碳纳米管场发射阴极电泳法制备及场发射特性研究

采用电泳沉积法在玻璃基板上成功制备出碳纳米管场发射阴极,采用扫描电子显微镜观察薄膜表面形貌,并对制备的碳纳米管阴极进行场发射测试.实验结果表明电泳2 min沉积的碳纳米管薄膜均匀连续且具有较好的场发射特性,其开启电场为3.1 V/μm,当外加电场强度为11.5 V/μm时场发射电流密度达到11.33 mA/cm2,经过10 V/μm的电场激活处理后样品具有较好的场发射稳定性.     

电解液法改善碳纳米管阴极场发射特性

针对丝网印刷碳纳米管(CNT)阴极,提出用电解液法进行表面后处理,有效改善碳纳米管阴极场发射特性.利用扫描电子显微镜表征电解液法处理前后CNT阴极表面形貌变化,并对处理前后CNT阴极进行场发射特性测试.结果表明,电解液法处理后有更多的CNT伸出有机浆料表面,开启电场从2.4 V/μm降低到1.4 V/μm,同样面积的薄膜(印制面积为1 cm×1 cm)在3.0 V/μm场强下的发射电流由100μA提高到了1 800μA,说明电解液处理对于提高薄膜的场发射特性有明显作用.该方法在碳纳米管场发射显示器的制作中具有很好的实际应用价值.     

基于CNT-Ni丝状阴极的场发射荧光灯

采用电泳法在金属镍(Ni)丝表面沉积碳纳米管(CNT)材料,制备成CNT-Ni丝状阴极,并在圆柱形玻璃灯管中对其进行二极结构的场发射性能测试。结果表明,CNT材料呈网状结构均匀平铺于Ni丝表面,CNT-Ni丝状阴极具有良好的场发射性能,开启场强为0.82V/μm;当阳压为3400V时,电流为2.3mA,发光亮度达到7500cd/m2;阳压为4000V时,丝状阴极场发射电流连续测试10h变化不大。     

热敷法制备丝状阴极及其在场发射中的应用

采用热敷法将碳纳米管(CNT)浆料直接热敷在Ni丝上制备成丝状阴极,并在圆柱形灯管中采用二极结构测试其场发射性能.扫描电镜(SEM)测试表明,丝状阴极的表面有一层均匀的CNT材料;场发射结果表明,CNT-Ni丝状阴极与传统的场发射阴极相比具有更优良的场发射性能,开启电场为0.15 V/μm,当电压为2280V时发射电流达到4 mA.在腔体中测试其发光亮度,最高值达到了14000 cd/m2.     

三色碳纳米管场发射灯的研制

报道了以粉末状碳纳米管为原料用丝网印刷法制备图形化的碳纳米管阴极的技术.采用热处理和氢等离子体表面处理方法提高了丝网印刷法制备的碳纳米管阴极的场发射性能,处理后阴极的阈值场强从4V/μm降到～1V/μm,场发射电流密度在4.5V/μm时达到了2.53mA/cm2,发射点密度从～103/cm2增加到～105/cm2.在此基础上,成功地设计和封装了三极管结构的三色高亮度碳纳米管场发射灯器件.     

三色碳纳米管场发射灯的研制

报道了以粉末状碳纳米管为原料用丝网印刷法制备图形化的碳纳米管阴极的技术.采用热处理和氢等离子体表面处理方法提高了丝网印刷法制备的碳纳米管阴极的场发射性能,处理后阴极的阈值场强从4V/μm降到～1V/μm,场发射电流密度在4.5V/μm时达到了2.53mA/cm2,发射点密度从～103/cm2增加到～105/cm2.在此基础上,成功地设计和封装了三极管结构的三色高亮度碳纳米管场发射灯器件.     

四针状氧化锌/碳纳米管复合阴极的制备及其场发射性能研究

采用丝网印刷技术制备四针状氧化锌(tetrapod-liked zinc oxide nanoneedles, T-ZnO)场发射阴极, 通过向T-ZnO阴极表面电泳沉积碳纳米管(carbon nanotube, CNT)薄膜制备了T-ZnO/CNT复合阴极。扫描电子显微镜观察表明: 与T-ZnO阴极相比, T-ZnO/CNT复合阴极与衬底电极之间具有较大的有效接触面积。采用二极场发射器件结构研究T-ZnO和T-ZnO/CNT的场发射特性, 实验表明: 相对于T-ZnO阴极, T-ZnO/CNT复合阴极发射电流密度大、开启场强与阈值场强低、发射点密度高, 且具有良好的工作稳定性。     

一种有效提高CNTs/CNFs阴极场发射性能的热处理方法

报道了一种新的提高碳纳米管／碳纳米纤维（CNTs／CNFs）丝网印刷阴极场发射性能的后处理方法。利用化学气相沉积（CVD）方法制备的CNTs／CNFs作为阴极材料,采用丝网印刷工艺在玻璃基板上制备场发射阴极,在H2和C2H2混合气氛下500℃处理20min,能有效提高其场发射性能,改善场发射显示器的发光均匀性。热处理后的阴极开启电压从2．4V降低到1．8V,在电场为3．9V／μm时,电流密度从0．02mA／cm^2提高到0．50mA／cm^2,发光点密度提高了近4个数量级。场发射特性的提高主要是由于热处理使阴极表面出现了大量突出并互相间有一定间距的CNTs／CNFs,这种形貌非常有利于电子场发射。     

双层掺混结构CNT薄膜的制备及场发射性能

针对单层掺混结构改善丝网印刷碳纳米管(CNT)薄膜场发射性能的局限性,提出了一种能有效改善CNT薄膜场发射性能的双层掺混结构。相比传统单层掺混结构的CNT阴极薄膜,双层掺混薄膜中上层TiO2介质掺混结构能有效提高CNT的增强因子,下层导电纳米钛粉掺混结构能降低CNT与衬底电极间的接触电阻、提高CNT导电网络的电子传输能力。场发射I-V特性测试表明,当CNT和钛的掺混质量比为1∶1且氮气中预烧温度为450℃时,双层掺混结构CNT薄膜的开启场强为1.53V/μm,电流密度在场强为2.0V/μm时达79.5μA/cm2。该方法为改善丝网印刷CNT薄膜的场发射性能提供了一种可行方案。     

基于半导体工艺制备碳纳米管阴极图形阵列

提出一种成本低、简单易行的碳纳米管图形阵列制备技术。首先在硅基底上采用热解工艺生长碳纳米管(CNT)阴极,再用光刻腐蚀法制备阴极图形阵列。研究了掩模精度及腐蚀液的浓度对图形阵列的影响,对所得到的图形样品进行XPS分析表明,图形腐蚀彻底、图形边沿轮廓清晰;以二极管结构FED测试场发射性能知:该阴极开启场1.5V/μm;在电场强度为2.0V/μm下,电流密度为58mA/mm2,发光亮度高达450cd/m2。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.