离子束刻蚀双频光栅的实验研究

本文利用离子束在玻璃上刻蚀出双频光栅,研究了光栅掩模制作中曝光量和显影条件,离子束刻蚀工艺等因素对光栅衍射效率的影响,并给出一些实验结果。     

高衍射效率凸面闪耀光栅的研制

基于严格耦合波分析,研究凸面闪耀光栅的衍射特性;采用全息光刻-离子束刻蚀法制作中心周期为2.45μm、曲率半径为51.64 mm、口径为17 mm的凸面闪耀光栅,闪耀角为6.4°,顶角为141°。结果表明,在整个可见-近红外波段,所制作光栅的1级衍射效率大于40%,在闪耀波长处1级衍射效率大于75%。     

线性啁啾相位掩模的研制

利用严格耦合波理论分析了线性啁啾相位掩模的衍射特性,得到只有当相位掩模的占宽比在0.37～0.50之间,槽形深度在242～270 nm之间时,才能保证零级衍射效率小于2%.同时正负一级的衍射效率大于35%.在此基础上,利用全息一离子束刻蚀和反应离子柬刻蚀相结合的新方法,制作了中心周期为1000 nm,啁啾率1 nm/mm,有效面积为100 mmX10 mm的线性啁啾相位掩模.发现先用短时间Ar离子束刻蚀对光刻胶光栅掩模槽形进行修正,然后采用CHF3反应离子束刻蚀,能得到更合适的占宽比,从而确定了刻蚀新工艺.实验测量表明其零级衍射效率小于2%,正负一级衍射效率大于35%,最大非线性系数为1.6%.理论分析表明该相位掩模能够满足制作线性啁啾光纤光栅的需要.     

用于ICF驱动器的色分离相位光栅的研究

采用相位闪耀光栅原理设计出用于ICF驱动器中能离轴分离基频、二倍频、三倍频激光的色分离相位光栅,理论上三倍频零级衍射效率达到100%,同时,对该相位光栅进行了实际制作和实验测量,测出了基频光和二倍频光的分离角以及光栅的零级衍射效率,得到了一些有意义的结果。     

用于惯性约束聚变驱动器的色分离光栅-光束采样光栅集成元件的制作

针对惯性约束聚变(ICF)驱动系统特别是其终端光学系统对元件数和元件厚度的限制要求,利用衍射光学元件(DOE)易于集成的优点,提出一种在石英基片的两面分别曝光制作色分离光栅(CSG)和光束采样光栅(BSG)的新方法,仅需一个石英片即可同时实现谐波分离和光束采样的功能.分别采用光学制版和电子束直写的方法制作了色分离光栅和光束采样光栅的掩模,并利用离子束刻蚀的方法加工了色分离光栅-光束采样光栅集成元件.结果表明,此集成元件的三倍频光能量利用率、色分离度以及采样效率等参数均与三倍频光通过色分离光栅、光束采样光栅分离元件时得到的结果相吻合,达到了惯性约束聚变激光驱动器终端光学系统的基本技术指标要求.     

锯齿槽闪耀光栅制作误差对衍射效率的影响

与矩形槽和正弦槽光栅相比,锯齿槽光栅具有高的衍射效率,可采用全息离子束刻蚀和单点金刚石车削两种方法制造。首先,介绍了这两种方法的制造误差。然后,分析了这些制造误差对用于可见近红外和长波红外成像光谱仪的光栅衍射效率的影响,指出闪耀角误差、槽顶角误差和刻刀圆弧半径是影响锯齿槽光栅衍射效率的关键因素。为制作高质量成像光谱仪用光栅奠定了理论基础和指导。     

色分离光栅对光束近场调制影响实验研究

介绍了一种用于惯性约束聚变研究的CSG衍射光栅研制情况,衍射光栅的制作采用离子束刻蚀的方法,光栅刻蚀面积为80mm×80mm。利用星光Ⅱ高功率固体激光装置实验平台对光路中插入衍射光栅后的光束近场调制变化进行了实验测试。实验结果表明,在低功率密度条件下(0.005GW/cm2)光路中插入CSG衍射光栅后,光束近场调制度没有明显的增加,相对于光束本身的调制来说,由光栅带来的调制为细微的小量调制。     

80 mm×80 mm衍射光栅零级衍射效率实验研究

研制了一种用于激光惯性约束聚变研究的衍射光栅。光栅的制作采用离子束刻蚀方法,光栅尺寸为80 mm×80 mm,工作周期为90μm,对1.053、0.527、0.351μm 3种波长的激光束进行谐波分离。利用YLF激光器系统对衍射光栅的性能参数进行测试,结果表明,衍射光栅对波长为0.351μm的三倍频激光束零级衍射效率为79.7%。     

色分离光栅激光诱导损伤特性实验研究

对色分离光栅(CSG)在10 64nmNd YAG激光辐照下的损伤特性进行了实验研究。研究表明,湿法刻蚀CSG的损伤阈值比干法刻蚀的高,刻蚀面的损伤阈值比非刻蚀面的损伤阈值大,激光入射表面选择影响光栅面和非光栅面的损伤阈值,从非光栅面入射,这两个面的损伤阈值都比从光栅面入射的高。     

感应耦合等离子休技术用于熔融石英表面凹凸光栅的刻蚀

感应耦合等离子体(ICP)刻蚀技术是一种新的干法刻蚀技术，具有刻蚀速率高和各向异性刻蚀等优点，并且能够独立控制等离子体密度和自偏置电压。然而，在利用这种技术进行刻蚀的过程中，经常会发生聚合物的沉积，从而阻碍了刻蚀过程的继续。我们报道了在熔融石英表面刻蚀光栅时不产生聚合物沉积的技术，给出了优化参数。所制作的熔融石英普通光栅和600线／mm的高密度光栅的表面很干净，没有聚合物沉积。光栅衍射效率的实际测量值和预期的理论值吻合得很好。最后还研究了ICP技术的刻蚀速度．刻蚀均匀性和过程可重复性等参数。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks     

Call for Papers—Feature Topic,Vol.12,No.7,2015

正Information Centric Networking Information-Centric Networking(ICN) is an emerging direction in Future Internet architecture research,gaining significant tractions among academia and industry.Aiming to replace the conventional host-to-host communication model by a data-centric model,ICN treats data content as the first