共查询到19条相似文献,搜索用时 125 毫秒
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利用射频磁控溅射法在Si(111)衬底上溅射ZnO中间层和Ga2O3薄膜,然后在管式炉中常压下通氨气对ZnO/Ga2O3薄膜进行氨化,高温下ZnO层在氨气气氛中挥发,而Ga2O3薄膜和氨气反应合成出GaN纳米线.X射线衍射测量结果表明利用该方法制备的GaN纳米线具有沿c轴方向择优生长的六角纤锌矿结构.利用扫描电子显微镜、透射电子显微镜、傅里叶红外透射谱、能量弥散谱及选区电子衍射观测并分析了样品的形貌、成分和晶格结构.研究发现ZnO层的挥发有利于Ga2O3和NH3反应合成GaN纳米线. 相似文献
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Si基氨化ZnO/Ga2O3薄膜制备GaN纳米线 总被引:1,自引:0,他引:1
利用射频磁控溅射法在Si(111)衬底上溅射ZnO中间层和Ga2O3薄膜,然后在管式炉中常压下通氨气对ZnO/Ga2O3薄膜进行氨化,高温下ZnO层在氨气气氛中挥发,而Ga2O3薄膜和氨气反应合成出GaN纳米线.X射线衍射测量结果表明利用该方法制备的GaN纳米线具有沿c轴方向择优生长的六角纤锌矿结构.利用扫描电子显微镜、透射电子显微镜、傅里叶红外透射谱、能量弥散谱及选区电子衍射观测并分析了样品的形貌、成分和晶格结构.研究发现ZnO层的挥发有利于Ga2O3和NH3反应合成GaN纳米线. 相似文献
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YU Zhou YANG Zhi-mei CHEN Hao WU Zhan-wen JIN Yong JIAO Zhi-feng HE Yi WANG Hui LIU Jun-gang GONG Min SUN Xiao-song 《半导体光子学与技术》2007,13(2)
Ga2O3 nano-structures,nanowires and nanosheets are produced on Au pre-coated(111) silicon substrates with chemical vapor deposition(CVD) technique.By evaporating pure Ga powder in the H2O atmosphere under ambient pressure the large-scale preparation of β-Ga2O3 with monoclinic crystalline structure is achieved.The crystalline structures and morphologies of produced Ga2O3 nano-structures are characterized by means of scanning electron microscope(SEM),X-ray diffraction(XRD),selected area electron diffraction(SAED) and transmission electron microscope(TEM).Raman spectrum reveals the typical vibration modes of Ga2O3.The vibration mode shifts corresponding to Ga2O3 nano-structures are not found.Two distinguish photoluminescence(PL) emissions are found at about 399 nm and 469 nm owing to the VO-VGa excitation and VO-VGa-O excitation,respectively.The growth mechanisms of Ga2O3 nanowires and nanosheets are discussed with vapor-liquid-solid(VLS) and vapor-solid(VS) mechanisms. 相似文献
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YU Zhou YANG Zhi-mei CHEN Hao WU Zhan-wen JIN Yong JIAO Zhi-feng HE Yi WANG Hui LIU Jun-gang GONG Min SUN Xiao-song 《半导体光子学与技术》2007,13(2):155-160
Ga2O3 nano-structures, nanowires and nanosheets are produced on Au pre coated(111) silicon substrates with chemical vapor deposition(CVD) technique. By evaporating pure Ga powder in the H2O atmosphere under ambient pressure the large-scale preparation of β-Ga2O3 with monoclinic crystalline structure is achieved. The crystalline structures and morphologies of produced Ga2O3 nano-structures are characterized by means of scanning electron microscope(SEM), X-ray diffraction(XRD), selected area electron diffraction (SAED) and transmission electron microscope(TEM). Raman spectrum reveals the typical vibration modes of Ga2O3 The vibration mode shifts corresponding to Ga2O3 nano-structures are not found. Two distinguish photoluminescence(PL) emissions are found at about 399 nm and 469 nm owing to the VO-VGa excitation and VO-VGaO excitation, respectively. The growth mechanisms of Ga2O3 nanowires and nanosheets are discussed with vapor liquid-solid(VLS) and vapor-solid(VS) mechanisms. 相似文献
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ZHUANG Hui-zhao LI Bao-li XUE Cheng-shan ZHANG Shi-ying WANG De-xiao SHEN Jia-bing 《半导体光子学与技术》2008,14(1):42-47
Large-scale GaN nanowires are successfully synthesized by ammoniating Ga2O3 films on Nb layer deposited on Si(111) substrates at 850 ℃. X-ray diffraction (XRD), scanning electron microscopy (SEM), field-emssion transmission electron microscope(FETEM), Fourier transformed infrared spectrum(FTIR) are used to characterize the structural and morphological properties of the as-synthesized GaN nanowires. The results reveal that the nanowires are pure hexagonal GaN wurtzite structure with a length of about several microns and a diameter between 50 nm and 100 nm. Finally, discussed briefly is the formation mechanism of gallium nitride nanowires. 相似文献
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采用氧化物缓冲层,通过射频磁控溅射系统依次在n型Si(111)衬底上沉积Ga2O3/ZnO(Ga2O3/MgO)薄膜,然后将薄膜于950℃氨化合成GaN纳米结构,氨化时间为15min。采用X射线衍射(XRD)、傅里叶红外吸收谱(FTIR)和高分辨透射电镜(HRTEM)对样品的结构进行了分析,结果显示两种缓冲层下制备的样品均为六方纤锌矿单晶GaN纳米结构,且缓冲层的取向对纳米线的生长方向有很大影响;采用扫描电镜(SEM)对样品的形貌进行了测试,发现纳米线表面光滑,长度可达几十微米,表明采用氧化物缓冲层制备了高质量的GaN线。同时对GaN纳米线的生长机理进行了简单讨论。 相似文献
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通过在1050°C时氨化Ga2O3/Mg薄膜制备出簇状GaN纳米线。用X射线衍射(XRD),傅里叶红外吸收光谱(FTIR)扫描电子显微镜(SEM)和高分辨电子显微镜(HRTEM)对样品进行测试分析。结果表明,GaN纳米线为六万纤锌矿结构单晶相并且成族生长,直径在200~500nm米左右,其长度可达5~10μm。几乎所有纳米线的直径均有逐渐缩小的趋势。对Mg膜的作用进行了初步的分析。 相似文献
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HU Li-jun ZHUANG Hui-zhao XUE Cheng-shan XUE Shou-bin 《半导体光子学与技术》2007,47(1):48-52
Large quantities of gallium nitride(GaN) nanowires have been prepared via ammoniating the Ga2O3 films deposited on the oxidized aluminum layer at 950℃ in a quartz tube. The nanowires have been confirmed as crystalline wurtzite GaN by X-ray diffraction, X-ray photoelectron spectrometry scanning electron microscope and selected-area electron diffraction. Transmission electron microscope (TEM) and scanning electron microscopy(SEM) reveal that the nanowires are amorphous and irregular, with diameters ranging from 30 nm to 80 nm and lengths up to tens of microns. Selected-area electron diffraction indicates that the nanowire with the hexagonal wurtzite structure is the single crystalline. The growth mechanism is discussed briefly. 相似文献
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Mesostructured wurtzite ZnS‐nanowire‐bundle/amine nanocomposites displaying remarkable quantum size effects are synthesized by using a mild‐solution reaction using different amines, such as n‐butylamine, ethylamine, and tetraethylenepentamine, Zn(NO3)2·6 H2O, and CS(NH2)2 or Na2S·9 H2O as the precursors at temperatures ranging from room temperature to 180 °C. A possible mechanism for the shape‐controlled growth of ZnS nanowires and nanocomposites is proposed. Increasing the reaction temperature or dispersing the composite in acetic acid or NaOH solution leads to the destruction of the periodic structure and the formation of individual wurtzite nanowires and their aggregates. The nanowire/amine composites and individual wurtzite nanowires both display obvious quantum size effects. Strong band‐edge emission is observed for the wurtzite ZnS nanowires after removal of the amine. The optical properties of these nanocomposites and nanowires are strongly related to the preparation conditions and can be finely tuned. This technique provides a unique approach for fabricating highly oriented wurtzite ZnS semiconductor nanowires, and can potentially be extended to other semiconducting systems. 相似文献
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Byungdon Min Jong Soo Lee Kyoungah Cho Ju Won Hwang Hyunsuk Kim Man Young Sung Sangsig Kim Jeunghee Park Hee Won Seo Seung Yong Bae Moon-Sook Lee Soon Oh Park Joo-Tae Moon 《Journal of Electronic Materials》2003,32(11):1344-1348
The GaN, GaP, InP, Si3N4, SiO2/Si, SiC, and ZnO semiconductor nanowires were synthesized by a variety of growth methods, and they were wrapped cylindrically
with amorphous aluminum oxide (Al2O3) shells. The Al2O3 was deposited on these seven different semiconductor nanowires by atomic layer deposition (ALD) at a substrate temperature
of 200°C using trimethylaluminum (TMA) and distilled water (H2O). Transmission electron microscopy (TEM) images taken for the nanowires revealed that Al2O3 cylindrical shells surround uniformly all these semiconductor nanowires. Our TEM study illustrates that the ALD of Al2O3 has an excellent capability to coat any semiconductor nanowires conformally; its coating capability is independent of the
chemical component, lattice structure, and growth direction of the nanowires. This study suggests that the ALD of Al2O3 on nanowires is one of the promising methods to prepare cylindrical dielectric shells in coaxially gated, nanowire field-effect
transistors (FETs). 相似文献
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氧化镓纳米带的制备研究 总被引:6,自引:0,他引:6
纳米带是继纳米线、纳米管之后 ,最新报道的又一种准一维纳米结构。文中介绍了 Ga2 O3纳米带制备的新方法。这种方法与首次报道的纳米带的生长方法有很大不同。用扫描电子显微镜和透射电子显微镜对产物形貌进行了分析 ,纳米带宽约 5 0 0 nm,厚度约 1 0 nm,宽度 /厚度比大于 2 0。选区电子衍射 (SAED)分析表明 ,产物是纯净的 Ga2 O3单晶。实验还发现了一些特殊形态的纳米结构 ,如纳米片等 ,证明了纳米带是一种常见并稳定存在的形态。最后 ,根据实验现象对纳米带的生长机制进行了初步的分析与讨论。 相似文献