计量型激光椭偏仪初始入射角校准方法的研究

为保证计量型激光椭偏仪测量结果的准确性,研究了一种初始入射角校准方法,通过线性位移台带动CCD相机进行一维运动,其运动轴作为空间线性辅助参考量,实现了椭偏仪的入射激光光轴与自准直仪光轴的90°校准。结果表明:采用该方法校准计量型激光椭偏仪的初始入射角,光轴俯仰角偏差＜0.05°,偏摆角偏差＜0.09°;校准后,对标称值为102.10nm的Si上SiO₂膜厚标准片进行测量,示值误差＜0.4nm,提升了计量型激光椭偏仪测量校准服务的准确性。     

X射线剂量当量仪校准因子不确定度评估

为了准确评估X射线剂量监测用防护仪表的校准因子的不确定度,依据有关技术规范,用标准电离室对参考点位置处的剂量当量率参考值进行测量;采用替代法获得待校仪表的显示值,从而确定校准因子结果的相关影响因素,并分别对影响量的不确定度进行评定;得出仪表校准因子的相对扩展不确定度为5.0％(k=2)。影响校准因子不确定度的主要来源包括校准用辐射场的均匀性、标准电离室本身的刻度因子及能量响应、剂量当量转换因子、待检仪表显示值的统计标准偏差等。在对该类仪表的校准过程中,通过提高标准参考值的不确定度水平可以改善校准因子的不确定度。     

Leak calibration by comparison with reference standard leaks

A study of the calibration of leaks by comparison with reference standard leaks calibrated at a National Metrology Laboratory is presented. The simplicity and efficiency of the method make it suitable for calibrations of leaks carried out at the industrial level. A commercial leak tester equipped with a mass spectrometer tuned to helium is used for the comparison. The main origins of uncertainties and their contributions to the expanded uncertainty are presented. In particular, discussion is devoted to the long-term stability, shift, or depletion of the reference standard leaks and the resulting impact on the expanded uncertainty. Results of application of the procedure for calibration of a leak of similar metrological characteristics to the reference standard leaks are also presented.     

Microform Calibration Uncertainties of Rockwell Diamond Indenters

National and international comparisons in Rockwell hardness tests show significant differences. Uncertainties in the geometry of the Rockwell diamond indenters are largely responsible for these differences. By using a stylus instrument, with a series of calibration and check standards, and calibration and uncertainty calculation procedures, we have calibrated the microform geometric parameters of Rockwell diamond indenters. These calibrations are traceable to fundamental standards. The expanded uncertainties (95 % level of confidence) are ±0.3 μm for the least-squares radius; ±0.01° for the cone angle; and ±0.025° for the holder axis alignment calibrations. Under ISO and NIST guidelines for expressing measurement uncertainties, the calibration and uncertainty calculation procedure, error sources, and uncertainty components are described, and the expanded uncertainties are calculated. The instrumentation and calibration procedure also allows the measurement of profile deviation from the least-squares radius and cone flank straightness. The surface roughness and the shape of the spherical tip of the diamond indenter can also be explored and quantified. Our calibration approach makes it possible to quantify the uncertainty, uniformity, and reproducibility of Rockwell diamond indenter microform geometry, as well as to unify the Rockwell hardness standards, through fundamental measurements rather than by performance comparisons.     

Traceability of photocurrent measurements to electrical standards

In detector output-signal measurements, where the measurement uncertainty critically impacts the total uncertainty of a detector-based radiometric scale realization, traceability of the photocurrent measurement to SI traceable electrical standards is needed. A reference photocurrent-to-voltage conversion scale has been developed and described here. The new standard has internal reference resistors for all signal-gain selections to decrease noise pickup of traditionally used external reference resistors. The internal resistors were calibrated by the NIST Quantum Electrical Metrology Division against standard resistors. Using the substitution method, the reference photocurrent-to-voltage conversion scale was transferred from the converter standard to other converters up to a maximum signal-gain of 10¹⁰ V/A with an expanded uncertainty of 0.013% (k=2). The DC conversion scale was extended to AC mode signal-gain calibrations where the photocurrent measurement uncertainty is 0.05% (k-2).     

裂隙灯显微镜校准方法的研究

本文介绍了基于放大率和分辨率测定校准裂隙灯显微镜的方法,在对总放大率误差、左右放大率相对误差校准的基础上,对影响裂隙灯显微镜成像质量的分辨率和裂隙像尺寸进行校准,建立了可溯源到国家长度基准的裂隙灯显微镜的校准装置,分析了上级定标和自身装置的不确定度来源。该装置的测量结果的相对扩展不确定度为1. 7%,基本满足目前裂隙灯显微镜的校准要求。     

铁磁材料阿留麦尔居里温度测试研究

铁磁材料阿留麦尔合金具有稳定的居里温度,常作为热分析温度校准的标准物质。介绍了阿留麦尔合金原料的选择、成分测试以及成分差异对居里温度的影响、居里温度的测量方法。采用可溯源的温度有证标准物质对仪器进行温度校正后,选取铟熔点标准物质作为外标物质,实现溯源至SI单位。测试了铁磁材料阿留麦尔居里点国家有证标准物质GBW(E)130668(居里温度为161.6℃,U=2.1℃,k=2),测试值为161.8℃,测试结果在认定值的不确定度范围内。     

固体式密度天平校准系统的设计与实现

针对目前密度天平仅能在液体模式校准、无法在固体模式校准的情况,研制了一种挂钩式空腔玻璃砝码作为固体密度标准,对密度天平固体测量模式校准,并提出了一种称量式密度天平校准方法。对固体式密度天平的校准实验显示,校准结果的扩展不确定度为0.0016g/cm3(k=2)。     

β射线剂量仪校准因子不确定度分析

为准确评估β射线剂量仪校准因子的不确定度,将经过溯源的薄窗电离室放置在β射线辐射场的测量点处进行测量得到剂量率参考值,然后采用替代法将β射线剂量仪放在同一位置进行测量得到指示值,通过二者的比值得到β射线剂量仪的校准因子,并对校准因子的不确定度进行评定。不确定度的来源主要包括参考辐射场的均匀性、替代法测量过程中位置的一致性、显示值的统计标准偏差等。结果表明在校准过程中,通过提高参考辐射场的均匀性和参考位置的一致性可以改善校准因子的不确定度。     

三天线法环天线校准系统建立及测量结果不确定度评定

在350kHz~30MHz频段内,为了准确得到环天线所处位置的场强,环天线的天线系数需要校准。三天线法是一种校准天线系数的绝对方法,需要3个环天线,两两组对测量,且不需要任何参考标准。介绍了三天线法校准环天线的原理,基于矢量网络分析仪建立校准系统,并评定校准系统的测量结果不确定度。基于K(i,j)的计算公式复杂,很难计算出其引入的不确定度,因此采用数字电磁学代码(NEC)建模评定K(i,j)的不确定度。评定结果表明,在350kHz~30MHz频段内4个典型频点的扩展不确定度小于0.81dB(k=2)。     

频域信道测量中VNA测量不确定度传播规律

针对频域信道测量中测量仪器引入的不确定度进行了深入分析。矢量网络分析仪是频域信道测量中最重要的测量仪器,测量前必须进行自校准。深入分析不同校准方法所引入的测量不确定度是合理选择自校方法的量化依据。测量不确定度分析基于蒙特卡洛法。由于在频域信道测量中需要对多个频点进行测量,而各频点间的测量结果存在较强的相关性,因此在应用蒙特卡洛法的基础上引入了基于协方差矩阵的分析方法,从而考虑了相关性的影响,给出了更为准确合理的不确定度分析,最终有效地指导了自校方法的合理选择。实验表明,是否考虑相关性,对信道参数的测量不确定度有较大影响。基于对测量不确定度的定量分析,可以得出直通校准是更适合于信道测量的矢网自校准方法的结论。     

防护水平X射线电离室的校准及不确定度分析

防护水平电离室剂量计是辐射防护的主要计量器具,需要在窄谱参考辐射质下进行检定和校准。利用EGSnrc软件模拟了参考辐射质X射线能谱,分析得到的能谱分辨率和平均能量与ISO 4037-1推荐值的最大偏差分别为7.1％和1.04％,均满足规范要求。依托60~250kV X射线空气比释动能国家基准装置,在窄谱系列参考辐射质下完成了距离X光机1m处参考点的空气比释动能量值复现;然后通过替代法对两个传递电离室进行校准并完成量值传递;最后利用传递电离室复现的2.25m处的空气比释动能率对PTW-32002球形电离室进行校准,获得相应的校准因子,校准因子相对扩展不确定度为2.2%(k=2)。     

荧光量子效率绝对法测量系统校准及不确定度评定

荧光量子效率是发射与吸收的光子数之比,是表征荧光材料发光性能的关键参数。然而,用于绝对法测量荧光量子效率的光路和探测器未经校准溯源或是校准方法不当,会造成测量光谱的不准确,进一步影响荧光量子效率计算结果的不准确。采用汞氩灯对单色仪进行校准,保证了激发波长和发射波长的准确性,利用标准辐射源对光路、发射单元单色仪和探测器进行光谱相对强度校准,保证了激发波段和发射波段光谱相对强度的准确性;最后从测量模型出发,对测量不确定度进行了分析,得到在300~360nm的激发光波段和370~900nm的发射光波段内相对合成标准不确定度为3.58%,相对扩展不确定度为7.16%,k=2。通过对单色仪波长校准以及对光谱相对强度进行校准,为荧光量子效率的准确测量提供了参考。     

在片LRRM校准算法研究

研究了LRRM(传输线-反射-反射-匹配负载)校准算法,完善了负载标准测量模型,通过参考面平移将测量结果由被测件中间平移到探针端面,基于MATLAB开发平台编制了校准软件.用研究的校准方法和商用校准方法分别对同一在片散射参数测量系统进行校准,校准后的系统测量相同的短路标准和衰减器.测量结果显示,在100 MHz～110...     

比较法真空标准漏孔校准方法研究

比较法校准真空标准漏孔是通过四极质谱计比较气体流量计提供的标准气体流量与被校真空标准漏孔产生的离子流获得校准值。主要介绍了比较法真空标准漏孔的校准方法、装置原理、校准过程及校准结果的处理等,并提出了减小测量不确定度的影响因素。     

Calibration of specific absorption rate (SAR) probes in waveguideat 900 MHz

The radiation safety tests for hand-held mobile phones require precise calibration of the small electric field probes used for the measurement of specific absorption rate (SAR) in phantoms simulating the human body. In this study, a calibration system based on a rectangular waveguide was developed for SAR calibrations at 900 MHz. The cross-sectional dimensions of the waveguide are a=190 mm and b=140 mm. The waveguide is loaded with a rectangular liquid slab where the dielectric parameters of the medium simulate human muscle and brain. The precise SAR reference is derived from the temperature rise during a short-term (10-15 s) microwave heating of the lossy slab by measuring with sensitive thermistor-type probes equipped with highly resistive lines. The thermistor probes are calibrated against a calibrated mercury thermometer. To improve the uniformity of the electric field at the calibration position, the thickness of the tissue equivalent slab was varied to adjust the standing wave pattern. This resulted in an almost threefold reduction in the positioning error of the E-field probe. The absolute uncertainty of the calibration is estimated to be ±5% (2σ) not including the uncertainty of the conductivity. The difference between the thermally measured SAR and a value computed with the FDTD method was well within this limit of uncertainty. This kind of closed waveguide system is more compact and requires less microwave power than open field calibration systems. Moreover, no radio-frequency interference is generated     

Multi-Entrance Fixed Points as an Alternative to the Equalizing Block

The uncertainty of comparison calibrations is often limited by temperature gradients and the stability of the isothermal zone. Traditionally, an equalizing block inserted into a bath or furnace is used to provide an isothermal zone during calibration. In this paper, the design and performance of a multi-entrance fixed point (MEFP) filled with mercury is described, with the goal to replace an equalizing block with the phase transition of mercury during melting/freezing. During this investigation, three thermometers were calibrated against a standard in the same bath at − 39  ˚C, using both the standard equalizing block and MEFP. The measurement results clearly indicate that use of MEFP decreases the uncertainty contributions from temperature gradients and the stability of the bath by an order of magnitude compared to the standard equalizing block.     

太赫兹阵列探测器响应度校准溯源研究

提出了一种太赫兹阵列探测器响应度校准溯源方法。首先,使用阵列探测器的每一像元对太赫兹辐照场中心进行逐一扫描,识别有效像元、死像元和过热像元,并对有效像元响应值进行归一化处理,获得阵列探测器的相对辐照度响应值。其次,使用中心像元对太赫兹辐照场进行扫描测量,扫描总面积大于太赫兹光斑尺寸,保证太赫兹功率被完整测量,获得中心像元与其他有效像元的太赫兹功率响应值。最后,用标准太赫兹功率计标定高莱功率计,扩展太赫兹功率校准量限,实现微瓦级太赫兹辐射功率测量溯源,用高莱功率计测得的太赫兹辐射源总功率对阵列探测器测得的积分响应值进行校准,得到阵列探测器辐照度响应绝对值。对探测器进行测量校准和不确定度分析,测得辐照度响应度的相对扩展不确定度为Urel=20%(k=2),测量结果可溯源至国家太赫兹辐射功率标准。     

A New Precision Digital Phase Meter and Its Simple Calibration Method

A digital phase meter (DPM) for power frequencies with a very low measurement uncertainty of 1 $muhbox{rad}$ was developed at Japan Electric Meters Inspection Corporation (JEMIC) to establish a power and energy calibration system. We also developed a phase meter calibrator (PMC) for calibrating the DPM. Since the DPM and PMC are synchronized with a single clock, the DPM can be calibrated by a very simple measurement method, which no longer requires extra standards. The DPM has been employed as an instrument for the primary standard of power and energy in Japan to achieve precise phase angle measurement. Since the error in the power measurement at power factor 0 is equal to the error in the phase angle measurement, we verified the performance of the DPM by calibrating a standard power meter using the power calibrators at JEMIC and Physikalische-Technische Bundesanstalt (PTB), and comparing the test results at power factor 0. According to the measurement, the phase angle difference between JEMIC and PTB is within 7 $mu hbox{rad}$.      

非正交轴系全站仪坐标测量系统误差分析技术研究

基于非正交轴系全站仪坐标测量系统的结构特点和测量模型,用数学分析的手段对其进行误差分析和测量不确定度评定。确定系统的主要误差分量是转台旋转角误差和激光跟踪仪测距值误差,并用GUM法评定各分量的不确定度。通过测量模型推导出系统的测量不确定度,并用MATLAB进行仿真,结果表明:当测距值不变时,测量不确定度几乎不受水平角变化的影响,而随着垂直角绝对值的增大而增大,当角度值不变时,测量不确定度随着被测点到视准轴上标定点的距离值增大而增大。实验初步验证了仿真结果的准确性。