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1.
动态原子力显微镜(atomic force microscope,AFM)是通过检测悬臂谐振状态的变化来对物体表面形貌进行测量的。通过对谐振状态的三种因素即振幅、相位、频率的检测,动态AFM可以分为三种工作模式,即振幅反馈、相位反馈与频率反馈模式,这三种反馈模式有着不同的扫描特点。基于硅悬臂具有高阶谐振的特性,动态原子力显微镜可以在悬臂工作于高阶谐振状态时对物体进行扫描。综合上述工作模式研制了一套多模态动态AFM,可以在三种反馈模式、不同阶谐振状态下对物体进行扫描测量。利用该系统在不同反馈模式、不同阶谐振状态下进行了扫描测试,结果显示,系统在各模式下具有亚纳米分辨力,其中在相位反馈模式,悬臂二阶谐振时可达到最优灵敏度与分辨力,分别为17.5V/μm和0.29nm,在最优灵敏度与分辨力状态下对光栅试样进行了三维扫描,得到光栅的三维形貌图。  相似文献   

2.
构建了一种可快速大面积测量光栅表面微结构的原子力显微镜(AFM)系统,研究了不同扫描模式下扫描速度对测量结果的影响。分别测量了微悬臂探针在恒高模式与恒力模式下的频谱,获得了这两种模式下微悬臂探针的有效带宽。基于恒高模式与恒力模式,在不同扫描速度下分别测量了光栅微结构表面上的一条直线与一个圆周,进而分析了扫描速度对测量结果的影响。基于该AFM系统,采用恒高模式下不失真扫描速度对光栅微结构表面进行了快速、大面积三维形貌测量实验。实验结果表明:测量光栅微结构表面上直径为4.0mm的圆形区域所用时间仅为40s。当扫描速度不超过微悬臂探针有效带宽所对应的速度时,所构建的AFM系统可无失真地实现微结构表面的快速、大面积测量。  相似文献   

3.
双环控制电动舵机系统的设计验证   总被引:1,自引:0,他引:1  
张跃  韩雪峰 《光学精密工程》2015,23(11):3138-3146
针对空空导弹的电动舵机系统,提出了基于传动机构主模态的控制方案,并利用机构动态特性匹配和主模态法设计了双环控制系统。对曲柄滑块机构中的连杆进行分析,利用机构动态特性匹配和主模态方法将高阶多自由度动力学模型简化为二自由度自由转子模型。对二自由度模型与控制系统联合建模,分析机构在有无阻尼状态时谐振主频对系统开环截止频率的影响,确定了按照无阻尼状态进行系统设计更为可靠。最后,对传动机构进行了模态测试,确定了机构动态特性匹配设计方法的可行性。结合风洞测试数据在全弹道飞行平台上对含机构主模态的舵机系统进行了性能验证。模态测试结果表明:固支舵面第一阶扭转频率为1 210.47rad/s,传动机构(含舵面)第一阶扭转频率为1 148.17rad/s,与理论1 180.0rad/s结果一致。全弹道飞行平台外载荷验证显示:最大铰链力矩为6.8Nm时,舵面弹性转角为1.1°,舵机跟踪自驾仪指令最大误差为±0.1°,这些结果满足舵机系统对性能指标的要求。  相似文献   

4.
针对锥齿轮传动形性测试仪进行齿轮传动误差、振动噪声测量时,其模态对测量结果产生影响的问题,对试验仪的动态性能进行了分析和测试。首先使用Solid Edge进行了结构建模,使用ANSYS Workbench进行了模态分析,并进行了谐响应分析;然后使用压电传感器和加速度传感器采集了动态响应数据,并利用DASP软件进行了实验模态分析,进行了不同工作状态下的振动数据采集;通过有限元仿真和实验模态得到了仪器的前6阶模态,证明了实验模态分析与软件仿真得到的模态分析结果基本一致;仿真得到了整体结构XYZ 3个方向的位移谐响应曲线;分析了不同工作状态下振动信号,发现了振动信号与仪器模态有明显联系;利用模态分析结果确定了仪器在工作条件下需要避开的共振频率区域,并通过振动实验确定了主动轴与机床连接部分为仪器动态特性的薄弱位置。振动实验分析结果表明:在仪器工作条件下,仪器第1阶固有频率应避开与齿轮转频、啮频相同的区域。  相似文献   

5.
谐振式MEMS温度传感器设计   总被引:4,自引:2,他引:2  
为了实现以频率输出为信号的气象温度测量,提出了一种基于双层悬臂梁的谐振式微温度传感器。基于双悬臂梁不同材料热膨胀系数的差异会导致悬臂梁谐振频率偏移的原理,采用压电方式同时实现悬臂梁的驱动及其谐振频率的检测,从而实现温度的测量。根据硅基传感器的正面腐蚀工艺,设计了谐振悬臂梁的双层结构,采用有限元方法分析了悬臂梁的谐振模态、可利用的振型及其温度与各模态谐振频率的关系,并利用多普勒振动系统对悬臂梁的谐振特性进行了研究。实验发现悬臂梁的二阶弯曲振型Q值相对于其它振型是最大的,其Q值约为150;高阶振型特别是二阶弯曲振型适合用于以ZnO为压电材料的温度传感器的频率检测,并且具有相对较高的灵敏度(约为20Hz/℃)和频率温度系数(1.9×10-4/℃)。结果表明,微型温度传感器能够满足气象温度检测的要求,并具有抗干扰能力强、灵敏度高、信号传输接口简单等优点。  相似文献   

6.
针对某新型轻卡在道路耐久实验中出现的驾驶室局部开裂现象,通过进行动应力测试,采集了该驾驶室各测点的动应力,对测点的动态响应进行了时域分析和频谱分析,结果表明:部分测点动应力较高,且在一阶模态频率处振动能量最大;动应力频谱分析中的谐振频率与有限元计算的模态频率吻合较好,均表明该驾驶室的一阶、二阶模态频率较接近,导致驾驶室在行驶中会存在耦合振动,降低了该驾驶室的疲劳强度。通过分析,为该驾驶室结构改进指出了方向。  相似文献   

7.
为了研究自主研制的磁流变减振器及其振动系统的动态性能,建立了未经简化的磁流变振动系统的动力学四阶系统模型,通过四阶系统分母多项式与时间序列ARMA模型系数的对应关系推导出动态特性参数的计算公式,将不同工况条件下实验检测信号进行傅里叶变换滤去谐振成分,利用公式计算获得了系统动态特性参数,与三阶系统建模比较分析了建模精度以及系统的动态性能。研究分析表明,基于ARMA模型的四阶系统比三阶系统具有更高的模拟精度,尤其在中高工作频率范围优势更为明显,推导得出的动态性能参数的分析为系统选取了合适的工况,分析结果可作为磁流变减振器及振动系统性能预测与评价的依据,其方法可供同类高阶系统动态性能分析推广与借鉴。  相似文献   

8.
采用传递矩阵方法研究了悬臂薄壁短圆柱壳的高阶模态振动特性。首先基于Love薄壳理论建立了薄壁短圆柱壳的动力学模型,根据壳体截面上的状态向量,利用传递矩阵方法推导了1阶状态微分方程组,然后采用高精度的精细积分方法进行求解,计算得到了高阶固有频率,绘制了三维模态振型,最后通过有限元法进行了比较。结果表明,通过传递矩阵方法可以对悬臂薄壁短圆柱壳的高阶固有频率进行精确求解,得到的三维模态振型与有限元结果具有较好的一致性。  相似文献   

9.
低温环境下MEMS微构件的动态特性及测试系统   总被引:1,自引:1,他引:0  
研究了微机电系统(MEMS)微构件的谐振频率等动态特性在低温环境下的变化规律,从理论上分析了改变环境温度对微悬臂梁谐振频率的影响,并对低温环境下微构件的动态特性测试技术进行了研究。研制了低温环境下MEMS动态特性测试系统,采用半导体冷阱实现低温环境,利用压电陶瓷作为底座激励装置的驱动源,通过底座的冲击激励,使微悬臂梁处于自由衰减振动状态,使用激光多普勒测振仪对微悬臂梁的振动响应进行检测,从而获得微悬臂梁的谐振频率。利用研制的测试系统,在-50℃~室温的环境下对单晶硅微悬臂的谐振频率进行了测试,结果表明,随着温度的降低,微悬臂梁的谐振频率略有增大,其谐振频率的温度变化率约为-0.263 Hz/K,与理论分析的结果基本一致。该测试装置能够有效地完成在-50℃~室温环境下微构件的动态特性测试。  相似文献   

10.
本文对流固耦合动态测试进行了深入地探讨,较好地解决了当前类似实验中较为困难的水下激振、拾振等问题。利用压电晶体片激振和拾振集于一身的特点,对结构进行了多点激振与拾振,一方面避免了测试中单点激振和拾振常出现的部分模态遗漏,另一方面对不同工况下各点间的相位进行测试,以期确定水上和水下同阶模态。本文对悬臂矩形板和循环对称结构进行了测试,结果表明,所设计的实验具有性能稳定、信噪比高、测试频带宽等优点。  相似文献   

11.
An engineering system may consist of several different types of components,belonging to such physical"domains"as mechanical,electrical,fluid,and thermal.It is t...  相似文献   

12.
The strength of composite plate with different hole-shapes is always one of the most important but complicated issues in the application of the composite material. The holes will lead to mutations and discontinuity to the structure. So the hole-edge stress concentration is always a serious phenomenon. And the phenomenon makes the structure strength decrease very quickly to form dangerous weak points. Most partial damage begins from these weak points. According to the complex variable functions theory, the accurate boundary condition of composite plate with different hole-shapes is founded by conformal mapping method to settle the boundary condition problem of complex hole-shapes. Composite plate with commonly hole-shapes in engineering is studied by several complex variable stress fimction. The boundary integral equations are founded based on exact boundary conditions. Then the exact hole-edge stress analytic solution of composite plate with rectangle holes and wing manholes is resolved. Both of offset axis loadings and its influences on the stress concentration coefficient of the hole-edge are discussed. And comparisons of different loads along various offset axis on the hole-edge stress distribution of orthotropic plate with rectangle hole or wing manhole are made. It can be concluded that hole-edge with continuous variable curvatures might help to decrease the stress concentration coefficient; and smaller angle of outer load and fiber can decrease the stress peak value.  相似文献   

13.
Giannuzzi LA  Utlaut M 《Ultramicroscopy》2011,111(11):1564-1573
30 keV Ga+ focused ion beam induced secondary electron (iSE) imaging was used to determine the relative contrast between several materials. The iSE signal compared from C, Si, Al, Ti, Cr, Ni, Cu, Mo, Ag, and W metal layers does not decrease with an increase in target atomic number Z2, and shows a non-monotonic relationship between contrast and Z2. The non-monotonic relationship is attributed to periodic fluctuations of the stopping power and sputter yield inherent to the ion–solid interactions. In addition, material contrast from electron-induced secondary electron (eSE) and backscattered electron (BSE) images using scanning electron microscopy (SEM) also shows non-monotonic contrast as a function of Z2, following the periodic behavior of the stopping power for electron–solid interactions. A comparison of the iSE and eSE results shows similar relative contrast between the metal layers, and not complementary contrast as conventionally understood. These similarities in the contrast behavior can be attributed to similarities in the periodic and non-monotonic function defined by incident particle–solid interaction theory.  相似文献   

14.
This paper proposes a novel grading method of apples,in an automated grading device that uses convolutional neural networks to extract the size,color,texture,an...  相似文献   

15.
分布动态载荷识别的抗噪处理   总被引:2,自引:2,他引:0  
针对正交多项式频域法在用多种响应对矩形薄板进行载荷识别中抗噪性较差的问题,综合运用平均法、矩阵预处理和奇异值截断法等方法对之进行改善,并引入空间映射的思想,将该方法的应用范围拓展为复杂的模型.利用仿真算例,证实了该方法具有较好的抗噪性.  相似文献   

16.
针对工程实践中环网通讯相关问题的处理缺乏理论基础及国产化安全级DCS平台的开发缺乏成熟经验借鉴问题,对基于MELTAC-N平台核电厂安全级DCS环网的软硬件实现进行了研究。提出了安全级DCS环网双环网冗余设计、光切换开关设计等硬件设计方法,以及以RPR协议为基础,采用全数据收发策略的软件设计方法。在CPR1000安全级DCS平台上对安全级DCS环网的可靠性及实时性进行了评价,并进行了容错能力、响应时间及响应时间稳定性测试验证实验。结果表明,基于MELTAC-N平台安全级DCS环网软硬件设计具有较好的容错能力及响应时间稳定性。  相似文献   

17.
The fraction defective of semi-finished products is predicted to optimize the process of relay production lines, by which production quality and productivity ar...  相似文献   

18.
The use of hand gestures can be the most intuitive human-machine interaction medium.The early approaches for hand gesture recognition used device-based methods....  相似文献   

19.
Abrasive wear has long been recognised as one of the most potentially serious tribological problems facing the operators of many types of plant and machinery; several industrial surveys have indicated that wear by abrasion can be responsible for more than 50% of unscheduled machine and plant stoppages. Locating the operating point of a tribological contact in an appropriate operational ‚map’︁ can provide a useful guide to the likely nature and origins of the surface degradation experienced in use, though care must be exercised in choosing the most suitable parameters for the axes of the plot. Laboratory testing of materials and simulations of machine contacts are carried out for a number of purposes; at one level for the very practical aims of ranking candidate materials or surface hardening treatments in order of their wear resistance, or in an attempt to predict wear lives under field conditions. More fundamentally, tests may be aimed at elucidating the essential physical mechanisms of surface damage and loss, with the longer term aim of building an analytical and predictive model of the wear process itself. In many cases, component surface damage is brought about by the ingress of hard, particulate matter into machine bearing or sealing clearances. These may be running dry although, more usually, a lubricant or service fluid is present at the interface. A number of standardised wear test geometries and procedures have been established for both two- and three-body wear situations, and these are briefly described. Although abrasive wear is often modelled as following an ‚Archard’︁ equation (i.e. a linear increase in material loss with both load and time, and an inverse dependence on specimen hardness) both industrial experience and laboratory tests of particularly lubricated contacts show that this is not always the case: increasing the hardness differential in an abrasively contaminated lubricated pair may not always reduce the rate of damage to the harder surface.  相似文献   

20.
Parameters describing the topographic character of a surface (height, surface wavelength, slope and curvature) can be derived from equivalent sinusoidal profiles. The response of a surface-measuring instrument may be modelled in terms of instrument parameters such as stylus radius, and scanning range and resolution. The performance of the instrument may then be mapped as a zone in amplitude-wavelength (AW) space to show the sinusoidal profiles it is capable of measuring. In a first-order analysis the STM and AFM are considered as equivalent to contact-stylus instruments with a notional stylus radius equal to the tip radius plus the gap. Comparisons between different instruments and types of instrument are readily made by mapping in AW space. The error arising from convolution of the sinusoidal profile with that of the finite tip may be quantified and plotted as contours in AW space.  相似文献   

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