Digital integrated circuit using integrated InAlAs/InGaAs/InP HEMTsand InAs/AlSb/GaSb RITDs

The demonstration of the first integrated circuit using monolithically integrated InAs/AlSb/GaSb resonant interband tunnelling diodes (RITDs) and InAlAs/InGaAs/InP high electron mobility transistors (HEMTs) is reported. A D-flip-flop (D-FF) was implemented using the monostable/bistable logic element (MOBILE) circuit architecture, with a measured effective voltage gain in excess of 380. Power dissipation of less than 2.8 mW/gate was measured     

InAlAs/InGaAs/InP HEMT欧姆接触研究

应用Au/Ge/Ni系金属在InAlAs/InGaAs/InP HEMT上成功制作了良好的合金欧姆接触。采用WN和Ti双扩散阻挡层工艺优化欧姆接触,在样品上获得了最低9.01×10-8Ω.cm2的比接触电阻,对应的欧姆接触电阻为0.029Ω.mm。同时,在模拟后续工艺环境的20min250°C热处理后,器件的欧姆接触性能无显著变化,表明其具有一定的温度稳定性。     

InP/InAlAs/InGaAs quantum wires

Single InGaAs quantum wires and stacked InGaAs quantum wires with InAIAs barriers have been fabricated on V-grooved InP substrates by low pressure metal-organic chemical vapour deposition (MOCVD). We have found growth conditions where the InAIAs barrier exhibits a resharpening effect, similar to that of AlGaAs utilized for growth on GaAs substrates. The existence of structural and electronic quantum wires in the bottom of the grooves is proven.     

High-speed InAlAs/InGaAs heterojunction bipolar transistors

InAlAs/InGaAs heterojunction bipolar transistors fabricated from wafers grown by molecular beam epitaxy are discussed. A cutoff frequency of 32 GHz for a collector current of 20 mA is achieved in the emitter area of devices 6×10 μm². The use of heavily doped and nondoped InGaAs layers as the emitter cap and collector, respectively, results in a reduction of the emitter and collector charging times; this, in turn, leads to improved microwave performance     

InGaAs（InAIAs）／InP和InP／InAIAs湿法选择腐蚀研究

介绍了两种选择腐蚀液对InGaAs（InAlAs）／InP和InP／InAlAs异质结构材料选择腐蚀的实验结果，重点介绍在InAlAs上面生长InP的湿法选择腐蚀，用HCl：H3PO4：CH3COOH系列腐蚀液，InP／InAlAs选择比大于300。InP／InAlAs湿法选择腐蚀的结果可以很好应用到OEIC芯片制作中，并取得了较好的器件及电路结果。     

InGaAs(InAlAs)/InP和InP/InAlAs湿法选择腐蚀研究

介绍了两种选择腐蚀液对InGaAs(InAlAs)I/nP和InPI/nAlAs异质结构材料选择腐蚀的实验结果,重点介绍在InAlAs上面生长InP的湿法选择腐蚀,用HClH∶3PO4C∶H3COOH系列腐蚀液,InPI/nAlAs选择比大于300。InPI/nAlAs湿法选择腐蚀的结果可以很好应用到OEIC芯片制作中,并取得了较好的器件及电路结果。     

Magnetotransport characterization of surface-treated InP/InGaAs heterojunction bipolar transistors

The results of surface modification induced effects on InP/InGaAs single heterojunction bipolar transistors, as revealed by magnetotransport experiments, are described here. The surface treatments included both sulphur-based surface passivation and ion bombardment-induced surface damage. The former is known to improve device characteristics and the latter to degrade device operation. In this work the aim was to assess these techniques for tailoring device performance for surface sensing applications. Device characteristics were found to be sensitive to surface preparation prior to measurements. Measurements revealed that surface treatments that improve device performance also reduce sensitivity to external magnetic fields while treatments that degrade performance make devices more sensitive to externally applied magnetic fields.     

Microwave performance of InAlAs/InGaAs/InP MODFET's

Modulation-doped InAlAs/InGaAs/InP structures were grown by molecular beam epitaxy (MBE) and fabricated into FET's with excellent RF gain performance. The intrinsic transconductance was about 400 mS/mm at 300 K. Current gain cutoff frequencies of up to 26.5 GHz were obtained in 1-µm gate devices. Extremely small S12and large S21led to a very largef_{max}of 62 GHz. These results represent the best reported figures for 1-µm devices in this material system and slightly better than those obtained in recently developed pseudomorphic modulation-doped field effect transistors (MODFET's).     

Microwave performance of InGaAs/InAlAs/InP SISFETs

Microwave S-parameter measurements and equivalent-circuit modeling of In_0.53Ga_0.47As/In_0.52Al_0.48 As/InP semiconductor-insulator-semiconductor FETs (SISFETs) of 1.1-μm gate length are discussed. The devices incorporated wide-bandgap buffers, self-aligned contact implants, and refractory air-bridge gates. Their DC I-V characteristics displayed sharp pinchoff, good output conductance of 10-20 mS/ss, and extrinsic transconductance up to 220 ms/mm at room temperature. The maximum unity-current-gain frequency was 27 GHz. Gate resistance was found to be the dominant factor limiting microwave power gain     

Optical effect in InAlAs/InGaAs/InP MODFET

Analytical results have been presented for an optically illuminated InAlAs/InGaAs/InP MODFET with an opaque gate. Partial depletion of the active region is considered. The excess carriers due to photo generation are obtained by solving the continuity equation. The energy levels are modified due to the generation of carriers. The surface recombination effect has also been taken into account. The results of I-V characteristics have been compared under dark conditions, since under illumination experimental results are not available. The offset voltage, sheet concentration, I-V, and transconductance have been presented and the effect of illumination discussed     

InGaAs/InAlAs/InP collector-up microwave heterojunction bipolartransistors

Collector-up InGaAs/InAlAs/InP heterojunction bipolar transistors (HBTs) were successfully fabricated, and their DC and microwave characteristics measured. High collector current density operation (J_c>30 kA/cm²) and high base-emitter junction saturation current density (J₀>10^-7 A/cm²) were achieved. A cutoff frequency of f _t=24 GHz and a maximum frequency of oscillation f _max=20 GHz at a collector current density of J₀ =23 kA/cm² were achieved on a nominal 5-μm×10-μm device     

Processing techniques for InGaAs/InAlAs/InGaAs spin field effect transistors

Wet etch processing techniques for InGaAs/InAl/As/InGaAs transistors are used to fabricate an N-channel HEMT (High Electron Mobility Transistor) with Fe contacts. These processing techniques can easily be extended for dilute magnetic semiconductor regrowth and for testing of various spin injection geometries.     

Fabrication and characterization of high-performance InP/InGaAsdouble-heterojunction bipolar transistors

This paper is on high-performance InP/InGaAs double-heterojunction bipolar transistors (DHBT's) utilizing compositionally step-graded InGaAsP layers between the InGaAs base and InP collector to suppress the current blocking effect. These DHBT's exhibit current gains of 200 and excellent breakdown behavior. Moreover, the DHBT's permit collector current density levels J_C up to 3×10⁵ A/cm ² at V_CE=1.5 V. A current gain cutoff frequency of 155 GHz and a maximum oscillation frequency of 90 GHz have been successfully obtained at J_C=1.6×10⁵ A/cm². We have also investigated electron transport properties in the InP collector using a set of DHBT's with different injection energies into the InP collector. By increasing the injection energies, electron velocity is found to decrease from 3.5×10⁷ cm/s to 1.6×10⁷ cm/s, due to increased population of upper valleys. This result clearly demonstrates the significant role of nonequilibrium Γ-valley transport in determining the high-speed performance of InP/InGaAs DHBT's     

Simulation of PNP InAlAs/InGaAs heterojunction bipolar transistors

The performance of single heterojunction InAlAs/InGaAs PNP heterojunction bipolar transistors is modeled numerically and good agreement is found with experimental measurements. Peak experimental values of f_T=14 GHz, f_Max=22 GHz, β=170 and U=38 dB are obtained near a collector current density of 10⁴ A/cm² for a nonoptimized device     

An 80-Gbit/s multiplexer IC using InAlAs/InGaAs/InP HEMTs

This paper describes the design and performance of an 80-Gbit/s 2:1 selector-type multiplexer IC fabricated with InAlAs/InGaAs/InP HEMTs. By using a double-layer interconnection process with a low-dielectric insulator, microstrip lines were designed to make impedance-matched, high-speed intercell connection of critical signal paths. The record operating data rate was measured on a 3-in wafer. In spite of the bandwidth limitation on the measurement setup, clear eye patterns were successfully observed for the first time. The obtained circuit speed improvement from the previous result of 64 Gbit/s owes much to this high-speed interconnection design     

High-speed InP/InGaAs heterojunction bipolar transistors

Very-high-performance common-emitter InP/InGaAs single heterojunction bipolar transistors (HBTs) grown by metalorganic molecular beam epitaxy (MOMBE) are reported. They exhibit a maximum oscillation frequency (f_T) of 180 GHz at a current density of 1×10⁵ A/cm². this corresponds to an (R_BC_BC)_eff=f _T/(8πf²_max) delay time of 0.12 ps, which is the smallest value every reported for common-emitter InP/InGaAs HBTs. The devices have 11 μm² total emitter area and exhibit current gain values up to 100 at zero base-collector bias voltage. The breakdown voltage of these devices is high with measured BV_CEO and BV_CEO of 8 and 17 V, respectively     

Selfaligned InGaAs/InP heterostructure bipolar transistors

InGaAs/InP heterostructure bipolar transistors have been realised using a new selfaligned process. Transistor wafers were grown by chemical beam epitaxy. Ideality factors close to unity were measured for emitter-base and collector-base diodes. The resulting devices exhibit nearly constant gain over four orders of magnitude of collector current densities, from j=1.5*10/sup -4/ A/cm/sup 2/ to 1.5 A/cm/sup 2/.<>     

Ultra-high-speed InP/InGaAs heterojunction bipolar transistors

We report on the microwave performance of InP/In_0.53Ga _0.47As heterojunction bipolar transistors (HBT's) utilizing a carbon-doped base grown by chemical beam epitaxy (CBE). The f_T and f_max of the HBT having two 1.5×10 μm² emitter fingers were 175 GHz and 70 GHz, respectively, at I_C=40 mA and V_CE=1.5 V. To our knowledge, the f _T of this device is the highest of any type of bipolar transistors yet reported. These results indicate the great potential of carbon-doped base InP/InGaAs HBT's for high-speed applications     

Subpicosecond InP/InGaAs heterostructure bipolar transistors

Bipolar transistors with subpicosecond extrinsic delay are discussed. These InP/InGaAs heterostructure transistors show a unity-current-gain cutoff frequency f_$T=165 GHz and maximum oscillation frequency f_MAX=100 GHz at room temperature. The authors model shows that an f_$T beyond 386 GHz is obtainable by further vertical scaling. Ring oscillators implemented with nonthreshold logic (NTL) and transistors having f_MAX=71 GHz show a propagation delay of 14.7 ps and 5.4 mW average power consumption per stage     

Mesa-sidewall gate leakage in InAlAs/InGaAs heterostructurefield-effect transistors

InAlAs/InGaAs HFETs fabricated by conventional mesa isolation have a potential parasitic gate-leakage path where the gate metallization overlaps the exposed channel edge at the mesa sidewall. The existence of this path has been proven by fabricating special heterojunction diodes with different mesa-sidewall gate-metal overlap lengths. It is found that sidewall leakage is a function of the crystallographic orientation of the sidewall, and increases with channel thicknesses, sidewall overlap area, and InAs mole fraction in the channel. In HFETs fabricated alongside the diodes, sidewall leakage increased the subthreshold and forward gate leakage currents, and reduced the breakdown voltage