Process integration and device performance of a submicrometerBiCMOS with 16-GHz ft double poly-bipolar devices

Submicrometer-channel CMOS devices have been integrated with self-aligned double-polysilicon bipolar devices showing a cutoff frequency of 16 GHz. n-p-n bipolar transistors and p-channel MOSFETs were built in an n-type epitaxial layer on an n⁺ buried layer, and n-channel MOSFETs were built in a p-well on a p⁺ buried layer. Deep trenches with depths of 4 μm and widths of 1 μm isolated the n-p-n bipolar transistors and the n- and p-channel MOSFETs from each other. CMOS, BiCMOS, and bipolar ECL circuits were characterized and compared with each other in terms of circuit speed as a function of loading capacitance, power dissipation, and power supply voltage. The BiCMOS circuit showed a significant speed degradation and became slower than the CMOS circuit when the power supply voltage was reduced below 3.3 V. The bipolar ECL circuit maintained the highest speed, with a propagation delay time of 65 ps for C_L=0 pF and 300 ps for C_L=1.0 pF with a power dissipation of 8 mW per gate. The circuit speed improvements in the CMOS circuits as the effective channel lengths of the MOS devices were scaled from 0.8 to 0.4 μm were maintained at almost the same ratio     

TFSOI complementary BiCMOS technology for low power applications

A Thin-Film-Silicon-On-Insulator Complementary BiCMOS (TFSOI CBiCMOS) technology has been developed for low power applications. The technology is based on a manufacturable, near-fully-depleted 0.5 μm CMOS process with the lateral bipolar devices integrated as drop-in modules for CBiCMOS circuits. The near-fully-depleted CMOS device design minimizes sensitivity to silicon thickness variation while maintaining the benefits of SOI devices. The bipolar device structure emphasizes use of a silicided polysilicon base contact to reduce base resistance and minimize current crowding effects. A split-oxide spacer integration allows independent control of the bipolar base width and emitter contact spacing. Excellent low power performance is demonstrated through low current ECL and low voltage, low power CMOS circuits. A 70 ps ECL gate delay at a gate current of 20 μA is achieved. This represents a factor of 3 improvement over bulk trench-isolated double-polysilicon self-aligned bipolar circuits. Similarly, CMOS gate delay shows a factor of 2 improvement over bulk silicon at a power supply voltage of 3.3 V. Finally, a 460 μW 1 GHz prescaler circuit is demonstrated using this technology     

A high performance super self-aligned 3 V/5 V BiCMOS technologywith extremely low parasitics for low-power mixed-signal applications

A high performance BiCMOS technology, BEST2 (Bipolar Enhanced super Self-aligned Technology) designed for supporting low-power multiGHz mixed-signal applications is presented. Process modules to produce low parasitic device structures are described. The developed BiCMOS process implemented with 1 μm design rules (0.5 μm as one nesting tolerance) has achieved f_l and f_max for npn bipolar (A_e=1×2 μm²) of 23 GHz and 24 GHz at V_ce=3 V, respectively, with BV_ceo⩾5.5 volts, and βV_A product of 2400. Typical measured ECL gate delay is 48 ps/37 ps per stage (A_e=1×2 μm² ; 500 mV swing) at 0.6 mA/2.1 mA switching currents, and CMOS gate delay (gate oxide=125 Å, L_eff=0.6 μm; V_th,nch =0.45 V; V_th,pch=-0.45 V) 70 ps/stage. A BiCMOS phase-locked-loop (emitter width=1 μm; gate L_eff=0.7 μm) has achieved 6 GHz operation at 2 V power supply with total power consumption of 60 mW     

Nonoverlapping super self-aligned device structure forhigh-performance VLSI

The nonoverlapping super self-aligned structure (NOVA) is reported. Because of its nonoverlapping nature, this structure can be applied equally well to bipolar, CMOS, or BiCMOS processes. This structure effectively minimizes parasitic capacitance and resistance for both the MOS and bipolar devices. CMOS and bipolar devices are integrated into a high-performance BiCMOS technology. CMOS and emitter-coupled logic (ECL) ring oscillators with 1.5-μm lithography are reported to have delays of 128 and 87 ps/stage, respectively     

BiCMOS circuit technology for a 704 MHz ATM switch LSI

This paper describes BiCMOS level-converter circuits and clock circuits that increase VLSI interface speed to 1 GHz, and their application to a 704 MHz ATM switch LSI. An LSI with a high speed interface requires a BiCMOS multiplexer/demultiplexer (MUX/DEMUX) on the chip to reduce internal operation speed. A MUX/DEMUX with minimum power dissipation and a minimum pattern area can be designed using the proposed converter circuits. The converter circuits, using weakly cross-coupled CMOS inverters and a voltage regulator circuit, can convert signal levels between LCML and positive CMOS at a speed of 500 MHz. Data synchronization in the high speed region is ensured by a new BiCMOS clock circuit consisting of a pure ECL path and retiming circuits. The clock circuit reduces the chip latency fluctuation of the clock signal and absorbs the delay difference between the ECL clock and data through the CMOS circuits. A rerouting-Banyan (RRB) ATM switch, employing both the proposed converter circuits and the clock circuits, has been fabricated with 0.5 μm BiCMOS technology. The LSI, composed of CMOS 15 K gate logic, 8 Kb RAM, I Kb FIFO and ECL 1.6 K gate logic, achieved an operation speed of 704-MHz with power dissipation of 7.2 W     

BiCMOS technology with 60 GHz n-p-n bipolar and 0.25 μm CMOS

A BiCMOS technology has been developed that integrates a high-performance self-aligned double-polysilicon bipolar device into an advanced 0.25 μm CMOS process. The process sequence has been tailored to allow maximum flexibility in the bipolar device design without perturbation of the CMOS device parameters. Thus, n-p-n cutoff frequencies as high as 60 GHz were achieved while maintaining a CMOS ring oscillator delay per stage of about 54 ps at 2.5 V supply comparable to the performance in the CMOs-only technology. BiCMOS and BiNMOS circuits were also fabricated. BiNMOS circuits exhibited ≈45% delay improvement compared to CMOS-only circuits under high load conditions at 2.5 V     

High speed submicron BiCMOS memory

This paper reviews device and circuit technologies for submicron BiCMOS memories, especially for high speed and large capacity SRAM's with 0.8 μm, 0.55 μm and 0.4 μm design rules. First, poly-silicon emitter structure and triple-well structure are described as key submicron BiCMOS device technologies for achieving high transistor performance and minimized process complexity, as well as high reliability. Next, submicron CMOS and BiCMOS inverter gate delays are compared. In addition, memory circuit techniques including BinMOS logic gates and bipolar sense amplifiers are discussed, respectively for ECL I/O asynchronous, TTL I/O asynchronous and super high speed synchronous submicron BiCMOS SRAM's. Future prospects for submicron BiCMOS memories are also forecasted     

Novel high speed circuit structures for BiCMOS environment

Novel high speed BiCMOS circuits including ECL/CMOS, CMOS/ECL interface circuits and a BiCMOS sense amplifier are presented. A generic 0.8 μm complementary BiCMOS technology has been used in the circuit design. Circuit simulations show superior performance of the novel circuits over conventional designs. The time delays of the proposed ECL/CMOS interface circuits, the dynamic reference voltage CMOS/ECL interface circuit and the BiCMOS sense amplifier are improved by 20, 250, and 60%, respectively. All the proposed circuits maintain speed advantage until the supply voltage is scaled down to 3.3 V     

High-performance dual-gate CMOS utilizing a novel self-alignedpocket implantation (SPI) technology

A self-aligned pocket implantation (SPI) technology is discussed. This technology features a localized pocket implantation using the gate and drain electrodes (TiSi₂ film) as well as self-aligned masks. The gate polysilicon is patterned by KrF excimer laser lithography. The measured minimum gate length L_g (the physical gate length) is 0.21 μm for both N- and P-MOSFETs. A newly developed photoresist was used to achieve less than quarter-micrometer patterns. This process provides high punchthrough resistance and high current driving capability even in such a short channel length. The subthreshold slope of the 0.21-μm gate length is 76 mV/dec for N-MOSFETs and 83 mV/dec for P-MOSFETs. The SPI technology maintains a low impurity concentration in the well (less than 5×10 ¹⁶ cm^-3). The drain junction capacitance is decreased by 36% for N-MOSFETs and by 41% for P-MOSFETs, compared to conventional LDD devices, which results in high-speed circuit operation. The delay time per stage of a 51-stage dual-gate CMOS ring oscillator is 50 ps with a supply voltage of 3.3 V and a gate length of 0.36 μm, and 40 ps with a supply voltage of 2.5 V and a gate length of 0.21 μm     

High-speed dynamic reference voltage (DRV) CMOS/ECL interfacecircuits

This paper introduces a circuit technique to increase the operating speed of CMOS/ECL interface circuits. The technique is based on shifting the reference voltage dynamically to follow the ECL input signal. HSPICE simulation results based on a 0.8-μm BiCMOS technology show the advantages of DRV CMOS/ECL in terms of speed and noise margins. An analytical delay model which fits HSPICE simulation results is addressed. The error between the model and the circuit simulator is within 4%     

Capacitor-free level-sensitive active pull-down ECL circuit withself-adjusting driving capability

This paper introduces a new self-adjusting active pull-down scheme for ECL circuit. The circuit offers self-terminating dynamic pull-down action by sensing the output level rather than using traditional load-dependent capacitive coupling. No capacitor or large resistor is required, and therefore it adds no process complexity and no area penalty. Implemented in an ECL gate array in a 1.2 μm double-poly self aligned bipolar technology, the circuit offers 300-ps delay at a power consumption of 1 mW/gate under FO=1 and C_L=0.55 pF loading condition. This is a 4.4 times speed improvement over the conventional ECL circuit. Furthermore, the circuit consumes only 0.25 mW for a gate speed of 700 ps/gate, which is a 1/7.8 power reduction compared with the conventional ECL circuit. The circuit requires a regulated reference voltage, which is also studied     

A 23-ps/2.1-mW ECL gate with an AC-coupled active pull-down emitter-follower stage

An emitter-coupled logic (ECL) gate with an AC-coupled active pull-down emitter-follower stage that gives high speed at lower power is described. Significant reduction of the speed-power product can be achieved over the conventional ECL gate. The speed/power advantages of the circuit have been demonstrated in a double-poly, trench-isolated, self-aligned bipolar process with 0.8- mu m (mask) emitter width. Unloaded gate delays of 21 ps at 4.1 mW/gate, 23 ps at 2.1 mW/gate, and 35 ps at 1.1 mW/gate have been measured.<>     

A 6-ns ECL 100 K I/O and 8-ns 3.3-V TTL I/O 4-Mb BiCMOS SRAM

The authors report a 4 M word×1 b/1 M word×4 b BiCMOS SRAM that can be metal mask programmed as either a 6-ns access time for an ECL 100 K I/O interface to an 8-ns access time for a 3.3-V TTL I/O interface. Die size is 18.87 mm×8.77 mm. Memory cell size is 5.8 μm×3.2 μm. In order to achieve such high-speed address access times the following technologies were developed: (1) a BiCMOS level converter that directly connects the ECL signal level to the CMOS level; (2) a high-speed BiCMOS circuit with low threshold voltage nMOSFETs; (3) a design method for determining the optimum number of decoder gate stages and the optimum size of gate transistors; (4) high-speed bipolar sensing circuits used at 3.3-V supply voltage; and (5) 0.55-μm BiCMOS process technology with a triple-well structure     

Overview of complementary GaAs technology for high-speed VLSIcircuits

A self-aligned complementary GaAs (CGaAs) technology (developed at Motorola) for low-power, portable, digital and mixed-mode circuits is being extended to address high-speed VLSI circuit applications. The process supports full complementary, unipolar (pseudo-DCFL), source-coupled, and dynamic (domino) logic families. Though this technology is not yet mature, it is years ahead of CMOS in terms of fast gate delays at low power supply voltages. Complementary circuits operating at 0.9 V have demonstrated power-delay products of 0.01 μW/MHz/gate. Propagation delays of unipolar circuits are as low as 25 ps. Logic families can be mixed on a chip to trade power for delay. CGaAs is being evaluated for VLSI applications through the design of a PowerPC-architecture microprocessor     

A 64-bit carry look ahead adder using pass transistor BiCMOS gates

This paper describes a 64-bit two-stage carry look ahead adder utilizing pass transistor BiCMOS gate. The new pass transistor BiCMOS gate has a smaller intrinsic delay time than conventional BiCMOS gates. Furthermore, this gate has a rail-to-rail output voltage. Therefore the next gate does not have a large degradation of its driving capability. The exclusive OR and NOR gate using the pass transistor BiCMOS gate shows a speed advantage over CMOS gates under a wide variance in load capacitance. The pass transistor BiCMOS gates were applied to full adders, carry path circuits, and carry select circuits. In consequence, a 64-bit two-stage carry look ahead adder was fabricated using a 0.5 μm BiCMOS process with single polysilicon and double-metal interconnections. A critical path delay time of 3.5 ns was observed at a supply voltage of 3.3 V. This is 25% better than the result of the adder circuit using CMOS technology. Even at the supply voltage of 2.0 V, this adder is faster than the CMOS adder     

High-performance BiCMOS 100 K-gate array

A BiCMOS gate array in 0.8-μm technology with CMOS intrinsic gate delays of 100 ps plus 60 ps/fan-out and BiCMOS intrinsic delays of 200 ps with a 17-ps/fan-out drive factor is discussed. A compact base cell (750 μm²/gate) has been designed with full bipolar drive capability for the efficient layout of both primitive gates and large-arrayed macros, such as register files and multipliers. A 106 K-gate array has been built on a 1.14-cm² chip with ECL I/O capability. The place and route in three levels of metal provide array utilization greater than 90%. The gate array was used to implement a 74 K-gate filter design with testability features such as JTAG and two-phase scan     

3.21 ps ECL gate using InP/InGaAs DHBT technology

A new circuit configuration for an emitter-coupled logic (ECL) gate that can reduce propagation delay time has been demonstrated. Nineteen-stage ring oscillators were fabricated using InP/InGaAs double-heterojunction bipolar transistors (DHBTs) with cutoff frequency f/sub T/ and maximum oscillation frequency f/sub max/ of about 232 and 360 GHz, respectively, to evaluate the speed performance of the proposed ECL gate. The minimum propagation delay is 3.21 ps/gate. The proposed ECL gate is about 8% faster than the conventional ECL gate.     

0.25 μm gate length CMOS devices for cryogenic operation

Under cryogenic operation, a low V_th realizes a high speed performance at a greatly reduced power-supply voltage, which is the most attractive feature of Cryo-CMOS. It is very important in sub-0.25 μm Cryo-CMOS devices to reconcile the miniaturization and the low V_th. Double implanted MOSFET's technology was employed to achieve the low V_th while maintaining the short channel effects immunity. We have investigated both the DC characteristics and the speed performance of 0.25 μm gate length CMOS devices for cryogenic operation. The measured transconductances in the saturation region were 600 mS/mm for 0.2 μm gate length n-MOSFET's and 310 mS/mm for 0.25 μm gate length p-MOSFET's at 80 K. The propagation delay time in the fastest CMOS ring oscillator was 22.8 ps at V_dd=1 V at 80 K. The high speed performance at extremely low power-supply voltages has been experimentally demonstrated. The speed analysis suggests that the sub-l0 ps switching of Cryo-CMOS devices will be realized by reducing the parasitic capacitances and through further miniaturization down to 0.1 μm gate length or below     

A low-resistance self-aligned T-shaped gate for high-performancesub-0.1-μm CMOS

This paper describes the high performance of T-shaped-gate CMOS devices with effective channel lengths in the sub-0.1-μm region. These devices were fabricated by using selective W growth, which allows low-resistance gates smaller than 0.1 μm to be made without requiring fine lithography alignment. We used counter-doping to scale down the threshold voltage while still maintaining acceptable short-channel effects. This approach allowed us to make ring oscillators with a gate-delay time as short as 21 ps at 2 V with a gate length of 0.15 μm. Furthermore, we experimentally show that the high circuit speed of a sub-0.1-μm gate length CMOS device is mainly due to the PMOS device performance, especially in terms of its drivability     

高速全耗尽CMOS/SOI2000门门海阵列

本文对全耗尽CMOS/SOI 2000门门海进行了研究,阵列采用宏单元结构,每个宏单元包括2×8个基本单元和8条布线通道,其尺寸为:92μm×86μm.2000门门海阵列采用0.8μm全耗尽工艺,实现了101级环形振荡器和4~128级分频器电路,在工作电压为5V时,0.8μm全耗尽CMOS/SOI 101级环振的单级延迟为45ps.