A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer

From a silicon-on-insulator (SOI) wafer, a microtranslation table with scratch-drive actuator (SDA) has been fabricated. The device Si layer of SOI wafer is etched to form the plate of SDA, which is partially connected to the handle Si substrate by the SiO₂ layer. Dicing the handle Si substrate, a microtranslation table with the SDA array has been fabricated. Placing the microtranslation table upside down on the other Si substrate on which a thin conductive film is patterned for the electrical connection, the microtranslation table is moved by the SDA without carrying a metal wire. The moving velocity of 45.5 μm/s has been obtained by applying the voltage of 120 V at the operating frequency of 500 Hz.     

Functional testing and characterisation of (bio-)chemical sensors on wafer level

An automated computer-assisted system for the functional testing and characterisation of (bio-)chemical sensors on wafer level is developed and integrated into a commercial prober station. The system enables the identification and selection of “good” sensors on wafer level and thus, allows to avoid further expensive bonding, encapsulation and packaging processes for defective or non-functioning sensor structures. Moreover, a specifically designed flow-through electrochemical microcell offers the possibility of wafer-level characterisation of (bio-)chemical sensors in terms of sensitivity, drift, hysteresis and response time at an early process stage. The system has been exemplarily tested using wafers combining pH-sensitive capacitive electrolyte-insulator-semiconductor structures as well as ion-sensitive field-effect transistors with different geometrical sizes and gate layouts.     

Cubic millimeter power inductor fabricated in batch-type wafer technology

A hybrid technology for the realization of three-dimensional (3-D) miniaturized power inductors is presented. Our devices consist of planar Cu coils on polyimide substrates, and mm-size ferrite magnetic cores, obtained by three-dimensional micro-patterning of ferrite wafers using powder blasting. The coils are realized using an in-house developed high-resolution polyimide spinning and Cu electroplating process. Winding widths down to 5 /spl mu/m have been obtained and total device volumes are ranging between 1.5 and 10 mm/sup 3/. Inductive and resistive properties are characterized as a function of frequency; inductance values in the 100 /spl mu/H range have been obtained.     

Contactless functional testing of grating-coupled evanescent wave (bio)chemical sensors

The contactless measurement of the sole modulus of the reflection coefficient of a grating-coupled slab waveguide sensor at three definite points of the reflection spectrum gives all necessary information for the determination of the complete set of phenomenological parameters of a waveguide grating (bio)chemical sensor thanks to a physically meaningful representation of the resonant reflection of a free space wave in the form of a circle in the complex plane. This property leads to a simple, non-destructive, wafer-scale functional testing methodology for grating-coupled (bio)chemical sensor chips.     

Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate

In this paper we present the design and fabrication of a fully flexible sensorial system, composed of three different sensor units implemented on an ultrathin polyimide substrate of 8 μm thick. Each unit is composed by a capacitive chemical sensor integrated with readout electronics. The sensors are parallel plate capacitors with the top electrode properly patterned to allow analytes diffusion into the dielectric that acts as chemical interactive material. Three different polymers, poly(tetrafluoroethene) (PTFE), poly(methyl 2-methylpropenoate) (PMMA) and benzocyclobutene (BCB), were used as dielectrics. A ring oscillator circuit, implemented with polysilicon thin film transistors (PS-nTFT), was used to convert the capacitance variations into frequency shifts. The electronic tests show oscillating frequencies of about 211 ± 2 kHz and negligible frequency shifts under different bending radius conditions. Furthermore, system response to some alcohols concentrations (Methanol, ethanol, 1-butanol, and 1-propanol) is reported and data analysis proves that the system is able to discriminate methanol from ethanol.     

Fully depleted SOI (FDSOI) technology

Fully depleted SOI (FDSOI) has become a viable technology not only for continued CMOS scaling to 22 nm node and beyond but also for improving the performances of legacy technology when retrofitting to old technology nodes. In this paper, we provide an overview of FDSOI technology, including the benefits and challenges in FDSOI design, manufacturing, and ecosystem. We articulate that FDSOI is potential cornerstone for China to catch up and leapfrog in semiconductor technology.     

液晶材料在化学与生物传感器中的应用

液晶分子是介于液态和晶态之间一种高分子有序材料,有不完全的取向长程有序性和位置有序性.研究者们把这种光学特性应用到生物传感领域,开辟了新型的传感技术-液晶生物传感器.该文综述了液晶分子的特性和基于液晶分子作为敏感元件的化学和生物传感器研究进展.液晶分子的这种新应用,对发展快速、简单的生物传感器,有可预见的良好前景.     

Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology

High temperature co-fired ceramics (HTCCs) have wide applications with stable mechanical properties, but they have not yet been used to fabricate sensors. By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity, the designed sensors made from HTCC materials (zirconia and 96% alumina) are fabricated, and their capacities for the pressure measurement are tested using a wireless interrogation method. Using the fabricated sensor, a study is conducted to measure the atmospheric pressure in a sealed vessel. The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm. The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments.     

聚邻苯二胺在传感器中的应用

根据最新研究文献,系统论述了聚邻苯二胺在生物传感器、湿度传感器、重金属离子传感器等领域的应用.指出聚邻苯二胺具有很好的酶固定性能、离子选择透过性能和耐腐性能等,在分析探测领域显示出广阔的应用前景.     

P(VDF-TrFE) copolymer acoustic emission sensors

Acoustic emission (AE) sensors have been fabricated using polarized polyvinylidene fluoride/trifluoroethylene (P(VDF-TrFE)) piezoelectric copolymer films. The acoustic and electromechanical properties of the copolymers have been determined using the ultrasonic immersion technique and the resonance technique, respectively. The P(VDF-TrFE) AE sensors have been calibrated according to the ASTM standard and evaluated for potential application in the detection of AE in glass fiber reinforced polypropylene (GFPP). A ceramic AE sensor also has been fabricated using lead zirconate titanate (PZT) 7A piezoelectric ceramic and its sensitivity and performance are reported as well. The copolymer sensors do not show resonance peaks of the ceramic sensor and have adequate sensitivity. They can reproduce AE signals accurately without giving artifacts and have potential use in commercial AE systems.     

令人难忘的我国化学传感器领域早期学术活动--纪念化学传感器专业委员会成立和《化学传感器》刊物创刊35周年

该文回顾了我国化学传感器领域自上世纪七十年代中期至八十年代末期的国内外学术交流活动以及在1979年12月成立的“离子选择电极协作组”和化学传感器专业委员会在1984年秋成立前后的人和事。也回顾了1981年创刊的《离子选择电极通讯》和在1985年更名为《化学传感器》后的历程。以纪念专业委员会成立和刊物创刊35周年。也表达了对本领域前辈学者和先驱者的怀念和敬意。     

Luminescent Eu(III) hybrid sensors for in situ copper detection

In this work we used the sol-gel technique to develop luminescent Eu(III) transparent films deposited on glass slides to build for sensor devices capable of monitoring transition metal ions in aqueous solutions. The films were obtained from a bis(trialkoxysilyl) organic precursor synthesized from the amide of the 2,6-pyridinedicarboxylic acid (DPA) with aminopropyltriethoxysilane (APTES) in the presence or absence of cetyl trimethyl ammonium bromide (CTAB) surfactant as templating agent and triethylethoxysilane (TEOS) as crosslinker. These sensor devices were used to perform in situ quenching experiments by Cu(II), Fe(III), Co(II) and Ni(II) ions. The results indicate that the templated films allow the detection and quantification of these metals down to ppb levels by means of the values of the Stern-Volmer constants. In particular, it was shown that Cu(II) acts as an extremely efficient quencher (K_SV = 3.5 × 10⁵ M⁻¹) when compared with the results obtained for the other metals, opening the possibility to use these devices as potential Cu(II) sensors for actual applications in aqueous media.     

Hydrogenation-Assisted Lateral Micromachining of (111) Silicon Wafers

Micromachining of (111) silicon wafers by means of a plasma hydrogenation and chemical etching sequence is achieved. Vertical etching is used to define the depth of the craters as well as the thickness of the final suspended silicon body. After protecting the 3-D structure by a thermally grown oxide, a hydrogenation step is used to remove the oxide layer from the bottom of the crater, allowing a lateral underetching. Final exposure of the processed silicon to a KOH solution, etches silicon in a lateral fashion and in the exposed places. A lateral aspect ratio of four to six has been achieved. The evolution of suspended structures on (111) wafers, suitable for sensor fabrication, is feasible without a need to a 3-D lithography. Using this technique suspended interdigital structures have been realized with a depth up to 70 $mu hbox{m}$. In addition, ultrathin fully suspended structures have been successfully fabricated. A preliminary capacitive accelerometer has been realized and tested on (111) substrate.$hfill$ [2008-0070]      

第十届全国化学传感器学术会议在重庆举行

经过近三年的精心准备,由中国分析仪器学会及中国化学会主办的第十届全国化学传感器学术会议于2008年11月1日至4日在重庆市举行.重庆市化学化工学会、西南大学、湖南大学、上海师范大学和江苏江分电分析仪器有限公司为本次会议的筹办单位,西南大学化学化工学院院长袁若教授担任会议组织委员会主席.     

多晶硅敏感技术（连载七）

多晶硅敏感技术（连载七）王善慈（东北传感技术研究所）ＳｅｎｓｉｎｇＴｅｃｈｎｏｌｏｇｙＢａｓｅｄｏｎＰｏｌｙｃｒｙｓｔａｌｌｉｎｅＳｉｌｉｃｏｎ（ＳｅｒｉａｌＳｅｖｅｎ）￥ＷａｎｇＳｈａｎｃｉ（ＮｏｒｔｈｅａｓｔＣｈｉｎａＲｅｓｅａｒｃｈＩｎｓｔｉｔ...     

多晶硅敏感技术(连载四)

<正> 5 多晶硅薄膜的压阻效应 目前,多晶硅薄膜在传感器上的应用主要有压力传感器、加速度传感器、应变计、热电传感器及执行器等。对于前几种可归结为力学量传感器,其理论基础是依据于多晶硅的压阻效应。     

Graphitic carbon nanofiber-poly(acrylate) polymer brushes as gas sensors

Carbon nanofiber/interdigitated array circuits fabricated with as-prepared herringbone graphitic carbon nanofibers [GCNF], GCNFs surface-derivatized with 3,4′-oxydianiline functional groups [GCNF–ODA], and GCNF–poly(butyl acrylate) [GCNF–PBA] or GCNF–poly(acrylic acid) [GCNF–PAA] polymer brushes are evaluated as solid-state gas-sensing materials unsupported by a polymer matrix. Vapor detection is observed as an increase in circuit electrical resistance. Analyte maximum response values exhibit chemoselectivity among different types of GCNF sensors and range over five orders of magnitude in parallel with expected trends in vapor/GCNF van der Waals interaction.     

多晶硅敏感技术（连载八）

多晶硅敏感技术（连载八）王善慈（东北传感技术研究所）ＳｅｎｓｉｎｇＴｅｃｈｎｏｌｏｇｙＢａｓｅｄｏｎＰｏｌｙｃｒｙｓｔａｌｌｉｎｅＳｉｌｉｃｏｎ（ＳｅｒｉａｌＥｉｇｈｔ）￥ＷａｎｇＳｈａｎｃｉ（ＮｏｒｔｈｅａｓｔＣｈｉｎａＲｅｓｅａｒｃｈＩｎｓｔｉｔ...     

多晶硅敏感技术（连载九）

多晶硅敏感技术（连载九）王善慈（东北传感技术研究所）ＳｅｎｓｉｎｇＴｅｃｈｎｏｌｏｇｙＢａｓｅｄｏｎＰｏｌｙｃｒｙｓｔａｌｌｉｎｅＳｉｌｉｃｏｎ（ＳｅｒｉａｌＮｉｎｅ）￥ＷａｎｇＳｈａｎｃｉ（ＮｏｒｔｈｅａｓｔＣｈｉｎａＲｅｓｅａｒｃｈＩｎｓｔｉｔｕ...