Form error compensation in single-point inclined axis nanogrinding for small aspheric insert

Based on an examination of traditional arc-enveloped grinding method, a single-point inclined axis nanogrinding method is presented to grind an aspheric insert by compensating tool setting error, radius error, and residual form error. Profile data from on-machine measurement are used to obtain the tool setting error and radius error of grinding wheel, as well as the normal residual form error. Compensation method of single-point inclined axis nanogrinding is built up for generating new compensation path. Grinding test of aspheric tungsten carbide insert with diameter 9.5 mm is conducted to evaluate performances of the grinding mode and compensation method. A last form error of 200 nm in peak to valley and surface roughness of 2.243 nm in Ra are achieved. These results indicated that the form error compensation method and single-point inclined axis nanogrinding mode can significantly improve form accuracy and surface roughness of ground surface.     

A solution for NURBS modelling in aspheric lens manufacture

Aspheric lenses are widely used as important parts of commercial optical products. Owing to their specific functionality, the aspheric surfaces of the lenses are mostly defined by highly complex functions incompatible with commercial manufacturing systems. This reduces lens data interoperability in downstream lens manufacture processes. It is necessary to represent such surfaces in standard formats such as non-uniform rational B-splines (NURBS) by approximating them without sacrificing their accuracy. This paper presents a solution for improving product data interoperability in aspheric lens manufacture. According to the surface type, the solution employs appropriate methods for approximating NURBS surfaces to aspheric surfaces of each type within a specified accuracy and correspondingly provides a simple way of interfacing lens data with commercial manufacturing systems. Some experimental results demonstrate its usefulness and quality.     

Precise bi-arc curve fitting algorithm for machining an aspheric surface

With the rapid development of the information/image system and aero-space industries, high quality optic aspheric surface lenses play an increasingly important role for completion of the functionalities. Aspheric lenses are non-spherical surfaces having rotation symmetry about the lens axis. The aspheric lens has various shapes according to its application and often requires tens nanometer order form accuracy since surface roughness and form accuracy play essential roles in the functional performance of the optical products. Interpolation of the aspherical surface path must precisely meet the allowable tolerance. Linear interpolation of the aspheric surface path for CNC machining generates an enormous amount of NC code to satisfy the extremely small tolerance, and produces scallops on the machined surface due to the acceleration and deceleration of the tool during every linear motion. Alternatively, interpolations with bi-arcs are used. In this paper, in order to minimize the error induced by the cutting tool path and to shorten the calculation time of interpolation, a precise -arc interpolation method is proposed. The developed algorithm of bi-arc interpolation meets the given tolerance precisely. This is guaranteed by an analytical proof and error maps. Another advantage is its ability to calculate about five times faster than the existing arc interpolation, since iterative calculations for the maximum error can be omitted. The developed algorithm has been used for the precise aspheric machining.     

超音速火焰喷涂WC涂层超高速磨削试验研究

针对超音速火焰喷涂碳化钨涂层存在的加工困难,研究了不同砂轮线速度对涂层磨削力、表面粗糙度及表面微观形貌的影响,试验结果表明,随着砂轮线速度的大幅度提高,涂层磨削力、表面粗糙度值都能得到明显的减小;通过观察磨削表面的微观形貌发现,在超高速磨削条件下,涂层材料的去除方式更多的以塑性去除为主.     

一种磁场控制成形的砂轮制备方法

提出了一种基于磁场作用来实现磨粒规则排布的砂轮制备方法,设计了金刚石微粉砂轮成形装置,并对其磁路及环形磁场分布进行了仿真。观察了环形磁场的分布状况,制作了磁控砂轮,并用制作的磁控砂轮磨削了碳化钨试件。试件表面粗糙度Ra达到了29nm,与非磁控砂轮相比,表面质量得到了明显提高。     

小口径双非球面硫系玻璃镜片精密热压成形模具制造

将小口径双非球面硫系玻璃镜片精密热压成形过程的有限元分析与模具非球面轮廓预测及补偿相结合,提高热压成形模具的制备效率与精度,满足该类镜片高精度批量制造的需求.根据硫系玻璃热压过程中的热传递、黏弹性、应力松弛行为与结构松弛特性的分析,获得玻璃高温热力学性能参数,建立镜片热压成形的有限元模型;对仿真获得的镜片非球面轮廓曲线...     

应用环形磁场控制的微粉砂轮制备及其磨削性能

在超精密磨削中,金刚石微粉砂轮的磨粒分布均匀性对提高磨削表面质量至关重要,为了使微粉磨粒规则排布,提出了一种采用环形磁场控制磨粒规则排布的砂轮制备方法,制备了多种金刚石微粉砂轮,使用磁场控制制备的微粉砂轮对硬质合金YG8进行了平面及非球面磨削试验。结果表明:应用环形磁场控制可使金刚石微粉砂轮的磨粒实现规则排布,极大改善砂轮加工性能,利用环形磁控方法制备的砂轮可获得最佳表面粗糙度Ra3 nm、最佳面形精度PV318 nm的光滑镜面。     

ELID超精密磨削钢结硬质合金及其表面质量分析

运用铁基结合剂金刚石砂轮与专用高频脉冲电源相配合,对钢结硬质合金（ＧＴ３５）进行在线电解修整（ＥＬＩＤ）精密磨削。分析了ＥＬＩＤ超精密镜面磨削异相非均质材料钢结硬质合金表面的磨削机理,并通过原子力显微镜对其表面进行了微观表面形貌的分析。     

非球面镜片面形检测技术综述

非球面镜片的应用越来越广泛,面形误差是影响非球面质量的重要指标,所采用的面形检测方法非常重要。介绍了非球面镜片面形误差的各种检测方法,并对各种检测方法进行了比较。最后,对非球面镜片面形检测技术的发展趋势作出了预测。     

Ф420mm高次非球面透镜的加工与检测

介绍了Ф420mm熔石英高次非球面透镜的加工与检测方法。对现有数控加工工艺进行了优化,通过分工序加工方式,依次采用机器人研磨、抛光和离子束修形技术完成了透镜的加工。进行非球面透镜检测时,考虑透镜的凹面为球面,利用球面波干涉仪对其面形进行了直接检测,剔除干涉仪标准镜镜头参考面误差后,透镜凹面的精度达到0.011λ-RMS;针对透镜的凸面为高次非球面,采用基于背后反射自准法的零位补偿技术对其进行面形检测,其精度达到0.013λ-RMS。最后,采用一块高精度标准球面镜对加工后透镜的透射波前进行了自消球差检测,得到其波前误差为0.013λ-RMS。试验结果表明,非球面透镜各项技术指标均满足设计要求。所述工艺方法亦适用于更大口径的非球面透镜及其他类型非球面光学元件的高精度加工.     

小口径非球面斜轴磨削及磁流变抛光组合加工工艺及装备技术研究

为提高小口径非球面模具加工效率和加工精度,提出一种结合斜轴超精密磨削和斜轴磁流变抛光的组合加工方法,将两种超精密加工方法集成在一台机床上,以缩短装夹时间以及降低装夹误差。研制新型的小口径非球面超精密复合加工机床,对直径Ф6.6 mm的非球面碳化钨模具进行了加工试验。斜轴磨削后加工表面粗糙度达到R_a 6.8 nm,斜轴磁流变抛光后表面粗糙度达到R_a 0.7 nm,面型精度可以达到PV 221 nm。结果表明,所开发的小口径非球面超精密复合加工装备能达到加工要求,可有效提高加工精度和加工效率。     

球面上微透镜阵列超精密慢伺服加工精度影响因素的研究

超精密慢伺服车削可加工出高精度的连续和非连续自由曲面,但是在微透镜阵列的加工过程中,不同位置的透镜加工精度也不同,个别子透镜的质量降低可能引起整个功能部件的失效。为了研究曲面上微透镜阵列超精密慢伺服加工精度的影响因素,本文采用实验的方法分析基面几何形状和子透镜位置对球面上微透镜阵列慢伺服车削加工精度的影响,通过在三种不同球径的基面上加工微透镜阵列,并使用Bruker GT-X白光干涉仪测量所加工的基面和微透镜阵列,分析了不同基面上不同位置的子镜表面粗糙度和形状精度的变化趋势。实验结果表明,同一基面上不同位置的子透镜,慢伺服车削加工表面微观形貌不同,表面粗糙度和形状精度也不同;基面的几何形状也会影响子镜的加工精度,当基面球径从50 mm增大至150 mm时,外圈子镜的表面粗糙度从75.78 nm(Ra)变小为69.08 nm(Ra)。在超精密慢伺服加工微透镜阵列过程中,必须考虑基面几何形状和子透镜位置两个因素对加工精度的影响,这将有助于提高微透镜阵列加工精度的一致性并保证微透镜阵列功能的有效性。     

360°高阶非球面反射式全景镜头设计

为了简化系统配置、提高图像采集及处理效率,实现单一光学系统环视高清全景成像,依据折反射式光学系统的工作原理,设计了高阶非球面反射式360°全景镜头,并对光学结构和系统像质进行优化设计。该相机采用高阶非球面反射镜压缩视场角,将垂直光轴方向俯仰角从-55°到20°的环视目标光引入到系统,接着,在后续光路中利用玻璃透镜组对目标光进行接收,并使其聚焦于相机靶面,获得物体的环形全景图像。通过对系统像质的优化,得到高清的360°环视全景图像,并对光学系统的主要性能指标进行了分析。所设计的360°全景镜头采用1片高阶非球面反射镜和10片玻璃球面镜组成,系统的焦距为0.4mm,光圈数为2.2,俯仰角达到75°,像方全视场在150lp/mm处的光学传递函数值均大于0.3。该360°全景镜头采用单一光学系统成像,解决了传统拼接式全景镜头图像采集与图像处理效率低的问题,同时通过简化系统结构,使该产品符合成本低、可量产的要求。     

ALON高陡度薄壁保形非球面的超精密磨削工艺

为了实现新型红外陶瓷ALON高陡度薄壁保形非球面的超精密磨削加工,首先根据ALON的材料属性和高陡度薄壁保形非球面的结构特性,进行了其超精密磨削加工工艺性分析,并基于有限元计算方法,完成了面向ALON高陡度薄壁保形非球面的精密夹具的设计以及关键参数的优化。然后完成了ALON的超精密磨削工艺实验,工艺实验结果表明减小工件转速和砂轮粒度都会降低ALON的平均表面粗糙度Ra值,但砂轮粒度对磨削后ALON的表面粗糙度影响更显著。最后实现了ALON高陡度薄壁保形非球面的超精密磨削加工,磨削后的ALON高陡度薄壁保形非球面的面形精度PV值为2μm,表面粗糙度Ra值可达8.6nm。     

Airbag tool polishing for aspherical glass lens molds

This paper presents a novel airbag tool polishing technique for small aspherical glass lens molds. For a mold material such as tungstencarbide, an ultra-precise grinding technique is used to generate the aspherical surface. However, the residual tool marks of the spiral pattern and scratch unavoidably develop on the mold surface. Therefore, post-polishing is required to obtain the optical surface. Footprinting by the superposition method without trajectory control was applied to polish the finely ground aspherical lens mold. A white light interferometer confirmed the tool mark removal effect. The final surface roughness was Ra 2nm. Microscopic observation also showed a cleaner surface without scratches.     

Fabrication of small aspheric moulds using single point inclined axis grinding

Single point inclined axis grinding techniques, including the wheel setting, wheel–workpiece interference, error source determination and compensation approaches, were studied to fabricate small aspheric moulds of high profile accuracy. The interference of a cylindrical grinding wheel with the workpiece was analysed and the criteria for selection of wheel geometry for avoiding the interference was proposed. The grinding process was performed with compensation focused on two major error sources, wheel setting error and wheel wear. The grinding results showed that the compensation approach was efficient and the developed grinding process was capable to generate small aspheric concave surfaces on tungsten carbide material with a profile error of smaller than 200 nm in PV value after two to three compensation cycles.     

Precision grinding of binderless ultrafine tungsten carbide (WC) microstructured surfaces

The primary objective of this study was to produce binderless ultrafine tungsten carbide (WC) microstructured surfaces in the ductile grinding regime and to optimize machining parameters to generate microstructural features and sharp edges without chipping. The micro-deformation, fracture properties, and grinding mechanisms were characterized using micro/nano-indentation and single-grit grinding experiments. The effects of grinding conditions (such as grinding mode, feed rate, and spindle speed) on ground surface quality and the radius and chipping of edges were investigated using microstructural grinding experiments. It was found that in nano-indentation, the binderless WC indentation was accommodated by plastic deformation. An average critical depth of cut of 146 nm could be achieved on single-grit scratching tests using atomic force microscopic procedures. In grinding of microstructured surfaces, the surface roughness of side surfaces was always smaller than that of the bottom surface of the machined feature. The better surface quality and sharper edges were obtained by using the upcut grinding mode. Reducing the tool feed rate did necessarily help to improve the surface roughness and edges of structures. The best ground surface could be obtained at the grinding speed of 2,500 rpm. According to the grinding experimental results, an echelle grating was manufactured using the optimized parameters. The average surface roughness SRa of the bottom surface was 78 nm and that of the side surface was 60 nm. The radius of the edge was less than 1 μm, and the radius of corner was about 3 μm. No visible evidence of grinding-induced cracks and chipping on the ground surfaces was found.     

F-Theta自由曲面透镜的精密与镜面磨削

针对光学玻璃的F-Theta自由曲面透镜加工困难等问题,提出将金刚石砂轮的椭圆环面代替圆环面,进行F-Theta自由曲面磨削加工,研究形状误差的补偿磨削方法和光学玻璃的镜面磨削工艺。根据F-Theta透镜的自由曲面建立砂轮与工件相切的刀具轨迹法向算法。采用#46粗金刚石砂轮修整成椭圆环面,提出自由曲面磨削的法向误差补偿加工模式。最后,采用#3000超细金刚石砂轮的椭圆环面进行轴向磨削试验。试验结果表明:传统的垂直误差补偿磨削可减小面形误差45.9%及其PV值11.6%;而新提出的法向误差补偿磨削可减小面形误差47.9%及其PV值41.5%。此外,超细砂轮磨削可使得自由曲面的粗糙度达到28 nm,其镜面磨削工艺有别于较粗砂轮磨削工艺。因此,椭圆环面砂轮的法向补偿磨削是提高自由曲面加工精度的有效方法,而且,无需研磨抛光就可以实现光学玻璃的自由曲面镜面磨削。     

Electrical discharge abrasive drilling of hard materials using a metal matrix composite electrode

The main object of the present work was to develop an electrical discharge abrasive drilling (EDAD) methodology to remove the re-solidified layer through the grinding induced by a metal matrix composite electrode prior to the re-solidification of molten material. A metal matrix composite (Cu/SiC_p) electrode, with an electroless pretreatment of Cu coating on SiC_p to enhance bonding status between Cu and SiC_p, was made with a rotating device and this was employed to study the EDAD technology. The machinability of the mold steel HPM50 and tungsten carbide P20 was investigated by the combined technologies of EDAD. The machined surfaces of these materials were examined by scanning electron microscopy (SEM) and their surface roughness measured by a profilemeter. From the experimental results, it was found that the EDAD machining efficiency was three to seven times than that of normal EDM operation for mold steel. However, the efficiency improvement is hardly detectable for tungsten carbide. In addition, the surface roughness of both materials could be improved in comparison with that achieved after EDM.     

超精密非球面镜面模具直轴磨削的研究

研究了非球面镜面模具直轴超精密磨削技术,给出了非球面镜面模具超精密加工机理、算法原理、软硬件结构、系统实现、工艺分析及实例应用,开发了小型超精密非球面镜面加工系统SGTCAM1.0.研究结果表明,系统原理正确,加工出的非球面光学零部件形状误差在100 nm以下,表面粗糙度在5 nm以下,达到纳米级加工精度.开发的系统使用方便,成本低.