磁能驱动微型泵的性能研究

在电磁驱动原理的基础上,设计并研制了一种磁能驱动的微型泵。微型泵的整体尺寸约为Φ11mm×4mm,腔室半径为5mm,深2mm。利用方差分析方法对实验数据进行了检验,验证了前期微型泵研究中获得的性能参数的正确性。为了进一步缩小微型泵体积、简化控制方式和外围电路,针对微型泵的能源部分,开展了单双电源的对比实验研究,并获得了较好的实验结果。     

磁力驱动微泵设计及优化

为提高收缩/扩散管无阀微泵的性能,设计了磁力驱动式无阀微泵,并利用ANSYS软件对微泵的整流部件收缩/扩散管和单腔微泵整体结构进行流体仿真,得到了微泵的结构优化参数.仿真和实验结果表明,流量随着管长、最小宽度、扩张角、泵腔半径的增大存在极大值.磁驱动微泵的流量在驱动电压12 V、驱动频率为25 Hz时达到最大值.     

超磁致伸缩薄膜驱动仿生游动微型机器人

研制了以超磁致伸缩薄膜为驱动器的仿生游动微型机器人,其作业原理是以超磁致伸缩薄膜驱动器为尾鳍,通过改变时变振荡磁场的驱动频率,在超磁致伸缩薄膜的磁机耦合作用下,将时变振荡磁场能转换成驱动器的振动机械能,振动的超磁致伸缩薄膜驱动器再与液体耦合,便产生了机器人的推力．由于超磁致伸缩薄膜为非接触式驱动,因此机器人不需要电缆驱动．基于仿生游动原理,提出一种计算推力的数学模型,以建立的超磁致伸缩薄膜受迫振动模型的前三阶谐振频率模态为尾鳍的摆动,对振动薄膜产生的推力进行了计算．实验验证了理论分析的正确性,表明仿生游动微型机器人的方案切实可行．     

微流道交流电水力泵的数值模拟及优化

描述了微通道内交流电水力泵(EHD)的工作原理,并用IntelliSuite(R)的Microfluidic模块对电水力泵进行数值模拟.并分析了影响电水力泵速度场分布的因素,包括流体电导率、驱动交流电频率和相位、电极维度以及电极间隙和数量等.通过数值模拟不同参数下的电水力泵,比较驱动压力大小,最后给出优化的设计结果,为给电水力泵设计参数的选择提供依据.本文对流道长度为5mm,宽0.4mm,厚度0.4mm的电水力泵做了优化设计的数值模拟,最后得到驱动电极宽度为0.01mm,电极间距为0.02mm.     

能量平衡法静电驱动柔性振膜微泵特性分析

从能量平衡的角度建立了静电驱动柔性振膜微泵的平衡方程,基于对压缩过程中振膜动能的考虑,改进了最小能量法压缩模型,结合均匀压力载荷下圆薄膜大挠度形变理论对静电驱动柔性振膜微泵进行理论分析.对振膜与腔体壁面贴合的压缩过程中各能量相互转化的关系进行分析,并与最小能量法模型进行了对比.结果表明,能量平衡法考虑了薄膜振动过程中的动能,故薄膜与腔体具有更大的贴合面积,且以薄膜与腔体完全贴合时作为零应力参考状态降低压缩过程中的薄膜形变势能,计算得到的静电微泵的压缩效率更高,在驱动电压为300 V时,改进的双腔模型中振膜贴合半径为4.06 mm,所得最大压升为87.08 kPa.基于改进的模型,对双腔微泵压升的影响因素进行讨论,发现降低柔性薄膜厚度会使输出压力有所上升,并且减小腔体表面介电层厚度、减小腔体深度与半径可以有助于提高微泵的压升.     

无缆微型游动机器人驱动磁场系统的研究

提出了一种基于组合线圈结构的磁场系统驱动实验方案,以实现基于磁致伸缩薄膜驱动器的泳动微型机器人的磁控驱动与游动实验参数的检测．首先介绍了该组合线圈的功率优化与设计方法,然后分析了保证一定区域内磁场均匀性的技术方案,最后用ANSYS软件对所设计的组合线圈进行了仿真和验证．实验结果表明该组合结构磁场系统的性能可以满足无缆微型机器人的磁控驱动的设计要求．     

微型仿生肠道内窥镜机器人的设计与实验

根据当前胃肠道内窥镜自主运动机器人的研究方向,设计了一种微型的肠道内窥镜机器人系统。机器人采用仿尺蠖式的运动步态,通过直流无刷电机驱动驻留-伸缩-驻留式的结构实现主动运动。整体采用模块化设计,主要包括驻留机构、伸缩机构、电路控制系统以及无线供能模块。对机器人结构模型进行了理论探讨,介绍了电路控制系统的设计,以及无线供能模块的构成。最终的机器人样机直径约为14 mm,整体长度约为61 mm。机器人在PVC柔性管道和猪小肠离体爬行实验中运行稳定可靠,能够实现前进、退后和停留等步态。实验结果表明该微型仿生肠道内窥镜机器人在肠道内可以实现主动运动。     

一种低成本压电无阀微泵的研制

提出了一种低成本的由压电材料驱动的平面扩张/收缩管无阀微泵的制作工艺.通过数值模拟确定了扩张/收缩管扩张角的最优值,在此基础上,采用光刻和湿法刻蚀工艺,刻蚀了300μm深的泵腔基片和100 μm深的盖片;使用等离子体清洗技术将其与PDMS薄膜键合,完成了可以实现单向泵送的压电无阀微泵样机制作.研究了该压电无阀微泵样机的...     

微型轴流式血泵外磁驱动电路设计

微型轴流式血泵是目前人工心脏结构研究的热点．外磁驱动是一种新型的血泵驱动方式。本文介绍了血泵外磁驱动电路的设计。该电路能够产生双向励磁电流．直接驱动电机，实现血泵的外磁驱动。电路简单、实用，稳定性较好。     

毫米级全方位移动微型装配机器人设计、运动学分析与控制

介绍了一种用于微型工厂的毫米级移动微装配机器人,其具有独特的全方位运动结构．微机器人由4个直径3 mm的电磁微马达驱动,并装备有一对微型夹钳．通过分析运动学矩阵的秩,证明了微机器人的全方位特性,并建立了微夹钳的运动学方程．设计了基于计算机视觉的微机器人控制系统,给出了微机器人定位和驱动方法．实验证明了微机器人的负载能力、机动性以及控制系统的有效性．     

Characteristic studies of the piezoelectrically actuated micropump with check valve

This study presents the design and fabrication of a novel piezoelectric actuator for a micropump with check valve having the advantages of miniature size, light weight and low power consumption. The micropump is designed to have five major components, namely a piezoelectric actuator, a stainless steel chamber layer with membrane, two stainless steel channel layers with two valve seats, and a nickel check valve layer with two bridge-type check valves. A prototype of the micropump, with a size of 10 × 10 × 1.0 mm, is fabricated by precise manufacturing. The check valve layer was fabricated by nickel electroforming process on a stainless steel substrate. The chamber and the channel layer were made of the stainless steel manufactured using the lithography and etching process based on MEMS fabrication technology. The experimental results demonstrate that the flow rate of micropump accurately controlled by regulating the operating frequency and voltage. The flow rate of 1.82 ml/min and back pressure of 32 kPa are obtained when the micropump is driven with alternating sine-wave voltage of 120 Vpp at 160 Hz. The micropump proposed in this study provides a valuable contribution to the ongoing development of microfluidic systems.     

Study on a piezoelectric micropump for the controlled drug delivery system

We present the design of a new controlled drug delivery system potential for in vitro injection of diabetics. The system incorporates some integrated circuit units and microelectromechanical system devices, such as micropump, microneedle array and microsensor. Its goal is to achieve safer and more effective drug delivery. Moreover, a valveless micropump excited by the piezoelectric actuator is designed for the drug delivery system, and a simple fabrication process is proposed. A dynamic model is developed for the valveless micropump based upon the mass conservation. To characterize the micropump, a complete electro-solid-fluid coupling model, including the diffuser/nozzle element and the piezoelectric actuator, is built using the ANSYS software. The simulation results show that the performance of micropump is in direct proportion to the stroke volume of the pump membrane and there is an optimal thickness of the piezoelectric membrane under the 500 V/mm electric field. Based on this simulation model, the effects of several important parameters such as excitation voltage, excitation frequency, pump membrane dimension, piezoelectric membrane dimension and mechanical properties on the characteristics of valveless micropump have been investigated.     

Magnetic active-valve micropump actuated by a rotating magnetic assembly

We report on a high-efficiency and self-priming active-valve micropump consisting of a microfluidic chamber structure in glass that is assembled with a polydimethylsiloxane (PDMS) elastic sheet. The latter comprises two valving membranes and a central pumping chamber actuation membrane, having each an integrated permanent magnet that is magnetically actuated by arc-shaped NdFeB permanent magnets mounted on the rotation axis of a DC minimotor. The choice of this actuation principle allows very low-voltage (0.7 V) and low power (a few 10 mW) operation of the micropump. For the realisation, we use affordable powder blasting glass micropatterning and PDMS molding technologies. A flow rate of 2.4 mL/min and up to 70 mbar backpressure are obtained at the micropump resonance frequency of around 12 Hz, values that are much higher than reported so far for such type of micropump.     

Design,fabrication and characterization of a piezoelectrically actuated bidirectional polymer micropump

We present the design, fabrication and characterization of a new, piezoelectrically actuated fully polymeric three chamber peristaltic micropump. An optimized bimorph bending actuator has been designed to deform the polymer membranes in an optimal and most-efficient way. The piezoelectric actuators of the micropump are driven with actuation voltages of ±260 V. The pump has a total size of 46 × 18 × 4 mm, is produced by hot embossing and is assembled in a very simple way. The presented design is able to pump water with a flow rate of 4.8 ml/min and achieves a maximum back pressure of app. 200 mBar.     

串联压电微泵特性研究

介绍了一种压电驱动的串联无阀微泵.基于收缩管/扩展管整流特性的分析,建立了微泵输出特性的表达公式.采用有限元仿真软件ANSYS对微泵内流体的流动过成进行了数值模拟,结果显示,在相同的驱动条件下,串联无阀微泵的工作性能优于单腔无阀微泵的工作性能.泵流量随着驱动电压的增加而增加.当固定的驱动电压下,存在最优的压电层厚度使得泵流量最大.研究结果为串联微泵的优化设计提供了依据.     

Fully coupled modeling and design of a piezoelectric actuation based valveless micropump for drug delivery application

The precise control over the drug delivery involved in several vital applications including healthcare is required for achieving a therapeutic effect. For such precise control/manipulation of the drugs, micropumps are used. These micropumps are basically of two types viz. check valve-based and valveless micropumps. The valveless micropumps are preferable due to the congestion-free operation of diffuser/nozzle valves. In this paper, design optimization of a valveless piezo-electric actuation based micropump is carried out using COMSOL Multiphysics 5.0 by coupling two Multiphysics interface modules namely fluid–structure interaction and piezoelectric physics modules. Using simulation studies, the influence of pump design parameters including diffuser angle, diffuser length, neck width, chamber depth, chamber diameter and diaphragm thickness on net flow rate is studied. An optimal set of design parameters for the proposed micropump is identified. Further, the influence of actuation frequency on the flow rate is analysed. It is found that the proposed micropump is capable to deliver a net flow rate of 20 µl/min and a maximum back pressure attainable is 200 Pa.

     

Study of an innovative one-sided actuating piezoelectric valveless micropump with a secondary chamber

Previous studies have indicated that a one-sided actuating piezoelectric micropump (OAPMP) combined with two valves may enhance the liquid flow rate to 4.1 ml/s and make it possible to reach the maximum pump head of 9807 Pa in a limited space. In this study, an innovative one-sided actuating piezoelectric valveless micropump (OAPMP-valveless) has been developed to actuate fluid at a higher flow rate in one direction by adding a secondary chamber. The secondary chamber plays a key role in the application of the valveless micropump: the flow rate of the pump can reach 0.989 ml/s by adding a secondary chamber. The maximum pump head is 1522.5 Pa when using the 0.3 mm-thick secondary diaphragm and the 0.5 mm-thick primary diaphragm. In addition, if a nozzle/diffuser element is applied to the OAPMP-valveless with a secondary chamber, the flow rate can be further improved to 1.183 ml/s at a frequency of 150 Hz. A three-dimensional numerical model of the valveless micropump has been built to compare the measured results with the simulated results.     

一种基于MEMS技术的压电微泵的研究

介绍了一种基于MEMS技术的压电微泵。该微泵利用聚二甲基硅氧烷(PDMS)作为泵膜,使用了一个主动阀和一个被动阀,并利用压电双晶片作为驱动部件。压电双晶片和PDMS泵膜的组合可以产生较大的泵腔体积改变和压缩比,显著降低了加工成本,并提高了成品率。对压电微泵的输出流量进行了测试,结果显示:电压、频率以及背压对流量均有显著影响。在100 V,25Hz的方波驱动下,该压电微泵的最大输出流量为458μL/m in,最大输出压力为6 kPa。