掺氮区熔硅单晶

一、前言直拉硅单晶中的氧原子,一般含量为10~17～10~18厘米~(-3),这些氧原子一方面能抑制器件制作过程中位错的产生;另一方面能通过内吸除效应,把硅晶体中的有害杂质吸除。同时氧沉淀在硅晶体中,能增强晶体的机械强度,减少高温扩散中的硅片翘曲形变,所以集成电路中广泛采用直拉硅单晶。但直拉硅单晶存在着坩埚沾污和氧的有害效应,即氧施主问题,不容易拉出高电阻率的晶体,也就不能制作高电压的器件。     

直拉硅单晶中的热致微缺陷

大规模集成电路工艺要求使用直拉法高质量的无位错硅单晶。然而,硅片在半导体器件制造过程中重复热过程将诱发很多微缺陷(MD),这种MD是有害的。降低晶体中的氧浓度是降低MD的一种方法,但硅中的氧并不     

氧沉淀对直拉硅单晶硬度的影响

研究了氧沉淀对直拉(CZ)硅单晶维氏硬度的影响.研究表明,在发生一定程度氧沉淀的情况下,硅单晶的硬度会由于氧沉淀导致的间隙氧浓度的降低而减小,此时间隙氧原子的固溶强化作用对硅单晶硬度具有显著的影响;而当氧沉淀足够显著时,由于氧沉淀的密度和尺寸较大,氧沉淀在硅单晶中的第二相强化作用得以显现,此时硅单晶的硬度不随间隙氧浓度的降低而减小,反而有较为显著的提高.     

热处理对掺镓直拉单晶硅中缺陷及少子寿命的影响

抑制p型单晶硅太阳能电池的光致衰减现象是光伏科技领域的热点和难点。掺镓直拉硅单晶工艺的突破以及在晶硅电池上的应用破解了这一难题,成功地抑制光致衰减。因为镓原子与硼原子共价半径的差异以及在太阳能电池制备过程中单晶硅片仍会经历不同条件的热处理,所以探究不同热处理条件对掺镓单晶硅中缺陷以及少子寿命的影响是非常有必要的。本文使用专利工艺技术制备掺镓硅单晶,并对掺硼和掺镓两种不同单晶硅片进行不同温度和时间的退火实验,对比分析不同样品的氧含量和少子寿命。结果发现:退火温度的升高、时间的延长以及预热处理都会降低两种硅片中的间隙氧含量以及少子寿命,同时促进了两组硅片中氧沉淀的形成。通过两组不同硅片对比表明,在相同条件下的退火处理,原子半径差异导致掺镓硅单晶硅的间隙氧含量下降速度更快,易形成更多的氧沉淀。     

Φ125mm硅单晶的控氧技术

Φ１２５ｍｍ硅单晶的控氧技术张果虎常青方锋吴志强郝玉清秦福（北京有色金属研究总院，北京１０００８８）关键词：硅单晶氧含量控氧技术坩埚结构１引言为满足不同的器件对硅片氧含量的不同要求，需要更精确地控制直拉硅单晶中的氧含量及氧梯度。单晶中的氧有两方面的作...     

直拉硅单晶时旋转磁场的获得

一、引言大规模和超大规模集成电路的发展,对硅单晶质量提出了越来越高的要求。直拉硅单晶中的杂质氧,使晶体在生长或器件制造的热处理过程中,产生堆垛层错、位错环和硅氧沉淀等缺陷。另一方面,氧化物沉淀引入的位错对表面沾污有本征吸杂的作用。因此硅中氧浓度是单晶质量的重要标志。一般直拉硅单晶中的氧浓度都超过1×10~(18)原子/厘米~3,而且单晶头部含量高于尾部。纵向     

日本研究提高硅单晶少子寿命的最新进展

众所周知,硅单晶中的少子寿命是评价硅单晶质量的重要参数之一,因而找出影响少子寿命的主要因素,从而提高少子寿命是一个具有重要意义、又很热门的课题。最近日本电报和电话大众公司发表了一篇科研报告,介绍少子寿命是与硅单晶中的氧沉淀密切有关,并深入地定量讨论了它们之间的关系。在直拉硅单晶中,由于氧浓度较高,所以硅单晶在生长后的冷却过程中或以后的热     

硅中氧行为研究的新进展

本文根据硅片表层器件有源区中的缺陷对器件性能有着严重的影响，以及在制备器件时会引入的杂质和缺陷的事实，提出了使用内吸除技术来改进硅材料与器件的质量，并对与内吸除有关的因素，即硅中氧行为，如硅中氧施主，氧沉淀及其衍生缺陷，硅片中的吸净层，硅片中的氧与翘曲的成因机制等，作了概要介绍。     

直拉重掺硼硅单晶的研究进展

系统介绍了直拉重掺硼(B)硅单晶研究的最新进展。主要内容包括重掺B硅单晶的基本性质，利用重掺B籽晶进行无缩颈硅单晶生长技术，重掺B硅单晶的机械性能，重掺B硅单晶中的氧和氧沉淀，以及B的大量掺杂与大直径直拉硅单晶中空洞型(Void)原生缺陷的控制关系。在此基础上，探讨了当前直拉重掺B硅单晶生产和研究中存在的主要问题。     

直拉法生长硅单晶时采用减压工艺与气体导流

直拉硅单晶历来都是在真空或氩气氛条件下生长的。在真空中生长,有利于杂质挥发,但电阻率不易控制;在氩气氛条件下生长,则恰好相反,但需消耗大量氩气。特别在硅单晶生产进入大容量化之后,氩气的消耗是相当惊人的。如果高纯氩气的售价不能大幅度下降,硅单晶的成本也就无法降低。另外,直拉硅单晶工艺中用到石英坩埚。石英即二氧化硅,在熔硅与石英的反应中势必有大量氧被溶解,从而增加了硅单晶中的氧     

China's Major Non-ferrous Metals Imports & Exports

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Zinc Production by Province in 2014

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80% of Chinese Firms Purchasing Overseas Mines Ended up in the Red

<正>Minmetals Resources acquired the world’s largest copper mine under construction for USD5.85 billion.One after another,listed companies Jien Nickle,China Molybdenum and Chihong Zinc and Germanium raised money to get involved in overseas mining projects…SOEs and private enterprises are engaged in a frenzy of overseas mine purchasing.A reporter with Economic     

Copper Processing Profit Dropped Sharply,Copper Consumption Will Face Impact in the Second Half of the Year

正Judging from China’s copper consumption field,the biggest consumption unit is electric power,which accounts for 47%of total consumption;it is followed by light industry sector,including household electrical appliance,machinery,durable goods and hardware etc,which accounts for 22%of total consumption;followed by transportation field,     

Central Geological Prospecting Fund Newly Added 16.47 Million Tonnes of Bauxite in 2013

正In 2013,the Central Geological Prospecting Fund(CGPF)Project newly discovered 15 ore fields,including 3 large above ore fields,and 5medium sized ore fields.The reporter learned from the recently published"Annual Report of Central Geological Prospecting Fund Project(2013)"that,from 2006 to 2013 the CGPF     

Manufacturers of Copper Tube for Central Air Conditioner Use Face Mounting Pressure in the Final Quarter of the Year

正This year,the investment growth rate of real estate industry continued to slow down,sold area of commercial housing also dropped significantly,which brought huge pressure to the domestic air conditioning manufactures.In the first half of the year,by relying on high growth in national financial expenditure,along with investment in public infrastructure     

Xinjiang Ranks No.1 in Production of Primary Aluminum in China

正Kang Yi,Honorary Chairman of China Nonferrous Metals Industry Association,said recently at the Forum on Development of the Non-ferrous Metals Industry in Central and Western China held in Zhengzhou that,as more and more electrolytic aluminum factories in Xinjiang came into operation,the electrolytic aluminum output of Xinjiang had reached2,275,000 tons in the first 7 months this year,     

Shenhuo Coal Industry and Electricity Power Completed800,000 t/a Aluminum Project in Xinjiang

正"Xinjiang project has been completed according to schedule,but total completion and total start of production are two different concepts,after completion it still needs a gradual process of reaching production target."On the morning of November 3,Shenhuo Coal Industry and Electricity Power told investors the above statement on the investor interaction platform.     

Guangdong Metal Transaction Center has Become the Second Largest Precious Metal Transaction Platform Nationwide

正The reporter learned from Guangdong Province Precious Metal Transaction Center that in 2013the Center maintained healthy development momentum,and had become the second largest precious metal transaction platform in China in terms of market size;currently Guangdong is quickening steps of financial innovation for the Center,aiming to build a transaction center with international core competitiveness.     

Seven Rare Earth Projects Involving Close to 3 Billion Yuan Investment Landed In the HighTech Zone

正On May 22,Baotou Rare Earth Industry Cooperation Consultation MeetingProject Agreement-signing Ceremony was held in Ningbo,nearly 40 enterprises from Ningbo,Guangdong,Hunan,and Shanxi participated in project consultation.After multi-lateral communication,agreements were signed for a total of 7 rare earth projects successfully.