Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications

In this paper, we investigate the performance of a piezoelectric membrane actuated by an epitaxial piezoelectric Pb(Zr_0.2Ti_0.8)O₃ (PZT) thin film for localized-mass sensing applications. The fabrication and characterization of piezoelectric circular membranes based on epitaxial thin films prepared on a silicon wafer are presented. The dynamic behavior and mass sensing performance of the proposed structure are experimentally investigated and compared to numerical analyses. A 1500 μm diameter silicon membrane actuated by a 150 nm thick epitaxial PZT film exhibits a strong harmonic oscillation response with a high quality factor of 110-144 depending on the resonant mode at atmospheric pressure. Different aspects related to the effect of the mass position and of the resonant mode on the mass sensitivity as well as the minimum detectable mass are evaluated. The operation of the epitaxial PZT membrane as a mass sensor is determined by loading polystyrene microspheres. The mass sensitivity is a function of the mass position, which is the highest at the antinodal points. The epitaxial PZT membrane exhibits a mass sensitivity in the order of 10⁻¹² g/Hz with a minimum detectable mass of 5 ng. The results reveal that the mass sensor realized with the epitaxial PZT thin film, which is capable of generating a high actuating force, is a promising candidate for the development of high performance mass sensors. Such devices can be applied for various biological and chemical sensing applications.     

基于RGD多肽掺杂聚吡咯-铟锡氧化物的仿生微电极构建及用于细胞生物学行为的电化学阻抗谱检测

构建一种基于RGD多肽分子掺杂聚吡咯膜修饰的铟锡氧化物微电极(PPy/RGD-ITO),并以此作为传感电极实现细胞生物学行为的电化学阻抗谱检测.采用光刻技术蚀刻感光干膜绝缘层制备ITO微电极;以含RGD模体的多肽分子作为吡咯电聚合唯一的掺杂阴离子,通过电化学共聚合方式在ITO微电极表面沉积PPy/RGD复合膜形成PPy/RGD-ITO微电极;原子力显微镜(AFM)、接触角测量仪和傅里叶变换红外光谱仪(FTIR)分别表征PPy/RGD复合膜的表面拓扑形貌、湿润性和组成成分;人肺癌细胞株A549铺展、粘附及增殖实验考察了PPy/RGD复合膜与细胞间的相互作用;以构建的PPy/RGD-ITO微电极作为传感电极,通过电化学阻抗谱技术对A549细胞粘附增殖行为及天然抗癌药物分子重楼皂苷I的细胞毒性进行了分析.结果显示,通过简单的电化学共聚合成功将RGD分子掺杂进PPy膜内,且PPy/RGD复合膜具有优异的表面物理性能;PPy基质膜内掺杂的RGD分子保留其生物活性,相比裸ITO电极和聚4-苯乙烯磺酸钠(PSS)掺杂的PPy膜,PPy/RGD复合膜能更好地促进A549细胞的铺展、粘附和增殖;由于PPy/RGD-ITO微电极表面A549细胞形态学变化可改变电极系统的阻抗谱特征,因此通过电化学阻抗谱技术可解析A549细胞粘附增殖行为学信息,同时可定量分析重楼皂苷I细胞毒性.因此,通过简单的电化学共聚合方法将生物活性RGD分子掺杂进PPy膜内制备出的PPy/RGD膜具有优良的生物相容性,可作为一种重要的仿生电极修饰材料用于构建电子系统和细胞生物学系统的耦合界面,未来可应用于细胞生物学行为及药物筛选研究.