共查询到20条相似文献,搜索用时 15 毫秒
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设计一种湿度传感器。该传感器选用聚酰亚胺作为湿度传感器的感湿介质,采用叉指电容式结构以增加感湿灵敏度,以电荷转移电路为微电容测量电路,用0.35μm多晶硅栅进行设计,形成单片集成湿度传感器。整个组成电路均与CMOS工艺兼容。仿真结果表明:在测量激励方波激励下,片上湿度传感器在27℃下模拟显示出较好的直流电压输出特性。 相似文献
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A capacitive surface-micromachined sensor suitable for the measurement of liquid and gas pressures was fabricated. The structure consists of a polysilicon stationary electrode suspended 0.7 μm above a 20-μm-thick lightly doped silicon diaphragm formed by a patterned etch stop. The a priori patterning of the buried etch stop yields diaphragm widths independent of wafer thickness variations with excellent alignment. The design described here has a pressure range of 100 PSI, a nominal capacitance of 3.5 pF with a full scale span of 0.8 pF, and a temperature coefficient of 100 ppm°C-1. Each device, including a matched reference capacitor, occupies 2.9 mm2 , yielding approximately 2000 devices per 100-mm wafer 相似文献
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This paper presents a novel high sensitive MEMS capacitive pressure sensor that can be used as a part of LC tank implant circuit for biomedical applications. The pressure sensor has been designed to measure pressures in the range of 0–60 mmHg that is in the range of intraocular pressure sensors. Intraocular pressure sensors are important in detection and treatment of an incurable disease called glaucoma. In this paper two methods are presented to improve the sensitivity of the capacitive pressure sensor. First low stress doped polysilicon material is used as a biocompatible material instead of p++silicon in previous work (Gu in Microfabrication of an intraocular pressure sensor, M.Sc Thesis, Michigan State University, Department of Electrical and Computer Engineering, 2005) and then some slots are added to the poly Si diaphragm. The novelty of this research relies on adding some slots on the sensor diaphragm to reduce the effect of residual stress and stiffness of diaphragm. The slotted diaphragm makes capacitive pressure sensor more sensitive that is more suitable for measuring intraocular pressure. The results yield a sensor sensitivity of 1.811 × 10?5 for p++silicon clamped, 2.464 × 10?5 1/Pa for polysilicon clamped and 1.13 × 10?4 1/Pa for polysilicon slotted diaphragm. It can be seen that the sensitivity of the sensor with slotted poly Si diaphragm increased 6.2 times compared with previous work (clamped p++silicon diaphragm). 相似文献
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Rao K. Srinivasa Samyuktha W. Vardhan D. Vazad Naidu B. Girish Kumar P. Ashok Sravani K. Girija Guha Koushik 《Microsystem Technologies》2020,26(8):2371-2379
Microsystem Technologies - This paper presents the design and simulation of a MEMS based clamped capacitive pressure sensor for blood pressure measurement. Normally, Blood pressure for human beings... 相似文献
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Microsystem Technologies - In this paper, we present a new design of diaphragm that supported by frog arms for MEMS capacitive microphone structure. The proposed diaphragm reduces the air damping... 相似文献
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A monolithically integrated surface micromachined touch mode capacitive pressure sensor 总被引:2,自引:0,他引:2
A monolithically integrated surface micromachined touch mode capacitive pressure sensor and its interface circuits are presented. The device includes the capacitance to voltage, and capacitance to frequency converters on the same chip. The sensor is fabricated using a surface micromachining technology, which is processed simultaneously with a conventional 2.0-μm double-poly, double-metal n-well CMOS process. The performance of the integrated sensor meets the design specifications of good linearity and good stability. Evaluation results on the completed ‘sensor and circuit' chip are presented. 相似文献
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In this paper, a treatment of respiratory disorders with brushless DC motor (BLDC) driven positive airway pressure (PAP) respirator is developed. The proposed schema of the system consists of a BLDC motor driven blower fan aided by a MEMS capacitive type pressure sensor to measure respiration rate (RR). To measure the respiration rate, the array of such sensors are mounted below right nostril (RN) and left nostril (LN), in such a way that the nasal airflow during inspiration and expiration impinge on the sensor diaphragms directly. Due to irregularities in nasal airflow in some respiratory diseases, the RR varies from the normal rate (12–20). Thus, a supporting airflow regulatory system has been designed to reduce abnormalities in RR. The supporting system consists of a positive airway pressure (PAP) respirator with a blower fan to relieve patients breathing abnormalities. The MEMS based RR sensors help to monitor patients breathing rate continuously and finally maintain the required air pressure/flow by regulating the rpm of the blower fan through BLDC motor drive. In order to implement such a control action, we have chosen the sensorless drive of BLDC motor to construct a transportable as well as noise immune system. An algorithm has been developed to sustain normal RR for both bradypnea (RR < 12) and trachypnea (RR > 20), which puts into operation through ATmega 328 to facilitate high level precision controlled action. The control system alongwith the sensory part occupies limited space in few centimeters with light weight. As a result, the electronics of the whole system can be easily mounted at the outer surface of the tube connected with the nasal mask. The scheme of such a portable and cost effective system is described in this present work. 相似文献
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目前电容式MEMS超声传感器(CMUS)多为收发一体结构,但二种工作模式对传感器结构要求存在很大差异,设计时为了兼顾收发性能往往不能使传感器性能达到最优;此外,传统的电容式MEMS超声传感器还存在寄生电容大的缺点。针对以上问题,基于收发分离的思想,设计了一种专用作超声接收的MEMS电容式传感器,结构上采用上下电极引线互错,单元间电极联线交错的方式来减小寄生电容。通过理论分析和ANSYS仿真得到所设计传感器的最佳工作电压为586V,灵敏度为174.2fF/Pa,满足现有超声接收传感器的应用要求。 相似文献
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Microsystem Technologies - There is a need to establish an ultra-small micro pressure sensors in dynamic performance for intracranial monitoring which can reduce the risk of inflammation and... 相似文献
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Microsystem Technologies - In this paper, a diaphragm based MEMS capacitive pressure sensor array in conjunction with signal conditioning circuitry is designed for measuring Heart Rate (HR) of... 相似文献
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A three-electrode capacitive pressure sensor for touch-mode operation with sensitivity of 0.030 pF/kPa (or 10.4 mV/kPa using
CP-10 C/V converter circuit) in the pressure range of 170–280 kPa is presented with theoretical explanation of experimental
results. A special ring structure is designed to integrate a sensing capacitor and a reference capacitor into the same cavity
to partially cancel out the temperature effect. A third electrode is included to eliminate two-level connections without reducing
its pressure sensitivity. The sensor offers the advantages of simple fabrication processes, planar connections, as well as
high sensitivity, near-linear output, and large over-range pressure. 相似文献
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Daisuke Yamane Takaaki Matsushima Toshifumi Konishi Hiroshi Toshiyoshi Kazuya Masu Katsuyuki Machida 《Microsystem Technologies》2016,22(3):459-464
This paper reports a novel dual-axis microelectromechanical systems (MEMS) capacitive inertial sensor that utilizes multi-layered electroplated gold. All the MEMS structures are made by gold electroplating that is used as a post complementary metal-oxide semiconductor (CMOS) process. Due to the high density of gold, the Brownian noise on the proof mass becomes lower than those made of other materials such as silicon in the same size. The single gold proof mass works as a dual-axis sensing electrode by utilizing both out-of-plane (Z axis) and in-plane (X axis) motions; the proof mass has been designed to be 660 μm × 660 μm in area with the thickness of 12 μm, and the actual Brownian noise in the proof mass has been measured to be 1.2 \({\upmu}{\text{G/}}\sqrt {\text{Hz}}\) (in Z axis) and 0.29 \({\upmu}{\text{G/}}\sqrt {\text{Hz}}\) (in X axis) at room temperature, where 1 G = 9.8 m/s2. The miniaturized dual-axis MEMS accelerometer can be implemented in integrated CMOS-MEMS accelerometers to detect a broad range of acceleration with sub-1G resolution on a single sensor chip. 相似文献
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基于MEMS技术的微电容式加速度传感器的设计 总被引:2,自引:0,他引:2
给出了一种基于MEMS技术制作的微电容式加速度传感器的结构及工艺。为了准确地把握这种微电容式加速度传感器的力学和电学特性,仔细地建立了它的力学模型。在此基础上,详细分析了它的动态特性———模态。并用有限元的方法分析和计算了微电容式加速度传感器的加速度与电容信号的非线性输入输出关系,并结合实测参数验证了模型的有效性。最后提出了一种详细的有效的基于MEMS技术的微电容式加速度传感器的结构以及加工工艺流程。基于MEMS技术制作的微电容式加速度传感器具有结构简单、工作可靠和工作范围大的特点。根据这套方法,可以比较方便地设计并加工不同测量要求的加速度计。 相似文献
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In this paper a novel single-chip microelectromechanical systems (MEMS) capacitive fingerprint sensor with slotted membrane is developed to improve the sensitivity. The capacitive sensor consists of a thin, flexible membrane and a rigid back plate with air gap. In this study with making slots in upper electrode to decrease the mechanical stiffness of the membrane, using proportional T-shaped protrusion on diaphragm in order to concentrate the force from finger ridges, making holes in lower electrode to reduce the air damping and using low stress material for diaphragm, we have been succeeded to design a novel MEMS fingerprint sensor with high sensitivity compared with the previous works (Sato et al., IEEE Trans Electron Devices 52:1026–1032, 2005; Damghanian and Majlis, 2008 IEEE International Conference on Semiconductor Electronics (ICSE 2008), pp 634–638 2008). The behaviors of the fingerprint sensor with clamped and slotted membranes are analyzed using the finite element method (FEM). The results yield a sensitivity of 1.44 fF/Mpa for the clamped and 3.22 fF/Mpa for the slotted fingerprint sensor with a 50 × 50 μm2 diaphragm. The sensitivity of the slotted structure is increased 2.236 times. 相似文献
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A novel single-chip microelectromechanical systems (MEMS) capacitive microphone with a slotted diaphragm for sound sensing
is developed to minimize the microphone size and improve the sensitivity by decreasing the mechanical stiffness of the diaphragm.
The behaviors of the microphones with clamped and slotted diaphragms are analyzed using the finite element method (FEM). According
to the results, a clamped microphone with a 2.43 × 2.43 mm2 diaphragm and a slotted one with a 1.5 × 1.5 mm2 diaphragm have the same mechanical sensitivity, but the size of slotted microphone is at least 1.62 times smaller than clamped
structure. The results also yield a sensitivity of 5.33 × 10−6 pF/Pa for the clamped and 3.87 × 10−5 pF/Pa for the slotted microphone with a 0.5 × 0.5 mm2 diaphragm. The sensitivity of the slotted diaphragm is increased 7.27 times. The pull-in voltage of the clamped microphone
is 105 V, and slotted one is 49 V. The pull-in voltage of the slotted microphone is about 53% decreased. 相似文献