Optimization of planar interdigitated microelectrode array for biofluid transport by AC electrothermal effect

Point-of-care (POC) diagnostics is one of the most important applications for microfluidic research. However, the development of microfluidic POC devices needs to overcome great obstacles to reach market. One challenge is to find a chip-scale pumping strategy that is of low cost, small size, and light weight. Because of their simple implementation, electrokinetic techniques have been extensively investigated as a promising candidate for realizing disposable pumps, with the majority of research effort focusing on direct current and alternating current (AC) electroosmosis. As POC applications often need to handle conductive biofluids with medium to high salt content, AC electrothermal (ACET) effect has been investigated recently for pumping of biofluids, albeit with less than desirable pumping performance. In order to achieve effective on-chip ACET micropumps, this paper presents one of the first efforts in optimizing ACET micropump design utilizing planar interdigitated electrodes. The effects of electrode dimensions on pumping rate were numerically studied using COMSOL Multiphysics and MATLAB, and an optimal ratio of electrode geometry was found for various pumping scenarios. The optimal geometry ratio was tested to be valid over a wide range of electrode characteristic lengths, AC signals, and fluid ionic strengths. Experimental validation of the simulation results was also conducted, and higher flow velocities over prior reports were consistently demonstrated by optimized electrode arrays.     

Design of a relaying electroosmosis pump driven by low-voltage DC

Electroosmosis pumps (EOPs) have been widely used for manipulating small amounts of reagents for chemical and biological analysis. Traditionally, a high-voltage DC has to be applied in order to achieve the required flow rate. One alternative is to use low AC voltage. Here we propose another solution, which, instead of using a high-voltage DC or low AC voltage, adds a low-voltage DC to an array of electrodes. This design of EOP is called a relaying EOP or cascade EOP. In this study, we intend to push the limit of the low-voltage further down to 2 V by patterning a dense electrode array in a straight microchannel. Two patterns of interdigitated electrodes, symmetric with equal size electrodes and asymmetric with unequal size electrodes, are proposed. Simulations are performed to optimize the distribution and geometrical parameters of the electrode array in order to achieve the maximum flow rate. The proposed low-voltage DC electroosmosis pump shows an advantage in integrating EOP into portable Lab-on-a-chip devices. In addition, the low-voltage DC EOP shows a good promise for in vivo biomedical applications such as drug delivery.     

交流电沉积实现微纳器件定向连接研究

使用交流电化学方法定向制备了预制微电极之间的电连接。通过调节交流电压与偏置直流电压幅值可以控制电连接的生长方向。如果施加的交流电压幅值高于生成电连接的电压阈值,并且该值恒定时,频率越小,浓度越大,电连接晶体越粗壮;而当电解液浓度与频率恒定时,电压幅值变化对形貌影响较小。有限元仿真模拟进一步说明：当施加的交流电压高于阈值时,电极处于交流电渗流上游。电极扩散层厚度增加将诱导电极之间电连接晶体的生长。在交流电压上叠加直流偏置电压时,电连接晶体从偏置电压相对较负的一端向另一端生长。伏安特性测试结果表明：该连接具有优异的接触特性。     

集成惯性聚焦结构的介电泳微流控芯片的粒子连续分离

设计并制造了一种带有惯性聚焦结构的介电泳微流控芯片,以实现不同介电性质的粒子连续分离.采用MEMS工艺制作了介电泳微流控芯片:通道入口侧壁设置一对梯形结构使经过的粒子受惯性升力的作用聚焦到通道两侧;通道底部光刻一组夹角为90°的倾斜叉指电极产生非均匀电场,利用介电泳力和流体曳力的合力使通道两侧不同的粒子发生角度不同的偏转进入不同通道,从而实现分离.将酵母菌细胞和聚苯乙烯小球作为实验样本,分析了流速和交流电压对分离的影响,确定了二者分离的最优条件并进行分离.实验结果表明,将电导率为20μS/cm的样本溶液以5μL/min的流速注入到通道中,施加6 Vp-p、10 kHz的正弦信号,酵母菌细胞沿电极运动至夹角处后沿通道中心排出,聚苯乙烯小球沿通道两侧排出,成功实现分离,平均分离效率达92.8％、平均分离纯度达90.7％.     

AC electrokinetic pumping on symmetric electrode arrays

AC electro-osmotic (ACEO) pumping is experimentally demonstrated on a symmetric gold electrode array. Using asymmetric connection of electrodes to the applied AC voltage, spatial asymmetry along the array is created, which produces unidirectional flow of electrolyte. An aqueous solution of 100 μM KCl is selected as the pumping fluid. The liquid velocity obtained as a function of voltage and frequency is compared to that generated using travelling-wave electroosmosis (TWEO) with the same electrode array. The expected velocities from the linear electrokinetic models of ACEO and TWEO are computed numerically. The comparison shows that TWEO generates greater velocity amplitudes and the streamlines are smoother than those generated by ACEO.     

Design and fabrication of an electrochemically actuated microvalve

A microfluidic valve based on electrochemical (ECM) actuation was designed, fabricated using UV-LIGA microfabrication technologies. The valve consists of an ECM actuator, polydimethylsiloxane (PDMS) membrane and a micro chamber. The flow channels and chamber are made of cured SU-8 polymer. The hydrogen gas bubbles were generated in the valve microchamber with Pt black electrodes (coated with platinum nanoparticles) and filled with 1 M of NaCl solution. The nano particles coated on the working electrode helps to boost the surface-to-volume ratio of the electrode for faster reversible electrolysis and faster valve operation. To test the functionality of the microvalve, a simple micropump based on ECM principle was also integrated in the system to deliver a microscopic volume of fluid through the valve. The experimental results have showed that an approximately 300 μm deflection of valve membrane was achieved by applying a bias voltage of ?1.5 V across the electrodes. The pressure in the valve chamber was estimated to be about 200 KPa. Experimental results proved that the valve can be easily operated by controlling the electrical signals supplied to the ECM actuators.     

Novel systems for configurable AC electroosmotic pumping

In this paper we present a novel method of creating and using geometric asymmetries for AC electroosmotic pumping. The method relies on grouping similar electrodes together in terms of applied voltage, in order to create configurable asymmetries in periodic electrode arrays, which induce a net pumping AC electroosmotic velocity. Using a numerical model for a system designed by applying the described method, it is demonstrated that by varying the degree of asymmetry it is possible to control the direction of the pumping velocity at a given voltage by simple switching of the voltages on the electrodes.     

High-current density DC magenetohydrodynamics micropump with bubble isolation and release system

One of the major challenges for integrated Lab-on-a-Chip (LOC) systems is the precise control of fluid flow in a micro-flow cell. Magnetohydrodynamics (MHD) micropumps which contain no moving parts and capable of generating a continuous flow in any ionic fluid offer an ideal solution for biological applications. MHD micropumping has been demonstrated by using both AC and direct current (DC) currents by a number of researchers with varying degrees of success. However, current MHD designs based on DC do not meet the flow rate requirements for fully automated LOC applications (>100 μl/min). In this research, we introduce a novel DC-based MHD micropump which effectively increases flow rate by limiting the effects of electrolysis generated bubbles at the electrode–electrolyte interface through isolation and a mechanism for their release. Gas bubbles, particularly, hydrogen generated by high current density at the electrodes are the main culprit in low experimental flow rate compared with theoretical values. These tiny bubbles coalesce in the flow channel thus obstructing the flow of fluid. Since hydrolysis is inevitable with DC excitation, compartmentalized electrode channels with bubble isolating and coalescence retarding mechanisms and bubble release systems are implemented to prevent the coalescence of these bubbles and minimize their effects on flow rate. In this novel design called bubble isolation and release system, flow rate of up to 325 μl/min is achieved using 1 M NaCl solution in DC mode with potentials of 5 V and current density of about 5,000 A/m² for a main channel of 800 μm × 800 μm cross-section and 6.4 mm length.     

Numerical simulation of AC electrothermal micropump using a fully coupled model

The classic model by Ramos et al. for numerical simulation of alternating current electrothermal (ACET) flow is a decoupled model based on an electrothermal force derived using a linear perturbation method, which is not appropriate for the applications, where Joule heating is large and the effect of temperature rise on material properties cannot be neglected. An electrically–thermally–hydrodynamically coupled (fully coupled) ACET flow model considering variable electrical and thermophysical properties of the fluids with temperature was developed. The model solves AC electrical equations and is based on a more general electrostatic force expression. Comparisons with the classic decoupled model were conducted through the numerical simulations of an ACET micropump with asymmetric electrode pairs. It was found that when temperature rise is small the fully coupled model has the same results with the classic model, and the difference between the two models becomes larger and larger with the increasing temperature. The classic decoupled model underestimates the maximum temperature rise and pumping velocity, since it cannot consider the increase in electrical conductivity and the decrease in viscosity with temperature. The critical frequencies where the lowest velocity occurs or pumping direction reverses are shifted to higher frequencies with the increasing voltage according to the fully coupled model, while are kept unchanged according to the classic model.     

High‐transmittance in‐plane switching liquid crystal display device driven by three‐level voltages

We propose a single‐layered electrode structure using three voltage levels instead of two to achieve high transmittance in an in‐plane switching liquid crystal display device. The proposed structure consists of two pixel electrodes and one common electrode. By using three voltage levels, we can generate an in‐plane electric field higher than that in a conventional in‐plane switching device. We confirmed that by using the proposed structure, the transmittance of a liquid crystal device can be increased from 29% to 35% at a slightly lower operating voltage without using the double‐layered electrode structure required for the fringe‐field switching mode. The transmittance of the proposed device is higher than that of the fringe‐field switching device.     

A printed circuit board capacitive sensor for air bubble inside fluidic flow detection

This paper presents a three-electrode capacitive fluidic sensor for detecting an air bubble inside a fluidic channel such as blood vessels, oil or medical liquid channels. The capacitor is designed and fabricated based on a printed circuit board (PCB). The electrodes are fabricated by using copper via structure through top to bottom surface of the PCB. A plastic pipe is layout through the capacitive sensor and perpendicular to the PCB surface. Capacitance of sensor changes when an air bubble inside fluidic flow cross the sensor. The capacitance change can be monitored by using a differential capacitive amplifier, a lock-in amplifier, filter and an NI acquisition card. Signal is processed and calculated on a computer. Air bubble inside the liquid flow are detected by monitor the unbalance signal between the three electrode potential voltages. Output voltage depends on the volume of the air bubble due to dielectric change between capacitor’s electrodes. Output voltage is up to 53 mV when an 2.28 mm³ air bubble crosses the sensing channel. Air bubble velocity can be estimated based on the output pulse signal. This proposed fluidic sensor can be used for void fraction detection in medical devices and systems; fluidic characterization; and water–gas, oil–water and oil–water–gas multiphase flows in petroleum technology. That structure also can apply to the micro-size for detecting in microfluidic to monitor and control changes in microfluidic channels.     

Experiments on opto-electrically generated microfluidic vortices

Strong microfluidic vortices are generated when a near-infrared (1,064 nm) laser beam is focused within a microchannel and an alternating current (AC) electric field is simultaneously applied. The electric field is generated from a parallel-plate, indium tin oxide (ITO) electrodes separated by 50 μm. We present the first μ-PIV analysis of the flow structure of such vortices. The vortices exhibit a sink-type behavior in the plane normal to the electric field and the flow speeds are characterized as a function of the electric field strength and biasing AC signal frequency. At a constant AC frequency of 100 kHz, the fluid velocity increases as the square of the electric field strength. At constant electric field strength fluid velocity does not change appreciably in the 30–50 kHz range and it decreases at larger frequencies (>1 MHz) until at approximately 5 MHz when Brownian motion dominates the movement of the 300 nm μ-PIV tracer particles. Presence of strongly focused laser beams in an interdigitated-electrode configuration can also lead to strong microfluidic vortices. When the center of the illumination is focused in the middle of an electrode strip, particles experiencing negative dielectrophoresis are carried towards the illumination and aggregate in this area.     

Rotating flow within a droplet actuated with AC EWOD

Electrowetting-on-dielectric (EWOD) is now used in numerous microsystems like digital lab-on-chips. This paper deals with a characteristic hydrodynamic flow appearing in droplets actuated by EWOD with AC voltage. In the coplanar electrode configuration, two pairs of vortex flows are observed to form in a droplet centred on the electrode gap. All experiments are performed in oil as ambient phase and flows in the droplet are analysed using fluorescent beads. At the same time, droplet oscillations induced by AC EWOD are also revealed under stroboscopic lighting. These experiments show that vortex location can be controlled by frequency actuation with fair degree of reproducibility.     

Contactless sensing of the conductivity of aqueous droplets in segmented flow

We present an electrode arrangement for the inline measurement of the conductivity of droplets in segmented flow by impedance spectroscopy. We use a thin-walled glass capillary with electrodes contacting the outer surface, so that the contactless measurement of conductivity of the liquid within the capillary is possible. The surface of the glass capillary is silanized resulting in a single hydrophobic surface across which droplets can freely move. We model the impedance of such insulated electrodes and use the model to optimize the electrode system. Measurement of solutions with various salt concentrations allows the performance of the electrode structure to be characterized. Subsequently, the measurement of the impedance response of the aqueous segments in two-phase flow was demonstrated. Measurements were firstly performed with an impedance analyzer and subsequently with a multi-sine measurement setup that is better suited to high-speed measurement of droplets. Previous electrical measurements of segmented flow sensed the difference in dielectric constant between the aqueous phase and the carrier fluid through measurement of capacitance. This work describes an electrical measurement of the conductivity of droplets in segmented flow, that is, the sensor senses a variable property of the droplet itself.     

Configurable AC electroosmotic generated in-plane microvortices and pumping flow in microchannels

This paper proposes the patterned AC electroosmotic flows (AC-EOF) by simply grouping discrete electrodes together to form various electrode configurations for generation of in-plane microvortices with clockwise/counter-clockwise rotation, and pumping flow in a microchannel. The rotational direction of in-plane microvortices and pumping flow direction can be controlled using the same electrode pattern by simple switching of the voltages on the electrodes. Microparticle image velocimetry (μPIV) was used to characterize the flow fields of the generated in-plane microvortices and pumping flow. The rotational strength of microvortices and flow rates of pumping flows were found to increase with the increase of the applied voltages, and an optimal value was achieved at an appropriately applied frequency. Moreover, the dependency of the applied voltages, frequencies, and the heights of the measured planes on the rotational strength of in-plane microvortices between the interdigitated and discrete electrode configurations were examined. The discrepancy in electrode geometry results in a small performance reduction, whereas it can be compensated for the ability of switching the rotational direction of in-plane microvortices using the same device. The configurable in-plane microvortices and pumping flow in microchannels provide the potential for micromixing applications and for the integration into a lab-on-a-chip system.     

Modeling of ferrofluid magnetic actuation with dynamic magnetic fields in small channels

One of the most important and promising research areas in biomedical and micropumping applications is magnetic actuation of ferrofluids with dynamic magnetic fields. For ensuring the use of ferrofluids in various applications in engineering fields, their flows generated by magnetic fields should be extensively investigated and simulated. In this study, simulations of ferrofluid actuation with dynamic magnetic fields were performed by modeling it using the COMSOL Multiphysics software, and iron oxide nanoparticle-based ferrofluids at different angles of rotating magnets were considered to provide insight into ferrofluid flow in small channels. Ferrofluid flows were modeled at different magnetic flux densities provided by rotating magnets, and velocity profiles inside the channel were analyzed. It was shown that ferrofluid actuation can be considered as a futuristic micropumping alternative, simulation results matched well with the experimental results of previous work, and the established model could serve as a tool to analyze ferrofluid flows generated by dynamic magnetic fields. The results of the model show that flow rates up to 100 µl/s can be reached at a rotation angle of 30° by using dynamic magnetic fields. Various applications including biomedical applications might be envisaged.     

Automating fluid delivery in a capillary microfluidic device using low-voltage electrowetting valves

A multilayer capillary polymeric microfluidic device integrated with three normally closed electrowetting valves for timed fluidic delivery was developed. The microfluidic channel consisted two flexible layers of poly (ethylene terephthalate) bonded by a pressure-sensitive adhesive spacer tape. Channels were patterned in the spacer tape using laser ablation. Each valve contained two inkjet-printed silver electrodes in series. Capillary flow within the microchannel was stopped at the second electrode which was modified with a hydrophobic monolayer (valve closed). When a potential was applied across the electrodes, the hydrophobic monolayer became hydrophilic and allowed flow to continue (valve opened). The relationship between the actuation voltage, the actuation time, and the distance between two electrodes was performed using a microfluidic chip containing a single microchannel design. The results showed that a low voltage (4.5 V) was able to open the valve within 1 s when the distance between two electrodes was 1 mm. Increased voltages were needed to open the valves when the distance between two electrodes was increased. Additionally, the actuation time required to open the valve increased when voltage was decreased. A multichannel device was fabricated to demonstrate timed fluid delivery between three solutions. Our electrowetting valve system was fabricated using low-cost materials and techniques, can be actuated by a battery, and can be integrated into portable microfluidic devices suitable for point-of-care analysis in resource-limited settings.     

基于高输入阻抗放大器的EEG传感器设计

脑电（头皮脑电）图（EEG）是医疗上重要的诊断信息,目前非接触式干电极在采集EEG信号时具有使用简单、不易受环境约束的优点,具有着广阔的应用前景,已经成为全世界的热门研究课题。由于人体皮肤具有很高的阻抗,故要求非接触式干电极具有高输入阻抗。为了提高输入阻抗,采用深度电压串联负反馈来实现超高输入阻抗放大电路,并给出电路的设计和分析。深度电压串联负反馈的前置放大器能提供高达2.6×1011Ω的输入阻抗,有助于非接触式干电极进行信号的采集。     

A Bubble-Free AC Electrokinetic Micropump Using the Asymmetric Capacitance-Modulated Microelectrode Array for Microfluidic Flow Control

A novel ac electrokinetic micropumping device based on ac electro-osmotic flow induced by asymmetrically capacitance/chemistry-modulated microelectrode arrays has been successfully developed and demonstrated. Asymmetric capacitance modulation is made of comb electrode arrays and parts of individual electrode surfaces are modulated/deposited with a $hbox{SiO}_{2}$ dielectric layer. This proposed design can be utilized to shift the optimal operation frequency of maximum velocity from tens of kilohertz to megahertz to minimize electrolytic bubble generation and enhance micropumping performance. The pumping velocity, described in this paper, is measured via the tracing of microbeads and is a function of applied potential, signal frequency, buffer concentration, and dielectric layer thickness. A maximum pumping velocity up to 290 $muhbox{m} cdot hbox{s}^{-1}$ in 5-mM buffer solution with the applied potential of 10 Vpp is observed in our prototype device, and the estimated maximum flow rate is up to 26.1 $muhbox{l} cdot hbox{h}^{-1}$. This is the first successful demonstration regarding bubble-free ac electrokinetic micropumping via such an asymmetrically capacitance-modulated electrode arrays. Design, simulation, microfabrication, experimental result, and theoretical model are described in this paper to characterize and exhibit the performance of proposed novel bubble-free ac electrokinetic micropump.$hfill$[2008-0030]      

Differential C<Superscript>4</Superscript>D sensor for conductive and non-conductive fluidic channel

This paper presents a novel design of a differential C⁴D (DC⁴D) sensor based on three electrodes for both conductive and non-conductive fluidic channel. This structure consists of two single C⁴D with an applied carrier sinusoidal signal to the center electrode as the excitation electrode. The electrodes are directly bonded on the PCB with built-in differential amplifier and signal processing circuit in order to reduce the parasitic component and common noise. In the non-conductive fluidic channel, the output voltage and capacitance changes 214.39 mV and 14 fF, respectively when a 3.83 μl tin particle crosses an oil channel. In conductive fluidic channel, the output voltage and admittance change up to 300 mV and 0.07 μS for the movement of a 4.88 μl plastic particle through channel. Moreover, the voltage change of this sensor is linear relation with the volume of investigated particle. This sensor also allows measuring velocity of particle inside fluidic channel and resistivity of the conductive fluidic.