An 18 ns CMOS/SOS 4K static RAM

A high-speed CMOS/SOS 4K word/spl times/1 bit static RAM is described. The RAM features a MoSi/SUB 2/ gate CMOS/SOS technology with 2 /spl mu/m gate length and 500 /spl Aring/ thick gate oxide. Performance advantage of SOS over bulk is discussed for the scaled-down MOS LSI with 1-2 /spl mu/m gate. A standard 6-transistor CMOS cell and a two-stage sense amplifier scheme are utilized. In spite of the rather conservative 3.5 /spl mu/m design rule except for the 2 /spl mu/m gate length, the cell size of 36/spl times/36 /spl mu/m, the die size of 3.11/spl times/4.07 mm, and the typical read access and cycle time of 18 ns are achieved. The active and standby power dissipation are 200 mW and 50 /spl mu/W, respectively.     

1.0-/spl mu/m n-Well CMOS/Bipolar Technology

High-performance 1.0-/spl mu/m n-well CMOS/bipolar on-chip technology was developed. For process simplicity, an n-well and a collector of bipolar transistors were formed simultaneously, and base and NMOS channel regions were also made simultaneously resulting in collector-isolated vertical n-p-n bipolar transistor fabrication without any additional process step to CMOS process. On the other hand, 1.0-/spl mu/m CMOS with a new "hot carrier resistant" seIf-defined Polysilicon sidewall spacer (SEPOS) LDD NMOS was developed. It can operate safely under supply voltage over 5 V without performance degradation of CMOS circuits. By evaluating ring oscillators and differential amplifiers constructed by both CMOS and bipolar transistors. it can be concluded that in a digital and in an analog combined system, CMOS has sufficiently high-speed performance for digital parts, while bipolar is superior for analog parts. In addition, bipolar transistors with an n/sup +/-buried layer were also fabricated to reduce collector resistance. Concerning the bipolar input/output buffers, the patterned n/sup +/-buried layer improves the drivability and high-frequency response. As a result, the applications of n-well CMOS/bipolar technology become clear. This technology was successfully applied to a high-speed 64-kbit CMOS static RAM, and improvement in access time was observed.     

An enhanced fully scaled 1.2-/spl mu/m CMOS process for analog

An n-well CMOS technology has been developed for high-speed/precision 10-V analog operation while retaining VLSI packaging densities and performance. Several enhancements to a fully scaled 1.2-/spl mu/m CMOS process were made to attain performance levels necessary for state-of-the-art data-conversion applications. The technology incorporates components essential for analog circuit design such as high-gain/low-noise n-p-n BJTs, laser trimmable Cr-Si resistors, and extremely accurate interpoly oxide capacitors. Inclusion of an optimized LDD structure on n-channel transistors has permitted 10-V CMOS capabilities down to 2.5-/spl mu/m drawn gate lengths.     

An isolated vertical n-p-n transistor in an n-well CMOS process

Isolated vertical n-p-n transistors were fabricated by a modified 5-/spl mu/m n-well CMOS process. The modification included a decrease in the p/SUP +/ source and drain implant dose and an increase in the final anneal time, but no extra processing steps of masks were required. The n-p-n transistors had generally good characteristics, with H/SUB FE//spl ap/600 and BV/SUB CEO//spl ap/40 V, while the MOS characteristics were unchanged.     

A low-power SRAM using hierarchical bit line and local sense amplifiers

This paper proposes a low power SRAM using hierarchical bit line and local sense amplifiers (HBLSA-SRAM). It reduces both capacitance and write swing voltage of bit lines by using the hierarchical bit line composed of a bit line and sub-bit lines with local sense amplifiers. The HBLSA-SRAM reduces the write power consumption in bit lines without noise margin degradation by applying a low swing signal to the high capacitive bit line and by applying a full swing signal to the low capacitive sub-bit line. The HBLSA-SRAM reduces the swing voltage of bit lines to V/sub DD//10 for both read and write. It saves 34% of the write power compared to the conventional SRAM. An SRAM chip with 8 K/spl times/32 bits is fabricated in a 0.25-/spl mu/m CMOS process. It consumes 26 mW read power and 28 mW write power at 200 MHz with 2.5 V.     

A 6K-gate CMOS gate array

Combining advanced 2 /spl mu/m CMOS technology with a newly developed double layer metallization technology, a high-performance 6K-gate CMOS gate array has been developed, featuring an inverter propagation delay time of 0.4 ns with a power dissipation of 10 /spl mu/W/MHz/stage. As a demonstration vehicle of the high-performance gate array, a 16 bit/spl times/16 bit parallel multiplier has been designed and fabricated in which 3365 basic cells are used. Typical multiplying time has been measured to be 130 ns at a 5 MHz clock rate with a power dissipation of 275 mW.     

HMOS-CMOS-a low-power high-performance technology

HMOS-CMOS, a new high-performance bulk CMOS technology, is described. This technology builds on HMOS II, and features high resistivity p-substrate, diffused n-well and scaled n- and p-channel devices of 2-/spl mu/m channel length and 400-/spl Aring/ gate oxide thickness. The aggressive scaling of n and p devices results in 350-ps minimum gate delay and 0.04-pJ power delay product. HMOS-CMOS is a single poly technology suitable for microprocessor and static RAM applications. A 4K static RAM test vehicle is described featuring fully CMOS six-transistor memory cell, a chip size of 19600 mil/SUP 2/, 75 /spl mu/W standby power, data retention down to a V/SUB cc/ voltage of 1.5 V and a minimum chip select and address access time of 25 ns.     

A low power 46 ns 256 kbit CMOS static RAM with dynamic double word line

A fast, low-power 32K/spl times/8-bit CMOS static RAM with a high-resistive polyload 4-transistor cell has been developed utilizing a dynamic double word line (DDWL) scheme. This scheme combines an automatic power down circuitry and double word line structure. The DDWL, together with bit line and sense line equilibration, reduces the core area delay time and operating power to about 1/2 and 1/15 that of a conventional device, respectively. A newly developed fault-tolerant circuitry improves fabrication yield without degrading the access time. As for a fabrication process, an advanced 1.2-/spl mu/m p-well CMOS technology is developed to realize the ULSI RAM, integrating 1,600,000 elements on a 6.68/spl times/8.86 mm/SUP 2/ chip. The RAM offers, typically, 46 ns access time, 10 mW operating power and 30 /spl mu/W standby power.     

Process and device performance of 1 /spl mu/m channel n-well CMOS technology

The process and device performance of 1 /spl mu/m-channel n-well CMOS have been characterized in terms of substrate resistivities of 40 and 10 /spl Omega/-cm, substrate materials with and without an epitaxial layer, n-well surface concentrations ranging from 5/spl times/10/SUP 15/ to 4/spl times/10/SUP 16/ cm/SUP -3/, n-well depths of 3, 4, and 5 /spl mu/m, channel boron implantation doses from 2/spl times/10/SUP 11/ to 1.3/spl times/10/SUP 12/ cm/SUP -2/, and effective channel lengths down to 0.6 /spl mu/m. Based on the experimental results obtained from /spl mu/m-channel n-well CMOS devices, the scaling effects on device and circuit performance of 0.5 /spl mu/m-channel n-well CMOS are discussed and the deep-trench-isolated CMOS structure is demonstrated.     

On the analysis and design of CMOS-bipolar SRAMs

The design and operation of a CMO-bipolar SRAM cell, which incorporates cross-coupled CMOS and n-p-n access transistors, is discussed. A column circuitry to accompany this cell is proposed. Simulation results attributing column access time, standby power dissipation, and active power dissipation of 6-8 ns, 6.5 nW/bit, and 4 mW/b, respectively, for a cell area of ~450 /spl mu/m/SUP 2/, suggest the suitability of this approach for applications requiring density, performance, and moderate power.     

A 50-/spl mu/A standby 1M/spl times/1/256K/spl times/4 CMOS DRAM with high-speed sense amplifier

A 1M word/spl times/1-bit/256K word/spl times/4-bit CMOS DRAM with a test mode is described. The use of an improved sense amplifier for the half-V/SUB CC/ sensing scheme and a novel half-V/SUB CC/ voltage generator have yielded a 56-ns row access time and a 50-/spl mu/A standby current at typical conditions. High /spl alpha/-particle immunity has been achieved by optimizing the impurity profile under the bit line, based on a triple-layer polysilicon n-well CMOS technology. The RAM, measuring 4.4/spl times/12.32 mm/SUP 2/, is fit to standard 300-mil plastic packages.     

A CMOS/SOS 4K static RAM

Discusses high density CMOS/SOS technology used to develop a fully static 4096-bit RAM with a five-transistor storage cell. Selection of a five-transistor memory cell has reduced the access to the flip-flop storage element to a single word line transistor and bit line. The word line transistor must be able to prevent data altering currents from entering the memory cell at all times except for the write operation. The write operation is enhanced by reducing the bias voltage across the memory cell, thereby making the current needed to alter the cell smaller. Through the use of a 5 /spl mu/m design rule, the memory cell occupies 2913 /spl mu/m/SUP 2/. The 4096-bit static CMOS/SOS RAM contains 22553 transistors in 20 mm/SUP 2/. Organised as 1024 4-bit words, the RAM has a read cycle time of 350 ns and standby power dissipation of 50 /spl mu/W at V/SUB cc/=5 V and temperature of 27/spl deg/C.     

A 60-ns 4-Mbit CMOS DRAM with built-in selftest function

A 4-Mb CMOS DRAM measuring 6.9/spl times/16.11 mm/SUP 2/ has been fabricated using a 0.9-/spl mu/m twin-tub CMOS, triple-poly, single-metal process technology. N-channel depletion-type trench cells, 2.5/spl times/5.5 /spl mu/m/SUP 2/ each, are incorporated in a p-well. A novel built-in selftest (BIST) function which enables a simultaneous and automatic test of all the memory devices on a board is introduced to reduce the RAM testing time in a system. This function is effective for system maintenance and a daily start-up test even in a relatively small system. A high-speed low-power 4-Mb CMOS DRAM with 60-ns access time, 50-mA active current, and 200-/spl mu/A standby current is realized by widening the DQ line bus which connects the sense amplifiers with DQ buffers, thereby reducing the parasitic capacitance of the DQ lines.     

A 256K ROM fabricated using n-well CMOS process technology

A 256K bit CMOS ROM with a speed-power product of 0.085 pJ/bit has been developed. The excellent speed-power product and the high packing density have been achieved by using n-well CMOS technology and a serial-parallel ROM cell structure. The concept and characteristics of a serial-parallel ROM cell structure are discussed and compared to conventional ROM cell structures. The serial-parallel ROM cell structure gives more flexibility for ROM matrix design. The chip size and memory cell size of the 256K CMOS ROM are 5.98/spl times/6.00 mm and 7.0/spl times/7.0 /spl mu/m, respectively. Access time is 370 ns. The power supply currents in active and quiescent modes are 12 mA and less than 0.1 /spl mu/A at +5 V, respectively.     

1.0-µm n-well CMOS/bipolar technology

High-performance 1.0-µm n-well CMOS/bipolar on-chip technology was developed. For process simplicity, an n-well and a collector of bipolar transistors were formed simultaneously, and base and NMOS channel regions were also made simultaneously resulting in collector-isolated vertical n-p-n bipolar transistor fabrication without any additional process step to CMOS process. On the other hand, 1.0-µm CMOS with a new "hot carrier resistant" self-defined polysilicon sidewall spacer (SEPOS) LDD NMOS was developed. It can operate safely under supply voltage over 5 V without performance degradation of CMOS circuits. By evaluating ring oscillators and differential amplifiers constructed by both CMOS and bipolar transistors, it can be concluded that in a digital and in an analog combined system, CMOS has sufficiently high-speed performance for digital parts, while bipolar is superior for analog parts. In addition, bipolar transistors with an n⁺-buried layer were also fabricated to reduce collector resistance. Concerning the bipolar input/output buffers, the patterned n⁺-buried layer improves the drivability and high-frequency response. As a result, the applications of n-well CMOS/bipolar technology become clear. This technology was successfully applied to a high-speed 64-kbit CMOS static RAM, and improvement in access time was observed.     

A 25 ns 64K static RAM

A high-performance 64K/spl times/1-bit CMOS SRAM is described. The RAM has an access time of 25 ns with active power of 350 mW and standby power of 15 mW. The access time has been obtained by using a 1.5 /spl mu/m rule CMOS process, advanced double-level A1 interconnection technology, an equalizer circuit, and a digit line sense amplifier that is the first sense amplifier directly connected to digit lines. The WRITE recovery circuit is effective in improving WRITE characteristics, and a block selecting circuit was used for low power dissipation.     

Current gain high-frequency CMOS operational amplifiers

The performance of high unity gain-bandwidth current gain-based CMOS operational amplifiers fabricated in a 1.5-/spl mu/m CMOS digital process is discussed. High unity-gain bandwidth was achieved by using short-channel MOS transistors operating in the current gain mode. Stacked current mirrors have been utilized as current gain stages to minimize the effects of the channel-length modulation in short-channel MOS transistors. Open-circuit gain of 60 to 70 dB, a unity-gain bandwidth of 70 to 100 MHz, and slew-rate of 200 V//spl mu/s were demonstrated at a DC power dissipation of 1-2 mW.     

A wide-band current-controlled oscillator using bipolar-JFET technology

A 256K/spl times/1 bit NMOS dynamic RAM, fabricated using conventional n-channel two-layer polysilicon gate technology, is described. The memory cell was laid out in 5.7 /spl mu/m/spl times/12.5 /spl mu/m, and the die measured 4.84 mm/spl times/8.59 mm which can use a standard 300 mil 16 pin DIP. Reduction of the bit line capacitance was accomplished using the second polysilicon layer for the bit line. Through the use of large memory cell capacitance and special device coating techniques, alpha particle immunity was increased. The memory offers a 160 ns typical access time, 350 ns cycle time, and 250 mW active power dissipation.     

A high speed molybdenum gate MOS RAM

Describes a high speed 16K molybdenum gate (Mo-gate) dynamic MOS RAM using a single transistor cell. New circuit technologies, including a capacitive-coupled sense-refresh amplifier and a dummy sense circuit, enable the achievement of high speed performance in combination with reduced propagation delay in the molybdenum word line due to the low resistivity. The n-channel Mo-gate process was established by developing an evaporation apparatus and by an improved heat treatment to reduce surface charge density. Ultraviolet photolithography for 2 /spl mu/m patterns and HCl oxidation for 400 /spl Aring/ thick gate oxide are used. The 16K word/spl times/1 bit device is fabricated on a 3.2 mm/spl times/4.0 mm chip. Cell size is 16 /spl mu/m/spl times/16 /spl mu/m Access time is less than 65 ns at V/SUB DD/=7 V and V/SUB BB/=-2 V. Power dissipation is 210 mW at 170 ns read-modify-write (RMW) cycle.