Increasing the power of the RF power source increases the power coupled in the inductive channel, electron density, and current flowing through the capacitive channel. This leads to increasing voltage drop on the separating capacitor and partial cutoff of the capacitive channel. At separating capacitance values below certain value(below 50 pF in the present experiments), the self-bias of the loaded plate of the discharge capacitor becomes positive indicating that the thickness of the electrode sheath of the loaded electrode decreases compared to thickness of the sheath of the grounded electrode. The thickness of the space-charge sheath of the grounded electrode decreases with increasing power coupled to the plasma. At separating capacitance below 50 pF, higher harmonics of the RF voltage and current are actively generated in the capacitive discharge channel. Increasing the separating capacitance leads to decreasing electron density, increasing effective electron temperature and more effective RF energy coupling to plasma due to increasing relative importance of the capacitive discharge channel.     

Experimental Investigation on Electromagnetic Attenuation by Low Pressure Radio-Frequency Plasma for Cavity Structure

This paper reports on an experiment designed to test electromagnetic(EM)attenuation by radio-frequency(RF)plasma for cavity structures.A plasma reactor,in the shape of a hollow cylinder,filled with argon gas at low pressure,driven by a RF power source,was produced by wave-transmitting material.The detailed attenuations of EM waves were investigated under different conditions:the incident frequency is 1-4 GHz,the RF power supply is 13.56 MHz and1.6~(-3) k W,and the argon pressure is 75-200 Pa.The experimental results indicate that 5-15 d B return loss can be obtained.From a first estimation,the electron density in the experiment is approximately(1.5-2.2)×1016m~(-3)and the collision frequency is about 11~(-3)0 GHz.The return loss of EM waves was calculated using a finite-difference time-domain(FDTD)method and it was found that it has a similar development with measurement.It can be confirmed that RF plasma is useful in the stealth of cavity structures such as jet-engine inlet.     

Comparison of discharge characteristics and methylene blue degradation through a direct-current excited plasma jet with air and oxygen used as working gases

Through using a direct-current driven plasma jet operated underwater, degradation of methylene blue(MB) is investigated with air and oxygen used as working gases. With a low power voltage,a plasma plume extends from the needle electrode, which is purple in air. It turns pink after it bridges the two electrodes. During the process, oxygen plasma remains white. Discharge operates in a pulsed mode or a continuous one, which depends on the magnitude of power voltage. For the pulsed mode, oxygen discharge has a shorter plume and a higher pulse frequency than air discharge under the same power voltage. For the same current of the continuous mode, both power and gap voltages of oxygen discharge are higher than those of air discharge. Moreover, MB degradation efficiency increases with increasing power voltage or initial concentration of MB solution. Compared with air discharge, oxygen discharge has a higher degradation efficiency with the same power voltage and treatment time. The pulsed oxygen discharge with power voltage of about 6.5 k V has the highest efficiency in degrading MB dye, reaching approximately 85.8% after 10 min treatment. As a comparison, after 10 min treatment in air discharge, the highest degradation efficiency is 63.7%, which appears in the continuous mode at a power voltage of 10.6 kV. Besides, optical spectra from the discharges are also compared for the two types of working gases.     

Mode transition induced by gas pressure in dusty acetylene microdischarges: two-dimensional simulation

Radio-frequency microdischarge in acetylene is investigated by use of a fluid model and an aerosol dynamics model in a cylindrical discharge chamber. In this article, the results at a pressure of 100–500 Torr, a voltage of 80–150 V, and an electrode gap of 400–1000 μm are carefully analyzed and discussed. It is shown that two electron heating modes α and γ appear in the microdischarge, and the pressure-dependent transition from α to γ was accompanied by the abrupt decrease of electron density and electron temperature. The mode transition phenomenon is further confirmed by the variation of the electron temperature axial profiles, the profiles vary continuously from a center high at the pressure of 100 Torr to an edge high at the pressure of500 Torr. Furthermore, in the α mode(100 Torr) the plasma density increases linearly with the increase of electrode gap, but decreases sharply with the increase of electrode gap in the γ mode(100 Torr). The gas pressure and applied voltage effects on the nanoparticle density and degree of nonuniformity are also investigated. It has been shown that the gas pressure greatly influences the axial profiles of nanoparticle density and the values of the degree of nonuniformity, while the values of the plasma parameters(electron density and nanoparticle density) strongly depend on the applied voltage.     

Experimental and numerical studies on the receiving gain enhancement modulated by a sub-wavelength plasma layer

A novel technique based on sub-wavelength plasma structure effects on enhancement of RF communication signals on a receiving antenna is carried out in this paper in laboratory experiments and analyzed by corresponding numerical simulations. Considerable intensification on receiving signal gain up to～10 dB in comparison with that without the plasma modulation is observed experimentally in～1 GHz RF band, with an effective enhancement bandwidth of～340 MHz and the fractional bandwidth of～34％. Then, the optimal modulation parameters of plasma are further studied by a numerical simulation. It is shown that the number density, the layer thickness, and the collision frequency of the plasma, as well as the relative distance between the plasma layer and antenna synergistically affect the modulation. Compared to the metallic antenna with the same overall dimension, the modulated antenna covered by the subwavelength plasma structure features higher receiving efficiency and lower radar cross section in the studied RF band. The mechanism of the reception enhancement is further revealed by analyzing characteristics of electromagnetic scattering and electric field distribution in the subwavelength plasma layer. The results then exhibit scientific significance and application potential of sub-wavelength plasma modulation on compact receiving antennas with higher performance and better feature of radar stealth.     

兰州重离子加速器冷却储存环高频加速系统

文章介绍兰州重离子加速器冷却储存环主环用于加速粒子的高频加速系统。加速系统的频率范围为0. 25~1.7MHz，最高峰值电压为8.0kV。高频腔体的固有谐振频率通过调节绕在腔体加载的铁[JP2]氧体材料上的偏磁电流来改变，所加载的铁氧体材料为600HH。高频腔体内的真空度达到3×10^-9Pa，高频发射机的最大输出功率为30kW，高频系统的控制采用基于PCI总线技术，它提供所有高频系统控制及监测功能。     

Frequency Matching Effects on Characteristics of Bulk Plasmas and Sheaths for Dual-Frequency Capacitively Coupled Argon Discharges： One-Dimensional Fluid Simulation

A one-dimensional fluid model is proposed to simulate the dual-frequency capacitively coupled plasma for Ar discharges. The influences of the low frequency on the plasma density, electron temperature, sheath voltage drop, and ion energy distribution at the powered electrode are investigated. The decoupling effect of the two radio-frequency sources on the plasma parameters, especially in the sheath region, is discussed in detail.     

Development of a helicon-wave excited plasma facility with high magnetic field for plasma-wall interactions studies

The high magnetic field helicon experiment system is a helicon wave plasma(HWP)source device in a high axial magnetic field(B_0)developed for plasma–wall interactions studies for fusion reactors.This HWP was realized at low pressure(5?×?10~(-3)?-?10 Pa)and a RF(radio frequency,13.56 MHz)power(maximum power of 2 k W)using an internal right helical antenna(5 cm in diameter by 18 cm long)with a maximum B_0of 6300 G.Ar HWP with electron density~10~(18)–10~(20)m~(-3)and electron temperature~4–7 e V was produced at high B_0 of 5100 G,with an RF power of 1500 W.Maximum Ar~+ion flux of 7.8?×?10~(23)m~(-2)s~(-1)with a bright blue core plasma was obtained at a high B_0 of 2700 G and an RF power of 1500 W without bias.Plasma energy and mass spectrometer studies indicate that Ar~+ion-beams of 40.1 eV are formed,which are supersonic(~3.1c_s).The effect of Ar HWP discharge cleaning on the wall conditioning are investigated by using the mass spectrometry.And the consequent plasma parameters will result in favorable wall conditioning with a removal rate of 1.1?×?10~(24)N_2/m~2 h.