共查询到20条相似文献,搜索用时 78 毫秒
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设计了一种基于电容数字转换芯片AD7745和单片机C8051F040微位移检测信号处理电路,给出了电容式微位移传感器的设计制备原理、C8051F040软硬件设计、输出转换电路的设计, 阐述了微位移检测电路信号提取及转换过程.实验结果表明:设计的微位移信号处理电路提高了厚膜微位移电容传感器的稳定性及抗干扰能力,并使传感器在量程100 μm的范围内线性度由6.10%提高到0.67%. 相似文献
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大行程纳米分辨率加载机构的研制 总被引:5,自引:0,他引:5
对微构件力学性能测试的微力微位移装置的重要组成部分--大位移高分辨率加载机构进行了研究。根据微力微位移装置的要求,提出了一种通过结构变形进行加载的载体式两级加载机构,该机构的第一和第二级分别通过压电陶瓷驱动器和直线电机进行加载,输出位移通过电容测微仪检测。加载机构的第一级是一个位移放大机构,采用柔性铰链连接的杠杆放大,第二级通过柔性杆进行输出位移的缩小。采用遗传算法优化设计了两级整体式结构,用有限元进行分析,并对加载机构的第一级进行了实验。有限元分析和实验结果表明,所设计的结构能够实现最1mm的输出位移,并在压电驱动器和直线电机的驱动下,获得小于10nm的理论位移增量和纳米级位移分辨率。该机构满足了最大加载为20N的要求。该加载机构的研制成功解决了微力微位移位置的一个关键问题。 相似文献
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为实现对悬浮转子微陀螺转子五自由度的测量,提出了一种频分复用的微位移检测原理,主要介绍了多频率信号发生器,前置放大器,锁相放大器组成的测试系统,设计了一种基于DDS技术的多频率信号发生器和基于锁相放大原理的解调电路。实验和分析结果表明,该电路能实现多自由度微位移检测,设计的多频率信号发生器的频率分辨率能达到0.005821Hz,相位分辨率可以达到0.006rad,检测轴向灵敏度为1.34V/μm,检测径向灵敏度为0.092V/μm,测量电路的轴向位移分辨率为0.45nm,径向位移分辨率为6.6nm,转角的分辨率为0.25μrad,位移检测电路的分辨率,灵敏度和测量范围能够满足静电悬浮转子微陀螺的控制需要。 相似文献
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推导了双框架式硅微陀螺仪驱动模态和检测模态的运动方程,定义了驱动位移和敏感位移。在此基础上,利用弹性主轴原理,分别推导了内外框弹性主轴偏转产生的正交误差信号表达式及正交误差信号和敏感信号的比值表达式。分析结果表明,双框架式硅微陀螺仪内外框弹性主轴发生偏转时,都将产生正交误差位移,且双框架式硅微陀螺仪产生的正交误差位移数值相当于单框架式硅微陀螺仪正交误差位移的两倍。测定了双框架式硅微陀螺仪的正交误差,正交误差信号,其值为431°/s,此时偏转角度仅为0.0196°。 相似文献
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介绍的基于激光干涉的微位移测量仪具有分辨率高、结构简单、成本低的特点。该微位移测量仪由基于迈克尔逊激光干涉原理的微位移测量装置、工作台、光电阵列、信号处理电路、计算机及数据处理软件等组成。该测量仪位移测量理论分辨力可以达到0.01nm,特别适合范围在微米及微米以下的位移测量,可用于MEMS器件的位移检测,压电器件位移检测等。 相似文献
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We developed a dual-probe (DP) atomic force microscopy (AFM) system that has two independently controlled probes. The deflection of each cantilever is measured by the optical beam deflection (OBD) method. In order to keep a large space over the two probes for an objective lens with a large numerical aperture, we employed the OBD sensors with obliquely incident laser beams. In this paper, we describe the details of our developed DP-AFM system, including analysis of the sensitivity of the OBD sensor for detection of the cantilever deflection. We also describe a method to eliminate the crosstalk caused by the vertical translation of the cantilever. In addition, we demonstrate simultaneous topographic imaging of a test sample by the two probes and surface potential measurement on an α-sexithiophene (α-6T) thin film by one probe while electrical charges were injected by the other probe. 相似文献
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介绍了车载自诊断系统(OBD)的工作原理和组成,OBD的发展状况以及OBD在中国的应用状况;概述了OBD目前在重型车上的应用状况,阐述了OBD的局限性,并简要给出解决方案,最后对OBD系统的应用进行了简要的总结和展望。通过系统的介绍,使读者对OBD系统有较全面的认识。 相似文献
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Nieradka K Małozięć G Kopiec D Grabiec P Janus P Sierakowski A Gotszalk T 《The Review of scientific instruments》2011,82(10):105112
Here we present an extension of optical beam deflection (OBD) method for measuring displacement and vibrations of an array of microcantilevers. Instead of focusing on the cantilever, the optical beam is either focused above or below the cantilever array, or focused only in the axis parallel to the cantilevers length, allowing a wide optical line to span multiple cantilevers in the array. Each cantilever reflects a part of the incident beam, which is then directed onto a photodiode array detector in a manner allowing distinguishing between individual beams. Each part of reflected beam behaves like a single beam of roughly the same divergence angle in the bending sensing axis as the incident beam. Since sensitivity of the OBD method depends on the divergence angle of deflected beam, high sensitivity is preserved in proposed expanded beam deflection (EBD) method. At the detector, each spot's position is measured at the same time, without time multiplexing of light sources. This provides real simultaneous readout of entire array, unavailable in most of competitive methods, and thus increases time resolution of the measurement. Expanded beam can also span another line of cantilevers allowing monitoring of specially designed two-dimensional arrays. In this paper, we present first results of application of EBD method to cantilever sensors. We show how thermal noise resolution can be easily achieved and combined with thermal noise based resonance frequency measurement. 相似文献
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汽车电脑诊断的现状和未来 总被引:2,自引:0,他引:2
汽车电脑诊断的首要目的是快速准确地发现汽车控制部件的故障,其次是控制汽车排气,安全驾驶以及汽车生产线组装的质量检查,随着全球性的环保要求日益高涨,汽车废报的转换除污处理更依赖电脑。同时,汽车安全舒适性的提高,也要由汽车电脑的动态回馈,实时地显示在汽车仪表盘上,就目前的汽车电脑诊断技术作一初步的系统介绍,并将其发展也作一个展望。 相似文献
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Jae-Hyeok Lee Won-Seok Kang Bung-Sam Choi Sung-Wook Choi Jae-Ho Kim 《Ultramicroscopy》2008,108(10):1163
Carbon nanotube (CNT)-tipped atomic force microscopy (AFM) probes have shown a significant potential for obtaining high-resolution imaging of nanostructure and biological materials. In this paper, we report a simple method to fabricate single-walled carbon nanotube (SWNT) nanoprobes for AFM using the Langmuir–Blodgett (LB) technique. Thiophenyl-modified SWNTs (SWNT-SHs) through amidation of SWNTs in chloroform allowed to be spread and form a stable Langmuir monolayer at the water/air interface. A simple two-step transfer process was used: (1) dipping conventional AFM probes into the Langmuir monolayer and (2) lifting the probes from the water surface. This results in the attachment of SWNTs onto the tips of AFM nanoprobes. We found that the SWNTs assembled on the nanoprobes were well-oriented and robust enough to maintain their shape and direction even after successive scans. AFM measurements of a nano-porous alumina substrate and deoxyribonucleic acid using SWNT-modified nanoprobes revealed that the curvature diameter of the nanoprobes was less than 3 nm and a fine resolution was obtained than that from conventional AFM probes. We also demonstrate that the LB method is a scalable process capable of simultaneously fabricating a large number of SWNT-modified nanoprobes. 相似文献