单悬臂梁结构的GaAs基MOEMS可调谐RCE光探测器

成功研制了GaAs基MOEMS可调谐RCE光探测器.该器件采用单悬臂梁结构,在6V的小调谐电压下,获得了31nm的连续调谐范围.在调谐过程中,峰值量子效率最大为36.9%,最小为30.8%;FWHM最大为20nm,最小为14nm.在0V偏压下器件的暗电流密度为7.46A/m2.     

具有90nm调谐范围的1.3μm Si基MOEMS可调谐光滤波器

利用表面微机械技术,成功制作了1.3μm Si基MOEMS可调谐光滤波器.原型器件在50V的调谐电压下,调谐范围为90nm.该技术可以用于制作1.3μm Si基可调谐光探测器.     

A novel resonant cavity enhanced photodetector with flat-top and steep-edge response

A novel resonant cavity enhanced (RCE) photodetector with flat-top and steep-edge response is presented. The response is obtained by designing a gradient-thickness P area in the absorption cavity. Simulation results show that the maximum and minimum values of the quantum efficiency in bandpass are 85.242% and 87.564% respectively, the ripple is about 3.6%, and 0.5 dB, 3 dB and 20 dB bandwidths are 0.3 nm, 0.4 nm and 1.2 nm, respectively. The mesa area is 10 μm × 10 μm and the frequency response bandwidth is 87 GHz. Compared with similar photodetectors, this photodetector has high quantum efficiency, narrow spectral response linewidth, good flat-top and steep-edge response and ideal high-speed characteristics.     

Modeling and performance of wafer-fused resonant-cavity enhancedphotodetectors

We discuss wavelength tuning and its corresponding quantum efficiency modulated by the standing wave effects in a resonant-cavity enhanced (RCE) photodetector. Specific design conditions are made for a thin In_0.53Ga_0.47As (900 Å) photodetector wafer-fused to a GaAs-AlAs quarter wavelength stacks (QWS). Analytic expressions for the calculation of resonant wavelength and standing wave effects are derived, using a hard mirror concept of fixed phase upon reflection, and are found to agree reasonably well with the exact numerical approach, using a transmission matrix method. We then experimentally demonstrate that wavelength tuning as large as 140 nm and its corresponding quantum efficiency modulated by the standing wave effects are clearly observed in our wafer-fused photodetectors, consistent with the predictions. The external quantum efficiency at 1.3 μm wavelength and absorption bandwidth for the wafer-fused RCE photodiodes integrated with an amorphous Si-SiO₂ dielectric mirror are measured to be 94% and 14 nm, respectively. This technique allows the formation of multichannel photodetectors with high quantum efficiency and small crosstalk, suitable for application to wavelength demultiplexing and high-speed, high-sensitivity optical communication systems     

Record tuning range of InP-based multiple air-gap MOEMS filter

Continuously tunable Fabry-Perot filters based on multiple InP/air-gap MOEMS technology are presented. Record wavelength tuning >112 nm with an actuation voltage of only 5 V is demonstrated. The FWHM remains constant over the entire tuning range. The stopband covers both the second and third optical telecommunication window (1250-1800 nm).     

集成液晶可调谐RCE光电探测器的实验研究

实现了波长调谐范围为 8nm的集成液晶可调谐谐振腔增强型 (RCE)光电探测器 ,并且对相应的实验结果进行讨论。这种器件可用在波分复用 (WDM)光网络中     

GaAs/AlGaAs谐振腔增强型光探测器的实现及其特性研究

本文报导ＧａＡｓ／ＡｌＡｇＡｓ谐振腔增强型（ＲＣＥ）光探测器的实验研究结果,并对器件的特性进行了理论分析。通过实验验证了ＲＣＥ器件谐振腔两个镜面的反射率随着波长的变化以及器件分层结构折射率差二者对器件性能的影响,并证明了分析理论的正确性。器件在８１０ｎｍ附近的响应峰的３ｄＢ谱线宽度约为２０ｎｍ,最大量子效率约为１１％。该光探测器具有较好的波长选择特性,将会成为波分复用（ＷＤＭ）光纤通信系统中比较理     

Long-wavelength resonant vertical-cavity LED/photodetector with a 75-nm tuning range

A design for a highly tunable long-wavelength LED/photodetector has been investigated. The device consists of a GaAs-based distributed Bragg reflector (DBR) that is wafer-bonded to InP-based active layers, with a surface-micromachined tunable top DBR mirror to produce the wavelength shift. A 1.5-/spl mu/m device has been fabricated with a continuous tuning range of 75 nm. An extinction ratio of greater than 20 dB existed across the entire tuning range.     

可调谐外腔RCE光探测器的实验研究

实现了波长调谐范围为 10 nm左右的可调谐分立外腔半导体光探测器。这一方案对于可调谐探测来说简捷易行 ,性能良好     

SiGe共振腔增强型探测器的制备

利用SOI材料的埋层二氧化硅的自停止特性,成功制作了具有高反射底镜的共振腔增强型SiGe探测器.底镜沉积于EPW腐蚀液腐蚀形成的背孔内,在1.2～1.5μm范围内,反射率高达99%.探测器的共振峰在1.344μm,光响应为1.2mA/W.与普通结构的探测器相比,文中所报道的探测器光响应有8倍的增强.     

Tunable Photodetector Based on GaAs/InP Wafer Bonding

We demonstrate a tunable long wavelength vertical-cavity photodetector which is fabricated by bonding a GaAs-based tunable filter with an InP-based absorption structure. The wavelength tuning range of 10.5 nm was achieved via thermal-optic effect. The external quantum efficiency of about 22%, the spectral linewidth as narrow as 0.6 nm, and the 3-dB bandwidth of 12 GHz were obtained in the device.     

可调谐微腔发光二极管微光机电系统悬臂梁的特性

采用微机械表面加工技术,成功设计并研制出具有GaAs基微光机电系统(MOEMS)悬臂梁结构的可调谐微腔发光二极管。对其工作特性进行了分析,测量得到悬臂梁载荷-位移关系曲线,并对微光机电系统悬臂梁可调谐微腔发光二极管进行调谐光谱测量。实验结果表明,在直流电流40mA,调谐电压范围4～22V时,波长从974.5nm蓝移至956.9nm,室温下波长调谐最大达到17.6nm。在实验基础上,采用有限元方法对具有分布布拉格反射镜(DBR)结构的悬臂梁动力学特性进行了研究,模拟结果与实验结果吻合较好。当悬臂梁长度为400μm时,最大位移达到411nm,最大调谐电压达到24V。     

新型长波长可调谐光电探测器

通过将GaAs基滤波器与InP基探测器键合在一起，实现了一种新型可调谐的长波长光电探测器。通过热调谐，在13V的偏置电压下，峰值波长从1540．1nm红移到1550．6nm，实现了10．5nm的调谐范围，响应线宽维持在0．6nm，量子效率也保持在22％左右。从理论上分析了器件的调谐原理，利用传输矩阵法模拟了滤波器的透射光谱，并通过实验加以了验证。     

Design of ultra-fast dual-wavelength resonant-cavity-enhancedSchottky photodetectors

A systematic optimization procedure for the design of RCE Schottky photodetectors to achieve maximum quantum efficiency and high speed operation at 1.3 and 1.55 μm wavelengths is presented. The quantum efficiency formulation used includes the structural parameters of the photodetector and takes into account the wavelength dependence of the top and bottom mirrors reflectivities. The results have shown that the value of the thickness of the antireflection coating layer has a major influence in selecting the width of the photodetector to simultaneously achieve maximum quantum efficiency and high bandwidth at the two wavelengths. Simulated values of 270 and 40 GHz were obtained, respectively, for the 3-dB carrier-transit time-limited bandwidth and bandwidth-efficiency product for an RCE Schottky photodetector with a 0.02-μm gold layer     

基于低温缓冲层的单片集成长波长可调谐光探测器

实现了一种单片集成的长波长可调谐光探测器.通过外延实验,摸索出低温缓冲层的最佳生长条件,成功地在GaAs衬底上生长出晶格失配度约4%的高质量的InP基材料.基于此低温缓冲层,在GaAs衬底上首先生长GaAs/AlAs材料的F-P腔滤波器,然后异质外延InP-In0.53 Ga0.47 As-InP材料的PIN结构.制作出的器件通过热调谐,峰值波长从1533.1nm红移到1543.1nm,实现了10.0nm的调谐范围,同时响应线宽维持在0.8nm以下,量子效率保持在23%以上,响应速率达到6.2GHz.     

基于双吸收结构的谐振腔增强型光探测器

为了实现对传统谐振腔增强型（RCE）光探测器的优化,提出了一种具有双吸收结构的RCE光探测器。首先从理论上分析了它的量子效率和高速响应特性,然后将其与传统的RCE光探测器进行了比较。结果表明,双吸收结构RCE光探测器在保持高速响应特性的基础上,其量子效率较传统RCE光探测器得到了进一步提高。实验上成功制备了双吸收结构的...     

Optimization procedure for the design of ultrafast, highlyefficient and selective resonant cavity enhanced Schottky photodiodes

An expression of quantum efficiency for high-speed resonant-cavity-enhanced (RCE) Schottky photodiodes is derived. This expression includes the structural and the physical parameters of the photodetector and takes into account the parameters of the metallic Schottky mirror and the wavelength dependence of the reflectivities. The metal layer thickness sets the maximum achievable quantum efficiency as it decays exponentially with it. The antireflection coating layer, on the other hand, determines the photodetector selectivity and the optimum absorption layer thickness that maximizes its quantum efficiency. An algorithm for the design and optimization of RCE Schottky photodetectors has been developed. Theoretical values of 647 GHz and 129 GHz were obtained, respectively, for the carrier-transit time limited 3-dB bandwidth and bandwidth-efficiency product for an RCE Schottky photodetector with a 0.02 μm gold layer     

谐振腔增强型光探测器的高速响应性能研究

高速长波长光探测器是高速光纤通信系统和网络的关键器件，它要求光探测器具有宽的频率响应带宽和高量子效率。常用的PIN光探测器由于量子效率和高速性能均受到吸收层厚度的牵制，使得二者相互制约，成为一对矛盾。谐振腔增强型(RCE)光探测器为这一矛盾的解决提供了有效的方案。基于谐振腔增强型光探测器的实际设计和制作模型，分析了器件吸收层中的光场分布，并将其运用于载流子的连续方程，从理论上详细地分析了器件的高速响应特性，给出了计算结果。针对研制的高速长波长谐振腔增强型光探测器，进行了理论分析和实际器件测试的结果比较，得到了比较一致的结果。     

Monothically Integrated Long-Wavelength Tunable Photodetector

This paper demonstrated a tunable long-wavelength photodetector by using the heteroepitaxy growth of InP-In_0.53Ga_0.47As-InP p-i-n structure on a GaAs-based GaAs/AlAs Fabry-Perot filter structure. High-quality heteroepitaxy was realized by employing a thin low-temperature buffer layer. A wavelength tuning range of 10.0 nm, an external quantum efficiency of about 23%, a spectral linewidth of 0.8 nm, and a 3-dB bandwidth of 6.2 GHz were simultaneously obtained in the device.     

Widely tunable chaotic fiber laser for WDM-PON detection

A widely tunable high precision chaotic fiber laser is proposed and experimentally demonstrated. A tunable fiber Bragg grating （TFBG） filter is used as a tuning element to determine the turning range from 1533 nm to 1558 nm with a linewidth of 0.5 nm at any wavelength. The wide tuning range is capable of supporting 32 wavelength-division mul- tiplexing （WDM） channels with 100 GHz channel spacing. All single wavelengths are found to be chaotic with 10 GHz bandwidth. The full width at half maximum （FWHM） of the chaotic correlation curve of the different wave- lengths is on a picosecond time scale, thereby offering millimeter spatial resolution in WDM detection.