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无线通信领域MEMS器件的研究进展 总被引:1,自引:0,他引:1
无线通信技术的发展对系统小型化提出了要求,用IC技术制造的电路无源器件的性能无法满足要求,利用MEMS技术不仅能将器件小型化,与,电路集成实现单片化,并且器件性能也能达到要求。近年来,用MEMS技术制作电容、电感、开关以及谐振器等无源器件成为MEMS的又一个新的研究领域。文章简单介绍了无线通信领域MEMS器件的研究进展。 相似文献
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射频微机电系统技术现状 总被引:8,自引:0,他引:8
较全面地介绍了 RF MEMS 器件、由 RF 器件构成的组件及应用系统,并给出了一些新的典型示例。通过比较 RF MEMS 器件与传统微波器件在性能、尺寸等各方面的差别,可以了解 RF MEMS 技术在相控阵雷达上运用的优势。 相似文献
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LTCC技术的现状和发展 总被引:1,自引:0,他引:1
LTCC是实现电子设备小型化、集成化的主流技术,介绍了近年LTCC技术在元件、功能器件、封装基板和集成模块方面的应用,特别是在微波、毫米波和MEMS的应用实例。指出了我国在该领域的优势和弱点,并提出了未来的努力方向。 相似文献
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无线通信的发展要求系统中的无源器件小型化,以实现系统单片集成。微加工技术制作的无源器件不仅可以满足小型化要求,而且在300kHz到14.5MHz频段内,其品质因子(Q值)可高达5000。鉴于此,本文以表面加工技术、体加工技术以及键合技术制作的MEMS谐振器以及由它和耦合梁组成的滤波器为重点,介绍了它们的工作原理、设计和制作方法,最后讨论了在高频范围内制约MEMS谐振器件工作性能的因素。 相似文献
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射频MEMS技术为实现微型化、集成化及智能化,以及探索具有新原理和新功能的器件与系统提供了重要途径。概述了射频MEMS的主要优势和在雷达领域的主要应用方向,在此基础上重点介绍了国外基于射频MEMS技术的T/R组件设计、X波段相控阵天线演示验证系统及针对Ka波段低成本无源相控阵的探索情况,并给出了新一代MEMS高集成度电子扫描阵列研究项目的最新进展。 相似文献
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借助于当代先进的大规模集成电路制造工艺,MEMS(微机电系统)技术将多种光、机、电功能器件集成于一体,真正实现了传统意义上的光机电一体化、微型化、数字化和智能化,在汽车工业、航空航天、消费电子等领域得到了越来越广泛的应用,实现了电子信息技术的新飞越。文中主要阐述MEMS在基础电子元器件、通信、汽车电子、消费电子等电子信息领域的发展应用。 相似文献
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光纤通信中MEMS器件及应用 总被引:1,自引:0,他引:1
MEMS是近年来发展起来的一门新兴科学技术,在很多领域都有着广泛的应用。阐述了目前光纤通信中的一些关键器件如光耦合器、光调制器、光开关、光检测器和光图象处理器等,利用MEMS的技术实现方法及其优点,分析了这些器件在光通信中的应用状况,并对其应用前景作出展望。 相似文献
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In this paper, we report an optical fiber sensor for measuring temperature based on bimetallic concept. The sensor is designed by following the basic principle of Fabry–Perot interferometer and theoretical detail of the sensor has been outlined here with a numerical study. An important feature of the proposed sensor is that the fabrication will be done on a commercial multimode optical fiber. The Micro-Electro-Mechanical Systems (MEMS) based fabrication process could be performed directly on a multimode optical fiber end face which will eliminate the need for adhesive in packaging. The sensor could be fabricated as sensor arrays for micro level applications. The potential application of the proposed optical sensor includes biomedical applications, nano research, microfluidics, and other MEMS devices. 相似文献
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发达的现代通信设备对时钟源器件提出了更高的要求,在保障频率信号稳定的同时还需要器件具备可集成、微型化等特点,微机电系统(MEMS)振荡器因其具备这些优势,已逐渐替代传统振荡器,成为电子设备中信号源的常用元器件。该文设计了一种MEMS振荡器并对其进行仿真测试,该振荡器的核心选频器件由Lamb波压电谐振器组成,在应用于振荡电路前,对设计的MEMS谐振器进行了仿真测试,并提出两种优化其寄生模态的方法,所得谐振器的品质因数(Q)为1 357.5,串联谐振频率为70.384 MHz。将优化后谐振器应用于振荡电路后,对振荡器输出信号和相位噪声进行测试,结果表明,MEMS振荡器的输出载波频率为70.58 MHz,相位噪声为-64.299 dBc/Hz@1 Hz及-144.209 dBc/Hz@10 kHz。 相似文献
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A BioMEMS review: MEMS technology for physiologically integrated devices 总被引:11,自引:0,他引:11
GRAYSON A.C.R. SHAWGO R.S. JOHNSON A.M. FLYNN N.T. YAWEN LI CIMA M.J. LANGER R. 《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》2004,92(1):6-21
MEMS devices are manufactured using similar microfabrication techniques as those used to create integrated circuits. They often, however, have moving components that allow physical or analytical functions to be performed by the device. Although MEMS can be aseptically fabricated and hermetically sealed, biocompatibility of the component materials is a key issue for MEMS used in vivo. Interest in MEMS for biological applications (BioMEMS) is growing rapidly, with opportunities in areas such as biosensors, pacemakers, immunoisolation capsules, and drug delivery. The key to many of these applications lies in the leveraging of features unique to MEMS (for example, analyte sensitivity, electrical responsiveness, temporal control, and feature sizes similar to cells and organelles) for maximum impact. In this paper, we focus on how the biological integration of MEMS and other implantable devices can be improved through the application of microfabrication technology and concepts. Innovative approaches for improved physical and chemical integration of systems with the body are reviewed. An untapped potential for MEMS may lie in the area of nervous and endocrine system actuation, whereby the ability of MEMS to deliver potent drugs or hormones, combined with their precise temporal control, may provide new treatments for disorders of these systems. 相似文献
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《Mechatronics》2000,10(4-5):431-455
This paper gives a brief overview of microactuators, focussing on devices made by microfabrication technologies which are based on silicon processes like photolithography, etching, thin film deposition etc. These technologies enable the miniaturization of electrical devices as well as micromechanisms and microactuators. They can be batch fabricated on large area silicon substrates and represent the smallest available in a vast field of actuators. Mentioning the activation principles and the three main fabrication technologies: bulk micromachining, surface macromachining and moulding, the paper focusses on devices, which made their way into industrial applications or prototypes. The far most developed micro electro-mechanical systems (MEMS) are found in micro-fluidic systems (printheads, microvalves and -pumps) and micro-optical systems (micromirrors, -scanners, -shutters and -switches). They can be combined with microelectronics and microsensors to form an integrated on-chip or hybrid-assembled system. Other MEMS-actuators like microgrippers, microrelays, AFM heads or data storage devices, are promising devices for future medical, biological and technical applications like minimal invasive surgery or the vast field of information storage and distribution. 相似文献
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变形反射镜是用于自适应光学中波前校正的重要元件,它能产生可控的波面校正量对波面相位加以校正。但随着自适应光学技术的发展,传统变形反射镜已不能满足微型化、集成化的发展需求,而基于微机电加工技术的新型变形反射镜的出现解决了传统变形反射镜存在的问题。介绍了微变形反射镜的工作原理,国内外微变形反射镜技术的发展情况及其在自适应光学中的应用,并对分立式与连续表面微变形反射镜的校正能力进行了比较分析,最后阐述了微变形反射镜器件技术展望。 相似文献
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目前大量的机械系统中应用了微电子机械设备,从而对微机电系统(MEMS)的测量提出了新的要求。现讨论了近几年MEMS主要的几种基于光干涉平台的位移和面形的测量方法。 相似文献