基于ELC谐振器的湿度传感器

LC谐振式湿度传感器因无源无线,可极大拓展传感器应用范围,已成为湿度传感器的研究热点之一.将超常媒质(metamaterials)应用在谐振器的结构选择上,解决了传统LC谐振式传感器尺寸过大,灵敏度较低的问题.湿度传感器由电耦合LC谐振器(ELC谐振器)和聚乙烯醇(PVA)敏感薄膜构成.首先利用电磁仿真软件,分析ELC谐振器主要结构参数对谐振特性的影响,设计和制作谐振频率为2.45 GHz的谐振器,品质因数达到302.然后通过滴涂法将制备好的感湿材料聚乙烯醇溶液涂敷在ELC谐振器表面制作湿度传感器,并进行了湿度敏感测试.实验结果显示:ELC谐振器在全频段内磁导率均为正,在频段2.19 GHz~2.98 GHz内介电常数为负,具有超常媒质特性;湿度传感器在相对湿度35% RH~88% RH范围内,谐振频率共偏移69.875 M,且在83%~88% RH湿度范围内感湿灵敏度η达到71.5 MHz/% RH.研究表明ELC谐振器因超常媒质特性实现了结构小型化,且由于品质因数较高改善了湿度灵敏度.     

Terfenol-D/SAW谐振器/Terfenol-D复合磁传感器

设计了一种由超磁致伸缩材料Terfenol-D和SAW谐振器构成的复合磁传感器,在磁场作用下,Terfenol-D沿长度方向伸缩,并将应力应变传递至SAW谐振器,使其产生应变,造成谐振频率改变,通过测量SAW谐振器谐振频率的变化来测量磁场强度.分析了该磁传感器的传感原理,建立了该复合磁传感器的静态模型,对弹性敏感元件进行了受力分析,根据压磁方程和受力平衡得到该磁传感器的静态特性.实验结果表明:该复合磁传感器灵敏度可达341.6Hz/Oe,较Terfenol-D/SAW谐振器结构灵敏度提高了3倍;测量谐振频率的分辨率为1Hz,SAW谐振器频率稳定度为0.1×10-6时,该磁传感器对磁场的分辨率为10-6T.     

一种超磁致伸缩材料和声表面波谐振器构成的复合磁传感器

设计了一种新的超磁致伸缩材料和声表面波谐振器构成的复合磁传感器.该传感器将超磁致伸缩材料在磁场中产生的应力应变传递到声表面波谐振器上,改变其谐振频率,通过对谐振频率的检测进行磁场测量.该传感器可以用于静态和动态磁场测量,并且可用作无源、无线磁传感器.主要分析了该结构用于静态磁场测量的原理,给出了实验结果.传感器谐振频率的变化对于静态磁场变化的灵敏度可达132 Hz/Oe,谐振频率测量分辨率在1 Hz时,磁场测量分辨率可达10-7T数量级.     

新型体声波传感器读出电路的实验验证

为了实验验证此前通过仿真验证的基于六端口反射计的新型BAW传感器读出电路的方案的可行性,本文制作了新型BAW传感器读出电路并对其进行了测试.以串联谐振频率约为1.5 GHz的薄膜体声波谐振器(FBAR)为待测器件(DUT),设计、制作了一种能够满足该FBAR谐振频率测量带宽(1.3 GHz~1.7 GHz)要求的PCB上微带六端口网络和检波器,配合射频信号发生器和示波器,获得了模拟DUT(50ΩSMA匹配负载)的反射系数-频率(Γ-f)曲线测量结果.与矢量网络分析仪(VNA)的测量结果进行了对比,两者吻合较好,实验验证了"基于六端口反射计的BAW传感器读出电路"可用于FBAR谐振频率的测量.本文工作对实用化BAW传感器的研制和片上矢量网络分析仪(VNA-on-Chip)的设计都有借鉴意义.     

谐振式传感器间歇工作方法的仿真研究

提出了一种新的谐振式传感器的工作方法,采用线性调频信号激励谐振器,当激励信号断开后,谐振器将以其谐振频率做自由振动,通过测量谐振器自由振动状态下的振动频率,即可测得谐振器的固有频率.文中通过仿真分析,对比了正弦信号激励和线性调频信号激励时,谐振器的储能情况和谐振器响应信号的幅度.仿真结果表明采用线性调频信号激励可以较好地实现谐振式传感器的间歇工作方法.     

用于气体检测的声表面波振荡电路设计

分析了声表面波(SAW)谐振器的性能和特点,对基于双端谐振型声表面波器件进行了振荡电路设计,采用RP1308、B433及Q284三种型号的声表面波谐振器进行了电路调试.测试结果表明,该电路能在固定频率起振,且频率跳变能够控制在30 Hz以下.本电路能够应用于多种不同谐振频率的双端谐振型声表面波气体传感器,具有广泛的应用前景.     

薄膜体声波谐振器(FBAR)谐振特性的模拟分析*

主要利用Mason等效电路模型对加入介质声损耗的薄膜体声波谐振器输入阻抗公式进行了推导,并利用该结果对薄膜体声波谐振器的谐振特性进行了模拟分析,分别就不同压电层材料和厚度以及不同电极材料和厚度对薄膜体声波谐振器谐振特性的影响进行了详细分析.结果表明,薄膜体声波谐振器谐振频率主要由压电材料和厚度决定但电极的影响也是很大的.在制作高频FBAR器件(5GHz以上)时,采用氮化铝作压电材料比用氧化锌作压电材料更合适.     

π网络法石英晶体谐振器测试技术研究

为了提高石英晶体谐振器参数的测量精度,对π网络法测量石英晶体谐振器参数的原理及π网络中分布参数对测量精度的影响进行了研究,在此基础上,设计并制作了π网络最大传输法石英晶体测量实验系统,实验系统在1～120MHz的测试范围内,石英晶体谐振器串联谐振频率的测试精度为±2ppm。测试方法符合国际标准,性能指标优于目前国内使用的阻抗计型测试仪器。     

—种超磁致伸缩材料和声表面波谐振器构成的复合磁传感器

设计了一种新的超磁致伸缩材料和声表面波谐振器构成的复合磁传感器．该传感器将超磁致伸缩材料在磁场中产生的应力应变传递到声表面波谐振器上，改变其谐振频率，通过对谐振频率的检测进行磁场测量．该传感器可以用于静态和动态磁场测量，并且可用作无源、无线磁传感器．主要分析了该结构用于静态磁场测量的原理，给出了实验结果．传感器谐振频率的变化对于静态磁场变化的灵敏度可达132Hz／Oe，谐振频率测量分辨率在1Hz时，磁场测量分辨率可达10^-7T数量级．     

不等基频硅微谐振式加速度计

分析了硅微谐振式加速度计的两个谐振器在谐振频率相交点附近区域产生耦合的原因,设计了一种新型的不等基频硅微谐振式加速度计,并对其进行了有限元仿真.该加速度计由质量块、放大惯性力的杠杆机构以及一对尺寸不同的谐振器组成.采用DDSOG工艺加工.利用ANSYS有限元软件进行仿真,结果表明加速度计上谐振器的谐振基频为124 67...     

基于基片集成波导和消逝模谐振腔的压力传感器设计

提出一种新型的基于基片集成波导和消失模谐振腔的压力传感结构。设计了圆形空腔,当施加外界压力时,圆形空腔发生形变从而使谐振腔谐振频率变化。采用共面波导线对谐振腔进行耦合馈电并将频率信号传输出来。通过读取传感器的回波损耗参数( S11)来表征压力与频率的关系。利用高频仿真软件HFSS对谐振腔进行了仿真设计和优化,设计尺寸为30 mm×30 mm×1.93 mm,与传统谐振腔相比体积明显减小。传感器基底为Rogers 4003C板材,采用PCB技术进行加工。搭建压力测试平台对传感器进行测试,结果表明在0~3 N的压力范围内变化100 MHz,绝对灵敏度为25 MHz/N。仿真和实测结果比较吻合,验证了所设计压力结构的有效性。     

A novel super compact half‐mode substrate‐integrated waveguide filter using modified complementary split‐ring resonator

A novel super compact filter based on half‐mode substrate‐integrated waveguide (HMSIW) technology loaded by the modified complementary split‐ring resonator (MCSRR) is proposed. The working principle of the proposed filter is based on the evanescent‐mode propagation technique. According to this technique, by loading the complementary split‐ring resonator (CSRR) on the metal surface of the substrate‐integrated waveguide (SIW) structure, an additional passband below the SIW cutoff frequency can be obtained. In order to miniaturize the physical size of the conventional CSRR, a new method is introduced. In the proposed MCSRR unit‐cell, the meander slots are carved inside all of the interior space of the ring. Accordingly, the length of the slot is increased which leads to an increase in the inductor and capacitor of the proposed structure without occupying the extra space. Therefore, the electrical size of the proposed MCSRR unit‐cell is reduced. Consequently, the resonance frequency of the proposed MCSRR unit‐cell is decreased compared to the conventional CSRR with the same sizes. Namely, the lower resonance frequencies can be achieved by using this technique without increasing the size of the unit‐cell. In order to confirm the miniaturization technique, two HMSIW filters loaded by the proposed MCSRR unit‐cell are designed, fabricated, and experimental verifications are provided. The results show that a miniaturization about 67% is achieved.     

A new design of substrate integrated waveguide diplexer using complementary split ring resonators

Design method for achieving the acceptable electrical responses (isolation and impedance matching) of a mixer in two‐close frequency with substrate integrated waveguide (SIW) is presented. SIW diplexer with complementary split ring resonators and an open stub is proposed. The SIW loaded diplexer is operated below the cutoff frequency of the equivalent waveguide for SIW; therefore, the size of the structure is compacted. Input and output ports matching are realized in the light of open microstrip stub. The diplexer with optimum dimensions is designed and fabricated. The measurement results verified the design procedures. They also show that operation frequencies are very close together, and also the proposed structure is suitable for long term evolution frequency bands.     

Ka波段硅基MEMS滤波器

滤波器是微波毫米波电路中的一个重要部件,本文介绍了采用基片集成波导技术和ICP深刻蚀微机械通孔阵列的硅基MEMS滤波器.设计制作了MEMS滤波器的核心部件谐振器,测试结果显示该谐振器无载Q值大于180,频率误差控制在2%以内.以此为基础采用理论计算与实验设计相结合的方法设计了一个Ka波段硅基MEMS滤波器.滤波器中心频率为30.3 GHz,插入损耗1.5 dB,相对带宽5%.芯片尺寸为10.0 mm×2.8 mm×0.4 mm.     

Compact bandpass filter based on SIW loaded by open complementary split‐ring resonators

A compact substrate integrated waveguide (SIW) with open complementary split‐ring resonators (OCSRRs) loaded on the waveguide surface is proposed. The OCSRRs can be interpreted in terms of electric dipoles and they are good candidates to behave as electric scatterers. By loading OCSRRs on the waveguide surface, a forward‐wave pass‐band propagating below the waveguide cutoff frequency is generated. The resonance frequency of the OCSRRs is approximately half of the resonance frequency of the complementary split ring resonator (CSRR). Therefore, the electrical size of this particle is larger than the CSRRs and the OCSRRs are more appropriate for the SIW miniaturization. A bandpass response with a sharp rejection frequency band is obtained by properly manipulating the structure of the elements. By changing the orientation of the OCSRRs, two types of unit cell are proposed. Moreover, by resizing the OCSRRs, resonance frequency can be easily moved and the bandwidth can be tuned by the coupling between two OCSRRs. Compared with some other reported bandpass filters (BPFs) with SIW technique, the presented BPF has great improvements on size reduction and selectivity. To verify the methodology, two filters with center frequency of 5.5 GHz are designed and measured. The measured results are in good agreement with the simulated ones. © 2016 Wiley Periodicals, Inc. Int J RF and Microwave CAE 26:674–682, 2016.     

K波段单片硅MEMS谐振器

介绍了基片集成波导技术和ICP深刻蚀微机械通孔阵列的硅基MEMS谐振器,通孔阵列和地平面形成不辐射介质波导,采用CPW电流探针与谐振腔进行信号耦合,在单层硅片上实现了平面电路与三维硅填充谐振腔的信号传输,得到低成本高性能可与平面电路集成的MEMS谐振器.谐振器工作于主模TE101模式,在片测试的Q值大于180,谐振频率21 GHz,与仿真结果吻合,芯片尺寸为4.7 mm×4.6 mm×0.5 mm.     

具有环境温度自补偿功能的微湿度传感器设计

设计了基于微加工技术的微湿度传感器,介绍了湿度传感器基于差分电路原理的温度补偿方法,实验证明：制作的湿度传感器具有半对数线性,环境温度为10-40℃时,湿度传感器输出变化小于±4％RH。     

A tunable third‐order bandpass filter based on combining dual‐mode square‐shaped substrate integrated waveguide resonator with triangular‐shaped resonator

A frequency reconfigurable third‐order bandpass filter based on two substrate integrated waveguide (SIW) cavities is presented in this article. The purposed filter consists of a dual‐mode square‐shaped resonator and a triangular‐shaped resonator. In the square‐shaped cavity, four lumped capacitors are loaded as electrical tuning elements in the area where the electric fields of diagonal TE₂₀₁ and TE₁₀₂ modes are strongest. And an another capacitor is loaded at the suitable region of the triangular‐shaped cavity. Square‐shaped cavity introduces two transmission zeros and the triangular‐shaped cavity can suppress out‐of‐band spurious modes. The method that combines the resonators with different shapes and multiple modes into an organic whole cannot only achieve synchronous tuning but also have complementary advantages and improve out‐of‐band rejection. To verify its practicality, a SIW reconfigurable bandpass filter is simulated when the capacitance value varies from 0 to 1.4 pF and measured at 0.7, 0.8, and 0.9 pF, respectively. Measured results show that when the center frequency is tuned from 3.42 to 3.52 GHz, the proposed filter exhibits good tuning performance with insertion loss of less than 2.5 dB and return loss of better than 10 dB, which is suitable for fifth‐generation communication system.     

Eighth‐mode SIW based compact high gain leaky‐wave antenna

In this article, a novel electrically small eighth‐mode substrate integrated waveguide (EMSIW) based leaky‐wave antenna (LWA) in planar environment is presented. The proposed antenna uses 1/8th mode SIW resonator which helps to improve compactness of the design while maintaining high gain and increased scanning angle. The proposed SIW cavity is excited by a 50 Ω microstrip line feeding to resonate at dominant TE₁₁₀ mode in X‐band. The dimensions of the resonators are adjusted to keep resonant mode at same frequency. The fabricated prototype is approximately 5λ₀ long. Measured results show that the proposed leaky‐wave antenna is able to operate within frequency range of 8‐10 GHz with beam scanning range of 51° and maximum gain of 13.31 dBi.