六轴加速度计的结构原理与阻尼振动设计

静电悬浮加速度计为当前国际上精度最高的一类加速度计 ,本文的设计目标为 :量程 12 .5 μgn,灵敏度 1ngn,带宽 0 .1Hz。从静电悬浮加速度计的敏感结构设计出发 ,详细地论述了该类加速度计的电容位移检测原理和微弱加速度检测原理。通过适当的电极配置设计 ,并对六路差分电容输出进行适当的线性组合 ,探讨了该加速度计的六轴检测功能 (三个线加速度和三个角加速度 )。随后对该加速度计的静电悬浮支承系统进行了振动学分析 ,采用 1atm的空气阻尼 ,得出系统的阻尼振动频率为 0 .82 5 Hz,输出采样间隔为 4 s。本文的设计对研制高精度多轴加速度计具有重要参考价值。     

MEMS加速度计信号光电检测与电容检测的噪声分析

在高精度MEMS扭摆式加速度计电容检测和光电检测实现原理的基础上,分析了该加速度计热机械噪声和电学噪声特性.该加速度计结构在品质因数Q=1和Q=85时,热机械噪声分别为2.4μgn/根号Hz和0.28 μgn/根号Hz.对于电学噪声,电容检测的电学噪声为3.27 μgn/根号Hz,光电检测在只考虑电学噪声时能分辨的最小加速度可达0.05 μgn.对比得出对于扭摆式加速度计结构,光电检测具有比电容检测更小的系统总噪声.     

谐振式微机械加速度计设计的关键技术

谐振式微机械加速度计直接输出频率信号,具有稳定性好、精度高的特点.分析了谐振式微机械加速度计的工作机理,建立了第一级敏感结构、杠杆机构和第二级敏感结构的数学模型,指出了实现高灵敏度加速度测量的关键技术在于支撑梁、质量块、谐振器和杠杆机构的设计.提出了一种谐振式微机械加速度计结构,进行了结构的优化设计和仿真计算,得出的性能指标:谐振频率98 858 Hz,Q值673.9,灵敏度24.52 Hz/gn.     

一种电容式微机械加速度计的设计

介绍了一种新型基于滑膜阻尼的电容式微机械加速度计.该加速度计根据差分电容极板间正对面积的改变来检测加速度大小,保证了输出电压与加速度之间的线性度.对加速度计进行了结构设计和分析.给出了加速度计的制作工艺流程,研究了解决深反应离子刻蚀过程中的过刻蚀现象的方法.初步测试结果表明,该加速度计的灵敏度比较理想,谐振频率与理论计算相吻合.     

三梁-质量块敏感结构高性能压阻式碰撞加速度计

研究了一种主要应用于碰撞测试领域的硅微机械高性能压阻式加速度计,量程范围为2 000 gn.为满足技术性能要求,加速度计采用一种三梁-质量块结合梳齿阻尼器的新颖结构,从而可以同时具有高灵敏度及高动态特性(包括高谐振频率及精确阻尼控制).这种加速度计采用n型(100)普通硅片制作,主要工艺过程包括双面ICP深刻蚀和压阻集成工艺.振动台测试结果表明,加速度计的灵敏度为0.11 mV/gn/5 V,谐振频率为31 kHz,灵敏度±5%变化下平坦带宽大于5 kHz.采用落杆测试法测试了加速度计的冲击响应及0～2 000 gn满量程范围内的非线性度.封装后的加速度计承受15 000 gn的冲击测试后没有受到损坏.     

具有横向加速度补偿功能的硅微型加速度计

本文介绍一种量程为100g的压阻式加速度计，用硅材料制作，适于批量生产。这种新型加速度计的工作原理与原有的加速度计有所不同，检测质量块由两端支承的挠性梁支撑，利用梁上8个电阻构成的桥路来检测加速度。这一新型设计，不仅增添了横向加速度补偿功能，而且带宽、灵敏度高。加速度灵敏度为20mV／V F．S．O．，谐振基波频率为3．65kHz，检测质量块重量为4．1mg。     

检测电压对一种新型谐振式微加速度计的影响

静电作用在在平行板电容器上会产生等效静电负刚度,介绍了基于静电刚度的谐振式微加速度计设计原理,建立了其动力学模型.根据检测电压的约束条件,求解了其可行范围.同时分析了检测电压对系统灵敏度、可靠性和量程及输出电压的影响.分析结果表明:检测电压越大,灵敏度越大,但可靠性和量程会相应减少,反之亦然;直流检测电压的存在使得输出电压不受检测电容并行的寄生电容影响.理论分析结果为谐振式微传感器的系统设计提供了重要依据.     

新型双轴电容式加速度传感器设计

为了实现多轴加速度检测,设计了一种新型双轴电容式加速度传感器.由内、外2个质量块组成,分别由4组折叠梁支撑.传感器通过固定梳齿和活动梳齿之间的距离变化引起两者电容值发生变化,最终测得加速度.通过ANSYS仿真分析得出:传感器的位移灵敏度为0.0845μm/gn(X轴)和0.1381μm/gn(Y轴).结构的一～三阶谐振频率分别为1.34,1.71,14.48kHz.由于各阶模态频率相差很大,避免了跨轴信号的干扰.     

静电刚度谐振式微加速度计及其接口电路分析

根据静电加载在平板电容器上产生等效静电负刚度原理,分析了基于静电刚度的谐振式微加速度计的敏感过程.针对有效信号检测中存在的同频干扰问题,建立了接口电路的等效模型,并根据干扰源提出在信号处理电路采用方波调制、开关解调的抑制方法.仿真和实验表明制造的加速度计检测端静态电容约为0.4pF,实验条件下变化的检测电容为3.1fF...     

谐振式硅微机械加速度计研究进展

谐振式硅微机械加速度计作为一种新型的对加速度进行测量的传感器,是通过检测加速度施加前后谐振敏感元件谐振频率变化实现对加速度检测的。该传感器具有频率信号输出、稳定性好、灵敏度高、精度高等优点,己成为微传感器的重要发展方向之一。汇总了该传感器的国内外相关研究现状,并对加工工艺进行了总结,讨论了谐振式硅微加速度计设计中的关键技术因素,并给出了未来的发展方向。     

Experimental study on band merging of non-linear multi-band piezoelectric energy harvester into single broadband using magnetic coupling

The operational bandwidth of Vibration Energy Harvesters (VEH) is area of concern due to stochastic, time-varying, random and multi-frequency nature of available environmental vibrating sources. Most of the VEH have narrow bandwidth providing usable power at specific frequencies. Efforts have been made to increase the frequency range by introducing non-linear structures and techniques. In this paper, multi-band output of the non-linear Piezoelectric Energy Harvester (PEH) is transformed into single wider band output using additional non-linear phenomenon. Dual region operation of PEH results into two separate band output. First region is the outcome of beam resonance and Centre of Gravity (CoG) shift whereas second region is due to the non-linear behaviour of cylinders. In this work, these separate bands are merged to form a single wider band. For merging these two bands and enhancing the bandwidth of PEH, additional phenomenon is introduced using two permanent magnets. A varying magnetic field by changing the distance between magnets changes stiffness of the cantilever beam and that leads to a change in the resonant frequency of band-I. Thus, the overall process shifts band-I towards band-II. In this work, the two separate bands are merged to have one wider band providing 53.22% more frequency coverage than our previous work with a bandwidth of 47.5 Hz. This band includes vibrational frequency range of 25.65–73.15 Hz at 1.4 g acceleration. Cylinder material and its effect with magnetic interaction is also studied. The magnetic force between two permanent magnets is measured experimentally. Effect of magnetic force on centre resonant frequency of beam is compared with experimental and simulated results. Effect of magnetic force on bandwidth of the device is studied.

     

Tilting Micromirror With a Liquid-Metal Pivot

In this paper, we have developed a new micromirror with a compact footprint which can be rapidly tilted to large angles. The micromirror is supported by a liquid-metal drop (LMD) with low vapor pressure and is rotated by an electrostatic torque. A torsional spring model is proposed to predict the equivalent torsional constant of the LMD and the resonant frequency of the mirror. Micromirrors (1 mmtimes1 mmtimes25 mum) and actuating electrodes are microfabricated with a centralized wetting area surrounded by a nonwetting parylene area to confine the LMD. Our measurements of the mirror show the average snap-down voltage of ~ 79 V and the resonant frequency of 165 Hz. A single mirror is actuated to steer a laser beam with a maximum deflected angle of 23.6deg. A 1times3 mirror array is demonstrated for light switching, and has greater than 1 : 64 idle/deflection contrast. We also test the stability of the mirror to mechanical shake up to 56 g (g = 9.807 m/s²). The prototype mirror has 3.6 million cycles of operation     

Structure design and fabrication of a novel dual-mass resonant output micromechanical gyroscope

A novel dual-mass resonant output micromechanical gyroscope is proposed which utilizes resonant sensing as the basis for Coriolis force detection instead of displacement sensing. It can overcome the shortcoming of single-mass resonant output micromechanical gyroscope and can reduce the common mode acceleration error by using a dual-mass topology structure and lever differential mechanism. The structure and operating principle of the device are introduced. Moreover, some important theoretical analyses of the gyroscope are provided in detail. The analytical results have shown that the resonant frequencies of vibrating mass and double-ended tuning fork resonators are 3.153 and 62.853 kHz. The device has a frequency sensitivity of 12.535 Hz/deg/s and a mechanical noise floor of $ 7.957\deg /{\text{h}}/\sqrt {{\text{Hz}}} A novel dual-mass resonant output micromechanical gyroscope is proposed which utilizes resonant sensing as the basis for Coriolis force detection instead of displacement sensing. It can overcome the shortcoming of single-mass resonant output micromechanical gyroscope and can reduce the common mode acceleration error by using a dual-mass topology structure and lever differential mechanism. The structure and operating principle of the device are introduced. Moreover, some important theoretical analyses of the gyroscope are provided in detail. The analytical results have shown that the resonant frequencies of vibrating mass and double-ended tuning fork resonators are 3.153 and 62.853 kHz. The device has a frequency sensitivity of 12.535 Hz/deg/s and a mechanical noise floor of 7.957deg/\texth/?{\textHz} 7.957\deg /{\text{h}}/\sqrt {{\text{Hz}}} in air. The finite element simulation results verify the accuracy of analytical algorithms. The common mode acceleration error of device can be reduced by 97.6%. The device is fabricated by SOG (Silicon on Glass) micro fabrication technology. Some important performances are measured by experimental method. The micromechanical gyroscope can be used to estimate the rotation rate by further implementing the signal processing electronics.     

Position control of parallel-plate microactuators for probe-based data storage

In this paper, we present the use of closed-loop voltage control to extend the travel range of a parallel-plate electrostatic microactuator beyond the pull-in limit. Controller design considers nonlinearities from both the parallel-plate actuator and the capacitive position sensor to ensure robust stability within the feedback loop. Desired transient response is achieved by a pre-filter added in front of the feedback loop to shape the input command. The microactuator is characterized by static and dynamic measurements, with a spring constant of 0.17 N/m, mechanical resonant frequency of 12.4 kHz, and effective damping ratio from 0.55 to 0.35 for gaps between 2.3 to 2.65 /spl mu/m. The minimum input-referred noise capacitance change is 0.5 aF//spl radic/Hz measured at a gap of 5.7 /spl mu/m, corresponding to a minimum input-referred noise displacement of 0.33 nm//spl radic/Hz. Measured closed-loop step response illustrates a maximum travel distance up to 60% of the initial gap, surpassing the static pull-in limit of one-third of the gap.     

微机械加速度计挠性梁机械刚度的实验研究

在使用开环频率响应实验求取微机械加速度计挠性梁机械刚度时,不可避免地受到静电负刚度的影响。通过分析预载电压和扫频信号幅值对静电负刚度的影响,提出了从系统刚度中分离出挠性梁机械刚度的计算方法。通过不同实验条件下得到的实验结果,验证了该方法的正确性。     

Design and simulations of a new biaxial silicon resonant micro-accelerometer

This paper presents a new biaxial silicon resonant micro-accelerometer. The device basically consists of a single proof mass, four pairs of decoupled beams, four lever mechanisms and two pairs of resonators, which provides 2-D in-plane acceleration measurement with the decoupled two pairs of resonators. Structure optimization is implemented by taking advantage of the finite element analyses. From the simulation results we can see that the effective frequencies of two acceleration sensitive modes are 1010.18 and 1010.13 Hz respectively, and the undesired modes and effective modes are isolated apparently. Additionally, high linear relationship between the input acceleration and the resonant frequency shifts of resonators are demonstrated by the input–output characteristic simulation. Moreover, simulation results reveal the scale factor for the x-axis is 180.03 Hz/g, and the scale factor for y-axis is 180.75 Hz/g, while the cross-axis sensitivity for x-axis is 0.046 Hz/g, and the cross-axis sensitivity for y-axis is 0.027 Hz/g. The high sensitivity and low cross-axis sensitivity are thus adequately confirmed. By the way, the simulation of temperature dependent characteristics demonstrate that the differential scheme can effectively suppress the influence of temperature variation, and the thermal analysis shows that the device can bear the thermal stress induced by temperature change. All these simulations above can verify the feasibility of the structure design.     

Evaluation of microfracture toughness and microcracking with notch tip radius of Si film structure for microactuator in hard disk drives

 The technologies developed for macroscale testing are not necessarily applicable to evaluate the mechanical properties of structures with dimensions comparable to those of typical microsystems such as sensors and actuators. An electrostatically actuated test device was designed to evaluate microfracture at sharp notch of Si film structures used for microactuators in hard disk drives (HDDs). The test device employs a notched beam that is fully integrated with an electrostatic actuator. This allows tests without the need of external loading instruments and without influences from external sources. Using the proposed test device, the apparent microfracture toughness of Si thin film was analyzed by considering the notch tip radius effect. Below the critical notch tip radius, the apparent fracture toughness is similar to intrinsic toughness measured by a precracked test device. Microcrack initiation near the notch was detected from the shift in the resonant frequency, which is related to the stiffness change. Received: 5 January 2001 / Accepted: 31 March 2001     

多晶硅双端固支梁高周循环下疲劳特性的分析

多晶硅固支梁是MEMS器件中较常见的可动部件,通过静电激励的方式对其进行疲劳振动加载;所用结构为面外运动结构,为了测试样品的加速疲劳特性,通过在固支梁面内引入缺陷的方式来增大应力水平值;器件在经历了1.72×1011次循环之后,微梁的谐振频率、振动幅度发生了较大偏移,其谐振频率的偏移量达到14.531 kHz,器件性能发生了严重的退化.研究结果表明,利用谐振频率的改变来表征材料性能的退化是一种准确、可行的方法,同时本文进一步分析指出,器件上引入凹槽缺陷的方法确实可起到加速疲劳的作用;可利用此方法制作不同应力水平幅度的结构进行振动载荷疲劳加载实验,从而得到固支梁结构疲劳加速因子.     

Nonlinear behaviour of membrane type electromagnetic energy harvester under harmonic and random vibrations

In this paper, the fabrication and characterization of a vibration-based polydimethylsiloxane (PDMS) membrane type electromagnetic energy harvester (EMEH) is reported. The harvester is suitable for generating electric energy from low level sinusoidal and narrow band random vibrations. Under acceleration levels greater than 0.1 g the behaviour of the EMEH is nonlinear, exhibiting sharp jump and hysteresis phenomena during frequency sweeps. Under sinusoidal excitations (0.1–3 g), the device produces a maximum of 88.8 mV load voltage and 39.4 μW power. At a matching load impedance of 10.1 Ω and when excited at its resonant frequency of 108.4 Hz and 3 g base acceleration, it generates a power of 68.0 μW, which corresponds to a power density of 30.22 μW/cm³. The nonlinear behaviour of the EMEH is exploited to harvest energy under narrow band random excitations. At higher acceleration levels of narrow band (50–150 Hz) random excitations, the device exhibits a broadening of the load voltage spectrum in comparison to the response under relatively low acceleration levels of narrow band (5–150 Hz) random excitations. The results show that the nonlinear behaviour of the PDMS membrane can be utilized to enhance the bandwidth of the harvester under narrow band random excitations and provides a simple alternative to other bandwidth broadening methods such as beam prestress, resonance tuning, or stopper impacts.