光伏InSb探测器R0A值的测试与分析

对所生产的光伏InSb器件R0A值进行了测试,结面积为 φ2.9mm的单元器件R0A值在5.71×104～5.75×106Ωcm2之间,50×100μm2的线列器件典型R0A值为3×104Ωcm2,对测试结果进行了分析.讨论了器件表面漏电对R0A值的影响.     

背照式InGaN紫外探测器的制备与数值模拟

研究了背照式InGaN p-i-n结构的紫外探测器的制备与数值模拟.通过低压金属有机化学气相沉积(MOCVD)方法生长p-GaN/i-InGaN/n-GaN外延片,采用标准的Ⅲ-Ⅴ族器件制备工艺,成功制备出p-i-n结构的InGaN紫外探测器.探测器台面半径为30 μm,在-5V偏压下暗电流为-6.47×10 1 2 A,对应的电流密度为2.29×10-7 A/cm2.该探测器响应波段为360～380 nm,在371 nm处达到峰值响应率为0.21 A/W,对应的外量子效率为70％,内量子效率为78.4％.零偏压下,优值因子R0A=5.66×107 Ω·cm2,对应的探测率D* =2.34×1013 cm·Hz1/2·W-1.同时,利用Silvaco TCAD软件进行数值模拟,响应率曲线仿真值与实验值拟合较好.     

2×2有机聚合物的全内反射型热光光开关

利用有机聚合物材料的负性热光效应 ,设计并研制成功了 2× 2全内反射型光开关。所研制的无阻塞 2× 2光开关 ,具有 >2 7dB的消光比 ,全内反射状态下 ,器件驱动功率约为 132mW (驱动电压约 3V×驱动电流约 4 4mA) ,这一驱动功率值可以降至 5 0～ 6 0mW ,同时给出器件插入损耗的测试结果。     

MBE生长的跨导为186mS/mm的AlGaN/GaN HEMT

用分子束外延 ( MBE)技术研制出了 Al Ga N/Ga N高电子迁移率晶体管 ( HEMT)材料 ,其室温迁移率为 10 35cm2 /V· s、二维电子气浓度为 1.0× 10 13 cm - 2 ;77K迁移率为 2 6 53cm2 /V· s、二维电子气浓度为 9.6× 10 12 cm- 2 。用此材料研制了栅长为 1μm、栅宽为 80μm、源 -漏间距为 4μm的 Al Ga N/Ga N HEMT,其室温最大非本征跨导为 186 m S/mm、最大漏极饱和电流密度为 92 5m A/mm、特征频率为 18.8GH z。另外 ,还研制了具有 2 0个栅指 (总栅宽为 2 0× 80μm =1.6 mm )的大尺寸器件 ,该器件的最大漏极饱和电流为 1.33A。     

加压布里奇曼法生长大直径HgCdTe晶体

根据加压改进布里奇曼法 ,采用“二次配料”工艺成功地生长了直径 40 mm的大直径 Hg Cd Te (组分 x≈0 .2 0 )晶体 .采用加压技术 ,平衡部分石英安瓶内的高汞蒸汽压 ,有效地避免了石英安瓶的爆裂 ;采用“二次配料”工艺 ,大大降低了生长温度 ;合理选择温度梯度和生长速度 ,获得了有较好结晶性和组分均匀性的 Hg Cd Te晶体 .分析表明 :Hg Cd Te晶片的载流子浓度 n77≤ 4× 10 1 4 cm- 3 ,迁移率 μ77≥ 1× 10 5 cm2 /(V· s) ,少数载流子寿命值 τ≥ 2 .0 μs,80 K时简单的性能测试用光导探测器件的探测率 D*为 1.1× 10 1 0 cm· Hz1 /2 /W.     

4H-SiC混合 PN/ Schottky二极管的研制

报道了 4H- Si C混合 PN / Schottky二极管的设计、制备和特性 .该器件用镍作为肖特基接触金属 ,使用了结终端扩展 (JTE)技术 .在肖特基接触下的 n型漂移区采用多能量注入的方法形成 P区而组成面对面的 PN结 ,这些 PN结将肖特基接触屏蔽在高场之外 ,离子注入的退化是在 15 0 0℃下进行了 30 min.器件可耐压 6 0 0 V,在 6 0 0 V时的最小反向漏电流为 1× 10 - 3A/ cm2 . 10 0 0μm的大器件在正向电压为 3V时电流密度为 2 0 0 A/ cm2 ,而 30 0μm的小尺寸器件在正向电压为 3.5 V电流密度可达 10 0 0 A/ cm2     

fMAX为425GHz转移衬底InP／InGaAa／InP双异质结双极晶体管

美国UniversityofCalifornia采用转移衬底技术已研制成fMAX为 4 2 5GHz ,fT 为 14 1GHz的InP/InGaAs/InP双异质结双极晶体管 (DHBT) ,这是目前所报道DHBT最高的fMAX 器件的发射极接触面积为 0 5 μm× 8μm。在Jc =5× 10 4 A/cm2 下 ,击穿电压BVCEO为 8V ,且使电流增益 β为 4 3。MBE生长InP/InGaAs/InPDHBT的层结构如表所示。表　MBE生长InP/InGaAs/InPDHBT的层结构LayerMaterialDoping ThicknessEmittercap InGaAs 1× 10 19∶Si 30 0GradeInGaAs/InAlAs 1× 10 19∶Si 2 0 0N+ + emitterInp 1× 10 …     

AlGaN/GaN异质结构欧姆接触的研制

研究了 Ga N高温宽禁带半导体外延层上欧姆接触的制备工艺 ,讨论了几种测试方法的优缺点 ,并根据器件制作的工艺兼容性 ,在 n-Ga N样品上获得了 4× 1 0 - 6 Ω·cm2的欧姆接触 ,在 Al Ga N/Ga N异质结构样品上获得了 4× 1 0 - 4Ω· cm2 的欧姆接触。实验结果表明 ,Al Ga N/Ga N上低阻欧姆接触的制备及其工艺兼容性是Ga N HFET器件研制的技术难点     

MBE生长的高质量AlGaAs/InGaAs双δ掺杂PHEMT结构的材料

用 MBE方法制备的 PHEMT微结构材料 ,其 2 DEG浓度随材料结构的不同在 2 .0— 4.0× 1 0 12 cm- 2 之间 ,室温霍耳迁移率在 50 0 0— 650 0 cm2 · V- 1· s- 1之间 .制备的 PHEMT器件 ,栅长为 0 .7μm的器件的直流特性 :Idss～ 2 80 m A/mm,Imax～ 52 0— 580 m A/mm,gm～ 32 0— 40 0 m S/mm,BVDS>1 5V( IDS=1 m A/mm) ,BVGS>1 0 V,微波特性 :P0 ～ 60 0— 90 0 m W/mm,G～ 6— 1 0 d B,ηadd～ 40— 60 % ;栅长为 0 .4μm的器件的直流特性 :Imax～ 80 0 m A/mm,gm>40 0 m S/mm.     

集成式HgCdTe红外双色探测器列阵

首次报道了集成中波 1/中波 2 (MW1/MW2 )的HgCdTe红外双色探测器的材料生长、器件制备及其性能 .采用分子束外延 (MBE)技术 ,生长了p p P N型Hg1-xCdxTe多层异质结材料 .通过B+ 注入、台面腐蚀、爬坡金属化、台面侧向钝化及互连等工艺 ,得到了 80元的原理型HgCdTe红外双色探测器 .纵向上背靠背的 2个光电二极管分别有电极输出 ,确保了空间上同步和时间上同时的探测 ,并能独立地选择最佳工作偏压 .它适于常规的背照射工作方式 ,且有大的空间填充因子 .在液氮温度下 ,2个波段的光电二极管截止波长λc 分别为 3.0 4 μm和 5 .74 μm ,对应的R0 A值为 3.85× 10 5Ωcm2 和 3.0 2× 10 2 Ωcm2 .测得MW1、MW2的峰值探测率Dλp 分别为 1.5 7× 10 11cmHz1/2 /W和 5 .6 3×10 10 cmHz1/2 /W .得到 2个波段的光谱响应 ,且MW2光电二极管的光谱串音为 0 .4 6 % ,MW1光电二极管的光谱串音为 6 .34% .     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.