光电编码器检测装置的安装偏角对检测精度的影响

针对编码器在检测过程中因安装误差产生安装偏角的情况,分析了安装偏角、旋转角度和测量误差之间的关系。建立由安装偏差引起的非同心检测系统安装偏角的模型,通过实验分析3种不同程度的安装偏角$ 0^ \circ～{0.002^ \circ } $、$ 0.1^\circ～{0.102^\circ } $、$ 0.2^\circ～{0.202^\circ } $对被检编码器检测静态精度、动态精度的影响,得出了3种不同实验结果。实验结果表明,在检测编码器时,初次安装可控的安装误差在$ 0^\circ～0.102^\circ $范围内可以满足编码器检测技术指标,超过此安装误差的安全范围会导致编码器检测技术指标偏离检测标准。实验结论对提高编码器的检测精度与可靠性有参考价值。     

Development of an automatic cumulative-lead error measurement system for ballscrew nuts

Ballscrew is a precision mechanical component used to convert rotational motion to linear motion in the precision linear stage. The precision measuring system for the screw's cumulative-lead error is already well known. Up to now, however, there is no suitable measuring equipment for internal cumulative-lead error of the nut. For a matching pair, it is not reasonable to understand the quality of only one piece. This paper presents a developed automatic cumulative-lead error measuring system for ballscrew nuts. The nut is clamped by a rotational stage, in which the moving angle is detected by a rotary encoder. The probing ball is inserted into the nut and remains in contact with the thread groove of the nut. The probe arm is mounted on a linear slide so that when rotating the nut, the probing ball will be pushed by the groove wall and moved axially. A high-resolution diffraction scale is employed to detect the linear movement of the probe to nanometer resolution. Combining the angular and linear motions, the cumulative-lead error of the nut can be realized. In practice, however, the nut will cause typical spindle errors during rotating, including axial slip, radial run out, and tilt motions. These errors have to be compensated in order to guarantee the accuracy of measurement results. A multi-sensor error compensation system is thus developed. Experimental results show the applicability of this developed measuring system.     

Calibration of linear encoders with sub-nanometer uncertainty using an optical-zooming laser interferometer

The nonlinear errors of high-precision linear encoders were calibrated by using a nanometer-length calibrator that was based on the optical-zooming laser interferometer with an optical frequency comb. A transmission-type linear encoder and a reflection-type linear encoder were calibrated, and the cyclic nonlinear errors were evident. The magnitudes of the observed cyclic errors were 0.1 nm and 0.2 nm, respectively, and the best calibration uncertainties were 0.55 nm (k = 2). A traceable calibration service for linear encoders with the best calibration uncertainty in the sub-nanometer range has started based on this work.     

非接触式扫描反射镜转角测量系统

为了提高扫描反射镜转角检测系统的测角范围,建立了基于一字线激光器和线阵CCD的高精度非接触式扫描镜角度检测系统。介绍了检测系统的结构和工作原理,该系统根据激光光斑在CCD上的位置计算扫描反射镜的转角,并利用特殊设计的阵列反射镜增大测角范围。为了降低对加工及装调精度的要求,对系统进行了误差分析,给出了采用多项式拟合法进行角度测量的理论依据。讨论了影响系统检测精度的一系列误差源,计算了系统测量的总误差。最后进行了相关的测量实验。实验结果表明：系统的检测系统分辨率为2.5",测角范围为11°,测角精度可达3",可以满足扫描反射镜对角度测量系统提出的高精度、非接触、大测角范围的要求。     

An evaluation of a modulated laser encoder

This paper introduces a new method of interpolation for sub-nanometer-resolution linear encoders. This method, called SPPE (scanning position probe encoder), uses high-order harmonics information obtained by a sinusoidal scanning pickup located on a periodic grating surface. The proposed encoder uses a current-modulated laser diode with diffractive grating optics. Since the electrical current changes the laser-diode wavelength, the interference light intensity is modulated as a sinusoidal scanning pickup on the scale grating. Phase-detection circuits can decode the position information in the pickup signal by using phase-locked loop techniques. The decoder achieves an interpolation rate of over 1/40,000 with interpolation errors of less than ±1 nm. A new interpolation-error measuring system was developed for the encoder. Finally, the evaluation results reveal that the presented encoder shows both high resolution and strong robustness.     

小型编码器动态精度检测的安装误差控制

研究了小型编码器动态检测过程中由编码器与基准编码器轴系中心线不完全重合产生的偏角导入的安装误差,以便提高编码器检测装置的准确性和可靠性。分析了安装误差对被检编码器检测精度的影响,推导出了存在安装偏角时引入的安装误差公式及其控制范围公式。为了使编码器的动态检测能准确地反映编码器的实际精度,给出了最大偏角值α_(max)及高度差D_(max)的允许范围。使用现有21位检测装置对15位被检编码器进行了检测实验,分别对安装良好、小偏角和大偏角情况下的测量结果和安装误差曲线进行了比较和分析。结果表明:检测15位编码器时,将安装偏角值控制在0.36°以下可满足动态精度检测要求。本文提出的误差公式及控制方法可以运用在不同类型、不同精度的编码器检测过程中,对提高小型光电编码器动态检测的精度和可靠性很有意义。     

A 6-degree-of-freedom measurement system for the accuracy of X-Y stages

A precision 6-degree-of-freedom measurement system has been developed for simultaneous on-line measurements of six motion errors of an X-Y stage. The system employs four laser Doppler scales and two quadrant photo detectors to detect the positions and the rotations of an optical reflection device mounted on the top of the X-Y stage. Compared to the HP5528A system, the linear positioning accuracy of the developed measurement system is better than ±0.1 μm to the range of 200 mm and the vertical straightness error is within ±1.5 μm for the measuring range of ±0.1 mm. The yaw and pitch errors are about ±1 arcsec, and the roll error is about ±3 arcsec within the range of ±50 arcsec.     

Development of a simple system for the simultaneous measurement of pitch, yaw and roll angular errors of a linear stage

A simple measurement system has been developed and implemented for the simultaneous measurement of pitch, yaw and roll of the moving axes of a linear stage. This developed system is based on the principle of the diffractive theorem and optical triangulation. It is composed of a laser source, two quadrant detectors and a diffracting grating. The diffraction grating mounted on the moving axes of a stage reflects an incident laser beam into several diffractive rays and two quadrant detectors are set up for detecting the position of ±1st-order diffraction rays. When the diffraction grating moves, the locations where the diffractive beams are generated change and also the positions of the spots on two quadrant detectors. According to the relationship between the three angular motions of a moving stage and the output coordinates of two quadrant detectors, an inverse algorithm is used to solve these pitch, yaw and roll angular errors through a kinematic analysis .     

Development of a measuring method for several types of programmed tool paths for NC machine tools using a laser displacement interferometer and a rotary encoder

Many circular motion measuring methods for NC machine tools have been proposed, however, the drawback common to many of these methods is the restriction on the radius size due to the short measuring range of the displacement transducers used. Moreover, most of these measurement tools are specialized, and can only perform circular test path measurements. A circularity test method using a laser displacement interferometer and a rotary encoder has been developed. The measuring method features a much longer range of motion than ordinal circular test methods such as the double ball bar (DBB) method and, therefore, the radius restriction on these measurements is greatly reduced. Moreover, this measuring system can also be used for the evaluation of positioning accuracy and other more complex test paths.

The proposed device consists primarily of a laser displacement interferometer and a rotary encoder. The holders for the interferometer head and the retroreflector are connected with a stainless steel rod. The retroreflector holder has a synthetic resin linear bearing allowing it to move relative to the interferometer head so that both optical components are always facing each other. The laser interferometer measures the change in distance between the interferometer head and the retroreflector, and the rotary encoder measures the rotation angle of the stainless steel rod.

In this paper, the background, measuring principle and apparatus structure are briefly described. The experimental setup is also presented. The apparatus was employed in several measuring experiments, including circularity tests for a vertical machining center. The results from these experiments support the validity of this measurement apparatus.     

数控机床圆轨迹运动误差测试仪器和方法的研究

介绍一种新的可用于数控机床圆轨迹运动误差测试的二雏球杆仪。该二维球杆仪包括一根两端与精密小球相连的测量杆和一台高精度的旋转编码器，测量杆内置有可用于测量位移的高精度传感器，旋转编码器用来精确测量杆的转动角度。分析了测量仪器的误差，并进行了校正。试验表明，该仪器不仅可测量出机床圆周运动轨迹精度，用于机床的精度评价，还可以测出机床圆周运动任意指令位置的定位误差值，为进一步用于对圆轨迹的误差补偿打下基础。     

Motion Error Compensation Method for Hydrostatic Tables Using Actively Controlled Capillaries

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was 2.4 /im, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to 0.12 μm and 0.20 arcsec, which were about 1/15^th and l/6^th of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.     

Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy

This paper describes a multi-probe scanning system comprising three laser interferometers and one autocollimator to measure a flat bar mirror profile with nanometer accuracy. The laser interferometers probe the surface of the flat bar mirror that is fixed on top of a scanning stage, while the autocollimator simultaneously measures the yaw error of the scanning stage. The flat bar mirror profile and horizontal straightness motion error are reconstructed by an application of simultaneous linear equations and least-squares method. Measurement uncertainties of the flat bar mirror profile were numerically evaluated for different installation distances between the laser interferometers. The average measurement uncertainty was found to be only 10 nm with installation distances of 10 and 21 mm between the first and second, and first and third interferometers, respectively. To validate the simulation results, a prototype system was built using an X–Y linear stage driven by a stepper motor with steps of 1 mm along the X direction. Experiments were conducted with fixed interferometers distances of 10 and 21 mm, as in the simulation, on a flat bar mirror with a profile known to an accuracy of λ = 632.8 nm. The average value of two standard deviations (95%) of the profile calculated over ten experiments was approximately 10 nm. Other results from the experiment showed that the system can also measure the yaw and horizontal straightness motion errors successfully at a high horizontal resolution. Comparing with the results measured by ZYGO's interferometer, our measured data excluding some edge points showed agreement to within approximately 10 nm. Therefore, we concluded that our measurement profile has an accuracy in the nanometer range.     

A new vacuum interferometric comparator for calibrating the fine linear encoders and scales

A new one-dimensional laser interferometric comparator has been developed for the calibration of the fine linear encoders and scales up to 1600 mm. In the comparator, the interferometer is fully arranged in vacuum and the calibration objects are mounted under atmospheric conditions. The Abbe’s principle on the alignment of workpiece with the measuring beam is satisfied in the structure of a long measuring range. A travelling slide table, on which the calibration objects are mounted, is supported on guide rails by the air bearing and is driven through a recirculating ballscrew. The exhaust of the air bearing is guided to the exterior of the booth in which the comparator is placed. The travel of the table is measured by a reference interferometer with a beam path in vacuum shielded by an evacuated metal bellow, so that the effect of refractive index is eliminated. The laser beam is led by a polarization plane maintaining glass fiber from a self-designed stabilised He–Ne laser, which is placed in an adjacency room, to the beam inlet of the main unit. The measurement system can input the interferometer signal by the encoder signal or the scale signal, and input the encoder or scale data by the interferometer signal. The system resolution is approximately 0.8 nm and maximum travelling measurement speed is 20 mm/s at continuous measurement. The uncertainly (k=2) of measurement is approximately 30 nm in linear encoders of 500 mm length and, approximately 40 nm in scales of 500 mm, although it depends on the length and the characteristics of encoders and scales. It is successful such a high accuracy that the uncertainty of measurement system is smaller than 40 nm in encoders of 1 m length.     

Prediction and compensation of motion accuracy in a linear motion bearing table

In the present research, a corrective machining algorithm is introduced to improve the motion accuracy of linear motion bearing tables. The algorithm commences with reverse analysis, in which the rail form error is estimated from the measured linear and angular motion errors. In the next step, the rail is remachined to reduce the estimated form error. Then, the motion errors are measured again, and the procedure is repeated until the measured errors are sufficiently small. A transfer function, which represents the bearing force variation of a bearing block with respect to the spatial frequency components of the rail form error, is used to describe the characteristics of the linear motion bearings. Computations are carried out via the Hertz contact theory. From the theoretical evaluation, it is evident that the magnitude of the normalized transfer function quantitatively represents the accuracy averaging effect at each spatial frequency and that motion errors are not affected by the preload and the stiffness of the bearings. It is also clear that the algorithm can be used to estimate the equivalent rail form error in terms of motion errors. As a practical application, the algorithm is utilized to improve the motion errors of an XY table with linear motion bearings. The experimental results show that the motion accuracy of a linear motion bearing table can be improved to about 1 μm of linear motion error and about 1-2 arcsec of angular motion error by applying the proposed algorithm.     

Method for the evaluation of optical encoders performance under vibration

Optical encoders are the preferred choice for position measurement, both linear and angular, when high accuracy is required. Their performance is widely affected by deformation, temperature and vibration. This last aspect is analysed, showing the limitations found in conventional methods of performance evaluation. The determining parameters, such as sweep type, sampling rate, trigger etc. are examined and a final diagram of measuring accuracy versus frequency is presented, where aspects as resonance effects and measuring uncertainty are identified and discussed. Experimental analyses have been made in a commercial linear optical encoder and show that its measuring error is three times its precision, and wide areas of large measuring uncertainty are present in the frequency span. The information obtained through this method can be used to improve encoder design and mounting conditions in the machine, reducing the total error.     

基于FPGA脉冲计数的瞬时角加速度测量系统

设计了一种基于现场可编程门阵列(FPGA)脉冲计数原理的瞬时角加速度测量系统。该系统可以跟踪测量转轴的瞬时角加速度,且能够补偿因编码器原理、工艺和安装偏差产生的周期性非线性系统误差,从而显著提高测量精度。该系统利用FPGA高速并行的特点,采用乒乓流水线采集机制,对磁旋转编码器的输出脉冲进行精确实时测量,在校正过程中通过计算测量波形相对于理论波形的偏差特征值来拟合出补偿系数,实现在测量过程中对瞬时角加速度测量误差的补偿。实验表明：该系统具有高精度和高分辨率,可以有效补偿由旋转编码器波形偏差而导致的瞬时测量误差,提高测试精度。     

Development of nanopositioning mechanism with real-time compensation algorithm to improve the positional accuracy of a linear stage

A compensation mechanism with six degrees of freedom (DOF) was developed to enable precise control of a linear stage. Geometric, thermally induced, and dynamic errors in the linear stage were compensated for in real time by the nanopositioning stage. A stage-based hinge with high structural stiffness and rapid response characteristics was modified for parallel operation. The stage’s full range of motion was measured and kinematics was used to calculate the displacement required by each actuator to compensate for the errors. Except for the displacement error of the linear stage, the contribution of each error source was measured by a reference mirror and five capacitive sensors. A compensation algorithm, based on a recursive method, was used to improve the positioning accuracy of the system. The performance of the stage presented here was investigated by measuring, and compensating for, the five-DOF linear stage errors in real time. In practice, the peak-to-valley errors of the translational and rotational errors were reduced by 89% and 93%, respectively.     

旋转变压器用高精度编码器的设计

本文介绍了一种提高旋转变压器测角精度的方法,采用硬件补偿型编码器电路,可将数字精度由１３位提高到１５位,并且这种补偿方法具有一定的推广价值。     

两步法测量编码器测角误差

由多面体和自准直仪组成的编码器角度检测系统测量编码器误差,得到的编码器误差中不但包含编码器误差,而且包含多面体检定误差.根据两步法的使用条件,将两步法应用于光电轴角编码器测角误差数据的处理,分别得到多面体检定误差和编码器测角误差,误差分离的结果与采用其他方法得到的结果相近,但用两步法计算需要的测量数据大大减少.比较结果证明,与其他测量方法相比,此方法可以提高测量效率90%以上,缩短检测时间近80%.     

基准圆光栅偏心检测及测角误差补偿

为了修正关节测试平台中由圆光栅安装偏心所产生的测量误差,建立了圆光栅偏心测角误差补偿模型并对安装偏心检测方法进行研究。首先,根据圆光栅测角与偏心参数间的几何关系,推导出圆光栅测量误差补偿模型。然后,描述了采用双读数头对比接收正弦信号间相位差,检测偏心参数的方法和原理;通过合成信号的李萨茹图形,检测出关节测试平台内圆光栅的偏心距及偏心方向。最后,根据所推导的偏心测角误差补偿公式对测试系统进行修正。对比实验结果表明:修正后的圆光栅测角精度大幅提高,测量精度提高了近5倍,满足关节测试平台的测量精度要求。