Sol-Gel法硅基铁电薄膜研究

介绍了用溶胶 凝胶方法制备Pb(Zr0 .53Ti0 .4 7)O3(PZT)铁电薄膜的工艺流程。以硝酸锆、醋酸铅和钛酸四丁酯为原料 ,在 90 0℃ ,30min退火条件下制备了硅基PZT铁电薄膜。实验分析结果显示 ,PZT铁电薄膜的晶化很完善。研究了PZT铁电薄膜与硅之间的界面及其对铁电薄膜品质的影响。并在此基础上实现了制备PZT铁电薄膜的低温改进工艺。     

激光脉冲外延生长Pb(Zr0.52Ti0.48)O3薄膜及其特性研究

利用激光脉冲法在LaAlO3衬底上沉积制备LaNiO3薄膜作为底电极并外延生长(100) Pb(Zr0.52Ti0.48)O3铁电薄膜,系统研究了生长温度对PZT外延结构和电学特性的影响.研究发现当生长温度高于550℃时即可得到外延(100)PZT薄膜.在对所制备的PZT薄膜的结构和性能测试表明,650℃下生长的PZT薄膜外延性最佳,并且表现出优异的介电和铁电性能,介电常数ε、剩余极化Pr和矫顽场Ec分别为900、26.5 μC/cm2和52.1kV/cm.试验还证实这种外延PZT薄膜具有优良的抗疲劳特性,可用于铁电存储器的制备中去.     

SO1-Gel法硅基PZT铁电薄膜研究

介绍了以硝酸锆、醋本以铅和钛酸四丁酯为原料用溶胶－凝胶（sol-gel）方法在硅衬底上制备Pb（Zr0.53Ti0.47)O3(PZT)铁电膜的工艺流程。对铁电薄膜的表面形貌、晶化程度、界面状态等性质进行了分析,结果表明硅基PZT薄膜形成了良好的钙伏矿结构,并在此基础上实现了制备PZT铁电薄膜的低温改进工艺。     

锆钛酸铅铁电薄膜电容的研究现状

介绍了Pb(Zr,Ti)O3,(PZT)铁电薄膜电容的研究现状,列举了不同电极和缓冲层所制备出的PZT铁电薄膜电容的结构,并对不同结构进行了分析比较,结果表明由于氧化物电极材料的各种优越性,已被证明可用于替代现有的金属电极材料,从而有效解决了PZT薄膜铁电性能退化的问题,是未来铁电薄膜电容的发展方向.     

用于非制冷热释电红外探测器的 PZT铁电薄膜研究

采用溶胶-凝胶和射频磁控溅射相结合的方法制备了PZT铁电薄膜．用溶胶-凝胶法制备一层PZT薄膜作为籽晶层,在衬底PZT(seed layer)／Pt／Ti／SiO2／Si上用射频磁控溅射过量10％Pb的Pb(ZrxTi1-x)O3(x=0．3)陶瓷靶生长厚500nm的PZT铁电薄膜．采用在450℃预退火,575℃后退火的快速分级退火方法对PZT铁电薄膜进行热处理．PZT铁电薄膜获得了较好的热释电性能,热释电系数、介电常数、介电损耗和探测度优值因子分别为P=2．3×10-8C·cm-2·K-1,ε=500,tanδ=0．02,Fd=0．94×10-5Pa-0.5．     

反提拉Sol-Gel法制备PZT薄膜及热处理工艺对薄膜性能结构影响的研究

通过醋酸铅、硝酸锆、钛酸丁酯分别制备独立稳定的前驱单体,采用Sol-Gel反提拉涂膜技术在基片Pt/Ti/SiO2/Si上制备PZT铁电薄膜.本文讨论了制备工艺对薄膜质量的影响,比较了在不同的退火速率,退火温度及退火气氛工艺中,制备的PZT铁电薄膜结构、性能的差异,并对其形成原因进行了分析.     

Sol-gel独立前驱单体制备PZT铁电薄膜技术

采用醋酸铅、硝酸氧锆(硝酸锆)、钛酸丁酯独立稳定的前驱单体。sol—gel法旋转涂膜技术制备了PZT铁电薄膜。研究了水的添加量对溶胶形成的影响,比较了不同的溶胶浓度、膜层结构(PT／PZT／PT Sandwich)及热处理工艺条件对薄膜结构、铁电性能的影响。     

铁电薄膜的制备及应用技术研究

研究出具有特色的制备铁电薄膜的 sol-gel技术;制备出高质量、高可靠的 PLT、PZT、PYZT、BST”l、PbTiO3、BaTiO3、Bi4Ti3O12多晶铁电薄膜,PLT、PZT和伽里O3异质外延生长铁电薄膜;研制出铁电薄膜热释电单元红外传感器,8元、9元、1O元线列和8X8元阵列;研制出热释电火情探测器和热释电非接触式温度测试仪。     

PZT铁电薄膜Sol-Gel技术制备和电性能研究

以乙酸铅(Pb(CH₃COO)₂·3H₂O)、钛酸四丁酯(Ti(OC₄H₉)₄)、硝酸锆(Zr(NO₃)₄·5H₂O)替代锆醇盐为原料,通过在Pt/Ti/SiO₂/si基片与PZT薄膜之间引入PT种子层,采用改进的sol-gel工艺制备出无裂纹,致密性好,晶粒尺寸小且分布均匀的单一钙钛矿结构的Pb(Zr_0.53Ti_0.47)O₃铁电薄膜.实验结果表明,具有PT种子层的PZT铁电薄膜电性能较好.经600℃热处理的具有PT种子层的PZT薄膜,在1kHz测试频率下,其剩余极化强度和矫顽场分别为20μC/cm²和59kV/cm,介电常数和介电损耗分别为385和0.030.     

Al_2O_3衬底上Pb(Zr,Ti)O_3铁电薄膜的外延生长与性能

以SrRuO3(SRO)作为缓冲层,利用脉冲激光沉积的方法,首次在蓝宝石(Al2O3)衬底上制备了PbZr0.52-Ti0.48O3(PZT)外延薄膜。利用X射线衍射分析得到了PZT薄膜与Al2O3衬底的外延关系,即(111)[110]PZT//(0001)[1010]Al2O3。所制备的PZT薄膜具有较强的铁电极化性能,饱和极化值达到138.3μC/cm2。同时,利用对电流-电压性质的测量研究了铁电极化的退反转现象。     

Estimation of Parameters of Universal Distribution of Moments of Failure of Products

A method is proposed for estimating the parameters of a mixture of exponential and Weibull distributions for which the accuracy of preliminary estimates obtained by graphical analysis is refined in accordance with the criterion of maximum likelihood. The efficiency of the proposed method is supported by the results of statistical modeling.     

Analysis of the rate of propagation of the wave of change of boiling modes

An approximate analytical expression is derived for the velocity of the front of the wave of change of boiling modes on a rod and on a plate. The impact of the Thomson effect and of the heater orientation in the gravity field is included. Adequate agreement is demonstrated between the derived relations and experimental data.     

Evaluation of optical properties of highly scattering media by moments of distributions of times of flight of photons

A novel method for the determination of the optical properties of tissue from time-domain measurements is presented. The data analysis is based on the evaluation of the first moment and the second centralized moment, i.e., the mean time of flight and the variance of the measured distribution of times of flight (DTOF) of photons injected by short (picosecond) laser pulses. Analytical expressions are derived for calculation of absorption and of reduced scattering coefficients from these moments by application of diffusion theory for infinite and semi-infinite homogeneous media. The proposed method was tested on experimental data obtained with phantoms, and results for absorption and reduced scattering coefficients obtained by the proposed method are compared with those obtained by fitting of the same data with analytical solutions of the diffusion equation. Furthermore, the accuracy of the moment analysis was investigated for a range of integration limits of the DTOF. The moment analysis may serve as a comparatively fast method for evaluating optical properties with sufficient accuracy and can be used, e.g., for on-line monitoring of optical properties of biological tissue.     

可燃气体检测报警器测量结果的不确定度评定

本文详细介绍了可燃气体检测报警器示值误差测量结果的不确定度评定方法。     

水三相点复现的不确定度评定

水三相点是开尔文热力学温度的唯一基准点，也是ITS-90国际温标重要的定义固定点。因此，水三相点不确定度分析对整个温标的建立、温度量值传递起着至关重要的作用。近3年来，中国计量科学研究院研制出一系列高质量的水三相点容器，加强了水三相点的研究，为不确定度的分析提供了更为可靠的实验依据。同时，不确定度的分析也是客观评价新研制容器性能的一个重要指标。因此，根据实验结果对新研制容器所复现的水三相点进行了不确定度评定。评定结果表明，其扩展不确定度为0．16mK(k=2．69，P=0．99)。     

心电图机电压测量示值误差测量值的不确定度评定

本文介绍了心电图机电压测量示值误差测量值的不确定度评定与表示方法。     

Estimation of potentialities of methods of summation of direct measurement errors

Conventional methods for summation of direct measurement errors are considered. Conditions under which these methods provide consistent results are stated. It is proposed to utilize for characteristic of the total error, its interval estimator or the half-sum of the value obtained by adding up its arithmetic and geometric random errors.Translated from Izmeritel'naya Tekhnika, No. 4, pp. 10–12, April, 1995.