A virtual scanning electron microscope. 3. A semiempirical model of the SEM signal generation

Experiments are analyzed on scanning electron microscopes (SEMs) with test objects having a trapezoidal profile and large tilt angles of the side walls. Based on the analysis, a semiempirical generation model of images in a SEM, operating in the low-voltage mode and high-voltage mode during recording back-scattered and secondary slow electrons (SSEs), is proposed. The model is intended for application in a virtual SEM (VSEM).     

The scanning electron microscope

The scanning electron microscope combines the techniques of the cathode-ray tube and the conventional electron microscope?both considered indispensable to modern technology. The SEM, which presents a picture having a distinct three-dimensional appearance, is finding application in the examination of wood fibers in connection with paper manufacture, of surfaces undergoing ionic bombardment, and of corrosion. At the present time, one of the most pressing problems is to reduce its total cost.     

透射电镜与扫描电镜分析

文章简要介绍了透射电镜和扫描电镜两种当前主要的电子显微分析方法的应用,比较了它们的结构和工作原理,讨论了各自的应用范围以及发展方向,指出将两者有机结合可以得到比较全面的材料分析结果。     

全计算机控制扫描电镜

随着计算机技术的飞速发展,各行各业都离不开计算机技术。在扫描电镜行业,全计算机控制的扫描电镜,使扫描电镜的操作自动化、多功能化、简单化提高到了新的水平。近几年来,国外电镜厂家纷纷研制出全计算机控制扫描电镜。我们结合多年从事分析仪器的开发、制造和应用研究经验,开发成功国内第一台全计算机控制扫描电镜KYKY-3800,它使用先进的计算机技术,实现了传统扫描电镜由面板控制到全计算机控制的升级。整个电镜的操作系统使用全新的WINDOWS操作界面,用户只须按动鼠标,就可实现电镜镜筒和电气部分的所有控制,同时,可实现一些工作状态…     

Nonlinearity estimation of scanning on a scanning electron microscope

The nonlinearity of scanning on a scanning electron microscope (SEM) of nanorelief elements with known geometric profile shapes is estimated. The average pitch value of the relief test structure is measured, when the studied sample is shifted along the X-axis (scanning axis). As an index that characterizes the nonlinearity of the SEM scanning with the stated sample displacements, the relative mean-square deviation from the average pitch value of the test structure is selected. It is experimentally shown that, when the magnification is 20k, this value is 0.4%, which is in the tolerance error range.     

扫描电镜中的算法进展

在过去的二十年中,同透射电镜一样,在扫描电镜上也取得了许多硬件的进展,如浸没式物镜、减速模式和新型探测器技术.测试技术的进步包括硬件和软件两方面内涵.伴随硬件的进步,借助信息科学(包括人工智能(AI)和其他统计数学方法),人们在成像和光谱学方面也有了新的机遇.硬件与软件结合,可以实现更高精度、更高通量的表征,也使得如今...     

扫描电镜图片的彩色处理初步体会

众所周知 ,由于扫描电镜的照明光源是准单一波长的电滋波 ,故观察到的图像只能是黑白图像。再精美、漂亮的电镜图片 ,也不例外由黑白灰度构成 ,如果把它彩色化会更有利于区分不同结构 ,突出重点 ,达到通俗易解 ,并具备优美的艺术性。目前其它自然科学图片的彩色化已与国际水平接近 ,但ＳＥＭ彩色化国外近年才有所开展 ,而国内尚少见。随着计算机技术的发展 ,电子显微镜也逐步受控于计算机 ,且由于图像处理软件的功能日益强大 ,我们经过反复摸索 ,将一幅幅色彩丰富的扫描电镜图片 ,展现在电镜同仁们的面前。Ｐｈｏｔｏｓｈｏｐ系列软件是美国…     

扫描离子电导显微镜的研制与实现

在微纳米尺度上对活细胞高分辨率成像对生命科学研究具有重要的意义,其将有助于再现正在发生的生命过程、检测细胞对外界刺激做出的响应,甚至观测某些蛋白簇在细胞膜表面的运动。然而直到今天,仍然没有很好的实现上述目标。扫描离子电导显微镜（SICM）由于其真正的非接触、高分辨、无损独特成像方式,规避了扫描过程中探针与样品表面发生力的接触,得到越来越多的关注和广泛的应用。从系统的角度阐述自制SICM 系统的设计、硬件集成及跳跃模式扫描算法的实现,并通过对聚二甲基硅氧烷（PDMS）栅格成像以及与原子力显微镜（AFM）成像结果的对比,验证了系统功能的正确性和有效性;最后开展了生理环境下活体细胞的原位扫描成像实验,初步获取了活体神经细胞轴突结构的三维形貌图像。SICM 的成功搭建,将为人们深入了解生理条件下活体生物样品表面微观结构与功能机理等提供有效的研究方法与手段。     

A method for visualizing cytoskeletal structures by the scanning electron microscope

The cytoskeleton of intestinal epithelial cells was observed by scanning electron microscope (SEM). Tissues were treated with Triton X-100, stained to enhance conductivity, and freeze-fractured in liquid nitrogen. With these procedures, not only the localization of core filaments (actin-containing microfilaments) and intermediate filaments but also the relations between fibrous structures and cell organellae were clearly revealed. This conventional method is of great value in interpreting the three-dimensional organization of intracellular fine structures.     

原生质体扫描电镜观察研究的一种新方法

常规方法制备原生质体扫描电镜样品容易造成原生质体变形和破裂,影响其电镜观测结果。本文工作中,通过选用适宜的固定剂对原生质体进行快速因定,然后将原生质体悬浮液滴在经过硅烷化处理而引入了胺基的玻片上,直接在玻片上进行原生质体洗涤、脱水、置换、临界点干燥、喷镀处理,避免了在制样过程中进行离心操作,从而有效地解决了原生质体变形和破裂的问题。     

扫描电子显微镜在煤岩学上的应用

煤作为一种固体可燃有机岩，是我国长期依靠的重要能源。作者总结多年扫描电子显微测试分析工作，将扫描电镜在煤岩学上的应用大致归为以下几个方面。     

Computer-controlled resist exposure in the scanning electron microscope

In modern microelectronics, complicated structures with very small dimensions must be fabricated on active-device materials. This task has been traditionally accomplished by photolithographic techniques, but electron-beam exposure of resist materials has recently been explored [1]-[3]. Submicron electron devices have been fabricated in several laboratories, often featuring a flying-spot scanner to generate the pattern being exposed [4]-[7]. Paper tape drives have been used for repetitive patterns [8], and computer control of the electron beam has been reported also [1], [9]. The electron resist that has shown the highest resolution to date appears to be poly-(methyl methacrylate) (PMM). We have used this material in a resist form for microelectronic device fabrication, and in bulk form to determine energy dissipation profiles. The exposure is performed with a computer-controlled scanning electron microscope (CCSEM). In this paper, we describe the electron beam system briefly, discuss the processes involved in resist exposure and development, describe our exposure procedures using the CCSEM, and show results of fabricated devices and energy dissipation studies.     

Ni-SiC-Graphite复合材料的扫描电镜研究

由于SiC具有高强度、高模量、高硬度以及优良的导热、耐磨损和耐腐蚀性能，所以常用来增强金属制成复合材料。本文采用粉末冶金法制作了由粗晶SiC(粒径约60μm)和细晶SiC(粒径约1μm)分别增强Ni基体的复合材料，并通过SEM(scanning electron microscope)对SiC(粗晶)-Ni-G(Graphite)、SiC(细晶)-     

大豆根瘤的扫描电镜观察

大豆与大豆根瘤处于一个共生的体系,大豆为大豆根瘤的生长提供适宜的微观环境,而大豆根瘤则为大豆植株的发育提供必要的养分.豆科植物的生物固氮能力是通过根瘤菌的侵染完成的.大豆根被根瘤菌侵染后,形成共生体根瘤,根瘤菌通过生物固氮作用将空气中的氮转化为氨供给大豆利用.本实验以东农46为研究对象,利用扫描电子显微镜技术,对大豆发育过程中根瘤、根瘤菌和淀粉粒的结构特征、形态变化进行超微结构观察.结果表明,大豆发育过程中根瘤的发育可分为三个时期,即:根瘤菌的侵入和感染;根瘤的形成和发育;根瘤及根瘤菌退化.各时期的根瘤菌经历了形态及数量发育的变化,由初期数量较少、形态不规则,到数量大幅度增加充满侵染细胞,最终随着侵染细胞开始衰亡其内部的根瘤菌逐渐减少至全部消失.     

扫描电子显微镜在植物中的应用研究进展

扫描电子显微镜(SEM)作为一种行之有效的科研分析工具,可对多种植物材料的表面形貌进行观察研究,具有较广的应用范围.本文论述了扫描电子显微镜样品的制备以及在植物花器官、种子表皮、种子形态、叶片表皮、内含物、病原体以及在植物细胞水平的研究进展,并对今后扫描电子显微镜的应用前景进行了展望,以期为利用SEM从事植物研究的科研...     

扫描电镜在砂岩孔隙铸钵上的应用

砂岩孔隙铸体是将地下含油水的岩石经洗油烘干，放到铸体仪中将树脂通过真空灌注，高温、高压固化，再酸化去除岩石颗粒，只保留孔隙骨架，表面再利用镀模机处理，利用扫描电镜进行观察和鉴定，获得砂岩孔隙特征的微观形貌信息。     

一种扫描电镜下纳米操纵台的设计

本研究组设计了一种在场发射扫描电镜下进行纳米操控的装置——纳米操纵台(图1)。利用该纳米操纵台可实现原位下对纳米点、线和膜材料空间三维上的操作与观察。