带有复合掺杂层集电区的InP/InGaAs/InP DHBT直流特性分析

设计了一种新结构InP/InGaAs/InP双异质结双极晶体管(DHBT),在集电区与基区之间插入n+-InP层,以降低集电结的导带势垒尖峰,克服电流阻挡效应.采用基于热场发射和连续性方程的发射透射模型,计算了n+-InP插入层掺杂浓度和厚度对InP/InGaAs/InP DHBT集电结导带有效势垒高度和I-V特性的影响.结果表明,当n+-InP插入层掺杂浓度为3×1019cm-3、厚度为3nm时,可以获得较好的器件特性.采用气态源分子束外延(GSMBE)技术成功地生长出InP/InGaAs/InP DHBT结构材料.器件研制结果表明,所设计的DHBT材料结构能有效降低集电结的导带势垒尖峰,显著改善器件的输出特性.     

带有复合掺杂层集电区的InP/InGaAs/InP DHBT直流特性分析

设计了一种新结构InP/InGaAs/InP双异质结双极晶体管(DHBT),在集电区与基区之间插入n -InP层,以降低集电结的导带势垒尖峰,克服电流阻挡效应.采用基于热场发射和连续性方程的发射透射模型,计算了n -InP插入层掺杂浓度和厚度对InP/InGaAs/InP DHBT集电结导带有效势垒高度和I-V特性的影响.结果表明,当n -InP插入层掺杂浓度为3×1019cm-3、厚度为3nm时,可以获得较好的器件特性.采用气态源分子束外延(GSMBE)技术成功地生长出InP/InGaAs/InP DHBT结构材料.器件研制结果表明,所设计的DHBT材料结构能有效降低集电结的导带势垒尖峰,显著改善器件的输出特性.     

4H-SiC npn双极型晶体管的研制

采用国产的4H-SiC外延材料和自行开发的SiC双极晶体管的工艺技术,实现了4H-SiC npn双极晶体管特性。为避免二次外延或高温离子p+注入等操作,外延形成n+/p+/p/n-结构材料,然后根据版图设计进行相应的刻蚀,形成双台面结构。为保证p型基区能实现良好的欧姆接触,外延时在n+层和p层中间插入适当高掺杂的p+层外延,但也使双极晶体管发射效率降低,电流放大系数降低。为提高器件的击穿电压,在尽量实现低损伤刻蚀时,采用牺牲氧化等技术减少表面损伤及粗糙度,避免表面态及尖端电场集中,并利用SiC能形成稳定氧化层的优势来形成钝化保护。器件的集电结反向击穿电压达200 V,集电结在100 V下的反向截止漏电流小于0.05 mA,共发射极电流放大系数约为3。     

带有阶梯缓变集电区的InP/InGaAs/InP DHBT材料研究

设计并生长了一种新的InP/InGaAs/InP DHBT结构材料,采用在基区和集电区之间插入两层不同禁带宽度的InGaAsP四元系材料的阶梯缓变集电结结构,以解决InP/InGaAs/InP DHBT集电结导带尖峰的电子阻挡效应问题。采用气态源分子束外延(GSMBE)技术,通过优化生长条件,获得了高质量的InP、InGaAs以及与InP晶格相匹配的不同禁带宽度的InGaAsP外延材料。在此基础上,成功地生长出带有阶梯缓变集电区结构的InP基DHBT结构材料。     

基于InP衬底的GaAsSb/InP异质结晶体管

采用金属有机化学气相沉积生长了InP/GaAs0.5Sb0.5/InP 双异质结晶体三极管(DHBT)材料,研究了材料质量对器件性能的影响.制备的器件不但具有非常好的直流特性,而且还表现出良好的微波特性,其结果与能带理论的预言一致,DHBT集电结和发射结的电流理想因子分别为1.00和1.06,击穿电压高达15V,电流放大增益截止频率超过100GHz.     

基于InP衬底的GaAsSb/InP异质结晶体管

采用金属有机化学气相沉积生长了InP/GaAs0.5Sb0.5/InP 双异质结晶体三极管(DHBT)材料,研究了材料质量对器件性能的影响.制备的器件不但具有非常好的直流特性,而且还表现出良好的微波特性,其结果与能带理论的预言一致,DHBT集电结和发射结的电流理想因子分别为1.00和1.06,击穿电压高达15V,电流放大增益截止频率超过100GHz.     

低开启电压的InGaP/GaAsSb/GaAs双异质结晶体管

采用窄禁带宽度材料GaAsSb作为异质结晶体管的基区材料,成功研制出了能有效降低电路工作电压和功率损耗的低开启电压的NPN InGaP/GaAsSb/GaAs双异质结晶体管(double heterojunction bipolar transistor,DHBT).器件性能如下:BE结的正向开启电压(turn-on voltage)仅为0.73V;当IB=1μA/step时,直流增益达到了100,BVCEO=5～6V.通过对基区不同Sb含量器件的比较得到,器件的直流特性与基区Sb的含量有关.     

两种不同结构InGaP/GaAs HBT的直流特性分析

InGaP/GaAs异质结双极晶体管(HBT)是当前微波毫米波领域中具有广阔发展前景的高速固态器件,其直流特性是器件重要参数之一.本文采用Medici软件对两种InGaP/GaAs外延结构HBT的直流特性和高频特性进行了模拟计算,并实际制备出了两种材料结构的大尺寸(发射极面积100μm×100μm)双台面InGaP/GaAs HBT器件,对其直流特性进行了测试和分析,两种外延结构的器件共射直流增益分别为50和350,模拟得其最大截止频率分别为8和10GHz.     

两种不同结构InGaP/GaAs HBT的直流特性分析

InGaP/GaAs异质结双极晶体管(HBT)是当前微波毫米波领域中具有广阔发展前景的高速固态器件,其直流特性是器件重要参数之一.本文采用Medici软件对两种InGaP/GaAs外延结构HBT的直流特性和高频特性进行了模拟计算,并实际制备出了两种材料结构的大尺寸(发射极面积100μm×100μm)双台面InGaP/GaAs HBT器件,对其直流特性进行了测试和分析,两种外延结构的器件共射直流增益分别为50和350,模拟得其最大截止频率分别为8和10GHz.     

C波段3.5W/mm,PAE＞40%的InGaP/GaAs HBT功率管

通过优化InGaP/GaAs异质结双极晶体管(HBT)的材料结构和器件结构,采用BE金属自对准、发射极镇流和电镀空气桥等工艺技术,研制了C波段InGaP/GaAs HBT功率管.其击穿电压BVCBO大于31V,BVCEO大于21V;在5.4GHz时连续波(CW)饱和输出功率达到1.4W,功率密度达到3.5W/mm,功率附加效率(PAE)大于40%.     

Low turn-on voltage InGaP/GaAsSb/GaAs double HBTs grown by MOCVD

A novel InGaP/GaAs_0.92Sb_0.08/GaAs double heterojunction bipolar transistor (DHBT) with low turn-on voltage has been fabricated. The turn-on voltage of the DHBT is typically 150 mV lower than that of the conventional InGaP/GaAs HBT, indicating that GaAsSb is a suitable base material for reducing the turn-on voltage of GaAs HBTs. A current gain of 50 has been obtained for the InGaP/GaAs_0.92Sb_0.08/GaAs DHBT. The results show that InGaP/GaAsSb/GaAs DHBTs have a great potential for reducing operating voltage and power dissipation     

基于MBE生长的一种Be掺杂InGaAs基区的新结构InGaP/InGaAs/GaAs DHBT

报道了一种以InGaAs为基区的新结构InGaP/InGaAs/GaAs双异质结晶体管,获得了直流性能良好的器件.其共射直流增益β达到100,残余电压Voffset约为0.4V,膝点电压Vknee约为1V,击穿电压BVceo超过10V,器件的基极和集电极电流理想因子分别为nb=1.16,nc=1.11,可应用于低功耗、高功率领域.     

低偏置电压工作的自对准InGaP/GaAs功率异质结双极晶体管

介绍L波段、低偏置电压下工作的自对准InGaP/GaAs功率异质结双极晶体管的研制.在晶体管制作过程中采用了发射极-基极金属自对准、空气桥以及减薄等工艺改善其功率特性.功率测试结果显示:当器件工作在AB类,工作频率为2GHz,集电极偏置电压仅为3V时,尺寸为2×(3μm×15μm)×12的功率管获得了最大输出功率为23dBm,最大功率附加效率为45%,线性增益为10dB的良好性能.     

高性能六边形发射极InGaP/GaAs异质结双极型晶体管

六边形发射极的自对准InGaP/GaAs异质结具有优异的直流和微波性能.采用发射极面积为2μm×10μm的异质结双极型晶体管,VCE偏移电压小于150mV,膝点电压为0.5V(IC=16mA),BVCEO大于9V,BVCBO大于14V,特征频率高达92GHz,最高振荡频率达到105GHz.这些优异的性能预示着InGaP/GaAs HBT在超高速数字电路和微波功率放大领域具有广阔的应用前景.     

Collector/emitter offset voltage in double-heterojunction bipolar transistors

Double-heterojunction bipolar transistors (DHBT) can exhibit a large collector/emitter offset voltage at zero collector current which will adversely affect digital switching circuits. It is shown that this effect results from insufficient grading at the base/collector heterojunction. A GaAlAs/GaAs DHBT grown by MBE having a 130 ? compositional grading at the emitter/base and base/collector junction showed no sign of the collector/emitter offset voltage.     

新结构复合收集区InGaP/GaAs异质结双极晶体管结构设计及特性

利用电子运动速度过冲现象,设计出了一种新结构复合收集区In Ga P/Ga As异质结双极晶体管.这种结构不仅提高了器件的截止频率,而且降低了影响器件直流性能的补偿电压.所制备器件的截止频率达到77GHz,直流电流增益高达10 0 ,补偿电压低至70 m V .同时,把所制备器件的微波和直流特性与已发表的文献进行了比较,充分显示了这种结构的优越性.     

Simulated analysis for InGaP/GaAs heterostructure-emitter bipolar transistor with InGaAs/GaAs superlattice-base structure

A novel InGaP/GaAs heterostructure-emitter bipolar transistor (HEBT) with InGaAs/GaAs superlattice-base structure is proposed and demonstrated by two-dimensional analysis. As compared with the traditional HEBT, the studied superlattice-base device exhibits a higher collector current, a higher current gain of 246, and a lower base–emitter (B–E) turn-on voltage of 0.966 V at a current level of 1 μA, attributed to the increased charge storage of minority carriers in the InGaAs/GaAs superlattice-base region by tunneling behavior. The low turn-on voltage can reduce the operating voltage and collector–emitter offset voltage for low power consumption in circuit applications.     

Implementation of reduced turn-on voltage InGaP HBTs using graded GaInAsN base regions

InGaP/GaInAsN double heterojunction bipolar transistors (HBTs) with compositionally graded bases are presented which exhibit superior dc and radio frequency performance. Reducing the average base layer energy gap and optimizing the emitter-base (e-b) and base-collector (b-c) heterojunctions leads to a 100-mV reduction in the turn-on voltage compared to a baseline InGaP/GaAs process. Simultaneously grading the base layer energy band-gap results in over a 66% improvement in the dc current gain and up to a 35% increase in the unity gain cutoff frequency. DC current gains as high as 250 and cutoff frequencies of 70 GHz are demonstrated. In addition, the InGaP/GaInAsN DHBT structure significantly reduces the common emitter offset and knee voltages, as well as improves the dc current gain temperature stability relative to standard InGaP/GaAs HBTs.     

High-speed InGaP/GaAs HBTs with a strained InxGa1-xAs base

A self-aligned InGaP/GaAs heterojunction bipolar transistor with a compositionally graded In_xGa_1-xAs base has been demonstrated with f_T=83 GHz and f_max=197 GHz. To our knowledge, these results are the highest reported for both parameters in InGaP/GaAs HBT's. The graded base, which improves electron transport through the base, results in a DC current gain and a cutoff frequency which are 100% and 20% higher, respectively, than that achieved by an identical device with a nongraded base. The high f_max results from a heavily doped base, self-aligned base contacts, and a self-aligned collector etch. These results demonstrate the applicability of InGaP/GaAs HBT's in high-speed microwave applications