射频磁控溅射SnO2/MWCNTs 薄膜材料的气敏性能研究

采用射频反应磁控溅射方法制备掺杂多壁碳纳米管(MWCNTs)的snO2薄膜材料,并在此基础之上制作了N02气敏传感器,使用扫描电子显微镜(SEM)和X射线衍射仪(XRD)研究了SnO2/MWCNTs薄膜材料的表面形貌、物质组份材料特性,采用气敏元件测试系统来分析优越感的气敏效应,包括灵敏度、选择性、响应-恢复等特性,实验结果表明该气敏传感器对超低浓度(10ppb)NO2气体有很好的灵敏度,对干扰气体不敏感,提出了气敏机理解释实验现象.     

基于La0.9Sr0.1Ga0.8Mg0.2O3−δ固体电解质的电流型NO2传感器敏感特性的研究

采用丝网印刷技术制备了以La0.9Sr0.1Ga0.8Mg0.2O3-δ(LSGM,Sr、Mg双掺杂的LaGaO3)为固体电解质、NiO为敏感电极(SE)材料的电流型NO2传感器。用X射线衍射仪和扫描电镜对该传感器进行了理化分析;通过测量其在不同温度和不同NO2浓度气氛中的I-V曲线和时间响应曲线,研究了传感器的电流输出信号和NO2浓度的关系、时间响应特性以及稳定性。结果显示:在400℃～650℃测试温度范围内,传感器响应电流的变化幅值ΔI和NO2浓度之间存在较好的线性关系。传感器的稳定性测试结果表明:传感器样品的响应电流幅值出现了一定程度的下降,稳定性有待进一步提高。     

Ni掺杂SnO2花状微结构的制备及其气敏特性研究

采用水热法合成了纯SnO2和4 mol%Ni掺杂SnO2花状微结构.利用X射线衍射仪(XRD)、X射线能谱分析仪(EDS)和扫描电子显微镜(SEM)对其晶相、成分进行了表征,对制备的纯的和Ni掺杂SnO2传感器性能进行了测试.实验结果表明:Ni掺杂可以显著改善SnO2微结构的气敏特性.在最佳工作温度(280℃)条件下,4 mol%Ni掺杂SnO2传感器对100×10-6甲醇的响应可达到13.0,其响应是纯SnO2气体传感器的2.4倍.同时,其具有快速的响应/恢复时间(6 s/5 s),较低的检测极限(1×10-6),以及对甲醇的良好选择性.最后,对Ni掺杂SnO2气体传感器的气敏机理进行了分析讨论.     

MWCNT-WO3薄膜双声路SAW NO2气体传感器

以金属钨粉,H2O2,CH3OH和多壁碳纳米管(MWCNT)为原料,在双声路声表面波(SAW)器件的测量声路上制作了MWCNT-WO3薄膜,提出并实现了一种MWCNT-WO3薄膜双声路SAW NO2气体传感器。由于MWCNT和WO3对NO2气体都有敏感作用,而且碳纳米管的毛细作用、以及MWCNT的加入都增加了气体的接触面积,提高了NO2气体的吸附和敏感作用。同时,SAW器件的双声路结构消除了由于外界测量条件改变引起的测量误差,也进一步提高了传感器的可靠性和准确性。实验结果表明,该传感器对各种浓度的NO2气体具有好的响应特性,在31.2×10-9到20×10-6范围内,传感器的响应灵敏度为9.8kHz/1×10-6,比单一MWCNT或WO3薄膜对NO2气体具有更好的灵敏度和线性特性。     

臭氧处理对石墨烯基NO_2气体传感器气敏性影响

通过臭氧处理制备了一种简单、高效、可重复使用的单层石墨烯基NO2气体传感器,并研究了纯的和经过臭氧处理的NO2气体传感器的响应特性和恢复特性。实验表明:经臭氧处理75s后的石墨烯基气体传感器对10×10-6NO2响应度可达到30%以上,是未经臭氧处理的石墨烯基气体传感器的2.8倍,且其响应的最低体积分数达150×10-9,低于世界卫生组织(WHO)空气质量标准(200×10-9,1h平均值)。     

基于In2O3纳米纤维的高响应及快速恢复的室温NO2气体传感器研究

由于暴露于NO2气氛的高危害性,种类繁多的NO2气体传感器得以被开发.近年来,室温气体传感器引起了研究者的广泛关注,并且已经成为该领域一个流行的发展方向.然而,在低温下,传感器的响应值很低.此外,敏感材料表面的气体分子很难脱附,这会导致其恢复过程很慢.利用静电纺丝法和随后的煅烧工艺成功合成了 In2O3纳米纤维,通过X射线衍射、扫描电子显微镜和透射电子显微镜证实了其成分和微结构.气敏测试结果表明,基于制备的In2O3纳米纤维气体传感器在室温下对NO2表现出高响应.更重要的是,引入了一种有效的可见光照射法对所制备的传感器的恢复过程进行了加速.基于所有的实验数据,最后提出了一些合理的机理和解释.     

Pr6O11/SnO2复合材料的制备及对异丙醇气敏特性的研究

通过水热法和退火处理制备了不同Pr浓度(0%,1%,2%,4%)的Pr6O11/SnO2复合材料。采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和X射线光电子能谱仪(XPS)等方法对制备材料的物相结构、微观形貌和元素组成进行了表征,并制成旁热式气敏元件,对异丙醇气体进行气敏测试。实验结果表明,基于2%样品的Pr6O11/SnO2气体传感器的气敏性能最佳,在最佳工作温度200℃下对100×10^-6异丙醇气体响应达到16.2,是纯相SnO2传感器响应的2.3倍。最后,对基于Pr6O11/SnO2复合材料气体传感器的气敏机理进行了分析讨论。     

PN结型硅基TiO_2氧传感器的特性分析

采用薄膜技术研制了一种以硅PN结结构为基底材料的TiO2氧传感器,阐述了该传感器的工作原理、结构设计、工艺流程及其特性。给出了磁控溅射工艺制备银电极及TiO2薄膜的方法,利用X射线衍射(XRD)标定了TiO2薄膜的金红石相晶体结构,通过扫描电镜(SEM)分析了薄膜的表面形貌及晶粒结构,讨论了TiO2的氧敏感机理,测试薄膜的敏感特性及响应特性。实验结果表明:硅PN结基底TiO2氧传感器具有工作温度低、低功耗、体积小、线性化好的优点。     

PPB级锆基安培型NO气体传感器性能的研究

采用丝网印刷技术制备了以In2O3为敏感电极的锆基安培型三电极NO传感器用以探测10-9级NO气体。用X射线衍射仪（XRD）和扫描电镜（SEM）对该传感器进行了理化分析;通过测量其在不同温度和不同NO浓度的气氛中的伏安特性曲线和时间响应曲线,研究了传感器的电流输出信号和NO浓度的关系以及时间响应特性。实验表明：在350℃~500℃测试温度范围内,极化电压为-60 mV,NO浓度变化为0~900×10-9时传感器响应电流的变化值Δcurrent和NO浓度之间存在较好的线性关系并且传感器在400℃时响应值最大。在被测气体总流量为100 cm3/min时,传感器信号90%的响应和恢复时间分别为18 s和12 s。传感器信号不受CO2浓度变化的影响,传感器的响应信号在测试时间里具有较好短期稳定性,但长期稳定性有待进一步提高。本文还采用阻抗谱分析方法对传感器的响应机理进行了初步的探索。     

PdO修饰的SnO2纳米球的制备及其气敏特性研究

通过溶剂热法和退火处理制备了不同浓度(0 mol％,2 mol％,5 mol％,10 mol％)PdO修饰的SnO2纳米球.采用X射线衍射仪(XRD)、X射线能谱分析仪(EDS)和扫描电子显微镜(SEM)等测试手段对材料的物相、元素种类和形貌进行了表征,并制成气敏元件,对氢气(H2)进行气敏测试.实验结果表明:5 mol％PdO修饰的SnO2纳米球气体传感器最佳工作温度为175℃,其对100×10-6氢气灵敏度达到19,是纯的SnO2纳米球的灵敏度的3倍.最后,对PdO修饰氧化锡纳米球气体传感器气敏机理进行了分析讨论.     

基于PVN-GO复合膜的亚硝酸盐电化学传感器

通过简单可控的滴涂成膜和在线电聚合方法,将氧化石墨烯（GO）和聚香兰素（PVN）修饰到玻碳电极（GCE）表面,制备了PVN-GO复合膜修饰GCE,即亚硝酸盐（NO2-）电化学传感器.伏安研究表明：PVN-GO复合膜对NO2-的电化学氧化具有良好的催化作用.借助于扫描电镜技术和电化学交流阻抗谱（EIS）技术,对PVN-GO复合膜的表面形貌和电导性进行了表征.最优的检测条件下,NO2-的检测线性范围为2.0 ×10^-8～1.1 ×10^-2mol/L,检出限低至5.0 ×10^-9 mol/L（S/N =3）.对传感器的性能进行了考核,结果表明：该NO2-传感器具有良好的稳定性和重现性,灵敏度高,选择性好.将传感器应用于南湖水样中亚硝酸盐含量的测定,结果令人满意.     

MEMS微型NO2气体传感器的研究

采用MEMS技术制作了硅基微型NO2气体传感器,选用高分子金属酞菁聚合物酞菁铜作为敏感膜,从半导体理论出发解释了酞菁铜的敏感机理。阐述了该传感器的结构与工艺流程,并测试了传感器的气敏特性、温度特性、响应时间和恢复时间等敏感特性。实验结果验证了酞菁铜对NO2气体的敏感性,该传感器可以检测到10^-6量级的NO2气体,且响应时间快。     

镀有SiO2-WO3纳米复合薄膜LPFG气体传感特性研究

以钨粉和正硅酸乙酯为原料,采用溶胶-凝胶工艺和浸渍提拉镀膜方法,在玻璃衬底上制备出了具有气敏传感特性的SiO2-WO3纳米复合薄膜.采用原子力显微镜和X射线衍射仪表征了薄膜样品的表面形貌和物相结构.实验结果表明:掺杂SiO2使WO3薄膜中的颗粒尺寸减小,空隙率提高,比表面积增大.将SiO2-WO3复合薄膜镀于长周期光纤光栅上(LPFG),在室温条件下,将LPFG置于体积分数为2%的NO气体中,LPFG谐振峰红移了4.77 nm,损耗由-9.93 dB变为-8.53 dB,相应的气体传感灵敏度达到3%,元件响应时间10 s,恢复时间20 s.     

掺杂三乙醇胺铜配合物的PVA复合薄膜/K+交换玻璃光波导器件检测SO2气体

三乙醇胺酮配合物气敏性研究发现,该配合物与二氧化硫气体作用时透光率发生变化。以此结果为依据在K 交换玻璃光波导表面固定三乙醇胺铜配合物掺杂的聚乙烯醇复合薄膜,研制出了二氧化硫气体传感元件,并在光波导传感检测系统中测定其传感特性。实验结果表明,本传感元件对低浓度(500×10-9～15×10-6)二氧化硫气体有良好的线性快速可逆响应,低浓度氯化氢、硫化氢、二氧化氮、氨气以及挥发性有机物蒸汽对二氧化硫气体的检测没有干扰,具有灵敏度和选择性高、可逆性好,结构简单和易制作等特点。     

Photoelectrocatalytic regeneration of NADH at poly(4,4′-diaminodiphenyl sulfone)/nano TiO2 composite film modified indium tin oxide electrode

Herein we report the photoelectrocatalytic regeneration of NADH at poly(4,4′-diaminodiphenyl sulfone)/nano TiO₂ (PDDS/TiO₂) composite modified indium tin oxide (ITO) electrode. The PDDS film growth was confirmed through in situ electrochemical quartz crystal microbalance (EQCM) studies. The prepared PDDS/TiO₂ composite was characterized by scanning electron microscopy (SEM), atomic force microscopy (AFM) and X-ray diffraction (XRD) studies. SEM and AFM results confirmed that TiO₂ nanoparticles size is between 130 and 180 nm. XRD results showed that TiO₂ nanoparticles are crystalline and belong to anatase phase. Electrochemical impedance spectroscopy (EIS) and light induced EIS results substantiate a rapid electron transfer process at PDDS/TiO₂ composite surface. Cyclic voltammetry (CV) results demonstrated that composite film showed excellent response to the photoelectrocatalytic regeneration of NADH. The photoelectrocatalytic oxidation of NADH at composite film surface irradiated for 5 min (optimized irradiation time) produced a notable enhancement in anodic peak current and it was 18-fold higher than that of PDDS film and several folds higher than that of TiO₂ and bare ITO electrodes. Further, composite film showed higher sensitivity of 124.1 μA μM⁻¹ for NADH. From Square wave voltammetry (SWV) results, sensitivity of the irradiated composite film was obtained as 0.252 μA nM⁻¹ of NADH. The linear concentration range was between 23 and 39 nM NADH respectively. Further, the composite film exhibits good selectivity towards NADH and no significant interference effect was observed even when 200-fold excess of ascorbic acid (AA), dopamine (DA) and uric acid (UA) coexist in the same supporting electrolyte solution.     

A nitric oxide gas sensor based on Rayleigh surface acoustic wave resonator for room temperature operation

A Rayleigh surface acoustic wave (RSAW) resonator with polyaniline/tungsten oxide nanocomposite thin film is investigated as a gas sensor for detecting the presence of nitric oxide (NO) in air. The sensor developed in this work was sensitive to NO gas at room temperature. It is shown that the sensor had a frequency shift of 1.2 ppm when it was exposed to 138 ppb NO. The negative frequency response increased with NO concentration increasing. The response and recovery times of the NO sensor in this work were about 20-80 s. In addition, this RSAW sensor also exhibited reversibility and repeatability to the presence of NO gas. Especially, the presented sensor showed high selectivity with NO gas to separate from NO₂ and CO₂ gases.     

Single-walled carbon nanotube network/poly composite thin film for flow sensor

A fabrication method about single-walled carbon nanotube (SWCNT) network and polydimethylsiloxane (PDMS) based composite thin film is reported, which can be used as flow sensor cell. This composite thin film is immersed in deionized water and salt solution with different flow rate tests. The morphology of SWCNTs on the surface of the composite thin film is characterized by scanning electron microscopy, revealing the SWCNTs are coated by PDMS chains. The induced voltage generates along the direction of the flowing liquid and depends significantly on the ionic concentration and flow velocity. Since the SWCNTs are fixed into PDMS matrix, the I–V curves of the composite thin film before and after several flow velocity measurements are exactly coincident, and the repeating flow-induced voltage experiment shows the composite thin film has a reliable electric characteristic and wide potential of device application.     

Thin film polypyrrole/SWCNTs nanocomposites-based NH3 sensor operated at room temperature

A PPY/SWCNTs nanocomposite-based sensor with relatively high sensitivity and fast response–recovery was developed for detection of NH₃ gas at room temperature. The gas-sensitive composite thin film was prepared using chemical polymerization and spin-coating techniques, and characterized by Fourier transformed infrared spectra and field-emission scanning electron microscopy. The results reveal that the conjugated structure of the PPY layer was formed and the functionalized SWCNTs were well-embedded. The effects of film thickness, annealing temperature, and SWCNTs content on gas-sensing properties of the composite thin film were investigated to optimize the gas-sensing performance. The as-prepared thin film PPY/SWCNTs composite sensor with optimized process parameters had a response of 26–276% upon exposure to NH₃ gas concentration from 10 to 800 ppm, and their response and recovery times were around 22 and 38 s, respectively.     

声表面波NO_2传感器敏感膜研究进展

由于工业检测、环境监测、医学监测等领域的需求,高性能NO2传感器得到了广泛的研究。声表面波传感器技术的发展为研发高灵敏度、高稳定性、响应快速、小型化的NO2传感器提供了极大的潜能。总结了近30年来声表面波NO2传感器敏感膜的研究现状,并根据现有的研究和传感器的应用需求,深入探讨了声表面波NO2传感器敏感膜面临的挑战和发展趋势。