A 46-ns 1-Mbit CMOS SRAM

A 1-Mb (128 K×8-bit) CMOS static RAM (SRAM) with high-resistivity load cell has been developed with 0.8-μm CMOS process technology. Standby power is 25 μW, active power 80 mW at 1-MHz WRITE operation, and access time 46 ns. The SRAM uses a PMOS bit-line DC load to reduce power dissipation in the WRITE cycle, and has a four-block access mode to reduce the testing time. A small 4.8×8.5-μm² cell has been realized by triple-polysilicon layers. The grounded second polysilicon layer increases cell capacitance and suppresses α-particle-induced soft errors. The chip size is 7.6×12.4 mm²     

An 18-Mb, 12.3-GB/s CMOS pipeline-burst cache SRAM with 1.54Gb/s/pin

An 18-Mbit CMOS pipeline-burst cache SRAM achieves a 12.3-Gbyte/s data transfer rate with 1.54-Gbit/s/pin I/O's. The SRAM is fabricated on a 0.18-μm CMOS technology. The 14.3×14.6-mm² SRAM chip uses a 5.59-μm², six-transistor cell. Circuit techniques used for achieving high bandwidth include fully self-timed array architecture, segmented hierarchical sensing with separated global read/write bitlines in different metal layers, a high-speed data-capture technique, a reduced-swing output buffer, and a high-sensitivity, high-bandwidth input buffer     

A 3.8-ns 16 K BiCMOS SRAM

A 2 K×8-b, ECL 100 K compatible BiCMOS SRAM with 3.8-ns (-4.5 V, 60°) address access time is described. The precisely controlled bit-line voltage swing (60 mV), a current sensing method, and optimized ECL decoding circuits permit a reliable and fast readout operation. The SRAM features an on-chip write pulse generator, latches for input and output bits, and a full six-transistor CMOS cell array. Power dissipation is approximately 2 W, and the chip size is 3.9×5.9 mm². The SRAM was based on 1.2-μm BiCMOS, using double-metal, triple-polysilicon, and self-aligned bipolar transistors     

A 7.5-ns 32 K×8 CMOS SRAM

A 256 K (32 K×8) CMOS static RAM (SRAM) which achieves an access time of 7.5 ns and 50-mA active current at 50-MHz operation is described. A 32-block architecture is used to achieve high-speed access and low power dissipation. To achieve faster access time, a double-activated-pulse circuit which generates the word-line-enable pulse and the sense-amplifier-enable pulse has been developed. The data-output reset circuit reduces the transition time and the noise generated by the output buffer. A self-aligned contact technology reduces the diffused region capacitance. This RAM has been fabricated in a twin-tub CMOS 0.8-μm technology with double-level polysilicon (the first level is polycide) and double-level metal. The memory cell size is 6.0×11.0 μm² and the chip size is 4.38×9.47 mm ²     

A 23-ns 4-Mb CMOS SRAM with 0.2-μA standby current

A 4-Mb CMOS SRAM having 0.2-μA standby current at a supply voltage of 3 V has been developed. Current-mirror/PMOS cross-coupled cascade sense-amplifier circuits have achieved the fast address access time of 23 ns. A new noise-immune data-latch circuit has attained power-reduction characteristics at a low operating cycle time without access delay. A 0.5-μm CMOS, four-level poly, two-level metal technology with a polysilicon PMOS load memory cell, yielded a small cell area of 17 μm² and the very small standby current. A quadruple-array, word-decoder architecture allowed a small chip area of 122 mm²     

A 12.5-ns 16-Mb CMOS SRAM with common-centroid-geometry-layoutsense amplifiers

A 16-Mb CMOS SRAM using 0.4-μm CMOS technology has been developed. This SRAM features common-centroid-geometry (CCG) layout sense amplifiers which shorten the access time by 2.4 ns. A flexible redundancy technique achieves high efficiency without any access penalty. A memory cell with stacked capacitors is fabricated for high soft-error immunity. A 16-Mb SRAM with a chip size of 215 mm² is fabricated and an address access time of 12.5 ns has been achieved     

An 8-ns 256K ECL SRAM with CMOS memory array and battery backupcapability

The authors describe the first high-performance, high-density ECL SRAM (emitter-coupled-logic static random-access memory) compatible with battery backup techniques. The 256K device has a measured access time of 8 ns. Fabricated in a 0.8-μm BiCMOS process, the chip uses 117-μm ², full-CMOS, six-transistor memory cells and measures 6.5×8.15 mm². The design methodology described here illustrates the extent to which bipolar devices can be integrated into the periphery of a CMOS memory array. This integration was achieved through the use of a novel sensing scheme which provided three stages of bipolar differential sensing, with the first stage of sensing taking place directly on the bit lines     

A 7-ns 140-mW 1-Mb CMOS SRAM with current sense amplifier

A 7-ns 140-mW 1-Mb CMOS SRAM was developed to provide fast access and low power dissipation by using high-speed circuits for a 3-V power supply: a current-sense amplifier and pre-output buffer. The current-sense amplifier shows three times the gain of a conventional voltage-sense amplifier and saves 60% of power dissipation while maintaining a very short sensing delay. The pre-output buffer reduces output delays by 0.5 ns to 0.75 ns. The 6.6-μm² high-density memory cell uses a parallel transistor layout and phase-shifting photolithography. The critical charge that brings about soft error in a memory cell can be drastically increased by adjusting the resistances of poly-PMOS gate electrodes. This can be done without increasing process complexity or memory cell area. The 1-Mb SRAM was fabricated using 0.3-μm CMOS quadrupole-poly and double-metal technology. The chip measures 3.96 mm×7.4 mm (29 mm²)     

An ultrahigh-density high-speed loadless four-transistor SRAM macrowith twisted bitline architecture and triple-well shield

We have developed two schemes for improving access speed and reliability of a loadless four-transistor (LL4T) SRAM cell: a dual-layered twisted bitline scheme, which reduces coupling capacitance between adjacent bitlines in order to achieve highspeed READ/WRITE operations, and a triple-well shield, which protects the memory cell from substrate noise and alpha particles. We incorporated these schemes in a high-performance 0.18-μm-generation CMOS technology and fabricated a 16-Mb SRAM macro with a 2.18-μm² memory cell. The macro size of the LL4T-SRAM is 56 mm², which is 30% to 40% smaller than a conventional six-transistor SRAM when compared with the same access speed. The developed macro functions at 500 MHz and has an access time of 2.0 ns. The standby current has been reduced to 25 μA/Mb with a low-leakage nMOSFET in the memory cell     

A 6-ns 4-Mb CMOS SRAM with offset-voltage-insensitive current senseamplifiers

A 4-Mb CMOS SRAM with 3.84 μm² TFT load cells is fabricated using 0.25-μm CMOS technology and achieves an address access time of 6 ns at a supply voltage of 2.7 V. The use of a current sense amplifier that is insensitive to its offset voltage enables the fast access time. A boosted cell array architecture allows low voltage operation of fast SRAM's using TFT load cells     

A 5-V-only operation 0.6-μm flash EEPROM with row decoder schemein triple-well structure

An experimental 4-Mb flash EEPROM has been developed based on 0.6-μm triple-well CMOS technology in order to establish circuit technology for high-density flash memories. A cell size of 2.0×1.8 μm² has been achieved by using a negative-gate-biased source erase scheme and a self-aligned source (SAS) process technology. A newly developed row decoder with a triple-well structure has been realized in accordance with its small cell size. The source voltage during the erase operation was reduced by applying a negative voltage to the word line, which results in a 5-V-only operation. The chip size of the 4-Mb flash EEPROM is 8.11×6.95 mm², and the estimated chip size of a 16-Mb flash EEPROM is 98.4 mm² by using the minimal cell size (2.0×10 μm²)     

A 1.5-ns 256-kb BiCMOS SRAM with 60-ps 11-K logic gates

A 1.5-ns address access time, 256-kb BiCMOS SRAM has been developed. To attain this ultra-high-speed access time, an emitter-coupled logic (ECL) word driver is used to access 6-T CMOS memory cells, eliminating the ECL-MOS level-shifter time delay. The RAM uses a low-power active pull down ECL decoder. The chip contains 11-K, 60-ps ECL circuit gates. It provides variable RAM configurations and general logic functions. RAM power consumption is 18 W; chip power consumption is 35 W. The chip is fabricated by using a 0.5-μm BiCMOS process. The memory cell size is 58 μm² and the chip size is 11×11 mm     

A CMOS integrated three-axis accelerometer fabricated withcommercial submicrometer CMOS technology and bulk-micromachining

In this paper, a bulk-micromachined three-axis accelerometer fabricated with commercial submicrometer CMOS wafers has been developed for low-cost realization of smart accelerometers and improvement of device performance. The signal processing circuits for three-axis detection were formed using a commercial 0.8-μm CMOS technology. After that, micromachining processes were performed to the complete CMOS wafers to form accelerometer structures. The important technologies to separate micromachining processes from the CMOS process are wafer thickness control after CMOS fabrication and backside polishing with chemical spin etching. Accelerometers with 3×3 mm² and 6×6 mm² die size were fabricated with the developed fabrication technology. As a result of device evaluation, 2.0 mg_rms resolution of Z-axis acceleration, and 10.8 mg_rms resolution of X and Y-axis acceleration were obtained by the accelerometers with 6×6 mm² die size. Comparing for the same die area, the 6×6 mm² size accelerometer showed about 21.3 times higher resolution of Z-axis acceleration and 37.8 times higher resolution of X, Y-axis acceleration as compared to our previous three-axis accelerometer fabricated with 5.0-μm CMOS technology. Temperature dependence and reliability for repetitive vibration loads were also evaluated. Through these evaluations, basic performance of the CMOS integrated three-axis accelerometer has been confirmed     

A 1/4-inch 330 K square pixel progressive scan CMOS active pixelimage sensor

In this paper, three pixel structures have been studied as candidates to realize high density CMOS active pixel sensors. A novel cell structure, the “I-shaped” cell, in which the active regions are formed along a straight line, has been proposed for high-packing density devices. The “I-shaped” cells can realize minimum cell area of 16F², 14F², and 14F ² (F: design rule) for three-transistor-type, two-transistor-type, and one-transistor-type pixels, respectively. A 1/4-inch format progressive scan CMOS active pixel sensor with 640 (H)×480 (V) pixels has been fabricated using a 0.6-μm CMOS process. The sensor operates with 5.0 V single power supply, and power consumption is below 30 mW     

A 16-Mb CMOS SRAM with a 2.3-μm2 single-bit-linememory cell

A novel architecture that enables fast write/read in poly-PMOS load or high-resistance polyload single-bit-line cells is developed. The architecture for write uses alternate twin word activation (ATWA) with bit-line pulsing. A dummy cell is used to obtain a reference voltage for reading. An excellent balance between a normal cell signal line and a dummy cell signal line is attained using balanced common data-line architecture. A newly developed self-bias-control (SBC) sense amplifier provides excellent stability and fast sensing performance for input voltages close to V_CC at a low power supply of 2.5 V. The single-bit-line architecture is incorporated in a 16-Mb SRAM, which was fabricated using 0.25-μm CMOS technology. The proposed single-bit-line architecture reduces the cell area to 2.3-μm² , which is two-thirds of a conventional two-bit-line cell with the same processes. The 16-Mb SRAM, a test chip for a 64-Mb SRAM, shows a 15-ns address access time and a 20-ns cycle time     

An experimental 1-Mbit CMOS SRAM with configurable organization andoperation

A 1-Mb SRAM (static random-access memory) configurable as a 128-kb×8, 256-kb×4, or 1-Mb×1 memory featuring asynchronous operation with static-column and chip-enable-access speedup modes or synchronous operation with a fast-page (toggle) or static-column mode is described. It has been fabricated in a double-metal, double-polysilicon CMOS process with 0.7-μm geometry and special SRAM structures. The measured synchronous access of 29 ns with a fast-page mode access of 22 ns. Measured asynchronous access is 34 ns with a static-column access of 33 ns and a chip-select speedup access of 29 ns. The SRAMs six-transistor CMOS memory cell is 58.24 μm²     

A 1.5-ns access time, 78-μm2 memory-cell size, 64-kbECL-CMOS SRAM

A 1.5-ns access time, 78-μm² memory-cell size, 64-kb ECL-CMOS SRAM has been developed. This high-performance device is achieved by using a novel ECL-CMOS SRAM circuit technique: a combination of CMOS cell arrays and ECL word drivers and write circuits. These ECL word drivers and write circuits drive the CMOS cell arrays directly without any intermediate MOS level converter. In addition to the ultrahigh-speed access time and relatively small memory-cell size, a very short write-pulse width of 0.8 ns and sufficient soft-error immunity are obtained. This ECL-CMOS SRAM circuit technique is especially useful for realizing ultrahigh-speed high-density SRAMs, which have been used as cache and control storages of mainframe computers     

A 16-Mbit DRAM with a relaxed sense-amplifier-pitch open-bit-linearchitecture

A 16-Mb dynamic RAM has been designed and fabricated using 0.5-μm CMOS technology with double-level metallization. It uses a novel trench-type surrounding high-capacitance cell (SCC) that measures only 3.3-μm² in cell size with a 63-fF storage capacitance. A novel relaxed sense-amplifier-pitch (RSAP) open-bit-line architecture used on the DRAM achieves a high-density memory cell array, while maintaining a large enough layout pitch for the sense amplifier. These concepts allow the small chip that measures 5.4×17.38 (93.85) mm² to be mounted in a 300-mil dual-in-line package with 65-ns RAS access time and 35-ns column address access time     

A 50-MHz 8-Mbit video RAM with a column direction drive senseamplifier

An 8-Mb (1-Mwords×8-b) dynamic RAM which utilizes a column direction drive sense amplifier to obtain low peak current is described. The power supply peak current is about one fourth of that for conventional circuits. The chip operates at 50-MHz and is fabricated with a 0.7-μm n-well CMOS, double-level polysilicon, single-polycide, and double-level metal technology. The memory cell is a surrounding hi-capacitance cell structure. The cell size is 1.8×3.0 μm², and the chip area is 12.7×16.91 mm²     

High-speed sensing techniques for ultrahigh-speed SRAMs

Two high-speed sensing techniques suitable for ultrahigh-speed SRAMs are proposed. These techniques can reduce a 64-kb SRAM access time to 71~89% of that of conventional high-speed bipolar SRAMs. The techniques use a small CMOS memory cell instead of the bipolar memory cell that has often been used in conventional bipolar SRAMs for cache and control memories of mainframe computers. Therefore, the memory cell size can also be reduced to 26~43% of that of conventional cells. A 64-kb SRAM fabricated with one of the sensing techniques using 0.5-μm BiCMOS technology achieved a 1.5-ns access time with a 78-μm² memory cell size. The techniques are especially useful in the development of both ultrahigh-speed and high-density SRAMs, which have been used as cache and control memories of mainframe computers