Ni 和Ni-PTFE自润滑模具的脱模研究

微塑铸是LIGA技术大批量、低成本生产的关键技术.由于LIGA技术制造的微结构具有较大的高宽比,在脱模过程中,模具侧壁与塑铸材料之间会存在较大的摩擦力.这种摩擦力会损毁模具或塑铸产品,从而给脱模带来困难.本文制作了镍(Ni)模具和Ni-PTFE(聚四氟乙烯)模具,并比较其脱模效果.试验表明,对同一种微结构,Ni-PTFE模具的连续脱模次数要多于Ni模具.     

Ni和Ni-PTFE自润滑模具的脱模研究

微塑铸是LIGA技术大批量、低成本生产的关键技术。由于LIGA技术制造的微结构具有较大的高宽比，在脱模过程中，模具侧壁与塑铸材料之间会存在较大的摩擦力。这种摩擦力会损毁模具或塑铸产品，从而给脱模带来困难。本文制作了镍(Ni)模具和Ni-PTFE(聚四氟乙烯)模具，并比较其脱模效果。试验表明，对同一种微结构，Ni-PTFE模具的连续脱模次数要多于Ni模具。     

热压印技术制作纳米光栅

通过分析脱模过程的摩擦力,讨论了模具表面处理工艺与压模质量的关系,给出了降低脱膜过程摩擦力的工艺方法.实验结果表明,用类聚四氟乙烯膜作为脱模剂能大大减小模具表面与聚合物表面的摩擦力.研究了压模、脱模工艺参数对实验结果的影响,基于HEX-02塑铸系统,真空条件下,在压模温度为195℃,模压压强为8 MPa的环境下,利用热压印技术在PMMA薄膜上复制出周期为120 nm的纳米光栅.     

BSRF上的微细塑铸研究

利用北京同步辐射装置(BSRF)上的LIGA技术制作了镍模具,试验了溶液浇铸、反应浇铸、大气模压、真空模压四种不同的塑铸方法.结果表明采用自制模压装置,采用排气法可以获得与真空模压相近的效果;真空模压在这四种方法中具有最好的精度,但若不进行工艺参数优化,也会导致变形等问题.     

BSRF上的微细塑铸研究

利用北京同步辐射装置 (BSRF)上的LIGA技术制作了镍模具 ,试验了溶液浇铸、反应浇铸、大气模压、真空模压四种不同的塑铸方法。结果表明采用自制模压装置 ,采用排气法可以获得与真空模压相近的效果 ;真空模压在这四种方法中具有最好的精度 ,但若不进行工艺参数优化 ,也会导致变形等问题     

LIGA工艺的发展及应用

介绍了LIGA(lithographie,galvanoformungandabformung)技术以及在此基础上开发出来的准LIGA(like－LIGA)技术、SLIGA(sacrificialLIGA)、M2LIGA(movingmaskLIGA)技术和抗蚀剂回流LIGA(PRLIGA———photoresistreflowLIGA)技术等。利用这一系列LIGA技术,可以生成具有高深宽比的复杂微结构,如微尖阵列、球形曲面、活动部件等,能较好地满足MEMS发展的需要。最后指出了目前这些方法存在的缺陷。     

PDMS多层次蘑菇形微结构的制作

提出了一种基于光刻胶牺牲层技术的用于制作多层次SU-8模具的新方法,并进一步采用浇注成型的方法制作了聚二甲基硅氧烷(PDMS)多层次蘑菇形微结构。在多层次SU-8模具的制作过程中,使用了正性光刻胶BP212作为牺牲层,并采用超声辅助显影的方法使显影的时间大大缩短。通过对多层次SU-8模具预处理,有效减小了多层次SU-8模具与PDMS的结合力,从而提高了PDMS脱模的成功率。对制作的PDMS多层次蘑菇形微结构和PDMS单层次微柱结构进行了接触角测试。结果表明,PDMS多层次蘑菇形微结构的接触角为150.93°±1.6°,PDMS单层次微柱结构的接触角为139.19°±0.1°。由此可知PDMS多层次蘑菇形微结构具有优异的超疏水性能。     

体微加工技术在MEMS中的应用

微机电系统(MEMS)技术的基础是由微电子加工技术发展起来的微结构加工技术，包括表面微加工技术和体微加工技术。其中体微加工技术是微传感器、微执行器制造中最重要的加工技术。该文主要介绍以加工金属、聚合物以及陶瓷为主的LIGA技术，先进硅刻蚀技术(ASE)和石英晶体深槽湿法刻蚀技术。最后给出用LIGA技术和牺牲层技术制作微加速度传感器的例子。     

O_2反应离子深刻蚀PMMA

高深宽比结构是提高微器件性能的重要环节之一。利用RIE深刻技术加工具有高深宽比结构的图形 ,方法简单 :它不象LIGA技术那样 ,需昂贵的同步辐射光源和特制的掩模板 ,对光刻胶的要求也不是特别高 ,利用这种技术深刻蚀PMMA膜 ,以Ni作掩模 ,采用普通的光刻胶曝光技术和湿法刻蚀的方法将Ni掩模图形化 ,然后利用O2 RIE技术刻蚀PMMA ,可以得到深度达 1 0 0 μm ,深宽比大于 1 0的微结构 ,图形表面平整 ,侧壁光滑垂直。在刻蚀过程中 ,氧气压、刻蚀功率等工艺参数对刻蚀结果影响较大。     

LIGA和微细EDM技术制造不锈钢微结构的研究

通过LIGA技术与微细电火花技术相结合，可以在硬质合金、不锈钢等材料上加工出微结构，这一新的方法必将拓宽微细加工的能力和应用范围。利用LIGA技术制备线宽70μm、厚度达730μm的铜工具电极，采用微细电火花技术在不锈钢片上加工出线宽90μm、具有复杂形状的微结构。     

Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review

The by far leading technology for manufacturing MEMS devices is Si-micromachining with its various derivatives. However, many applications of microsystems have requirements on materials basis, geometry, aspect ratio, dimensions, shape, accuracy of microstructures, and number of parts that cannot be fulfilled easily by mainstream silicon-based micromachining technologies. LIGA, an alternative microfabrication process combining deep X-ray lithography, plating-through-mask and molding, enables the highly precise manufacture of high-aspect-ratio microstructures with large structural height ranging from hundreds to thousands of micrometers thick. These tall microstructures can be produced in a variety of materials with well-defined geometry and dimensions, very straight and smooth sidewalls, and tight tolerances. LIGA technology is also well suited for mass fabrication of parts, particularly in polymer.Many microsystems benefit from unique characteristics and advantages of the LIGA process in terms of product performance. The LIGA technology is briefly reviewed. The strengths of the manufacturing method and its main fields of application are emphasized with examples taken from various groups worldwide, especially in micromechanics and microoptics.     

微机械自润滑材料的摩擦性能研究

研究了Ni-MoS2自润滑层在不同工艺条件下的结构特征、形貌，并分析其摩擦特性，发现润滑层表面粗糙度和厚度对摩察系数影响较大；即使MoS2含量较少，Ni-MoS2复合镀层的极限剪切模量也比金属Ni降低很多。这为LIGA技术制造自润滑MEMS器件提供了有益的参考，并提供低MoS2含量的Ni-MoS2复合材料的一些基本性质。     

The LIGA technique and its potential for microsystems-a survey

The LIGA technique, which is being developed at the Research Center Karlsruhe, offers the possibility to manufacture microstructures with arbitrary lateral geometry, lateral dimensions down to below 1 μm and aspect ratios up to 500 from a variety of materials (metals, plastics, and ceramics). The basic steps of X-ray lithography, electroplating, and plastic molding, are briefly described. Examples of applications of the LIGA technique are: optical components (high performance microspectrometer), mechanical components (acceleration sensor with integrated temperature compensation), and fluidic components (micropumps) which are presented and discussed. Microcomponents will be of limited interest in the future if it will not be possible to integrate them into microsystems. Microsystems must be more powerful than the sum total of their components. This is discussed in the final chapter of this article     

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography,galvanoforming, and plastic moulding (LIGA process)

Under the LIGA process for fabricating microstructures having high aspect ratios and great structural heights, synchrotron radiation lithography produces a primary template which is filled with a metal by electrodeposition. The metallic structure so produced is used as a mould insert for fabricating secondary plastic templates which, in mass production, replace the primary template. This is a report about the status of work performed by the Karlsruhe Nuclear Research Center with the cooperation of Siemens AG and the Fraunhofer Institute for Solid State Technology: By irradiation and development of polymethyl methacrylate (PMMA) plates, primary templates were produced which, for structural heights of several hundred μm, exhibit deviations in critical dimensions of less then some 0.1 μm. The best results were obtained with an X-ray mask consisting of a 25 μm thick beryllium foil and 18 μm thick absorber structures consisting of copper and gold. Practically perfect metallic replicas were obtained by electrodeposition of nickel in the PMMA microstructures and even details in structure of less than 0.1 μm size were reproduced. Moulding was done with a methacrylate-based casting resin with an internal mould release agent. By electrodeposition of nickel in the secondary templates, secondary metal structures were produced which practically do not differ from the primary structures. The LIGA process can be expected to be superior to other methods for fabricating microstructures with high aspect ratios if, in series production of microstructures with complex shapes, stringent requirements are imposed on the resolution, the aspect ratio, the structural height, and the parallelism of the structural walls.     

用金刚石薄膜制造X射线掩模版

用金刚石薄膜作为支撑层，金作为吸收体；同时，采用Ｎｉ合金过渡层来解决金刚石与金之间结合力小，热匹配性能差等问题。制作的掩模版具有较好的反差效果。同时，还具有工艺简单，成品率高等特点。     

微细加工新技术—LIGA技术

LIGA技术是近几年才开展起来的一门新技术,是微细加工的一种新方法。本文对这一技术,从简单工艺过程到每个具体工序环节都详细、深入地进行了介绍。LIGA技术是由光刻、电铸、塑铸三个环节组成,尤刻以同步辐射深度X光曝光为主。由于同步辐射X光有非常好的平行性、极高的辐射强度、连续的光谱,使这项技术能够制造出高宽比大到100、厚度可达几百微米、结构侧壁平行线偏差在亚微米范围内的微米级三维立体结构。通过电铸、塑铸就可将这一结构转换成金属或塑料的微结构产品。 这项技术在短短几年的发展过程中,已制造出电机、齿轮、发动机、涡轮、联杆、单色器、光纤联接器、电联接器、喷嘴、泵、阀、加速度传感器等微型结构与器件,被认为是将对下一世纪带来重大影响的一门新技术。     

塑料成型模具设计多媒体与动态演示系统的研制

在对塑料成型工艺、成型设备、成型所用模具的特点进行系统分析的基础上，研制开发了旨在对初入模具行业的技术人员以模具设计知识为指导的塑料成型模具设计多媒体与动态演示系统。该系统利用多媒体计算机的文本、图像、动画、视频和音频的综合处理能力和其交互式特点，借助VB、AUTOCAD、3DS MAX等高级软件，为塑料成型模具设计学习人员创造了一个图文并茂、生动逼真的学习环境。     

Sensorless Force Control for Injection Molding Machine Using Reaction Torque Observer Considering Torsion Phenomenon

Recently, many plastic products have been produced and used. These plastic products are mostly manufactured using injection molding machines. The quality of plastic products depends on the injection force. Therefore, it is important to develop a fine force-control system. Generally, in force-control systems, the force information from the environment is detected by a force sensor. However, control systems using force sensors present problems related to signal noise, sensor cost, narrow bandwidth, and other factors. To overcome these problems, this paper presents a proposal for a new sensorless force-control method using a reaction torque observer. The injection molding machine, which uses a ball screw, has a resonance frequency that is affected by the torsion phenomenon. This new reaction torque observer considers the torsion phenomenon and friction phenomena.      

Development of low loss organic-micromachined interconnects on silicon at microwave frequencies

We present the design and development of an ultra-violet (UV) LIGA (a German acronym for electroplating, lithography and molding) micromachining process on silicon substrates at microwave/millimeter wave frequencies. The process employs an ultra-thick negative photoresist SU-8 that can be spin-coated and processed using conventional lithography techniques. Using this process, we have developed micromachined coplanar waveguide (CPW) interconnects on Si substrates. The conductor-backed micromachined CPW on Si (7.2 /spl Omega/-cm) achieves a measured attenuation of 0.18 dB/cm at 20 GHz.