一种分析微悬臂梁大挠度变形的新算法

考虑静电力边缘效应的影响,建立了微悬臂梁大挠度变形的静态变形分析模型,通过梁弯曲理论将控制方程化为一阶非线性微分方程组,结合非线性方程组求根、迭代修正齐次扩容精细积分法和增量迭代法,提出了一种分析微悬臂梁大挠度变形的半解析、半数值算法。数值算例表明:该方法具有较高的精度和稳定性,是分析微悬臂梁变形的一种有效方法;通过对微梁静态特性的分析表明:考虑边缘效应后微梁的吸合电压减小,考虑大挠度变形的影响后微梁的吸合电压增加。     

Microcantilever-based weather station for temperature,humidity and flow rate measurement

The current study develops a new process for the fabrication of Pt resistor temperature detectors (RTDs), cantilevers covered with a water-absorbent polyimide layer for humidity measurement and the bending-up of cantilevers to determine the flow rate. Pt RTDs are fabricated on the silicon substrate. The temperature measurement is based on the linear resistance variations when temperature changes. The polyimide layer is spun on the cantilever to form a humidity sensing layer. A variation in humidity causes moisture-dependent bending of the micro-cantilever, which changes the measured resistance of the resistor on the micro-cantilever. The same type of micro-cantilever, without spinning on polyimide, is used to form an anemometer. It is found that the cantilever bends slightly upward as a result of the released residual stress induced in the beam during the fabrication. When wind passes over the cantilever beam, a small deformation occurs. Variations in the flow rate can therefore be determined by measuring the changes in resistance caused by the beam deflection, using a LCR meter.     

Design of high stroke electrostatic micropumps: a charge control approach with ring electrodes

A novel design strategy to avoid pull-in occurrence in electrostatic micro electro mechanical systems is proposed. It combines charge control with ring electrodes, on a circular geometry. This idea is introduced here for the design of efficient and reliable high stroke electrostatic diaphragm micropumps, while it has a broad potential applicability. A minimal lumped one degree-of-freedom model is derived and used to introduce and demonstrate the proposed approach for a circular plate geometry. Finite element models are subsequently adopted for a more detailed device modelling. As expected, charge control exhibits a stabilizing effect with respect to voltage drive, but not sufficient to achieve a full-range stability for the considered geometry. When the electrode area is properly defined, stability range can be extended up to gap closure in the central part of the membrane. In this configuration, the increase in voltage required for full-range device drive would be relevant, while in charge control the penalty is considerably lower. Finally, loading conditions and geometrical parameters for an optimized actuation are suggested.     

Optimal design and noise consideration of micromachined vibratingrate gyroscope with modulated integrative differential optical sensing

A novel design of a micromachined vibrating rate gyroscope is presented. The rate gyroscope consists of a suspended proof mass which is attached by indium bumps to a CMOS chip. The proof mass is excited to vibration by electrostatic force. The displacements due to rate are sensed optically, using CMOS-integrated photodiodes and analog electronics. System considerations, including the mechanical behaviour, optical sensing, electronics, and noise sources of the rate gyroscope, are discussed. An expression for the noise equivalent rate (NER) of the system is obtained in order to derive an optimal design approach for the rate gyroscope. Optimal design and simulations of a case study of a rate gyroscope are presented. The device shows the ability of sensing 1 deg/h even at moderate quality factors of the order of 5000 and low-excitation voltages of 2.25 V     

Design of bossed silicon membranes for high sensitivity microphone applications

This paper deals with the design optimization of new high sensitivity microphones in silicon on insulator (SOI) technology for gas sensing applications. A novel geometry of bossed silicon membranes used as mechanical transducer has been studied by finite element modelling. Device fabrication is achieved from SOI substrates through deep backside anisotropic etching and shallow front side reactive ion etching to define a bossed sensing membrane with two reinforced areas. Thus, the influence of thin film stresses on the device performance is largely decreased. Polysilicon gauges are located on the reinforced areas to get a better linearity in pressure.     

A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing

This paper reports a thermopneumatic microvalve featuring a corrugated diaphragm. A sealed cavity below the diaphragm contains a volatile fluid, the vapor pressure of which can be increased by resistive heating to deflect the diaphragm, thus closing the valve. Silicon heater grids are elevated 9 /spl mu/m above the cavity floor, and the cavity is only partially filled with fluid, to increase thermal efficiency. A vacuum-sealed, capacitive pressure sensor on the floor allows direct monitoring of the cavity pressure. Pentane-filled actuators sustain a 2070 torr pressure rise above atmospheric with 500 mW input power. A device tested in situ closes with 350 mW at 1000 torr inlet pressure (venting to vacuum) and maintains closure with 30 mW input. Valves conduct 400 sccm under 1500 torr differential pressure, while maintaining leak rates as low as 10/sup -3/ sccm, yielding a dynamic range of 10/sup 5/. A thermodynamic model has been developed that matches experimental power, pressure, and transient response data to within a few percent. This model is used to suggest an optimized structure capable of a 2000 torr pressure rise with 50 mW input and a 1 s response time. The glass-and-silicon valve structure is suitable for integration into complete microfluidic systems.     

Optical detection of the Coriolis force on a silicon micromachined gyroscope

In this paper, we report on the optical characterization of a micromachined gyroscope prototype for automotive applications, by means of feedback interferometry. In order to directly detect the rotation-induced Coriolis force, we have developed a compact and stable interferometric setup, which has been positioned inside a small vacuum bell, mounted on a rotating table. By this setup, which has a noise limit of the order of 10/sup -11/ m/(Hz)/sup 1/2/, we have measured the gyro responsivity curve, demonstrating the feasibility of the optical interferometric detection of the in-plane response of a MEMS sensor. In addition, we have carried out the full mechanical characterization of the device at different pressures, and we have performed the matching of the gyro resonance frequencies by the interferometric monitoring. Our gyro had a resonance frequency of 3986 Hz for both axes after tuning; at a pressure of 7 10/sup -2/ torr, the quality factor were Q=18000 for the driving axis and Q=1800 for the sensing axis, while the measured responsivity was 7 10/sup -10/ m/(/spl deg//s). The optical characterization represents an important feedback to the designer and is especially powerful in the case of prototypes for which the on-board electronics is not yet available.     

Measurement of static and dynamic mechanical behavior of micro and nano-scale thin metal films: using micro-cantilever beam deflection

We present the results of a novel micro-beam deflection test used to investigate the static and dynamic mechanical behavior of submicron-thick metal films. The method demonstrated in this study allows researchers to observe the motion of micro and nano-scale thin films responding to electrostatic loads, by means of laser reflection measurements at frequency rates of up to 500 Hz. Researchers fabricated a supporting frame and a novel triangular shaped “paddle” beam designed to provide uniform plane stress distribution while undergoing deflection. A simple geometric calculation, based on cantilever deflection, enabled the degree of strain to be determined, which in turn provided the Young’s modus for aluminum film of a given thickness. We also studied the dynamic behavior using the dynamic frequency response of the beam, generated by electrostatic forces under various loads and vacuum pressure conditions. Our results showed that air damping has a significant influence on the free damping behavior of specimens, and only a minor influence on damping frequency. We determined the loss angle and frequency using sweep frequency and free damping methods, which were very consistent with paddle resonant frequencies. The loss angle obtained from a simple silicon micro-beam was 2.001 × 10^−4°using the free damping method and 2.23 × 10^−4°using the sweep frequency method. The dynamic response loss mechanism measured in this experiment provides incentive for the further study of grain boundary motion and dislocation motion in thin films.     

Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever

This study experimentally investigates the effect of hydrodynamic coupling of a micro-cantilever array on the dynamic response of a micro-cantilever. The micro-cantilever array consists of three harmonically driven micro-cantilevers dynamically coupled through air flow. The right cantilever and left cantilever (auxiliary-cantilevers) adjacent to the middle cantilever (operating-cantilever) are exploited to generate hydrodynamic force to change the air damping of operating-cantilever. Thus, the quality factor of operating-cantilever can be controlled by changing the phase and magnitude of excitation force on auxiliary-cantilevers, and varying the gap between auxiliary-cantilevers and operating-cantilever. In the experiment, magnetic actuated micro-cantilever arrays were fabricated and characterized. Measurements show the variation of quality factor of operating-cantilever is from ?39% to +27%.     

Fabrication and Characterization of a Wafer-Level MEMS Vacuum Package With Vertical Feedthroughs

This paper reports a MEMS vacuum package with vertical feedthroughs formed in a glass substrate all at the wafer level. This approach satisfies requirements for MEMS vacuum packages, including small size, vacuum/hermetic capability, sealed and low parasitic feedthroughs, wafer-level processing, compatibility with most MEMS processes, and low cost. It also enables flip-chip solder attachment to a PC board. The package has an integrated micro-Pirani gauge on a glass substrate for in situ monitoring, a silicon cap, and vertical feedthroughs through the glass. The integrated Pirani gauge has 0.6 milli-torr resolution at 0.1 torr and 0.2 torr resolution at 100 torr. Using the Pirani gauge, the fabricated vacuum package is characterized. The package has maintained ~33 torr base pressure with plusmn1.5 torr uncertainty for more than four months without a getter. The long-term measured pressure uncertainty is from the measurement setup and environment, and can be improved using a getter inside the package. [2007-0160]     

Sensing device for measuring infants’ grasping actions

The study and measurement of grasping actions and forces in humans is important in a variety of contexts. In infants, it can give insights on the neuro-motor development and on pathological dysfunctions, while it poses functional and operative requirements that are not fully matched by current sensing technology. Novel approaches for measuring infants’ grasping actions are based on sensorized toys usable in natural settings. In this paper, we present a sensing device for measuring grasping force in 4–9-month-old infants. Starting from technical and clinical specifications, we designed and developed a novel device made by silicone, shaped as a ring toy and equipped with a pressure sensor, able to measure the pressure exerted by the infant's hand in the range of 0–5 psi. A mechanical model of the material has been developed and tensile compression tests have been executed in order to assess the mechanical and electrical characteristics of the sensing device. The proposed device complies with the (technical and clinical) specifications and results suitable for measuring the grasping forces of the targeted infants, and finally for monitoring infants’ motor development. The theoretical model developed and the methodology for designing and characterizing the sensing device allow for easy re-design and adaptation of the sensing device and consideration of a variety of possible applications.     

基于无线跳频通讯的液压支架工作状态无线采集和监测系统的研究

针对煤矿井下综采工作面液压支架机械状态信息获取困难,无法监测其工作状态的问题,提出了一种基于无线跳频通讯感知液压支架工作状态的方法,设计了无线感知传感器,它利用电阻式应变片将压力、应力等力学信号转化为电信号,通过无线收发模块进行数据交换。开发了基于C8051F020和nRF905射频电路的无线收发模块,模块之间通过无线跳频的方式通讯,在多个信道进行数据传输,可避免同频信号对传输数据的干扰。基于IEEE 802.11相关协议,采用CSMA/CA、RTS/CTS/DATA/ACK握手机制和CRC差错校验机制,可确保无线通信的可靠性。考虑液压支架的支护状态和安全强度,提出了液压支架安全程度分级方法,实现对液压支架机械故障的预警,进而为液压支架的寿命管理提供可靠的数据支撑。     

An uncooled optically readable infrared imaging detector

This paper presents a design and fabrication of bi-material micro-cantilever array (focal plane array, FPA) made of silicon nitride (SiN_x) and gold (Au) for uncooled optical readout infrared (IR) imaging system, in which silicon (Si) substrate is removed. Compared with the conventional thermal imaging detectors where the FPA must be put in high vacuum, IR thermal images can be obtained even though the cantilever array is placed in the atmosphere. The reason is the elimination of air gap (∼2 μm) between the cantilever beam and substrate, which introduces the air conduction of high temperature gradient. The preliminary experimental results with the micro-cantilever array of 140 × 98 elements and a 12-bit charge-coupled device (CCD) indicate that objects at temperature of higher than 120 °C can be detected and the noise-equivalent temperature difference (NETD) is ∼7 K. Also, the experimental results are well accordant with the thermomechanical analysis of designed micro-cantilever array.     

An Improved Performance Poly-Si Pirani Vacuum Gauge Using Heat-Distributing Structural Supports

A new micro-Pirani vacuum gauge that employs a ladder-shaped structure with two parallel bridges and crosslinks in between has been designed and fabricated. This design enhances the physical performance of the gauge by increasing structural rigidity, thus allowing for longer beams and a wider selection of materials, and by allowing for better heat distribution across the sensor - therefore improving the full-scale range of sensor response. Furthermore, this Pirani gauge can be fabricated in a one-, two-, or three-mask process without postprocessing steps such as KOH etching. In a CMOS-compatible process, poly-Si 4 times 2 times 250-mum and 4 times 2 times 1000-mum Pirani gauges with the ladder structure were fabricated and tested with pressure ranges from 10^-3 to 50 torr (0.133 to 1 times 10³ Pa) and 5 times 10^-2 to 760 torr (6.67 to 1.01 times 10⁵-Pa atmospheric pressure) and with resolutions of approximately 10^-3 and 5 times 10^-2 (0.133 to 6.67 Pa), respectively. Constant temperature circuitry and thermoelectric temperature stabilization would further extend the range of operation and the resolution of these devices. Furthermore, these sensors operate at very low powers ranging from 300 to 600 muW depending on their geometry and pressure measurement range.     

一种差动输出石英谐振式力传感器研制

介绍了一种具有差动输出石英力传感器,该传感器由轮辐式弹性结构和2只石英力敏谐振器组成。利用分别位于正负应力区2只力敏元件感知作用力的大小,进而进行差动输出,以实现零点温漂与时漂自补偿。分析了弹性梁的结构特性;介绍了双端音叉石英力敏谐振器的结构、力学特性及力传感器的制作过程。对传感器进行了静态测试,结果表明:传感器测量范围为0～300N,静态精度为0.05%。     

Wide range electrostatic MEMS Fabry Perot optical tunable filter: modelling an electrostatic and mechanic beam deflection

A novel wide range electrostatic microelectromechanical system floating Fabry Perot optical tunable filter (MEMS f-FPOTF) is modelled and analyzed in terms of its electro-mechanic behaviour. The composite beam approach has been used to model the floating Fabry Perot cavity. The floating dual membrane FPOTF consists of multi layer Si/SiO₂/Si thin films with an optical cavity in the middle structure. The filter tuning range has been improved by utilizing bonded silicon on insulator wafers that permits the floating cavity to be deflected both ways; up and down. Electro-mechanic analysis shows a 7% (STRUCTURE1) and 5% (STRUCTURE2) difference between analytical and finite element modelling in which the 7% difference in light incident angle contributes to a 0.5 nm shift while the 5% difference in length of cavity indicates a 4 nm shift in MEMS f-FPOTF operating wavelength. This analysis validates the analytical modelling of this device as a wavelength selector in coarse wavelength division multiplexing.     

A low-temperature thin-film electroplated metal vacuum package

This paper presents a packaging technology that employs an electroplated nickel film to vacuum seal a MEMS structure at the wafer level. The package is fabricated in a low-temperature (<250/spl deg/C) 3-mask process by electroplating a 40-/spl mu/m-thick nickel film over an 8-/spl mu/m sacrificial photoresist that is removed prior to package sealing. A large fluidic access port enables an 800/spl times/800 /spl mu/m package to be released in less than three hours. MEMS device release is performed after the formation of the first level package. The maximum fabrication temperature of 250/spl deg/C represents the lowest temperature ever reported for thin film packages (previous low /spl sim/400/spl deg/C). Implementation of electrical feedthroughs in this process requires no planarization. Several mechanisms, based upon localized melting and Pb/Sn solder bumping, for sealing low fluidic resistance feedthroughs have been investigated. This package has been fabricated with an integrated Pirani gauge to further characterize the different sealing technologies. These gauges have been used to establish the hermeticity of the different sealing technologies and have measured a sealing pressure of /spl sim/1.5 torr. Short-term (/spl sim/several weeks) reliability data is also presented.     

静电刚度式谐振微加速度计设计

运用梁的横向振动特性分析了梁振动频率与平行板电容形成的静电刚度的关系,并以此设计了静电刚度式谐振微加速度计。在加速度作用下,检测质量产生的惯性力使电容器极板发生位移来改变电容结构的间隙大小,从而使谐振频率发生变化,通过检测频率变化量来测量输入加速度的大小。根据加速度计的工作原理说明检测过程中梁的机械刚度保持不变,只与产生静电刚度的电容间隙变化相关,减小了检测信号对机械误差与残余应力的依赖性。运用加工参数进行理论计算得出加速度计的灵敏度为21．17Hz／gn,在CoventorWare2005中进行仿真表明：加速度计的固有频率为23．94kHz,灵敏度约为20Hz／gn,与理论设计值相近。     

Silicon micro-cantilever chemical sensors fabricated in double-layer silicon-on-insulator (SOI) wafer

Micro-cantilever piezoresistive sensors are optimally designed and fabricated in a double-layer silicon-on-insulator (SOI) wafer. The sensor geometry is optimized by placing the sensing piezoresistor at the cantilever root region to increase effective piezoreisistive sensing area. According to finite-element simulation results, high sensitivity can be obtained by design the cantilever into a wide and short shape. In order to use single-crystalling silicon to fabricate both the cantilever and the piezoresistor for high sensitivity, double-layer SOI wafer, which has two active layers and two insulating layers, is proposed to fabricate the self-sensing micro-cantilever sensor. The piezoresistor is made of the top active-layer single-crystalline silicon. Without p–n junction isolation, such a piezoresistor can be free from leakage-current relative noise that helps to achieve fine sensing resolution. The bottom active-layer is used to form the cantilever, with well controlled cantilever thickness and high fabrication yield. With the top surface of the micro-cantilever is modified with the functionalized self-assembled monolayer, detection of trace-concentration Trinitrotoluene (TNT) vapor is experimentally carried out, with reproducible sensing response to 7.6 ppb TNT.     

Dynamic boundary control of a Euler-Bernoulli beam

A flexible beam, clamped to a rigid base at one end and free at the other end is considered. To stabilize the beam vibrations, a dynamic boundary force control and a dynamic boundary torque control applied at the free end of the beam are proposed. It is proved that with the proposed controls, the beam vibrations decay exponentially. The proof uses a Lyapunov functional, based on the energy functional of the system