ZnO微纳结构对GaN基LED光提取效率的影响研究

基于时域有限差分法(FDTD)在GaN基LED表面分别生长了 ZnO柱状与锥状微纳结构,并利用Rsoft模拟仿真软件分析了两种结构的几何参量(排列周期p、高度H、底面直径D等)对GaN基LED光提取效率的影响.结果表明两种结构均可提高器件的光提取效率,柱状结构在H=0.25 μm,p=1.5 μm,D=0.9μm时表现最优,其光提取效率是未加任何结构平板LED的5.6倍;而锥状结构在H=0.6μm,p=1.4 μm,D=1.4 μm时表现最优,其光提取效率是未加任何结构平板LED的5.3倍.研究结果对高性能GaN基LED的设计与制备具有一定指导意义.     

表面粗化对GaN基垂直结构LED出光效率的影响

用加热后的KOH水溶液腐蚀GaN材料的N极性面,用以提高GaN基垂直结构发光二极管(LED)的出光效率。经过湿法腐蚀后,构成N极性面的表面晶粒尺寸和密度成为影响垂直结构LED提取效率的主要因素,通过分析不同腐蚀条件下晶粒尺寸和密度与出光效率间的关系,得到最优化的粗化条件,使得器件的提取效率达到最佳。经由浓度为30%、温度为60℃的KOH溶液腐蚀后,未封装的垂直结构LED芯片的提取效率增加了近1倍。     

正装、倒装结构GaN 基LED提取效率分析

从几何和物理光学角度分析了影响GaN基LED提取效率的因素,并以理论分析为基础,利用Monte-Carlo光线追踪的方法,对GaN基LED的提取效率进行模拟,比较不同器件结构对LED提取效率的影响.模拟结果表明,采用倒装结构可以显著提高GaN基LED的提取效率,Ni/Au透明电极透射率为0.6～0.9时,相对于普通正装结构,倒装结构可以使LED提取效率提高39%～16%.     

光子晶体GaN LED与量子点的共振能量转移

正设计并研制了光子晶体结构GaN LED,实现了光子晶体GaN LED提取效率的提高及其到胶体量子点的共振能量转移,能量转移效率达到79.50%。设计了光子晶体GaN LED器件结构,利用光刻、感应耦合等离子体刻蚀等工艺研制了光子晶体GaN LED器件,制作的光子晶体区域边缘光滑,满足实验的要求。采用积分球收集LED发光来测试LED的P-I-V曲线,测试了在p-GaN上刻蚀光子晶体的LED在不同电流下输出功率与晶格常数、占空比的关系。研究发现:50 mA驱动电流下,晶格常数为14μm、半径与晶格常数比为0.25的光子晶体GaN LED输出功率比无光子晶体GaN LED提高21%以上。该研究对实现高效率胶体量子点电注入发光器件具有借鉴价值。     

GaN基LED的图形衬底优化研究

设计了方形和阶梯状两大类的图形化蓝宝石衬底(PSS), 使用Crosslight公司的工艺软件CSuprem建立了三维的方形和阶梯状两类图形衬底GaN LED器件, 然后使用APSYS软件模拟计算出它们的光电特性。并且对方形图形衬底的刻蚀深度进行了优化, 通过对模拟结果的比较得到刻蚀深度与边长的比值为0.4时, 这种方形图形衬底GaN LED的光提取效率最高, 且比平面衬底提高了20.13%。对阶梯状图形衬底的阶梯层数进行了比较, 发现随着阶梯层数的增加, 光提取效率也随着增加, 阶梯状层数为5时, 光提取效率比平面衬底提高了30.03%。并对方形PSS LED进行了实验验证。     

侧面粗化提高GaN基LED出光效率研究

通过对传统结构LED出光分析,提出采用侧面粗化来提高GaN基LED出光效率的方法,使用蒙特卡罗光子追踪方法对器件出光效率进行了模拟。结果表明:粗化侧面为三角状、底角为55°时出光效率最高,随机粗化可以获得比固定角度粗化更高的出光效率,同时降低材料的吸收系数可以提高LED的出光效率,在吸收系数为10/cm时,经过粗化后的LED出光效率可以达到46.1%。模拟结果证明侧面粗化可以较大地提高LED的出光效率。     

基于垂直结构GaN LED的水下蓝光通信系统

垂直结构GaN LED能够提高器件的出光效率和调制带宽,是可见光通信的关键器件。该文面向水下蓝光通信的重大应用需求,基于亚波长理想LED模型,设计、制备了垂直结构蓝光LED器件,在NRZ-OOK调制下可实现10 Mbps的无线光通信。该文进一步搭建了水下可见光通信系统,采用基于该器件,实现了调制速率2 Mbps的全双工水下蓝光通信。     

表面织构对红光LED发光的影响

运用蒙特卡罗法模拟二维红光LED表面织构对LED光提取效率的影响.模拟了不同形状的表面织构对应的光强变化率.选取刻蚀深度为4μm、腐蚀宽度为2μm、倾角为40°、周期为2μm的表面图形对LED进行粗化实验.结果显示,引入表面织构后光强比常规LED提高了20.56%;并对模拟结果与实验结果进行了分析,结果表明引入表面织构可以有效地提高LED的光提取效率.     

表面织构对红光LED发光的影响

运用蒙特卡罗法模拟二维红光LED表面织构对LED光提取效率的影响.模拟了不同形状的表面织构对应的光强变化率.选取刻蚀深度为4μm、腐蚀宽度为2μm、倾角为40°、周期为2μm的表面图形对LED进行粗化实验.结果显示,引入表面织构后光强比常规LED提高了20.56%;并对模拟结果与实验结果进行了分析,结果表明引入表面织构可以有效地提高LED的光提取效率.     

GaN基LED芯片的光效提升研究

GaN基LED芯片具有制备工艺简单、低成本、良率高等优点,提高LED芯片的出光效率已成为国内外专家的研究重点.采用tracepro软件,并基于蒙特卡洛法对ITO表面具有微孔结构的LED芯片的光萃取效率进行模拟仿真,相比ITO层没有微孔结构的LED芯片,有微孔结构的LED芯片的光萃取效率有明显的提升.通过光刻技术和湿法蚀...     

ZnO纳米棒阵列提高发光二极管光抽取效率的研究

为了提高大功率LED的光抽取效率,采用溶胶-凝胶法、水热生长法的两步生长工艺在大功率红光发光二极管(LEDs)表面制作ZnO纳米棒阵列结构进行研究.利用ZnO纳米棒形成的光波导,ZnO纳米棒侧面为辅助出光面,提高了LED芯片的光输出效率.测试表明,所生长的ZnO纳米棒分布密度均匀,形貌一致;与未制作ZnO纳米棒前相比较...     

Improved light extraction efficiency of GaN-based light emitting diodes using one and two interfaces of ITO/ZnO layer texturing

Light extraction efficiency of GaN-based light emitting diodes (LEDs) has improved significantly by using ITO/ZnO layer texturing. We have deliberately designed and successfully fabricated GaN-based LEDs having one and two interfaces of ITO/ZnO layer texturing in the device structure. It was found that the light extraction efficiencies of one and two interfaces of ITO/ZnO-layer texturing LEDs were 22.29% and 35.54% at 20 mA of current injection, respectively. Creating the chances of multiple light scattering at more than one interface is playing a major role to enhance light output power of the device. The source of the enhanced light output power is also discussed.     

Analysis and Simulation of Light Extraction of Light-Emitting Diodes:Simulation Efficiency

Two foundational factors (escape cone and transmissivity) about light extraction of light emitting diodes (LEDs) are discussed.According to these factors,a new process to simulate the light extraction of LEDs based on the Monte Carlo method has been provided.The improved method is to deal with the reflection and refraction of light (beam of light) at the interface between two mediums approximately.In addition,light extraction of traditional LEDs is simulated by different processes with the same structure and parameters.The results show that the reflection and refraction of light processed approximately are accurate enough for analyzing LEDs structure.This method saves much time and improves efficiency in the simulation of light extraction of LEDs.     

Analysis and Simulation of Light Extraction of Light-Emitting Diodes: Simulation Efficiency

Two foundational factors (escape cone and transmissivity) about light extraction of light emitting diodes (LEDs) are discussed. According to these factors, a new process to simulate the light extraction of LEDs based on the Monte Carlo method has been provided. The improved method is to deal with the reflection and refraction of light (beam of light) at the interface between two mediums approximately. In addition, light extraction of traditional LEDs is simulated by different processes with the same structure and parameters. The results show that the reflection and refraction of light processed approximately are accurate enough for analyzing LEDs structure. This method saves much time and improves efficiency in the simulation of light extraction of LEDs.     

大功率GaN基LED的提取效率

影响GaN基LED效率的主要因素是内量子效率和提取效率. 蓝光GaN基的LED内量子效率可达70%以上， 紫外GaN基LED可达80%，进一步改善的空间较小. 而传统大面积结构GaN基LED由于全反射和吸收等原因，外提取效率只有百分之几，提高空间很大. 本文从几何和物理光学角度分析了影响GaN基LED外提取效率的因素，针对全反射、吸收、横向光波导等问题总结了现有的各种提高GaN基LED提取效率的手段及其优缺点.     

Light Output Improvement of InGaN-Based Light-Emitting Diodes by Microchannel Structure

We propose a microchannel structure with deep holes to enhance the extraction efficiency of InGaN-based light-emitting diodes (LEDs). Two different depth microchannel LEDs are examined experimentally. One has air holes penetrated through the active layer and the other does not. It is found that the light extraction efficiency in the LED with the penetrated air holes is significant h larger than that in the LED without penetrating holes. The reason can be attributed to the microchannel waveguide behaviors. In comparison to the conventional LEDs, the light output power of our fabricated LEDs with and without penetrating holes improved by 43.5% and 5.1%, respectively.     

Enhancing extraction efficiency from GaN-based LED by using an omni-directional reflector and photonic crystal

To enhance the light extraction efficiency of traditional light-emitting diodes（LEDs） by reducing the total internal reflection,an omni-directional reflector（ODR） and photonic crystal are adopted in the paper.The structures of photonic crystal and the ODR are designed by diffraction theory and finite difference time domain（FDTD） method.The photonic crystal is employed in the p-GaN layer and the ODR composed of TiO2/SiO2 is designed between the active region and substrate.The simulation results indicate that the light extraction of LEDs can be enhanced by 11.6 times,and the external quantum efficiency of LEDs will be effectively improved.     

AlGaInP系LED的表面纳米级粗化以及光提取效率提高

分析了常规AlGaInP系发光二极管（LED）光提取效率低的主要原因,半导体的折射率与空气折射率相差很大,导致全反射使有源区产生的光子绝大部分不能通过出光面发射到体外。通过在LED出光层采用纳米压印技术引入表面纳米结构,以改变光子的传播路径,从而使得更多的光子能够发射到体外。理论分析与实验结果表明,与常规平面结构相比,...     

Improvement of the performance of GaN-based LEDs grown on sapphire substrates patterned by wet and ICP etching

Sapphire substrates patterned by a selective chemical wet and an inductively coupled plasma (ICP) etching technique was proposed to improve the performance of GaN-based light-emitting diodes (LEDs). GaN-based LEDs were fabricated on sapphire substrates through metal organic chemical vapor deposition (MOCVD). The LEDs fabricated on the patterned substrates exhibit improved device performance compared with the conventional LED fabricated on planar substrates when growth and device fabricating conditions were the same. The light output powers of the LEDs fabricated on wet-patterned and ICP-patterned substrates were about 37% and 17% higher than that of LEDs on planar substrates at an injection current of 20 mA, respectively. The enhancement is attributable to the combination of the improvement of GaN-based epilayers quality and the improvement of the light extraction efficiency.     

Efficiency Improvement of GaN-Based LEDs With $ hbox{SiO}_{2}$ Microrod Array and Textured Sidewalls

High-performance nitride-based light-emitting diodes (LEDs) grown with SiO₂ microrod array have been demonstrated. The light output power of LEDs with SiO₂ microrod array was 9.03% higher than conventional LEDs at the injection current of 20 mA. The improvement contributed to the enhancement of the light extraction efficiency, and epitaxial GaN film quality improved by direct heteroepitaxial lateral overgrowth with SiO₂ microrod array. The light output power could be further enhanced by about 18.36% as compared with the conventional LEDs when adopting the textured sidewall surface which use buffered oxide etch to remove SiO₂ microrod arrays and use NaOH to etch the sidewall again into an inverted pyramid shape. After the texturing process, the LEDs show higher electroluminescence intensity and broader far-field pattern. Furthermore, the LEDs with SiO₂ microrod array and additional wet-etching process will not affect the electrical property.