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为了避免微加速度计在工作过程中因为共振导致结构损坏,需要在结构中合理设计阻尼.设计了一个复合量程压阻式微加速度计,为了使结构中各个传感器具有较好的阻尼参数,通过静电键合在硅结构层下制作一玻璃层.根据Reynolds方程,可知当硅-玻璃静电键合间距d=2.25μm时,复合量程微加速度计中各个传感器可得到较好的阻尼比. 相似文献
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封装热应力是导致MEMS器件失效的主要原因之一,本文设计了一种MEMS高g加速度传感器,并仿真研究了传感器在封装过程中的热应力及影响其大小的因素。根据封装工艺,建立设计的高g加速度传感器封装的有限元模型,利用AN-SYS软件仿真传感器在不同的贴片工艺中受到的热应力及影响热应力的因素。结果显示,在封装中,与直接贴片到管壳底部相比,MEMS高g加速度传感器芯片底面键合高硼硅玻璃后再贴片到管壳底部时,封装热应力可从135MPa降低到33MPa;在贴片工艺中,基板的热膨胀系数和贴片胶的弹性模量、热膨胀系数及厚度是影响封装热应力的主要因素;在健合工艺中,基板和键合温度主要影响到热应力的大小。 相似文献
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两电极多层阳极键合实验研究 总被引:1,自引:0,他引:1
介绍了用2个电极通过一次电极反接的方式实现多层样片之间阳极键合的操作工艺和键合机理,并以玻璃-硅-玻璃三层结构为例对其进行了实验研究。结果显示:多余的玻璃对第一次键合过程的电流特性影响不大,而第一次键合的玻璃对第二次键合电流产生显著的影响,电流出现不规则的突变。而且,在第二次键合过程中,第一次键合的玻璃在键合面上会出现由于钠元素积聚而产生的黄褐色斑点。拉伸强度实验的结果表明:第二次键合过程中在第一次键合面形成的反向电压会减弱键合的强度;通过合理选择键合参数可以得到满足MEMS封装要求的键合强度。 相似文献
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复合量程微加速度计的研究 总被引:3,自引:1,他引:3
在同一个物理过程中往往存在相差上数十倍甚至上万倍的多个加速度值需要测量,例如,分析弹体在发射和飞行过程中的受力情况,既需要测试发射过程中上万个g的加速度,也需要测试飞行过程中几个g的加速度.在这些场合用同一个加速度计很难满足整个过程的测试要求.针对类似的需求,介绍了一种由四个压阻式微加速度计组成的复合量程微加速度计,四个微加速度计量程分别为100 g、500g、1000 g和2000 g.除了主要介绍微加速度计阵列的设计、制造和测试外,还着重介绍了低量程传感器在高过载环境下的结构防护问题.线性测试结果表明该复合量程微加速度计具有较好的线性度,因而可以同时在测量四个不同的量程的加速度值. 相似文献
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MEMS加速度计等传感器检测精度受机械元件加工、电路制作、封装工艺等方面影响,其中机械热应力的影响尤为显著。为降低热应力,提出了一种基于多层嵌套环驻波特性的应力隔离结构设计,利用嵌套环的驻波振动特性,通过多层嵌套环逐级吸收传递至敏感结构的能量,从而达到隔离锚点处热应力的效果。通过有限元方法计算了不同嵌套环在热应力下变形情况,并研究了键合残余热应力与温度变化热应力对加速度计敏感结构频率、正应力和切应力的影响规律,得出在不同结构布局和尺寸参数下设计的应力隔离效率。对于正应力而言,应力隔离效率最优可以达到99.98%;对于切应力而言,应力隔离效率最优可以达到99.53%。结果表明,多层嵌套环应力隔离结构在特定布局和尺寸条件下的应力隔离效果优于现有的框架式应力隔离结构。 相似文献
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介绍了复合量程加速度计的设计原理,对加速度计的抗高过载能力进行理论分析和实践证明。从复合量程加速度计的内部结构设计到外部封装设计两个方面考虑提高抗高过载能力。应用ANSYS软件对结构进行仿真,并应用到实际的过载试验。试验中,复合量程加速度计在经过高过载之后,能有效的测得炮弹膛内初始过载和外弹道轴向过载,而且加速度计没有被损坏。结果证明,这种抗过载设计方案具有很高的可靠性。 相似文献
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硅微静电加速度计将静电悬浮技术与微机械加工工艺相结合,在空间微重力环境下通过降低量程可实现极高的分辨率。设计了一种玻璃—硅—玻璃三明治结构、平行六面体状检测质量、体硅加工工艺、低量程的三轴硅微静电加速度计,分析了加速度计的力平衡回路特性。采用基于DSP的数字控制器,实现了检测质量的六自由度稳定悬浮。在大气环境下测试了静电加速度计的性能。测试结果表明:加速度计x轴的带宽为88.1 Hz,量程为0.220 g n;y轴的带宽为118.2 Hz,量程为0.313 g n;z轴的带宽为10.7 Hz,量程为3.53 g n。 相似文献
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T. Kárpáti S. Kulinyi R. Végvári J. Ferencz A. Nagy A. E. Pap G. Battistig 《Microsystem Technologies》2014,20(6):1063-1068
In this paper design aspects and challenging packaging solution of a monolithic 3D force sensor will be presented. The previously developed design and process flow (Vázsonyi et al. 123–124:620–626, 2005; Molnár et al. 90:40–43, 2012) were improved by an additional hybrid wafer bonding step of simultaneous anodic and metal bonding processes. This electrostatic force assisted metal bonding can ensure both the mechanical and the electrical integrity of the device. The applied novel process sequence can eliminate the need of a possible flip-chip bonding and chemical–mechanical polishing steps. The applied glass substrate improves the thermal isolation and thermo-mechanical stability of the integrated system considering the thermal expansion coefficients of the chosen glass material and the silicon (Si) only slightly differ minimizing the residual thermo-mechanical stress during the operation. 相似文献
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The fabrication and characterization of an optical accelerometer based on silicon technology and using BESOI wafers is presented. Instead of the standard total internal reflection (TIR) waveguides, AntiResonant Reflecting Optical Waveguides (ARROW) have been used. On the basis of a quad beam accelerometer design, a sensing waveguide has been placed on the seismic mass. Its misalignment with the waveguides located at the frame allows measuring the acceleration. The mechanical structure has been designed so as to have a span of 2 μm, that should provide with a sensitivity of 4.6 dB/g. Reference waveguides measured by end-fire coupling have low radiation and insertion losses (0.3 and 2.5 dB, respectively). High insertion losses are observed due to imperfections in polishing when V-grooves with glass anodic bonding are used. This fact causes the reduction of its sensibility to 2.3 dB/g. 相似文献
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Jihperng Leu Chin‐Cheng Chang Alexander Chen Mao‐Hsing Lin Kun‐Feng Huang 《Journal of the Society for Information Display》2012,20(1):28-36
Abstract— Mura defects become visible in a 13.3‐in. TFT‐LCD using chip‐on‐glass (COG) packaging when the thickness of the glass substrate is decreased from 0.5 to 0.3 mm. Mura, the non‐uniform brightness in LCDs, is caused by COG packaging due to the mismatch of the coefficient of thermal expansion (CTE) and Young's modulus between the glass substrate and the IC‐driver Si chips. In this paper, a 3‐D finite‐element‐analysis (FEA) model, coupled with transient thermal analysis is first established to examine the warpage and stress behavior in the upper‐glass‐plate post‐COG‐package processing for identifying the root causes of the light‐leakage phenomenon. Prior to that, the simulated warpage results are validated by surface‐contour measurement. Data and modeling results show that a low bonding temperature together with a low modulus in novel ACF materials can effectively eliminate Mura. Besides, thinner silicon or a shorter length of Si chips as drivers offers enhanced reduction in the localized warpage, and thus can be a practical and low‐cost solution for eliminating mura defects. 相似文献
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In this paper a novel process to bond and, at the same time, to electrically connect a silicon wafer to a glass wafer is presented. It consists of a low temperature anodic bonding process between silicon and glass by using a glass wafer with etched channels in order to contain metal tracks. The glass-to-silicon anodic bonding process at low temperatures (not exceeding 300°C) assures a strong mechanical link (Berthold et al. in Transducers 1999, June:7–10, 1999). The electrical contacts between the metal pads on the backside of a silicon wafer and the metal pads on the glass wafer are achieved by sintering and diffusion of metals due to a kind of thermo compression bonding. This bonding method permits a high vertical control due to a well-controlled etching of the cavity depth and to the thickness precision of both metallization (pads on silicon wafers and metal tracks on glass wafer). This IC-processing compatible approach opens up the way to a new electrical connection concept keeping, at the same time, a strong mechanical bond between glass and silicon wafers for an easier fabrication of a more complex micro-system. 相似文献
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Frit glass bonding is a widely used technology for encapsulation of surface micro-machined structures like inertial sensors or gyroscopes on wafer level. Since for sensors in automotive applications, a lifetime of 15–20 years has to be guaranteed for, a reliable lifetime prediction is necessary. Different material parameters have to be known for a lifetime estimation based on stress corrosion cracking, which determines the long-term strength behaviour of most bonded interfaces of microsystems. Parameters needed for lifetime prediction have to describe the material’s resistance against crack propagation (fracture toughness K
IC), the stress situation in a micro package and the long-term strength behaviour. Results for fracture toughness investigations presented in this paper were determined by the micro chevron test. The stress situation in a micro package was calculated by a thermo-mechanical Finite Element Analysis. Furthermore the residual stress in the glass layer and the linear thermal expansion coefficient were determined by a crack width measurement in an environmental scanning electron microscope. 相似文献
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Svetlana Tatic-Lucic John Ames Bill Boardman David McIntyre Paul Jaramillo Larry Starr Myoungho Lim 《Sensors and actuators. A, Physical》1997,60(1-3):223-227
A simple testing method is presented that allows the comparison of the bond quality for anodically bonded wafers. An array of parallel metal lines of predetermined thickness is formed on a glass wafer. The estimation of the bond quality can be performed by visual inspection after the bonding. This method enables comparison of the anodic-bonding process performance for different glasses, for intermediate layers and various bonding conditions. The optimization of silicon-glass anodic bonding with an intermediate phosphosilicate glass (PSG) layer is shown using this technique. 相似文献
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通过对静电封接结构的受力分析,建立了静电封接后弹性膜片的热失配应力数学模型。并分析了改善微压传感器性能的技术途径。 相似文献