Precision position control using combined piezo-VCM actuators

This paper presents the control performance of a high-precision positioning table using the hybrid actuators composed of the piezoelectric (PZT) actuators and voice-coil motors (VCMs). The combined piezo-VCM actuator features two main characteristics, i.e., a large operation range due to the long stroke of VCM, and a high precision and heavy load positioning ability due to the actuation of PZT impact force. In this paper, a one-degree-of-freedom (1-DOF) experimental setup was configured to examine the control performance and the parametric identification for the VCM was performed based on the recursive-least-square (RLS) method. The control performance was effectively demonstrated by using a switching controller configured by an integral variable structure controller (IVSC) for the VCM to conduct rough position control and an impact force controller (IFC) for the PZT actuator to conduct fine position control. The experimental results showed that the positioning table having mass 881 g was successfully positioned within the positioning accuracy of 10 nm by both the forward and backward positioning processes. In the forward control, it totally took 1.253 s for the sliding table to reach the target position of 450 μm; in the backward control, it took 1.387 s for the sliding table moving from the position of 450 μm to the target position of 200 μm.     

Pneumatic actuating device with nanopositioning ability utilizing PZT impact force coupled with differential pressure

This paper reports a new actuating method using piezoelectric (PZT) impact force coupled with differential pressure for the pneumatic positioning device. Fundamental experiments show that the sliding table can be actuated to move with precise step motions in both the forward and backward directions based on the proposed method. A two degree-of-freedom (DOF) analytic model is established and verified for expressing the impact actuation. Furthermore, a pulse width, which is equal to the period of second-mode vibration of the actuating device, is experimentally examined for the actuation of PZT actuator. Finally, position control based on a hybrid controller is implemented. The experimental result shows that the sliding table is successfully positioned from the reference origin to the target position of 4 mm in 0.924 s with the positioning accuracy of 5 μm due to the actuation of the pneumatic cylinder, and that the final positioning accuracy of 10 nm is obtained by the actuation of PZT impact force coupled with differential pressure. The total control time is 2.683 s. It is shown that the proposed method is capable of significantly improving the positioning performance of the pneumatic actuating device. It is expected that the proposed method will be widely applied in the precision industry using pneumatic cylinders.     

A new mechanism design of electro-magnetic actuator for a micro-positioner

This paper proposes a new type of non-conventional electro-magnetic actuator (EMA) for micro-positioning. It is a repulsive magnetic system consisting of a motion pad and two active coils. The motion of the pad is caused by the repelling force between the coils and the permanent magnets on the pad. First, the dynamic model is derived and analyzed. Next, an adaptive sliding mode controller is developed to deal with the unknown parameters with the objective of precision positioning. The experimental results demonstrate satisfactory performances including regulation accuracy and control stiffness for the system.     

Dynamic adhesive force measurements under vertical and horizontal motions of interacting rough surfaces

An instrument to measure dynamic adhesive forces between interacting rough surfaces has been developed. It consists of four parts, namely, main instrument body, vertical positioning system with both micrometer and nanometer positioning accuracies, horizontal positioning system with nanometer positioning accuracy, and custom-built high-resolution, and high dynamic bandwidth capacitive force transducer. The vertical piezoelectric actuator (PZT) controls the vertical (approaching and retracting) motion of the upper specimen, while the horizontal PZT controls the horizontal (reciprocal) motion of the lower specimen. The force transducer is placed in line with the upper specimen and vertical PZT, and directly measures the adhesive forces with a root-mean-square load resolution of 1.7 microN and a dynamic bandwidth of 1.7 kHz. The newly developed instrument enables reliable measurements of near-contact and contact adhesive forces for microscale devices under different dynamic conditions. Using the developed instrument, dynamic pull-in and pull-off force measurements were performed between an aluminum-titanium-carbide sphere and a 10 nm thick carbon film disk sample. Three different levels of contact force were investigated; where for each contact force level the vertical velocity of the upper sample was varied from 0.074 to 5.922 microms, while the lower sample was stationary. It was found that slower approaching and retracting velocities result in higher pull-in and pull-off forces. The noncontact attractive force was also measured during horizontal movement of the lower sample, and it was found that the periodic movements of the lower disk sample also affect the noncontact surface interactions.     

A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator—part I: experimental design and results

This paper proposes a novel high-precision and large-stroke positioning table utilizing the spring-mounted piezoelectric actuator. An experimental setup with the actuation along one direction in the horizontal plane was configured to elucidate the characteristics of the positioning table. Several parameters, e.g. the waveform and the amplitude of applied voltage, the mass ratio, and the stiffness of spring, which affect the motion behavior of the table were examined and discussed. The experimental results show that the proposed actuator can actuate a heavy table by utilizing the impact force of a piezoelectric element while maintaining the comparatively long operational range of the initially compressed spring.     

内箝位型压电精密步进旋转驱动器

提出一种新型的压电精密步进旋转驱动器。该驱动器以仿生运动的原理,以压电陶瓷叠堆为动力源,采用定子内侧箝位的方式和薄壁柔性铰链微变形结构,提高该驱动器箝位的稳定性和步进旋转的稳定性。通过静力学有限元分析和动力学分析,较深入地研究了该驱动器的运动特性,并对驱动器旋转分辨率、旋转速度、驱动转矩等方面进行试验研究。研制的内箝位型压电精密步进旋转驱动器能够实现高频率(40 Hz),较高速度(325 μrad /s),大行程(大于360°),高分辨率(1 μrad),较大驱动力矩(30 N·cm)等特点,有效提高了压电精密步进旋转驱动器的驱动性能。该驱动器在精密运动、微操作、光学工程以及精密定位等精密工程中具有广阔的应用前景。     

倒置线轨并整体防护的高速定位承载系统设计

采用倒置安装线性滑轨作为运动导引,配合整体安装及防护,伺服电动机通过大导程精密研磨级滚珠丝杠驱动承载工作台,实现承载工作台的高速度进给及高精度定位.     

Model reference adaptive control for a piezo-positioning system

Piezoelectric (PZT) actuators having the characteristic of infinitely small displacement resolution are popularly applied as actuators in precision positioning systems. Due to its nonlinear hysteresis effect, the tracking control accuracy of the precision positioning system is difficultly achieved. Hence, it is desirable to take hysteresis effect into consideration for improving the trajectory tracking performance. In this paper, a model reference adaptive control scheme based on hyperstability theory is developed for a moving stage system driven by a PZT actuator. It is worth emphasizing that the controller can be constructed without a nonlinear hysteresis dynamic equation to compensate the hysteresis effect. According to simulation results, the tracking error was only nanometer order. Through experimental examinations, the tracking performance was obtained as precision as ten nanometers order which is the resolution limitation of the measurement system. The effectiveness of the proposed adaptive control scheme was validated.     

A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator—part II: theoretical analysis

A simple mechanical vibration model was formulated to analyze the dynamic characteristics of the precision positioning table utilizing a spring-mounted piezoelectric actuator. The formulated model was validated by comparing the results of numerical simulations with the experimental data of Part I. The performance of the precision positioning table was predicted by changing the parameters of mass ratio and stiffness of spring. It is found that the analytic method described in this paper can provide an effective means in designing the precision positioning table utilizing a spring-mounted piezoelectric actuator.     

Large stroke and high precision positioning using iron–gallium alloy (Galfenol) based multi-DOF impact drive mechanism

A miniature-positioning device with a large stroke motion has attracted more and more attentions in these years because of the intensive development in precision engineering. In this paper, we have achieved the large stroke actuating and the high precision positioning, as well as realized a multi-degree-of-freedom in-plane motion using the developed Galfenol impact drive mechanism (IDM) actuator. In order to enhance the system robustness, two pieces of U-shape Galfenol (iron–gallium alloy) have been employed as the driving elements with a bias magnetic field contributed by a permanent magnet to generate the swing motion that amplifies the propelling inertia force. The current amplitude modulation has been applied in the precision positioning of the actuator under the quasi-static condition because of the motion step-size fineness. The results show that the actuator is able to achieve a sub-micrometer positioning accuracy that has reached the measurement limit of our setup. Meanwhile, the frequency modulation method has been explored in the large stroke actuation with a high motion speed. We have found out that this design is capable of achieving an accurate positioning without the frequency modulation because of the intrinsic fine step-size of the actuator. In addition, a rectangular in-plane motion has been realized with the image-based control for the multi-degree-of-freedom positioning. The actuator has an inductive impedance with a resistance of 3.796 Ω and an inductance of 0.4697 mH. Under the present driving ratings, the power consumption is smaller than 1.97 W while the reactive power can be ignored. Moreover, the experimental load analysis indicates that the design can achieve a maximum carry-load-to-weight ratio of 6.5.     

新型惯性式压电驱动机构的研究

基于控制移动机构和支撑面之间摩擦力的方法,提出了新型惯性冲击式压电陶瓷驱动机构的研究方案.分析了驱动机构的工作原理,驱动电压与驱动力、位移之间的关系,设计、制做了可实现直线往复运动的压电微型驱动器结构,并作了相关的性能测试.实验结果表明,采用简单的对称信号波形能驱动机构运动.直线驱动器最高速度可达1 mm/s,最大步长分辨率为20 nm,最大承载能力为1 000g.     

大量程纳米级垂直扫描系统研究

研究开发了一种大量程纳米级垂直扫描系统,该系统采用粗/精两级驱动,粗驱动子系统由滑动导轨、直流无刷电机、精密丝杠组成,精驱动子系统由平行平板柔性铰链和压电陶瓷组成。对平行平板柔性铰链进行了力学分析,并推导计算了其固有频率。该垂直扫描系统的粗位移和精位移由同一套激光干涉位移计量系统计量。该垂直扫描系统运动范围为0～40mm,运动分辨率为5nm。     

Magnetically suspended contact-free linear actuator for precision stage

With the development of precision manufacturing technologies, the importance of precision positioning devices is increasing. Conventional actuators, dual stage or mechanically contacting type, have limitation in coping with performance demands. As a possible solution, magnetic suspension technology was studied. Such a contact-free system has advantages in terms of high accuracy, low production cost and easy adaptability to high precision manufacturing processes. This paper deals with magnetically suspended multi-degrees of freedom actuator which can realize large linear motion. In this paper, the operating principle is explained with the magnetic force analysis, and the equations of motion are derived. Experimental results of the implemented system are also given.     

Measurement and compensation of pitch error based on GMA with elimination of its hysteresis

This paper proposes a pitch error compensation technique with decomposition of mechanical signals based on giant magnetostrictive actuator (GMA) to eliminate tool tracking errors and to reach a high machining precision. In ultra-precision cutting, grinding and nontraditional machining, there is a difficult problem for achieving long travel and high precision. Considering the characteristics of giant magnetostrictive materials (GMM), a micro-displacement GMA with a flexure hinge micro-motion table is designed, and used for error compensation. The inherent hysteresis nonlinearity of the GMA is controlled effectively by a sliding mode robust adaptive controller (SMC). Aiming at reducing the positioning error of a precision working table driven by an AC servo motor, the measurement of the dynamical characteristics of the system is carried out by a laser interferometer. The leadscrew pitch error, which accounts for most of the error detected, is separated out by an improved signal filter algorithm. Experimental results show that the positioning error is reduced to an extent within ±8 μm from ±20 μm after compensation, which demonstrates the feasibility of the control and compensation method.     

Development of a microlateral force sensor and its evaluation using lateral force microscopy

A microlateral force sensor (MLFS) was developed and evaluated using atomic force microscopy (AFM). The sensor was attached to a sensing table supported by a suspension system. The lateral motion of the sensing table was activated by a comb actuator. The driving voltage to the comb actuator was controlled to maintain a constant position of the sensing table by detecting the tunneling current at a detector, which consisted of two electrodes where the bias voltage was applied. An AFM was used to apply a lateral force to the sensing table of the sensor. When the probe of a cantilever was pressed against the sensing table and a raster scanning was conducted, the driving voltage of the comb actuator changed to compensate the friction force between the probe and sensing table. AFM measurements of an asperity array on the sensing table were conducted, and a lateral force microscopy image (LFM) was obtained from the change in driving voltage. The image by MLFS was very similar to the LFM image that was conventionally obtained from torsion of the cantilever. The LFM image strongly correlated with the gradient image calculated from the AFM topographic image. The force sensitivity of the MLFS was determined by comparing the LFM image obtained by using the MLFS with the tangential force derived from the gradient of the AFM image.     

Novel precision piezoelectric step rotary actuator

A novel piezoelectric (PZT) precision step rotary actuator was developed on the basis of PZT technology. It adopts the principle of bionics and works with an inside anchoring/loosening of the stator and a distortion structure of the uniformly distributed thin flexible hinge to solve problems such as ineffective anchoring/loosening, low step rotary frequency, small travel, poor resolution, low speed and unsteady output. The developed actuator is characterized by high frequency (30 Hz), high speed (380 μrad/s), large travel (>270°), high resolution (1 μrad/step), and work stability. It greatly improves the ability to drive the existing PZT step rotary actuator. The new actuator can be applied in the field of micromanipulation and precision engineering, including precision driving and positioning and optics engineering. __________ Translated From Journal of Jilin University (Engineering and Technology Edition), 2006, 36(5): 673–677 [译自: 吉林大学学报 (工学版)]     

Development of a precision indentation and scratching system with a tool force and displacement control module

This article presents a tip-based micropatterning system with a precision device for measuring the machine force and the tool path. The machine force is obtained by a tool control module with a leaf spring and a capacitive displacement sensor. It is controlled to provide a force that ranges from 80 microN to 8 N. The force sensing unit, which is part of the module, is mounted on a PZT (PbZrTi) driven in-feed motion stage with a resolution of 1 nm. The work piece is set on an X-Y motion stage, and the position can be controlled with a tool path accuracy of 5 nm. Micropatterning and precision indentation experiments were performed, while the machined surfaces were examined by atomic force microscopy. From these results, the feasibility of the system for precise force-displacement control was verified for application in tip-based precision machining.     

压电陶瓷驱动器蠕变特性的研究

压电陶瓷驱动器具有位移分辨率高、体积小、响应快、输出力大、不发热等优点，但其固有的迟滞、蠕变和非线性，严重影响了它的定位精度。在大行程微动工作台中，需要借助于位移放大机构来克服压电陶瓷驱动器位移行程小的缺点，但放大机构在放大位移的同时，也放大了压电陶瓷蠕变和迟滞误差的影响。本文通过对一种大行程压电陶瓷微动工作台蠕变特性的研究性实验，得到了该机构的蠕变特性曲线，找到了压电陶瓷驱动器蠕变的规律，为进一步修正和减少蠕变误差的影响、提高系统的定位精度，提供了科学的依据。     

压电型步进精密旋转驱动器

提出了一种将压电叠堆驱动元件应用到精密旋转驱动器上的研究方案。在对驱动器机械结构及旋转运动工作原理进行分析的基础上,建立了以压电叠堆为驱动元件的旋转驱动数学模型,采用有限元分析软件对机械结构进行了分析,并从旋转运动分辨率、运动稳定性等方面对所设计加工的样机进行了实验研究。实验结果表明设计的结构具有分辨率高、行程大和运行稳定等优点,克服了目前精密驱动机构存在的位移最小分辨率和大行程共存性不好的问题。     

Concepts for a class of novel piezoelectric self-locking long-stroke actuators

The friction-type motor is the most common type in the field of piezoelectric motors. One limitation of friction-type motors is their inability to achieve high output push force or torque. Based on the theory of self-lock, a novel mechanism for the linear piezoelectric motor is proposed. On the basis of the proposed mechanism, three prototype models have been developed. The new motors transfer the force and displacement generated by a piezoelectric actuator to the output directly, whereas the friction-type motor transfers via the induced friction between the stator and the rotor. The achieved positioning precision is within 10 nm, while the push force is up to 1,176 N. The new motors can be applied in cases where both high positioning precision and heavy load are essential.