Batch fabrication of atomic force microscopy probes with recessed integrated ring microelectrodes at a wafer level

A batch fabrication process at the wafer-level integrating ring microelectrodes into atomic force microscopy (AFM) tips is presented. The fabrication process results in bifunctional scanning probes combining atomic force microscopy with scanning electrochemical microscopy (AFM-SECM) with a ring microelectrode integrated at a defined distance above the apex of the AFM tip. Silicon carbide is used as AFM tip material, resulting in reduced mechanical tip wear for extended usage. The presented approach for the probe fabrication is based on batch processing using standard microfabrication techniques, which provides bifunctional scanning probes at a wafer scale and at low cost. Additional benefits of batch fabrication include the high processing reproducibility, uniformity, and tuning of the physical properties of the cantilever for optimized AFM dynamic mode operation. The performance of batch-fabricated bifunctional probes was demonstrated by simultaneous imaging micropatterned platinum structures at a silicon dioxide substrate in intermittent (dynamic) and contact mode, respectively, and feedback mode SECM. In both, intermittent and contact mode, the bifunctional probes provided reliable correlated electrochemical and topographical data. In addition, simulations of the diffusion-limited steady-state currents at the integrated electrode using finite element methods were performed for characterizing the developed probes.     

Fabrication and characterization of probes for combined scanning electrochemical/optical microscopy experiments

A technique that combines scanning electrochemical microscopy (SECM) and optical microscopy (OM) was implemented with a new probe tip. The tip for scanning electrochemicaVoptical microscopy (SECM/OM) was constructed by insulating a typical gold-coated near-field scanning optical microscopy tip using electrophoretic anodic paint. Once fabricated, the tip was characterized by steady-state cyclic voltammetry, as well as optical and electrochemical approach experiments. This tip generated a stable steady-state current and well-defined SECM approach curves for both conductive and insulating substrates. Durable tips whose geometry was a ring with < 1 microm as outer ring radius could be consistently fabricated. Simultaneous electrochemical and optical images of an interdigitated array electrode were obtained with a resolution on the micrometer scale, demonstrating good performance of the tip as both an optical and an electrochemical probe for imaging microstructures. The SECM feedback current measurements were successfully employed to determine tip-substrate distances for imaging.     

Combined scanning electrochemical/optical microscopy with shear force and current feedback

A technique that combines scanning electrochemical microscopy (SECM) and scanning optical microscopy (OM) was developed. Simultaneous scanning electrochemical/optical microscopy (SECM/OM) was performed by a special probe tip, which consists of an optical fiber core for light passage, surrounded by a gold ring electrode, and an outermost electrophoretic insulating sheath, with the tip attached to a tuning fork. To regulate the tip-substrate distance, either the shear force or the SECM tip current was employed as the feedback signal. The application of a quartz crystal tuning fork (32.768 kHz) for sensing shear force allowed simultaneous topographic, along with SECM and optical imaging in a constant-force mode. The capability of this technique was confirmed by obtaining simultaneously, for the first time, topographic, electrochemical, and optical images of an interdigitated array electrode. Current feedback from SECM also provided simultaneous electrochemical and optical images of relatively soft samples, such as a polycarbonate membrane filter and living diatoms in a constant-current mode. This mode should be useful in mapping the biochemical activity of a living cell.     

Probing heterogeneous electron transfer at an unbiased conductor by scanning electrochemical microscopy in the feedback mode

The theory of the feedback mode of scanning electrochemical microscopy is extended for probing heterogeneous electron transfer at an unbiased conductor. A steady-state SECM diffusion problem with a pair of disk ultramicroelectrodes as a tip and a substrate is solved numerically. The potential of the unbiased substrate is such that the net current flow across the substrate/solution interface is zero. For a reversible substrate reaction, the potential and the corresponding tip current depend on SECM geometries with respective to the tip radius including not only the tip-substrate distance and the substrate radius but also the thickness of the insulating sheath surrounding the tip. A larger feedback current is obtained using a probe with a thinner insulating sheath, enabling identification of a smaller unbiased substrate with a radius that is approximately as small as the tip radius. An intrinsically slow reaction at an unbiased substrate as driven by a SECM probe can be quasi-reversible. The standard rate constant of the substrate reaction can be determined from the feedback tip current when the SECM geometries are known. The numerical simulations are extended to an SECM line scan above an unbiased substrate to demonstrate a "dip" in the steady-state tip current above the substrate center. The theoretical predictions are confirmed experimentally for reversible and quasi-reversible reactions at an unbiased disk substrate using disk probes with different tip radii and outer radii.     

Scanning electrochemical microscopy. 40. Voltammetric ion-selective micropipet electrodes for probing ion transfer at bilayer lipid membranes

Voltammetric ion-selective micropipet electrodes for use in scanning electrochemical microscopy (SECM) for detection of potassium ion were fabricated. These used pulled borosilicate capillaries with tip orifice radii of 0.7-20 microm with silanized inner walls filled with a solution of 10 mM valinomycin and 10 mM ETH 500 in dichloroethane. The electrodes were characterized by determining the steady-state tip current for K+ concentrations of 0.05-0.3 mM. The tips were used in the SECM feedback and generation-collection modes to study K+ transfer through gramicidin channels in a horizontal bilayer lipid membrane (glycerol monooleate).     

Polished nanopipets: new probes for high-resolution scanning electrochemical microscopy

Nanometer-sized pipets pulled from glass or quartz capillaries have been extensively used as probes for scanning electrochemical microscopy (SECM) and scanning ion conductance microscopy (SICM). A small separation distance between such a probe and the sample, which is required for high-resolution SECM measurements, may be hard to attain because of considerable roughness of the pipet tip. In this Letter, we report the preparation and characterization of polished nanopipet SECM probes with a much smoother tip edge. Using polished pipets, quantitative SECM measurements were performed at extremely short tip/substrate distances (e.g., d ≈ 1 nm).     

Feedback-independent Pt nanoelectrodes for shear force-based constant-distance mode scanning electrochemical microscopy

A new generation of platinum nanoelectrodes for constant-distance mode scanning electrochemical microscopy (CD-SECM) has been prepared, characterized, and used for high spatial resolution electrochemical measurements and visualization of electrochemically induced concentration gradients in microcavities. The probes have long (1-2 cm), narrow quartz tips that were conically polished and have a Pt nanoelectrode that is slightly offset from center. Because of the size and location of the electrode on the probe, it does not exhibit SECM feedback while approaching the analyzed sample surfaces even to distances within a few hundred nanometers. The probe was positioned near the surface while scanning and performing electrochemical measurements through use of nonoptical shear force control of the tip-to-sample distance. Test structures consisted of cylindrically shaped microcavities that are 50 microm in diameter with three individually addressable electrodes: a gold disk at 8-microm depth, a crescent-shaped gold ring at 4-microm depth along the wall, and a top gold electrode at the rim. Different electrodes within the microcavity were used to reduce and oxidize redox species in 250 microL of a solution of 5 mM hexaamineruthenium(III) chloride and 0.1 M potassium chloride, protected from evaporation by mineral oil, while the SECM tip followed the topography of the structures and monitored the current from the oxidation of [Ru(NH3)6]2+. Electrochemically generated concentration profiles were obtained from these complex test structures that are not possible with any other SECM technology at this time.     

Microfluidic push-pull probe for scanning electrochemical microscopy

This paper presents a microfluidic push-pull probe for scanning electrochemical microscopy (SECM) consisting of a working microelectrode, an integrated counter/reference electrode and two microchannels for pushing and pulling an electrolyte solution to and away from a substrate. With such a configuration, a droplet of a permanently renewed redox mediator solution is maintained just at the probe tip to carry out SECM measurements on initially dry substrates or in microenvironments. For SECM imaging purposes, the probe fabricated in a soft polymer material is used in a contact regime. SECM images of various gold-on-glass samples demonstrate the proof-of-concept of a push-pull probe for local surface activity characterization with high spatial resolution even on vertically oriented substrates. Finite element computations were performed to guide the improvement of the probe sensitivity.     

Carbon nanofiber electrodes and controlled nanogaps for scanning electrochemical microscopy experiments

The electrochemical behavior of electrodes made by sealing carbon nanofibers in glass or with electrophoretic paint has been studied by scanning electrochemical microscopy (SECM). Because of their small electroactive surface area, conical geometry with a low aspect ratio and high overpotential for proton and oxygen reduction, carbon nanofiber (CNF) electrodes are promising candidates for producing electrode nanogaps, imaging with high spatial resolution and for the electrodeposition of single metal nanoparticles (e.g., Pt, Pd) for studies as electrocatalysts. By using the feedback mode of the SECM, a CNF tip can produce a gap that is smaller than 20 nm from a platinum disk. Similarly, the SECM used in a tip-collection substrate-generation mode, which subsequently shows a feedback interaction at short distances, makes it possible to detect a single CNF by another CNF and then to form a nanometer gap between the two electrodes. This approach was used to image vertically aligned CNF arrays. This method is useful in the detection in a homogeneous solution of short-lifetime intermediates, which can be electrochemically generated at one electrode and collected at the second at distances that are equivalent to a nanosecond time scale.     

Scanning electrochemical microscopy, 52. Bipolar conductance technique at ultramicroelectrodes for resistance measurements

The bipolar conductance, BICON, technique for the measurement of solution resistance, based on the application of microsecond current pulses, as originally described by Enke and co-workers for measurements with conventional electrodes, was extended for use with ultramicroelectrodes, with a focus on its application in scanning electrochemical microscopy (SECM). When the plateau time used to make the measurement lies within the BICON conditions, the solution conductance can be obtained directly from the output without the need for calibration curves. However, decreasing the size of the ultramicroelectrode decreases the range of values that satisfy these conditions, and one must resort to calibration curves to obtain solution conductance from the measured current, which was nevertheless found to be proportional to electrolyte concentration with electrodes as small as 5 mum in diameter. BICON/SECM approach curves over insulating substrates followed SECM negative feedback theory and approach curves in the presence of low (micromolar) or no added electrolyte are possible once the background conductivity is taken into account. Approach curves to a conducting substrate at open circuit potential are influenced by the solution time constant (solution resistance at the electrode tip x electrode double layer capacitance), which is a function of the tip/substrate distance, as well as the substrate size.     

A positionable microcell for electrochemistry and scanning electrochemical microscopy in subnanoliter volumes

Positionable voltammetric cells with tip diameters of < 50 microm were constructed from theta glass capillaries. One channel of the pulled glass capillary contains a carbon fiber microelectrode sealed in epoxy while the other houses a Ag/AgCl reference electrode that makes electrical contact to the analyte solution via a salt bridge at the tip. The device can be operated as a two-electrode cell and can therefore make measurements in droplets of solution that are similar in size to the tip. Alternatively, if the droplet of solution is larger than the tip, spatially resolved measurements of a substrate in solution can be made. Voltammetric experiments and feedback imaging with the scanning electrochemical microscope (SECM) were accomplished in microdroplets with solution volumes of less than 1 nL. pH images of a substrate immersed in 70-microL-thick films of solution were obtained in the generator-collector mode of SECM using an iridium oxide-modified microcell. This type of microcell is particularly useful for making electrochemical measurements in very small droplets of solution where a mobile working electrode could easily collide with a separately positioned reference electrode.     

Disk-generation/ring-collection scanning electrochemical microscopy: theory and application

The potential of ring-disk ultramicroelectrodes (RD UMEs) as probes for scanning electrochemical microscopy (SECM) was investigated both theoretically and experimentally. In particular, the disk-generation/ring-collection (DG/RC) mode of operation was considered. In this case, the interaction of two species with the substrate under investigation can be followed simultaneously from single tip current-distance measurement (approach curve) to the substrate. Theoretical approach curves for DG/RC were calculated by numerical methods. Such approach curves to both insulating and conducting substrates indicate a strong tip response dependence on the ring radius while the response was relatively insensitive to ring thickness and overall tip radius. The RD tip was characterized by fitting experimental approach curves recorded at insulating and conducting substrates to simulated curves for a given tip geometry. DG/RC SECM was then applied to investigate the partitioning of iodine across a liquid-liquid interface.     

Scanning electrochemical microscopy. 47. Imaging electrocatalytic activity for oxygen reduction in an acidic medium by the tip generation-substrate collection mode

The oxygen reduction reaction (ORR) in acidic medium was studied on different electrode materials by scanning electrochemical microscopy (SECM) operating in a new variation of the tip generation-substrate collection mode. An ultramicroelectrode tip placed close to the substrate electrode oxidizes water to oxygen at a constant current. The substrate is held at a potential where the tip-generated oxygen is reduced and the resulting substrate current is measured. By changing the substrate potential, it is possible to obtain a polarization (current-potential) curve, which depends on the electrocatalytic activity of the substrate material. The main difference between this mode and the classical feedback SECM mode of operation is that the feedback diffusion process is not required for the measurement, allowing its application for studying the ORR in acidic solutions. Activity-sensitive images of heterogeneous surfaces, e.g., with Pt and Au electrodes, were obtained from the substrate current when the x-y plane was scanned with the tip. The usefulness of this technique for imaging electrocatalytic activity of smooth metallic electrodes and of highly dispersed fuel cell-type electrocatalysts was demonstrated. The application of this method to the combinatorial chemical analysis of electrode materials and electrocatalysts is discussed.     

Scanning electrochemical microscopy. 32. Gallium ultramicroelectrodes and their application in ion-selective probes

Gallium ultramicroelectrodes for amperometric measurements in scanning electrochemical microscopy were fabricated by introduction of liquid Ga into drawn glass micropipets. Cyclic voltammetry of Ru(NH(3))(6)(3+) and the use of this species for SECM imaging is described. Double-barrel micropipet tips with a Ga amperometric electrode and an ion-selective (K(+)) potentiometric probe can also be constructed. This probe was used to image the K(+) activity near a 20-μm-diameter lumen of a glass capillary.     

Local feedback mode of scanning electrochemical microscopy for electrochemical characterization of one-dimensional nanostructure: theory and experiment with nanoband electrode as model substrate

Local feedback mode is introduced as a novel operation mode of scanning electrochemical microscopy (SECM) for electrochemical characterization of a single one-dimensional (1D) nanostructure, for example, a wire, rod, band, and tube with 1-100-nm width and micrometer to centimeter length. To demonstrate the principle, SECM feedback effects under diffusion limitation were studied theoretically and experimentally with a disk probe brought near a semi-infinitely long band electrode as a geometrical model for a conductive 1D nanostructure. As the band becomes narrower than the disk diameter, the feedback mechanism for tip current enhancement is predicted to change from standard positive feedback mode, to positive local feedback mode, and then to negative local feedback mode. The negative local feedback effect is the only feedback effect that allows observation of a 1D nanostructure without serious limitations due to small lateral dimension, available tip size, or finite electron-transfer rate. In line-scan and approach-curve experiments, an unbiased Pt band electrode with 100-nm width and 2.6-cm length was detectable in negative local feedback mode, even using a 25-microm-diameter disk Pt electrode. Using a 2-microm-diameter probe, both well-defined and defected sites were observed in SECM imaging on the basis of local electrochemical activity of the nanoband electrode. Noncontact and spatially resolved measurement is an advantage of this novel SECM approach over standard electrochemical approaches using electrodes based on 1D nanostructure.     

Selective insulation with poly(tetrafluoroethylene) of substrate electrodes for electrochemical background reduction in scanning electrochemical microscopy

We describe a wet process for the fabrication of poly(tetrafluoroethylene) (PTFE)-covered electrodes in which arrays of holes ( approximately 200 microm) are formed. The PTFE coating provides electrical insulation of most of the electrode surface with selected regions exposed for electrochemical experiments. The arrays of microholes can be controllably patterned and filled with precursor solutions using a piezoelectric dispenser. A micrometer spot of electrocatalyst is produced after reduction of the precursor. The application is tested for scanning electrochemical microscopy (SECM) in the tip generation-substrate collection (TG-SC) studies of electrocatalysts. The method is shown to reduce the substrate background currents that are included in the electrochemical signal read from the local perturbation induced with the SECM tip to the substrate in the TG-SC mode of SECM. This background current reduction is consistent with the decrease in the exposed area of the electrode. The general methodology for the fabrication of the substrate electrodes and two proof-of-concept applications in the TG-SC SECM modality are described.     

Noncontact electrochemical imaging with combined scanning electrochemical atomic force microscopy

Combined scanning electrochemical atomic force microscopy (SECM-AFM) is a recently introduced scanned probe microscopy technique where the probe, which consists of a tip electrode and integrated cantilever, is capable of functioning as both a force sensor, for topographical imaging, and an ultramicroelectrode for electrochemical imaging. To extend the capabilities of the technique, two strategies for noncontact amperometric imaging-in conjunction with contact mode topographical imaging-have been developed for the investigation of solid-liquid interfaces. First, SECM-AFM can be used to image an area of the surface of interest, in contact mode, to deduce the topography. The feedback loop of the AFM is then disengaged and the stepper motor employed to retract the tip a specified distance from the sample, to record a current image over the same area, but with the tip held in a fixed x-y plane above the surface. Second, Lift Mode can be employed, where a line scan of topographical AFM data is first acquired in contact mode, and the line is then rescanned to record SECM current data, with the tip maintained at a constant distance from the target interface, effectively following the contours of the surface. Both approaches are exemplified with SECM feedback and substrate generation-tip collection measurements, with a 10-microm-diameter Pt disk UME serving as a model substrate. The approaches described allow electrochemical images, acquired with the tip above the surface, to be closely correlated with the underlying topography, recorded with the tip in intimate contact with the surface.     

Scanning electrochemical microscopy 50. Kinetic study of electrode reactions by the tip generation-substrate collection mode

A scanning electrochemical microscopy (SECM) methodology for localized quantitative kinetic studies of electrode reactions based on the tip generation-substrate collection (TG-SC) operation mode is presented. This approach does not use the mediator feedback required in typical kinetic SECM experiments. The reactant is galvanostatically electrogenerated on a tip placed in proximity to the substrate. It diffuses through the tip-substrate gap and undergoes the reaction of interest on the substrate surface. The substrate current is monitored with time until it reaches an apparent steady-state value. The process was digitally simulated using an explicit finite difference method, for an irreversible first-order electrode reaction at the substrate. Transient responses, steady-state polarization curves, and TG-SC approach curves can be used to obtain substrate kinetics. The effects of the experimental parameters were analyzed. The possibility of easily changing the experimental conditions with the SECM is an attractive approach to obtain independent evidence that can be used for a strict test of reaction mechanisms. The technique was applied for a preliminary simplified kinetic examination of the oxygen reduction reaction in phosphoric acid.     

Scanning electrochemical microscopy. 41. Theory and characterization of ring electrodes

Ring ultramicroelectrodes, which are of particular interest as probes for scanning electrochemical microscopy (SECM), combined with near-field scanning optical microscopy, were investigated. Theoretical SECM tip current-distance (approach) curves for a ring electrode were calculated by numerical (finite element) analysis. The SECM curves obtained were a function of the geometry of the tips including the thickness of the ring and the insulating sheath. Theoretical approach curves over conductive substrates showed a strong dependence on the ratio of inner to outer radii of ring microelectrodes (a/b) and were relatively insensitive to the thickness of the insulating sheath (r(g)). For insulating substrates, however, the approach curves varied significantly with r(g), but much less with the a/b ratio. Comparison of experimental and theoretical SECM curves provided a good method of evaluating the size and shape of ring electrodes. Good agreement of the experimental and theoretical curves was found with a ring microelectrode with a nominal 200-nm ring thickness, yielding values of 1.7, 1.9, and 5.7 microm for the inner (a) and outer (b) radii of a ring and the outermost radius of insulating sheath (r(g)), respectively.     

Simple and clear evidence for positive feedback limitation by bipolar behavior during scanning electrochemical microscopy of unbiased conductors

On the basis of an experimentally validated simple theoretical model, it is demonstrated unambiguously that when an unbiased conductor is probed by a scanning electrochemical tip (scanning electrochemical microscopy, SECM), it performs as a bipolar electrode. Though already envisioned in most recent SECM theories, this phenomenon is generally overlooked in SECM experimental investigations. However, as is shown here, this may alter significantly positive feedback measurements when the probed conductor is not much larger than the tip.