Confocal theta line-scanning microscope for imaging human tissues

A confocal reflectance theta line-scanning microscope demonstrates imaging of nuclear and cellular morphology in human skin and oral mucosa in vivo. The illumination and detection are through a divided objective lens pupil, resulting in a theta-microscope configuration. A line is directly scanned in the pupil and descanned onto a linear detector array such that the theta line scanner consists of only seven main optical components. The experimentally measured lateral resolution is 1.0 microm and optical section thickness is 1.7 microm under nominal conditions at 830 nm wavelength. Through full-thickness human epidermis (i.e., in the dermis) the measured lateral resolution is 1.7 microm and the optical section thickness is 9.2 microm. The lateral resolution, sectioning, and image quality in epidermal (epithelial) tissue is comparable to that of point scanning confocal microscopy.     

Enhanced middle-infrared light transmission through Au/SiO(x)N(y)/Au aperture arrays

The enhanced middle-infrared light transmission through Au/SiO(x)N(y)/Au aperture arrays by changing the refractive index and the thickness of a dielectric layer was studied experimentally. The results indicated that the transmission spectra was highly dependent on the refractive index and the thickness of SiO(x)N(y). We found that the transmission peaks redshifted regularly along with the refractive index from 1.6 to 1.8, owing to the role of surface plasmon polaritons (SPP) coupling in the Au/SiO(x)N(y)/Au cascaded metallic structure. Simultaneously, a higher transmission efficiency and narrower transmission peak was obtained in Au/SiO2.1N0.3/Au cascaded metallic structure with small refractive index (1.6) than in Au/SiO0.6N1/Au cascaded metallic structure with large refractive index (1.8). When the thickness of SiO(x)N(y) changes from 0.2 to 0.4 microm, the shape of transmission spectra exhibits a large change. It was found that a higher transmission efficiency and narrower transmission peak was obtained in Au/SiO(x)N(y)/Au cascaded metallic structure with a thin dielectric film (0.2 microm), with the increase of SiO(x)N(y) film's thickness, the transmission peak gradually widened and disappeared finally. This effect is useful in applications of biochemical sensing and tunable integrated plasmonic devices in the middle-infrared region.     

Improvement in thickness uniformity of thick SOI by numerically controlled local wet etching

Silicon-on-insulator (SOI) wafers are promising semiconductor materials for high-speed LSIs, low-power-consumption electric devices and micro electro mechanical systems (MEMS). The thickness distribution of an SOI causes the variation of threshold voltage in electronic devices manufactured on the SOI wafer. The thickness distribution of a thin SOI, which is manufactured by applying a smart cut technique, is comparatively uniform. On the other hand, a thick SOI has a large thickness distribution because a bonded wafer is thinned by conventional grinding and polishing. For a thick SOI wafer with a thickness of 1 microm, it is required that the tolerance of thickness variation is less than 50 nm. However, improving the thickness uniformity of a thick SOI layer to a tolerance of +/- 5% is difficult by conventional machining because of the fundamental limitations of these techniques. We have developed numerically controlled local wet etching (NC-LWE) technique as a novel deterministic subaperture figuring and finishing technique, which utilizes a localized chemical reaction between the etchant and the surface of the workpiece. We demonstrated an improvement in the thickness distribution of a thick SOI by NC-LWE using an HF/HNO3 mixture, and thickness variation improved from 480 nm to 200 nm within a diameter of 170 mm.     

Design and fabrication of diffractive optical elements by use of gray-scale photolithography

Diffractive optical elements (DOEs) are key components in the miniaturization of optical systems because of their planarity and extreme thinness. We demonstrate the fabrication of DOEs by use of gray-scale photolithography with a high-energy-beam sensitive glass photomask. We obtained DOE lenses with continuous phase profiles as small as 800 microm in diameter and 5.9 microm in the outermost grating pitch by selecting a suitable optical density for each height level and optimizing the process variables. Microlenses patterned with eight levels and replicated by UV embossing with the polymer master mold showed a diffraction efficiency of 81.5%, which was sufficiently high for the devices to be used as optical pickups. The effects of deviations in diffraction efficiency between the DOE height and profile design were analyzed.     

Study of miscible and immiscible flows in a microchannel using magnetic resonance imaging

Magnetic resonance imaging (MRI) is a noninvasive technique that can be used to visualize mixing processes in optically opaque systems in up to three dimensions. Here, MRI has been used for the first time to obtain both cross-sectional velocity and concentration maps of flow through an optically opaque Y-shaped microfluidic sensor. Images of 23 micromx23 microm resolution were obtained for a channel of rectangular cross section (250 micromx500 microm) fed by two square inlets (250 micromx250 microm). Both miscible and immiscible liquid systems have been studied. These include a system in which the coupling of flow and mass transfer has been observed, as the diffusion of the analyte perturbs local hydrodynamics. MRI has been shown to be a versatile tool for the study of mixing processes in a microfluidic system via the multidimensional spatial resolution of flow and mass transfer.     

Large area microchannel plate detector with amorphous silicon pixel array readout for fast neutron radiography

Fast neutron radiography is a non-destructive testing technique with a variety of industrial applications and the capability for element sensitive imaging for contraband and explosives detection.

Commonly used position sensitive detectors for fast neutron radiography are based on charge coupled devices (CCDs) and scintillators. The limited format of CCDs implies that complex optical systems involving lenses and mirrors are required to indirectly image areas that are larger than 8.6 cm×11.05 cm. The use of optics reduces the light collection efficiency of the imaging system, while the efficiency of hydrogen rich scintillators exploiting the proton recoil reaction is limited by the hydrogen concentration and the magnitude of the neutron scattering cross-section.

The light conversion step inevitably involves a tradeoff in scintillator thickness between light yield and spatial resolution.

The development of large area amorphous silicon (a-Si) panel flat panel photodiode arrays and direct neutron-to-charge converters based on microchannel plates, provide an attractive new form of high resolution, large area, fast neutron imaging detector for the non-destructive imaging of large structures. This paper describes some recent results of both Monte Carlo simulations and measurements for such a detector.     

Sub-diffraction-limited multilayer coatings for the 0.3 numerical aperture micro-exposure tool for extreme ultraviolet lithography

Multilayer coating results are discussed for the primary and secondary mirrors of the micro-exposure tool (MET): a 0.30 NA lithographic imaging system with a 200 microm x 600 microm field of view at the wafer plane, operating in the extreme ultraviolet (EUV) region at an illumination wavelength around 13.4 nm. Mo/Si multilayers were deposited by DC-magnetron sputtering on large-area, curved MET camera substrates. A velocity modulation technique was implemented to consistently achieve multilayer thickness profiles with added figure errors below 0.1 nm rms demonstrating sub-diffraction-limited performance, as defined by the classical diffraction limit of Rayleigh (0.25 waves peak to valley) or Marechal (0.07 waves rms). This work is an experimental demonstration of sub-diffraction- limited multilayer coatings for high-NA EUV imaging systems, which resulted in the highest resolution microfield EUV images to date.     

Quantitative dosing of surfaces with fluorescent molecules: characterization of fractional monolayer coverages by counting single molecules.

Quantitative deposition of dye molecules onto a substrate has been achieved at very low surface concentrations, in the range of 5 x 10(-8) - 1 x 10(-6) monolayer, using the technique of controlled substrate withdrawal from solution. These small surface populations were determined with high (>96%) efficiency by single-molecule counting using an epi-illumination, fluorescence microscope with charge-coupled device detector. The fluorescence imaging resolution (3sigma) is 0.78 microm; over a uniform excitation area of 67 x 67 microm2, a large number (>7,500) of spatially resolved channels are available for counting individual molecules. At low coverages, the number density of fluorescence spots on the surface agrees with the expected surface concentration of molecules, based on the concentration of dye in solution and the solution film thickness predicted from theory. When the surface density of molecules is high enough that fluorescence spot overlap is likely to occur within the optical resolution of the instrument, the observed fewer number of spots can be corrected for overlap through a site occupation model based on Poisson statistics.     

Open-loop correction of horizontal turbulence: system design and result

Adaptive optics systems often work in a closed-loop configuration due to the hysteretic and nonlinearity properties of conventional deformable mirrors. Because of the high-precision wavefront generation and nonhysteretic properties of liquid-crystal devices, the open-loop control becomes possible. Open-loop control is a requirement for advanced adaptive optics concepts. We designed an open-loop adaptive optics system with a liquid-crystal-on-silicon wavefront corrector. This system is simple, fast, and can save much more light compared to conventional liquid-crystal-based closed-loop systems. The detailed principle, construction, and operation are discussed. The 500 m horizontal turbulence correction experiment was done using a 250 mm telescope in the laboratory. The whole system can reach a 60 Hz correction frequency. Evaluation of the correction precision was done at closed-loop configuration, which is 0.2 lambda (lambda=0.633 microm) in peak to valley. The dynamic image under open-loop correction got the same resolution compared to closed-loop correction. The whole system reached 0.68 arc sec resolution capability at open-loop correction, which is slightly larger than the system's diffraction-limited resolution of 0.65 arc sec.     

Study of a chemically amplified resist for X-ray lithography by Fourier transform infrared spectroscopy

Future applications of microelectromechanical systems (MEMS) require lithographic performance of very high aspect ratio. Chemically amplified resists (CARs) such as the negative tone commercial SU-8 provide critical advantages in sensitivity, resolution, and process efficiency in deep ultraviolet, electron-beam, and X-ray lithographies (XRLs), which result in a very high aspect ratio. In this investigation, an SU-8 resist was characterized and optimized for X-ray lithographic applications by studying the cross-linking process of the resist under different conditions of resist thickness and X-ray exposure dose. The exposure dose of soft X-ray (SXR) irradiation at the average weighted wavelength of 1.20 nm from a plasma focus device ranges from 100 to 1600 mJ/cm(2) on the resist surface. Resist thickness varies from 3.5 to 15 mum. The cross-linking process of the resist during post-exposure bake (PEB) was accurately monitored using Fourier transform infrared (FT-IR) spectroscopy. The infrared absorption peaks at 862, 914, 972, and 1128 cm(-1) in the spectrum of the SU-8 resist were found to be useful indicators for the completion of cross-linking in the resist. Results of the experiments showed that the cross-linking of SU-8 was optimized at the exposure dose of 800 mJ/cm(2) for resist thicknesses of 3.5, 9.5, and 15 microm. PEB temperature was set at 95 degrees C and time at 3 min. The resist thickness was measured using interference patterns in the FT-IR spectra of the resist. Test structures with an aspect ratio 3:1 on 10 microm thick SU-8 resist film were obtained using scanning electron microscopy (SEM).     

Three-dimensional nanoscale organization of bulk heterojunction polymer solar cells

In this study, the three-dimensional (3D) nanoscale organization in the photoactive layers of poly(3-hexylthiophene) (P3HT) and a methanofullerene derivative (PCBM) is revealed by electron tomography. Morphologies suggested by previous experimental evidence were, for the first time, observed directly with a nanometer resolution and studied in detail. After annealing treatment, either at elevated temperature or during slow solvent evaporation, genuine 3D nanoscale networks are formed with high crystalline order and favorable concentration gradients of both P3HT and PCBM through the thickness of the photoactive layer. These favorable morphological changes account for a considerable increase of the power conversion efficiency in corresponding solar cell devices.     

FT-IR study of a chemically amplified resist for X-ray lithography

Microelectronic devices for future applications demand lithographic performance that falls within the 0.10 microm region and below. Chemically amplified resists (CARs), such as the positive tone commercial UVIII resist, offer a substantial gain in sensitivity, resolution, and process efficiency in deep ultraviolet, e-beam, and X-ray lithographies. In this work, the UVIII resist is characterized for X-ray lithographic applications by studying the "deprotection" or acid generation-diffusion process of the resist under different conditions of post-exposure bake (PEB) temperature and time, and of X-ray exposure dose. The X-ray irradiation from a copper anode at a wavelength of 1.33 nm was at an intensity of 30 microW/cm2 on the resist surface. The deprotection process of the resist during PEB was accurately monitored by using Fourier transform infrared (FT-IR) spectroscopy. The infrared absorption peaks at 1151, 1369, and 2977 cm(-1) in the spectrum of the UVIII resist were found to be useful indicators for the completion of deprotection. Results of the experiments showed that the performance of UVIII could be optimized at the PEB temperature of 140 degrees C, a time of 2 min, and X-ray exposure dose of 12 mJ/cm2. The change in resist thickness after PEB was also measured. The results were confirmed by scanning electron microscopy (SEM) in which a test structure as small as 0.12 microm was obtained in a 1-microm-thick UVIII resist layer.     

High-temperature 434 Mhz surface acoustic wave devices based on GaPO4

Research into surface acoustic wave (SAW) devices began in the early 1970s and led to the development of high performance, small size, and high reproducibility devices. Much research has now been done on the application of such devices to consumer electronics, process monitoring, and communication systems. The use of novel materials, such as gallium phosphate (GaPO4), extends the operating temperature of the elements. SAW devices based on this material operating at 434 MHz and up 800 degrees C, can be used for passive wireless sensor applications. Interdigital transducer (IDT) devices with platinum/zirconium metallization and 1.4 microm finger-gap ratio of 1:1 have been fabricated using direct write e-beam lithography and a lift-off process. The performance and long-term stability of these devices has been studied, and the results are reported in this paper.     

Accuracy of the diffusive gradients in thin-films technique: diffusive boundary layer and effective sampling area considerations

When using the diffusive gradients in thin-films (DGT) technique in well-stirred solutions, the diffusive boundary layer has generally been ignored on the assumption that it is negligibly thin compared to the total thickness of delta g, i.e., the sum of the thickness of the prefilter and diffusive gel. Deployment of devices with different diffusive layer thicknesses showed that the thickness of the DBL was approximately 0.23 mm in moderate to well-stirred solutions, but substantially thicker in poorly or unstirred solutions. Measurement of the distribution of Cd in the DGT resin gel at high spatial resolution (100 microm) using laser ablation inductively coupled plasma mass spectrometry showed that the effective sampling window had a larger diameter (2.20 cm) than the geometric diameter of the exposure window (2.00 cm). Lateral diffusion in the gel, which had previously been neglected, therefore increased the effective surface area of the device by approximately 20%. The concentrations measured by DGT agreed well with the known concentrations in standard solutions for all diffusion layer thicknesses, when the effective area and the appropriate diffusive boundary layer (DBL) were used. The extent of the error associated with neglecting the DBL and using the geometric window area depends on the gel layer thickness and the true thickness of the DBL, as determined by the deployment geometry and flow regime. When DGT measurements were made in well-stirred solutions using a 0.80-mm diffusive gel, the effect of neglecting the DBL and using the inappropriate geometric area offset each other, with the error being <+/-10%. For precise measurements, and especially work involving speciation or kinetic measurements, where DGT devices with different diffusive gel layer thicknesses are deployed, it is necessary to use the effective area and the appropriate DBL thickness in the full DGT equation, which allows for the use of layer-specific diffusion coefficients.     

Attenuated total internal reflection infrared microscopy of multilayer plastic packaging foils

Multilayer plastic foils are important packaging materials that are used to extend the shelf life of food products and drinks. Fourier transform infrared (FT-IR) spectroscopic imaging using attenuated total internal reflection (ATR) can be used for the identification and localization of different layers in multilayer foils. A new type of ATR crystal was used in combination with a linear array detector through which large sample areas (400 x 400 microm(2)) could be imaged with a pixel size of 1.6 microm. The method was tested on laminated plastic packing materials containing 5 to 12 layers. The results of the identification of the different materials using ATR-FT-IR were compared with differential scanning calorimetry (DSC) and the layer thickness of the individual layers measured by ATR-FT-IR was compared with polarized light microscopy (LM) and scanning electron microscopy (SEM). It has been demonstrated that individual layers with a thickness of about 3 microm could be identified in multilayer foils with a total thickness ranging from 100 to 150 microm. The results show a spatial resolution of about 4 microm (measured at wavenumbers ranging from 1000 to 1730 cm(-1)), which is about a factor of two better than can be obtained using transmission FT-IR imaging. An additional advantage of ATR is the ease of sample preparation. A good correspondence was found between visible and FT-IR images. The results of ATR-FT-IR imaging were in agreement with those obtained by LM, SEM, and DSC. ATR-FT-IR is superior to the combination of these techniques because it delivers both spatial and chemical information.     

Three-dimensional shift selectivity in reflection-type holographic disk memory with speckle shift recording

Three-dimensional shift selectivity of a reflection-type hologram with speckle shift recording is investigated experimentally and numerically. We build an experimental setup consisting of lenses with numerical apertures of 0.28 and an iron-doped LiNbO(3) with a thickness of 0.5 mm. The experimental results show that three-dimensional selectivity has a size of 0.97 microm x 0.97 microm x 8.8 microm in diffraction efficiency. We also develop a volume holographic memory simulator to evaluate the experimental results. The simulator can quantitatively evaluate bit error rate, signal-to-noise ratio, and diffraction efficiency. Numerical results are in good agreement with the experimental results. The experimental and numerical results indicate that three-dimensional shift multiplexing can increase the storage capacity.     

High-resolution imaging ellipsometer

We report on a novel imaging ellipsometer using a high-numerical-aperture (NA) objective lens capable of measuring a two-dimensional ellipsometric signal with high resolution. Two-dimensional ellipsometric imaging is made possible by spatial filtering at the pupil plane of the objective. A Richards-Wolf vectorial diffraction model and geometrical optics model are developed to simulate the system. The thickness profile of patterned polymethyl methacrylate is measured for calibration purposes. Our instrument has a sensitivity of 5 A and provides spatial resolution of approximately 0.5 microm with 632.8-nm illumination. Its capability of measuring refractive-index variations with high spatial resolution is also demonstrated.     

Development of electrical field-flow fractionation

Electrical field-flow fractionation (ElFFF) results for a series of polystyrene latex beads are presented. To first approximation, retention behavior can be related to conventional FFF theory, modified to account for a particle-wall repulsion effect. Size selectivity and column efficiency were exceptionally high, again approaching the upper limit predicted by theory. For the channel described in the present study, application of small voltages (typically less than 2 V) across the thin (131 microm) separation space defined by a Teflon spacer generates nominal field strengths of 10(4) V m(-1). However, electrode polarization reduces the effective field across the bulk of the channel to approximately 3% of the nominal value in the system studied. The magnitude of the applied field was calibrated by using standard latex beads of known size and mobility. Perturbations to retention behavior, such as overloading, were investigated. It was found that ideal separations occur at very dilute concentrations of the sample plug and that working in systems of very low ionic strength, the double-layer thickness adds significantly to the effective size of a particle. Steric inversion was observed at a particle size of approximately 0.4 microm under the conditions employed.     

Photorefractive Incoherent-to-Coherent Optical Converter Based on Anisotropic Self-Diffraction in BaTiO(3)

A photorefractive incoherent-to-coherent optical converter (PICOC) is demonstrated; conversion is accomplished by anisotropic self-diffraction in BaTiO(3). The setup of the PICOC is easy, and only two writing beams are required. The diffraction efficiency reaches 50%, and the resolution is 22 line pairs (lp)/mm in a typical-size crystal. Further, the resolution reaches 40 lp/mm when a BaTiO(3):Rh crystal of thickness 1.2 mm is used, and the diffraction efficiency is as high as 51%. The resolution of the PICOC can be increased effectively by reduction of the crystal thickness with no penalty for low diffraction efficiency.     

Chemical imaging of pharmaceutical materials: fabrication of micropatterned resolution targets

Resolution targets composed of thick poly(ethylene glycol) (PEG) lines on silicon substrates have been fabricated using the method of micromolding in capillaries (MiMIC). Patterns of three parallel lines with equal width and spacing have been prepared, with widths between 5 and 25 microm. Raman chemical images of the PEG-on-silicon devices as well as the metal-on-glass masks used to prepare the devices were measured. The Raman images were used to determine the impulse response of the instrument by comparing the measured images to model functions prepared by convolution of a test impulse function with the object functions of the devices. Impulse widths for PEG-on-silicon targets were approximately two times greater than impulse widths for metal-on-glass targets. The results provide a quantitative measure of the influence of light-matter interactions on the spatial resolution achievable with chemical imaging instruments. This work shows that microfluidic channels can be used to produce robust patterns of PEG on silicon, and these patterns are realistic resolution targets for spectroscopic chemical imaging of pharmaceutical materials.