激光诱导荧光在低温等离子体诊断中的应用

激光诱导荧光技术(LIF)应用到等离子体中已经有超过20年的历史,在等离子体处理中的应用也已经持续了十多年。激光诱导荧光系统可以用于刻蚀、溅射以及薄膜沉积等离子体源的诊断研究。离子密度和速度分布及对流、传播参数等,都可以用LIF直接测量或间接计算得到。LIF可以得到时间分辨和空间分辨的离子分布方程,可用于等离子体热力学和等离子体迁移的研究。     

Investigation of the BF3 plasma particle’s lateral distribution using two-view emission tomography

The uniformity of the (BF₃ + 2% Ar) plasma is investigated by the two-view emission’s optical tomography in an experimental plasma-chemical reactor. This made it possible to reconstruct the lateral concentration distribution of both the ion plasma component B⁺ and free radicals F*. To investigate the possibilities of a tomographic algorithm, the experiment was performed at various pressures in the reactor chamber, an asymmetric gas input was used, artificial nonuniformities of the near-wall magnetic field were introduced, and the influence of the silicon wafer on the lateral particle’s distribution was investigated.     

基于模糊核优化的图像盲去模糊算法

针对图像的模糊算法优化问题,首先选取高斯分布拟合自然图像的分布特性,利用双边滤波器从模糊图像中提取出清晰的图像边缘。针对降噪进行参数设置,在初步估计出模糊核之后,对模糊核进行正规化修正工作。最后在图像复原阶段,利用优化的凸函数拟合自然图像分布,并利用快速傅里叶变换提高算法计算速度。实验结果,表明该模糊核优化算法与现有的其他算法相比,复原后的图像具有更好的视觉效果,且计算时间减少约20%。     

基于多站雷达自适应融合的光滑对称锥体三维重构与参数估计

针对单部雷达提取目标微动参数精度不高和难以实现三维重构的问题,提出了一种基于多视角微动信息自适应融合的三维重构新方法。首先,建立了组网雷达模型和锥体进动模型,在详细分析各散射点微距离变化关系的基础上,对不同视角下的锥顶散射点进行了匹配关联。然后,以每两部雷达的观测信息作为一个目标参数求解组合,采用基于估计方差最小的加权融合算法对各组合求得的参数进行优化处理。最后,利用优化后的参数求解出目标锥顶坐标和锥旋矢量,实现了锥体目标的三维重构。仿真结果表明该方法能有效实现高精度参数的提取和锥体目标的重构。      

Some results on the weight distribution of linear codes

By studying the algebraic structure of the parity check matrix of a linear code we show that the weight distribution is a function only of the quantitiesN_{upsilon}^{u}, the number ofupsiloncolumns of the parity check matrix with ranku. We apply this to obtain a new formula for the weight distribution of the distance3 s-ary Hamming code and for the distance4 s-ary conic code. We give the definition of a conic code and some of its properties.     

A general simulator for VLSI lithography and etching processes: Part II—Application to deposition and etching

The extension of the general process simulator SAMPLE to plasma etching and metallization is described. The etching algorithm is divided into isotropic, anisotropic, and direct milling components and is suitable for modeling wet etching, plasma etching, reactive ion etching, and ion milling. Separate deposition algorithms are used for CVD, sputtering, and planetary deposition. With the extension, it is possible to use a simple keyword repertoire to simulate a sequence of photolithography, etching, and deposition steps to obtain device cross sections at each stage of fabrication.     

固体火箭喷焰的尘埃等离子体非相干散射研究

航天飞机通过电离层时,喷焰提供了相较于周围等离子体的高速中性气体,与背景电离层中的O+离子交换电荷,产生环形离子分布(也称Bump-on-tail分布),这将对非相干散射雷达(incoherent scattering radar,ISR)谱产生显著影响.基于尘埃等离子体非相干散射理论,建立了固体火箭喷焰早期离子Bum...     

基于Fourier-Mellin变换和相干系数法的重复轨道干涉SAR图像配准新方法

相对于单轨双天线InSAR系统,重复轨道InSAR系统由于轨道不能完全平行,导致InSAR图像对间存在夹角,使其配准更为困难。该文针对非平行重复轨道的InSAR问题,提出了一种结合Fourier-Mellin变换和相干系数法的InSAR图像配准算法,对存在夹角的SAR复图像对进行精确配准。该方法用于粗配准时,通过引入非线性图像幅度变换预处理,克服了Fourier-Mellin变换无法直接处理SAR图像对幅度分布动态范围大且不均匀的问题,而用于精配准时,通过引入相干系数法,精确估计了复图像对之间存在的微小角度。以SIR-C/X重复轨道的X波段SAR数据为例,详细比较了传统相干系数配准算法和该文算法在配准精度和计算时间上的差异,从而验证了算法的有效性。     

基于有限域GF上圆锥曲线的公钥密码算法

圆锥曲线密码学是一种新型的公钥密码学,迄今对圆锥曲线密码学的研究成果都是以有限域GF(p)上的圆锥曲线为基础的.本文将有限域GF(p)上的圆锥曲线C(GF(p))推广为有限域GF(2ⁿ)上的圆锥曲线C(GF(2ⁿ)),证明了圆锥曲线C(GF(2ⁿ))上的点和加法运算构成有限交换群(C(GF(2ⁿ)),),并给出了圆锥曲线群(C(GF(2ⁿ)),)的阶的计算.此外,提出了使用有限域GF(2ⁿ)上的圆锥曲线群构造公钥密码系统,并给出了ElGamal加密方案和数字签名算法(DSA)在圆锥曲线C(GF(2ⁿ))上模拟的算法,最后分析其安全性.     

Fabrication of a Superhydrophobic Surface from a Smectic Liquid‐Crystal Defect Array

A novel fabrication method is developed for the preparation of superhydrophobic surfaces. The procedure uses focal conic structures of semi‐fluorinated smectic liquid crystals (LCs) whose periodic toric focal conic domains (TFCDs) are prepared on a surface modified substrate. Reactive ion etching (RIE) on the periodic TFCD surface leads to a superhydrophobic surface with a water contact angle of ～160° and a sliding angle of ～2° for a 10 µL water droplet. The results show that this phenomenon is due to the development of a dual‐scale surface roughness arising from the nanoscale protuberance caused by applying the RIE process to the top of the microscale TFCD arrays. The unique surface behavior is further verified by demonstrating that RIE on a flat lamellar liquid crystal film, in which the director is aligned parallel with surface, results in a relatively low hydrophobicity as compared to when periodic TFCDs are subjected to REI. The observations made in this publication suggest that a new approach exists for selecting potential candidates of superhydrophic surface formation based on spontaneous self‐assembly in smectic liquid‐crystalline materials.     

微波气体击穿过程的模拟计算

本文利用流体模型,将无外加恒定磁场的等离子体当作各项同性的有耗媒质,求得圆柱腔结构中的微波场分布。耦合电子、离子运动的流体方程,对微波等离子体的初始形成过程进行了数值模拟计算。结果表明,在电离的初始阶段,电子、离子密度分布与场分布同步。同时,存在一关键电子密度。超过此密度后,微波场在表面快速衰减,气体电离主要在表面进行。     

一种双频喇叭馈源的相位中心分析

多模圆锥喇叭天线是一种应用较广的高效率喇叭天线,它被广泛应用于反射面初级馈源。双频多模圆锥喇叭天线在收发两个频率处的相位中心是不重合的,当其作为反射面馈源时,其相位中心及安放位置的确定对于反射面天线的性能有着不可忽视的影响。从天线相位中心的定义出发,计算了双频多模喇叭天线在收发频率处的相位中心,并对该天线在偏置反射面系统中的安放位置进行了分析,确定了馈源的最佳安放位置。     

THE SIMULATION FOR MICROWAVE PLASMA BREAKDOWN PROCESS

From the fluid model, the plasma is an isotropic medium. First, it is obtained that the microwave field in a cylindrical cavity filled with plasma, where the microwave comes from vacuum cylindrical waveguide. Coupling with fluid equations for the electron and ion motion, the microwave discharge courses are calculated , The results show that the curves of ion and electron density distributions are similar as the curves of electric field intensity distribution. Abo, a critical electron density is exist. Above this density, microwave field will damp rapidly, this makes the gas ionization mainly happening on the surface.     

Radiation from electromagnetic sources in a plasma

The radiation from electromagnetic sources in an unbounded, isotropic plasma is treated. Using a two-fluid magnetohydrodynamic approach, the problem is formulated in terms of three orthogonal modes, namely, i) the electromagnetic mode, ii) the electron plasma mode and iii) the ion plasma mode. When formulated in this manner, the radiation from simple electromagnetic sources are obtained easily. Three specific sources are treated, namely, i) a point source of electric current, ii) a uniformly moving charge and iii) a short filament with prescribed current distribution. For the case of the electric dipole and the current filament, the total power radiated in each of the three modes are obtained. A point charge moving uniformly with the velocity of sound, for example, is found to excite only the ion plasma mode. The frequency and the angular spectrum of the emitted radiation are obtained. It is found that at frequencies less than a critical frequency which is approximately equal tosqrt{2}times the ion plasma frequency, the radiation has the character of a simple sound wave.     

圆锥和抛物面天线的风荷载及变形特征分析

简述了研究雷达天线风荷载和变形特性所用的测试仪器、测试方法及数据处理。给出了抛物面及圆锥形两种雷达天线的主要研究结果，结果表明对于所研究的构形圆锥天线的阻力和方位力矩系数分别的为圆抛物面天线的1.34倍和4.0倍，而最大弹性变形量却仅为圆抛物面天线的75%，文中对上述两种雷达天线全然不同的风荷载及变形特性作了初步分析。     

朗缪尔探针在射频离子源中的扰动仿真研究

准确的等离子体参数信息对射频离子源的研制十分重要,为获得这些关键参数,需要借助朗缪尔探针作为研究手段。研究利用COMSOL软件作为研究平台,建立射频离子源的几何模型,并加入探针作为变量,通过仿真模拟得到不同功率下的电子密度、电子温度分布,通过对比有、无探针加入的情况下所得参数的变化趋势,来分析朗缪尔探针对射频离子源的扰动情况。研究结果表明,探针放入等离子体后,会对等离子体产生扰动,等离子体放电中心向右偏移大于1 cm。该研究结果为射频离子源的设计以及朗缪尔探针的测量分析提供了参考。     

Optimization of the tomographic algorithm of the reconstruction of plasma irregularities in process reactors of microelectronics

In this article, an algorithm of two-aspect emission optical tomography of plasma taking into account apriori data about the object of investigation is developed. The reconstruction algorithm was tested for statistically large number of phantoms. The cases of incorrect operation of the suggested algorithm were revealed and the methods of its improvement were suggested. The improved algorithm of emission optical tomography compatible with industrial plasmochemical reactors of low-temperature plasma allows us to reconstruct a two-dimensional distribution of plasma particles with the reconstruction error lower than 15% for 90% of randomly selected phantoms.     

基于时频分布迭代的跳频信号参数估计

提出了一种基于时频分布迭代的跳频信号参数估计新算法,利用时频平面最大值,通过计算跳频信号与最优原子时频分布的残差逐次迭代获取匹配于跳频信号分量的时频参数,进而实现跳频信号参数估计.理论分析和仿真结果表明,与基于匹配追踪和粒子群优化的跳频信号参数估计相比,基于时频分布迭代的参数估计算法在保证算法精度的情况下,有效地降低了算法的计算复杂度,为跳频信号盲接收的实时实现提供了一种新方法.     

不均匀非磁化等离子体覆盖三维目标的FDTD分析

针对典型的目标模型,采用RC-FDTD算法计算不均匀非磁化等离子体覆盖三维导体球的双站和单站雷达散射截面（RCS）。分析了等离子体电子密度分布和等离子体碰撞频率对目标RCS缩减的影响。数值结果表明,等离子体隐身技术显著;双站结果显示,不均匀非磁化等离子体能在较大双站角范围内减小目标的RCS;单站结果说明,等离子体包层能在较大的频率范围内对目标RCS的缩减起作用。选择合适的等离子体参数可以加强隐身效果。     

辉光放电等离子体鞘层的计算机模拟

本文利用蒙特卡罗方法,模拟了氩气辉光放电鞘层内离子的运动过程,得到了不同气压和不同放电电压下离子入射阴极的能量分布和角度分布。模拟基于离子与中性原子的电荷转移碰撞和弹性散射两种物理过程,并且分别考虑了碰撞截面与能量相关和不相关两种情况。同时较为系统地研究了放电参数对离子能量分布和角度分布的影响。