用金刚石磨头数控加工轴对称非球面光学玻璃透镜

为了提高轴对称非球面透镜的形状精度,降低其精加工成本,用金刚石小磨头在不同的加工参数和数控走刀轨迹条件下对K9光学玻璃透镜进行铣磨实验加工。透镜的轮廓精度用三坐标测量机测量,通过测量的数据点计算非球面透镜的法向轮廓度误差,并用数控加工时磨头的有效切削半径进行补偿。实验结果表明:当数控走刀轨迹为平行精加工和等高精加工时,加工后非球面透镜的面型精度最大轮廓度偏差PV和误差平均值RMS分别为54.48 μm和22.88 μm、98.46 μm和28.88 μm;通过优化金刚石磨头的有效切削半径可以提高非球面透镜加工的面型精度,平行精加工后优化的非球面透镜面型精度PV和RMS值分别为44.52 μm和7.37 μm。      

化学机械抛光机的抛光盘面形在位测量研究

化学机械抛光机是加工光学元件的主要设备,抛光盘面形是影响抛光机加工精度的重要技术参数。现有的抛光盘面形测量主要依赖离线测量的方式,存在着测量基准不统一、二次装夹引发变形等问题。针对上述问题,提出了一种抛光盘面形在位测量方法,搭建了抛光盘面形在位测量系统。经过误差分析将测量误差分离成为平行度误差与直线度误差两部分,通过垫调整片的方式将平行度误差从0.043 mm减小到0.015 mm,再通过z向补偿的方式将测量误差进一步减小到0.006 mm。分别利用抛光盘面形在位测量系统和三坐标测量机对直径200 mm的检测件进行了测量,两种测量方式的结果显示:抛光盘面形在位测量系统的测量误差在0.003 mm之内。抛光盘面形在位测量系统的测量精度得到了有效验证。     

数控铣磨非球面面形误差补偿技术研究

数控铣磨是脆性材料非球面成形加工的主要方法。在数控铣磨非球面工艺技术研究中,面形误差直接影响加工精度和生产效率。结合数控铣磨非球面原理,利用Satisloh GI-3P精密铣磨加工中心铣磨非球面硅透镜,分析了影响非球面硅透镜面形误差的因素,并探讨了修正补偿面形误差的方法。结果表明:影响非球面面形精度的主要因素为z轴偏移误差、CNC程序原点与实际工件旋转轴心的偏移误差和砂轮磨损误差,通过修正误差后,有效提高了非球面成形的加工精度和加工效率。     

小口径非球面小球头接触式抛光及磁流变抛光组合加工

目的 为了提高非球面光学模具的表面质量和加工效率。方法 分析当前非球面超精密抛光方式及其特点,针对小口径非球面光学模具,提出一种小球头接触式抛光及磁流变抛光的组合加工方法,对小球头进行设计,并抛光碳化钨圆片,对比小球头接触式抛光及轴向、径向、水平方向磁极的永磁体球头的磁流变抛光的加工性能。分别对编号为1^#、2^#、3^#等3个相同轮廓形状的碳化钨非球面模具进行单一方式抛光试验和组合加工试验。结果 通过对小球头抛光碳化钨圆片的加工性能进行分析发现,接触式抛光小球头的去除率为926.5 nm/h,表面粗糙度达到4.396 1 nm;轴向、径向、水平方向磁极的永磁体小球头磁流变抛光的去除率分别为391.7、344.3、353.7 nm/h,表面粗糙度分别为1.425 2、1.877 6、1.887 5 nm。对采用组合加工方法抛光碳化钨非球面的有效性进行验证时发现,非球面1^#在单一接触式抛光60 min后表面粗糙度从8.786 6 nm降至3.693 2 nm;非球面2^#在单一磁流变抛光60 min后表面粗糙度从8.212 1 nm降至1.674 5 nm;非球面3^#在组合抛光方法下先进行15 min接触式抛光,再进行15 min磁流变抛光,表面粗糙度从8.597 2 nm降至1.269 4 nm,面形精度由175.2 nm提高到138.4 nm。结论 组合加工方法可以弥补单一抛光方法的缺陷,并能有效地提高工件的面形精度。与单一接触式抛光方法相比,组合加工方法获得的表面质量更好,抛光后表面粗糙度为1.269 4 nm,远小于单一接触式抛光下的3.693 2 nm;与单一磁流变抛光方法相比,组合加工方法更高效,将样件抛光到同等级别粗糙度所需时间从60 min减少至30 min。     

大口径高精度超光滑非球面制备方法

本发明涉及非球面加工技术。要解决大口径高精度超光滑非球面加工非常困难，而且加工周期长、成本较高的问题。本发明在溅射功率及工作气体压强一定的条件下，首先对靶材的沉积速率进行定标，再根据球面和非球面的差异量，利用沉积速率确定出转盘公转机构的速度，通过控制球面基底上各点经过溅射靶材的公转速度，从而控制球面基底上各点在溅射镀膜区的停留时间T，在球面基底镀制出的按一定空间分布的膜层厚度，则制成所需要非球面面形。解决了传统数控和应力盘抛光等问题，提供了一种表面粗糙度低、精度高、加工周期短、成本低的大口径高精度超光滑非球面制备方法。本发明适用于大曲率半径、小偏移量和大口径的高精度超光滑非球面加工。     

微小非球面碳化钨光学模具的磁流变抛光特性研究

超精密加工是光学模具获得高形状精度、表面精度和表面完整性的必要手段。通过实验比较抛光前后工件面形精度的PV值及RMS值来研究微小非球面碳化钨光学模具的磁流变抛光特性。结果表明:磁流变抛光技术对提高微小非球面碳化钨光学模具形状精度、表面精度等有较显著的作用。     

超精密车削中精确对刀方法

在超精密车削球面和非球面零件过程中,对刀的精度是影响加工件面形精度的最主要因素之一。介绍一种试切小直径球面对刀件的方法,可实现圆弧刃金刚石刀具的精确对刀,并加工完成直径75 mm、顶部球径为250 mm的凸球面纯铝工件,其面形精度优于0.2μm。     

非球面碳化硅反射镜往复式磨削面形精度建模及仿真

为优化圆弧面砂轮磨削非球面碳化硅反射镜的加工效果,基于往复式磨削对非球面反射镜的残余高度进行建模,通过残余高度与面形精度的几何关系,建立面形精度预测模型并进行仿真分析。面形精度模型仿真结果表明:随截圆弧长增加或倾角增大,面形精度降低;随砂轮基圆半径增加或砂轮圆弧半径增加,面形精度提高。其中,截圆弧长和砂轮基圆半径对面形精度影响较大。      

轴对称非球面加工进给速度控制技术研究

本文根据轴对称非球面的加工误差特性，通过分析轴对称非球面磨削加工中砂轮磨削线速度、进给速度对加工精度影响的条件，提出控制砂轮进给速度使轴对称非球面工件各点磨削量均匀的方法。该技术避免了传统加工方法中原理上固有的磨削量差异缺陷，提高了系统的加工精度。研究结果表明：进给速度控制方法针对轴对称非球面加工中常用的平面砂轮、圆弧砂轮、球面砂轮，均得到了良好的控制效果；采用新方法的数学模型更接近于理论计算轨迹，可以进一步提高工件的加工精度；新方法进给速度由外沿加工至中心部分，进给速度逐渐加快；并且变化率也逐渐增大。     

三轴超精密单点金刚石车床SGDT350研制

文章介绍了基于静压支承技术自主研制的三轴超精密单点金刚石车床SGDT350。机床采用模块化设计,构建了开放式控制体系,成功实现了机床的高精度运动。经实测机床主轴回转跳动≤50nm,导轨直线度允差≤0.3μm/250mm,加工φ75mm口径SR250mm铝合金凸球面面形PV值达0.24μm,表面粗糙度Sa值达3.5nm,表明了机床具有较好的运动精度和加工性能。     

Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors

The paper presents the design of a six-axis machining system and its application in fabricating large off-axis aspherical mirrors with sub-aperture lapping techniques. The new system is based on computer-controlled optical surfacing (CCOS), which combines the faculties of grinding, polishing, and on-machine profile measuring, has the features of conventional loose abrasive machining with the characteristics of a tool having multiple degrees of freedom moving in planar model. And a novel dual touch-trigger probe profiler is designed, which is composed of a probe, model METRO-MT60 made by HEIDENHAIN Co., is integrated into the system for measuring the shape accuracy of the tested aspherical surface, another probe modeled METRO-MT12 is designed as a calibrating device for minimizing the cosine error caused by assembly inaccuracy. The new CNC machining system with two kinds of moving coordinate systems, dual tool activities and on-machine measuring is presently developed based on the new concept. The general material removal function during machining is analyzed on the basis of the Preston hypothesis. Further, an alignment test of the measuring profiler is carried out using a leveling rule as a specimen. The accuracy of the optical surfaces measured by the dual probe profiler is found to be within 1 μm PV after removing cosine error and error compensating, achieves to the resolving power of the profiler is about 0.2–0.5 μm, so the developed system can be applied to the shape accuracy measuring of aspheric fabrication with micro precision during fine grinding process according to the calibrating results. Finally, the manufacturing experiments are carried out by virtue of an off-axis oblate ellipsoid mirror with rectangular aperture as 770 mm×210 mm and centered 127 mm. The accuracy of the aspherical mirror improved from the initial form error of 17.648 μm rms to the final one of 0.728 μm rms after grinding for 200 h.     

5-Axis adaptive flank milling of flexible thin-walled parts based on the on-machine measurement

Deformation of the part and cutter caused by cutting forces immediately affects the dimensional accuracy of manufactured parts. This paper presents an integrated machining deviation compensation strategy based on on-machine measurement (OMM) inspection system. Previous research attempts on this topic deal with deformation compensation in machining of geometries in 3-axis machine tools only. This paper is the first time that concerned with 5-axis flank milling of flexible thin-walled parts. To capture the machined surface precision dimensions, OMM with a touch-trigger probe installed on machine׳s spindle is utilized. Probe path is planned to obtain the coordinate of the sampling points on machined surface. The machined surface can then be reconstructed. Meanwhile, the cutter׳s envelope surface is calculated based on nominal cutter location source file (CLSF). Subsequently, the machining error caused by part and cutter deflection is calibrated by comparing the deviation between the machined surface and the envelope surface. An iteration toolpath compensation algorithm is designed to decrease machining errors and avoid unwanted interference by modifying the toolpath. Experiment of machining the impeller blade is carried out to validate the methodology developed in this paper. The results demonstrate the effectiveness of the proposed method in machining error compensation.     

大口径方形非球面镜的高效磨削技术研究

本文基于X/Y/Z三直线轴平面磨床,研究了圆弧砂轮应用于大口径方形非球面镜的平行磨削新技术,介绍了圆弧砂轮平行磨削的机理、重点解决了砂轮形状误差在线检测、元件面形误差在线检测与误差补偿等关键技术问题.以430 mm×430 mm非球面镜为样件,进行了多轮高效精密磨削工艺实验,面形精度PV均值为4.2μm,表面粗糙度约0...     

Profile error compensation approaches for parallel nanogrinding of aspherical mould inserts

This paper reports a parallel nanogrinding protocol for fabricating aspherical mould inserts. In the protocol, a preliminary grinding cycle was first employed, which significantly reduced the effect of the initial wheel geometry error on the ground profile accuracy. A new compensation approach was developed. The compensation used the ground profile measured from a Talysurf profilometer to modify the NC tool path for the next grinding cycle. The tool path was modified by offsetting the residual profile error along the normal direction of a grinding point, rather than in the horizontal direction commonly used in the conventional method. The performance of the developed method was evaluated by fabricating aspherical mould inserts on cemented tungsten carbide. The result indicated that the residual profile error after two grinding cycles was reduced to approximately 0.4 μm in PV, with average surface roughness of below 10 nm, which is more efficient than the conventional compensation process.     

基于环境模型优化的机器人磨抛阻抗控制

对比传统加工机床,机器人的刚度与定位精度较低,为提高机器人辅助磨削的加工质量,需要控制其加工过程中的接触压力。基于球形弹性磨具磨削时的接触特性,以磨具的下压量为自变量,磨具与工件的接触压力为因变量进行有限元仿真,对下压量-接触压力仿真结果进行曲线拟合,并通过接触实验验证其准确性,以此建立基于环境模型修正的阻抗力学控制模型,从而进行自由曲面力控实验。结果表明:建立的基于环境模型修正的阻抗控制方法能有效改善球形弹性磨具的力控性能,自由曲面力控精度达到±0.5 N,且可为球形弹性磨具复杂曲面的磨削加工提供稳定的磨削压力。      

ELID precision grinding of large special Schmidt plate for fibre multi-object spectrograph for 8.2 m Subaru telescope

To explore various scientific frontiers from nearby substellar objects to large scale structures of the high redshift universe, a Fibre Multi-Object Spectrograph (FMOS) is being developed as the second generation near-infrared measuring instrument for the prime focus of 8.2 m Subaru telescope in Hawaii, which employs a large special Schmidt plate element. The Schmidt plate consists of a large non-axisymmetric aspherical concave plate and a convex plate. This paper introduces its manufacturing process, focusing on its non-axisymmetric aspherical surface machining by utilizing synthetically ELID grinding and arc-enveloped grinding method. A new grinding system capable of fabricating large optical elements was developed with 10 nm resolution. In this ELID arc-enveloped grinding system, a Cast Iron Fibre Bonded (CIFB) diamond wheel was 3D controlled to scan the workpiece to generate required surface. Grinding characteristics such as attainable form accuracy, surface roughness were investigated. Furthermore, some measures to improve form accuracy were discussed and verified.     

MVC850B型立式数控铣床误差分析与补偿试验研究

针对企业实际生产中铣床加工精度波动的问题,应用Renishaw XL-30激光干涉仪对MVC850B数控铣床的定位误差进行精密检测与补偿试验.利用环境参数对比试验,得出影响定位误差测量的因素;通过三因素双指标正交试验判断进给速度、加工时间以及测距等输入变量对反向间隙与螺距累积误差影响的主次关系;通过单因素对比试验获得反...     

计算机控制纳米胶体射流抛光的实验研究

将所设计的纳米颗粒胶体射流加工系统与计算机控制技术结合,实现了计算机控制纳米颗粒胶体射流加工,可将其应用于小曲率半径非球面和自由曲面元件的超光滑表面加工。本试验对一非球曲面高纯石英玻璃元件进行纳米颗粒胶体射流超光滑表面加工,用表面轮廓仪测量了纳米颗粒胶体射流加工前后该高纯石英玻璃元件的表面轮廓曲线。实验结果表明:计算机控制纳米颗粒胶体射流加工,实现了可控的微/纳米材料去除,该非球曲面元件轴向最大去除量为900 nm。原子力显微镜检测结果表明:该元件轮廓截面曲线上的表面粗糙度由Ra2.860 nm降低到Ra0.460 nm。采用纳米颗粒胶体射流技术对小曲率曲面及自由曲面进行超光滑表面加工,是一种确定性超光滑表面的加工方法。