A novel bulk micromachined electrostatic microvalve with acurved-compliant structure applicable for a pneumatic tactile display

Recent success of microelectromechanical systems (MEMS) in projection displays have raised similar expectation for an efficient, low power, affordable, full-page and pneumatic tactile display. Such design has not been achieved by the conventional technology but could bring significant improvement to current refreshable Braille displays. This paper demonstrates a novel bulk-micromachined electrostatic microvalve suitable for a pneumatic tactile display. The microvalve, a silicon perforated diaphragm juxtaposed to a silicon inlet orifice, requires relatively low closing voltage against a large supply differential pressure and flow rate, i.e., 72.9 V-rms for 19.3 kPa and 85 mi/min. Such an attractive characteristic is due to its unique curved-compliant structure that has, unlike other electrostatic microvalves, no tolerance for any initial air gap between its electrodes. As a design tool, a mechanical model of the microvalve is introduced based on the lubrication theory and large plate deflection theory. The model is established on a steady-state coupled field problem of fluid-solid mechanics. Reynolds and von-Karman equations were simultaneously solved for the microvalve geometry by finite difference approximation and double Fourier series expansion. The results of the model and experiments are compared and found to be in good agreement with a relative error less than 10%     

Capacitive touchscreen‐integrated electrostatic tactile display with localized sensation

An electrostatic tactile display with a projected capacitive touchscreen integrated into a single panel was demonstrated. Every electrode on the panel is driven for both tactile presentation and the touch sensor. The functions are both time and spatially multiplexed, and a reference–node‐driven high‐pass filter in the touch controller filters out the noise from the tactile driving signals.     

A flexible capacitive tactile sensor array with micro structure for robotic application

A flexible capacitive tactile sensor array with micro needle structure is proposed in this paper for robotic application. Micro needle layer made of polydimethylsiloxane （PDMS） is sandwiched between the upper electrode layer made of PDMS and the bottom electrode layer fabricated on polyester （PET） film. The PDMS material renders the device adequate flexibility as it can be rolled into a cylinder. The single cell size in the fabricated 4 ~ 4 sensors array is 0.7 ~ 0.5 cm2 and the initial capacitance of each cell is 0.86 pF. The fabricated cell shows a sensitivity of 3.26%/mN within the full scale range of I kPa. The micro needle structure gives better repeatability and stability. The maximum error during each measurement is about 3.2%, while the minimum error is about 1.2%.     

Selectively stimulating skin receptors for tactile display

Research in virtual reality has recognized the need for more realistic tactile display in addition to touch and non-touch display and force display. We propose a method of selectively stimulating only superficial mechanoreceptors. We show that it makes people feel a more realistic, finer virtual texture than possible by adjusting the stimulator spacing. The apparatus is simple and we expect this idea to develop into a device to display varieties of tactile feeling     

微机械电容式压力传感器的变换电路

在介绍一种新型微机械差动电容式压力传感器的基础上 ,重点介绍一种为其配套的电容—电压变换电路。并以实验结果反映其电路的优点     

A flexible three-axial capacitive tactile sensor with multilayered dielectric for artificial skin applications

In this paper, a new flexible three-axial force sensor was designed and investigated, which was composed of four capacitors, and the mechanism was based on the capacitance change induced by an applying three-axial force. For the configuration of the electrodes, four sensing electrodes and a public electrode were in the same plane, which was based on fringe effect theory. Different from the traditional dielectric layer with single material, this multilayered dielectric consisted of both the air gap and polydimethylsiloxane. The structure of the multilayered dielectric changed under the external/applied force, leading to variation of dielectric constant ε, which caused the capacitance change. Measurement results showed that the full-scale range of detectable force was around 0–10 N for all three axes. The average sensitivities of the force sensor units were 0.0095, 0.0053, and 0.0060 N⁻¹ for the normal, X-axis, and Y-axis shear forces, and more test proved its high potential for application in skin-like sensing field.

     

Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate

In this paper we present the design and fabrication of a fully flexible sensorial system, composed of three different sensor units implemented on an ultrathin polyimide substrate of 8 μm thick. Each unit is composed by a capacitive chemical sensor integrated with readout electronics. The sensors are parallel plate capacitors with the top electrode properly patterned to allow analytes diffusion into the dielectric that acts as chemical interactive material. Three different polymers, poly(tetrafluoroethene) (PTFE), poly(methyl 2-methylpropenoate) (PMMA) and benzocyclobutene (BCB), were used as dielectrics. A ring oscillator circuit, implemented with polysilicon thin film transistors (PS-nTFT), was used to convert the capacitance variations into frequency shifts. The electronic tests show oscillating frequencies of about 211 ± 2 kHz and negligible frequency shifts under different bending radius conditions. Furthermore, system response to some alcohols concentrations (Methanol, ethanol, 1-butanol, and 1-propanol) is reported and data analysis proves that the system is able to discriminate methanol from ethanol.     

Adhesive bonding with SU-8 in a vacuum for capacitive pressure sensors

This paper describes a method for fabricating capacitive pressure sensors through the use of adhesive bonding with SU-8 in a vacuum. The influence of different parameters on the bonding of structured wafers was investigated. It was found that pre-bake time, pumping time, and the thickness of the crosslink layer are the most important factors for successful bonding. Bonding quality was evaluated by inspection through the transparent glass of the sensor and through the use of an SEM photograph, with 90% of the area successfully bonded and an ultimate yield of 70% of the sensors. The measured bonding strength was 17.15 MPa and 19.6 MPa for wafers bonded in 80 °C and 100 °C, respectively. The pressure–capacitance characteristic test results show that this bonding process is a viable micro electro mechanical systems (MEMS) fabrication technology for cavity sealing in a vacuum.     

A fully-digital and ultra-low-power front-end for differential capacitive sensors

In this paper, we present a simple, compact and low-power interface for differential capacitive sensors with a direct digital output. The complete system is composed with a current to voltage converter, an integrator, a comparator and a one-bit digital to analog converter as a feedback. The so-obtained Sigma–Delta modulator is able to deliver directly a bit stream with a ratio of logical ‘1’ directly proportional to the differential capacitance to be measured. A partially integrated prototype has been realized to demonstrate accuracy and non-linearity compatible with a 9-bit sensor.

     

Electrostatic tactile display with thin film slider and its application to tactile telepresentation systems

A new electrostatic tactile display is proposed to realize compact tactile display devices that can be incorporated with virtual reality systems. The tactile display of this study consists of a thin conductive film slider with stator electrodes that excite electrostatic forces. Users of the device experience tactile texture sensations by moving the slider with their fingers. The display operates by applying two-phase cyclic voltage patterns to the electrodes. The display is incorporated into a tactile telepresentation system to realize explorations of remote surface textures with real-time tactile feedback. In the system, a PVDF tactile sensor and a DSP controller automatically generate voltage patterns to present surface texture sensations through the tactile display. A sensor, in synchronization with finger motion on the tactile display, scans a texture sample and outputs information about the sample surface. The information is processed by a DSP and fed back to the tactile display in real time. The tactile telepresentation system was evaluated in texture discrimination tests and demonstrated a 79 percent correct answer ratio. A transparent electrostatic tactile display is also reported in which the tactile display is combined with an LCD to realize a visual-tactile integrated display system.     

A flexible PDMS capacitive tactile sensor with adjustable measurement range for plantar pressure measurement

A flexible capacitive tactile sensor with adjustable characteristics, i.e., measurement range and sensitivity, has been developed. The proposed sensor is designed for large pressure measurement; therefore, polydimethylsiloxane (PDMS) material is selected as the material of the dielectric layer between the parallel plate electrodes of the sensor. Since the elasticity of the PDMS material can be adjusted by the mixing ratio of PDMS pre-polymer and curing agent during formation, sensors in different measurement ranges, i.e., 240–1,000 and 400–3,000 kPa, and corresponding sensitivities, i.e., 2.24 and 0.28 %/MPa, were respectively constructed and demonstrated. These measurement ranges are suitable for most of the biomechanical applications, especially for plantar pressure measurement. Moreover, because the output of the sensor, i.e., capacitance, is highly influenced by the dimension of the sensor structure, each sensor consists of four independent capacitance elements. The output of each sensor is averaged by four capacitances for single force measurement. This could improve the measurement accuracy in practical situation. Also, linearity of the measurement response could be enhanced and it was shown by the R-squared values in two measurement ranges, i.e., 0.9751 and 0.9881, respectively. The proposed sensor is flexible and miniaturized and has the potential to be applied to biomechanical applications.     

Towards developing perceivable tactile feedback for mobile devices

As mobile technologies such as cellular telephones reduce in both size and cost, and improve in fidelity, they become a more attractive option for performing tasks such as surfing the Web and accessing applications while on-the-go. The small size of the visual display limits the amount of information that can be presented, which may lead to cluttered interfaces. Tactile feedback (e.g. vibrations) provides one solution to reducing the burden on the visual channel. This paper describes a series of studies conducted with the goal of developing perceivable tactile icons (tactons) to aid in non-visual interactions with mobile applications. In contrast to previous work, our research addresses the development of pairs of tactons, rather than individual tactons, with the goal of conveying two-state signals such as ‘on/off’, ‘slower/faster’, or ‘left/right’. Such communication can help reduce visual demands associated with using mobile applications, allowing the device to convey important information while the users’ hands and eyes are otherwise occupied. Realistic conditions were simulated in a laboratory-based environment to determine how auditory distracters could affect the perception of tactons. Findings show that recognition rates differed depending on the design of the vibration pair parameters, and type of auditory distracter. This research culminated in a set of guidelines, which tactile interface designers can integrate as they design mobile applications to improve access, as well as insights which can guide future research on tactile feedback for mobile devices.     

Design of a discrete Kalman filter for a tactile sensor in a feedback control system

This paper presents a design methodology for the optimum linear filter and predictor applied to robot sensor signals, as well as a sensitivity analysis of the kalman algorithms for uncertainties in the estimation of signal and noise parameters. Simulation of the filtration and prediction processes was made assuming a first-order spectrum of a pure signal and white measurement noise. Calculations of the algorithm errors, dependent on the accuracy of the signal and noise parameter estimation, were done for various spectra of the signal and for various signal-to-noise ratios. Furthermore, the sensitivity curves of the Kalman filter and predictor are presented. The outlined considerations might be helpful for designers when synthesizing optimum linear digital filters applied to sensor signals. Although that particular procedure has been designed for a robot tactile sensor application, the conclusions are more general, and applications may be found elsewhere.     

Human shape recognition performance for 3D tactile display

The paper describes the relationship between the pin-matrix density of a tactile display and the recognition performance of displayed 3D shapes. Three types of pin-matrix tactile display, that generate 3D shapes, were used for the experiment. The pitch of pins was 2 mm, 3 mm, 5 mm each. We assumed that surfaces, edges, and vertices were primitive 3D shape information, so tested shapes were classified into these three categories. We assumed two types of finger touching mode: 1) fingertip-only, allowed full use of spatial shape information given to the fingertip; and 2) allowed tracing of the object. Recognition time and the classified error rate were measured. We obtained results on the relationship between pin pitch and recognition performance data. Regression curves for pin pitch and recognition time were plotted. A significance test of recognition time versus pin pitch was done. The error rate of identification versus pin pitch was described. Our results provide basic knowledge for developing tactile presentation devices     

Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

This paper presents the development of a MEMS based capacitive tactile sensor intended to be incorporated into a tactile array as the core element of a biomimetic fingerpad. The use of standard microfabrication technologies in realising the device allowed a cost efficient fabrication involving only a few process steps. A low noise readout electronics system was developed for measuring the sensor response. The performance of both bare and packaged sensors was evaluated by direct probing of individual capacitive sensor units and characterising their response to load–unload indentation cycles.     

Development of a smart handheld surgical tool with tactile feedback

This paper presents a handheld surgical tool adapting a tactile feedback system. The tool consists of a 3-degree-of-freedom (DOF) force sensor and three tactile displays. The sensor is easily embedded in the tool by adopting the capacitive transduction principle. The sensor measures the direction and magnitude of the 3-DOF force applied to the tool tip. The fingertip grasping the tool is stimulated by the tactile display to transmit the contact force information measured by the sensor. The tactile display is actuated by employing a soft actuator technology based on a dielectric elastomer actuator such as a type of electroactive polymer actuator. In this work, a prototype of the tool is designed and fabricated. Its performance is experimentally validated.     

NEMS diaphragm sensors integrated with triple-nano-ring resonator

Two types of circular diaphragm, made by Si and Si/SiO₂, integrated with hexagonal photonic crystal (PhC) lattice with triple-nano-ring (TNR) resonator created at the centre are proposed as nano-scale force and pressure sensor. The optimized channel drop effect of the TNR resonator brings a strong forward drop resonant peak in both the cases and with Q-factor of 1602 and 1737, respectively. The resonant wavelength peak experience red shifts upon the applied load on the circular diaphragm along the normal direction, in terms of a 2nd-order polynomial relationship. The devices can detect a wide range of applied load. Si diaphragm based micro force sensor gives minimum detectable force of 0.847 μN in the region of applied force from 10 to 20 μN. Si/SiO₂ diaphragm based pressure sensor gives minimum detectable pressure of 4.17 MPa in the region of applied pressure from 20 to 40 MPa. From the derived wavelength shift versus a given centre displacement of the diaphragm, Si diaphragm based sensor shows higher sensitivity than Si/SiO₂ diaphragm sensor.