(Ti,Al)N单层和TiN/(Ti,Al)N复合涂层的切削性能研究

借助EDX、SEM、强度测试和切削实验研究了采用磁控溅射在硬质合金基体上沉积的(Ti,Al)N单层和TiN/(Ti,Al)N复合涂层的切削性能。研究表明,两种涂层均与基体结合紧密;TiN/(Ti,Al)N复合涂层则表现出更好的切削性能。     

Ti—Al—N薄膜的性能及应用

利用多弧离子沉积技术在W18Cr4V高速钢表面沉积（Ti,Al）薄膜,实验结果表明（Ti,Al）N薄膜的硬度和抗氧化性能明显优于TiN薄膜,（Ti,Al）N膜层刀具的寿命大大高于TiN膜层刀具。     

TiN涂层的微观组织结构及力学性能分析

借助XRD、纳米压痕、SEM和划痕仪研究了采用磁控溅射在硬质合金基体上沉积的TiN、(Ti,Al)N单层和TiN/(Ti,Al)N多层涂层的组织结构和力学性能。研究表明:面心立方结构的TiN涂层晶粒形貌为典型的喇叭口结构,沿(200)、(111)择优生长;TiN涂层的硬度为24.6GPa;与硬质合金基体的结合强度约为62N。     

(Ti,Al)N涂层的微观组织和性能

采用EPMA、XRD、SEM、TEM、HR-TEM、EDX、纳米压痕、氧化实验和切削实验研究了磁控溅射在硬质合金基体上沉积TiN涂层和(Ti,Al)N涂层的微观组织结构和性能。结果表明:TiN涂层晶粒为喇叭口柱状晶,(Ti,Al)N涂层为面心立方平直柱状晶,由于固溶了Al元素,(Ti,A l)N涂层呈(200)面择优生长;(Ti,Al)N涂层在硬质合金基体上无外延生长;(Ti,Al)N涂层在800℃氧化后形成Al2O3/TiO2/(Ti,Al)N的分层结构;(Ti,Al)N涂层具有更高的硬度和更好的切削性能。     

钛合金切削用Ti_(1-x)Al_xN涂层的制备及其切削性能研究

采用磁控溅射法制备了不同Al含量的Ti1-xAlxN涂层.经XRD,SEM,EDX和纳米压痕仪分析发现,Al含量在0.50~0.58(原子分数,下同)之间时,Ti1-xAlxN涂层为(111)择优生长的fcc结构.当Al含量增加到0.63时,涂层中有六方纤锌矿结构的Al N生成,涂层硬度降低.另外,随着Al含量的增加,涂层表面颗粒尺寸变大,涂层变疏松.钛合金切削实验表明,涂层刀具的磨损形式主要为黏结磨损和崩刃.在低速切削(65 m/min)时,Ti0.50Al0.50N涂层刀具的切削性能略好于无涂层刀具,并且都好于Ti0.42Al0.58N和Ti0.37Al0.63N涂层刀具.在高速切削(100 m/min)时,Ti0.50Al0.50N涂层刀具有最好的切削性能,其切削距离比无涂层刀具提高4倍多.这主要因为Ti0.50Al0.50N涂层表面致密、硬度高,在钛合金切削时形成的切屑瘤致密而整齐.     

医用钛合金表面纳米晶TiN梯度涂层的显微组织及腐蚀磨损性能（英文）

采用磁控溅射方法在Ti6Al4V钛合金表面制备纳米晶TiN梯度涂层,研究涂层的显微组织和力学性能,并对涂层和Ti6Al4V合金基体在生理环境中的电化学腐蚀行为和腐蚀磨损性能进行比较。结果表明:纳米晶TiN的梯度分布有利于释放涂层中的内应力,使粘附强度增加到90 N。致密的结构和细化的晶粒使涂层表面纳米硬度达到28.5 GPa,纳米晶TiN涂层的防腐蚀效率达到96.6%。与Ti6Al4V合金基体相比,纳米晶TiN涂层的耐腐蚀磨损性能提高了100倍。纳米晶TiN梯度涂层具有良好的化学稳定性和较高的H~3/E~2比(H为硬度,E为弹性模量),是改善耐腐蚀性能和抗磨损性能的主要原因。     

数控机床刀具的表面改性和切削性能研究

对数控机床刀具进行了表面喷涂改性处理制备了Ti N、Ti Al N和Ti Al Si N涂层刀具,研究了不同涂层刀具的切削和摩擦学性能并分析了其作用机理。结果表明,3种涂层刀具的摩擦系数从高至低依次为:Ti Al Si NTi NTi Al N。Ti Al Si N涂层刀具切削不锈钢棒材后的平均粗糙度、平均峰谷深和均方根粗糙度都要小于Ti N和Ti Al N涂层刀具,Ti Al Si N涂层刀具表现出了最优的耐磨性能。     

高速钢钻头电火花沉积 Ti( C, N) /Al2O3 复合涂层的组织及切 削性能

目的在高速钢钻头表面电火花沉积Ti(C,N)/Al2O3复合涂层,以提高其切削性能。方法利用电火花沉积技术,以Ti(C,N)/Al2O3作为电极材料,在高速钢钻头表面制备Ti(C,N)/Al2O3涂层,考察涂层的物相组成、组织形貌及横截面硬度分布,并进行切削试验。结果涂层组织均匀,厚度约32~36μm,物相主要为C0.3N0.7Ti,Al2O3,AlTi3,Fe7W6,Fe4N,TiN和AlN,平均硬度是基体高速钢的2.6倍。结论在高速钢钻头表面制备Ti(C,N)/Al2O3涂层可以提高刀具的切削性能,延长其使用寿命。     

金属陶瓷多弧离子镀TiN／TiAlN涂层的结构与性能

采用多弧离子镀技术在Ti（C，N）基金属陶瓷基体上沉积了TiN／TiAlN涂层，通过扫描电镜、能谱仪、X射线衍射仪、原子力显微镜等分析技术对其显微组织、成分、相结构、粗糙度及涂层与基体间的结合强度进行了分析。结果表明，多弧离子镀TiN／TiAlN涂层后试样的表面为金黄色，涂层光滑平整，其均方根粗糙度为20．6nm，显微硬度达到2808HK。TiN相和TiAlN相均存在强烈的（111）择优取向。Al的含量从涂层内部到表面逐渐增大，呈现梯度分布特征。TiN／TiAlN涂层与金属陶瓷之间的结合强度高达57．52N。     

一种减少金属线Al空洞的金属线溅射膜工艺

本发明属于半导体集成电路制造工艺技术领域，具体涉及一种金属线溅射膜工艺。为了有效地解决金属线Al空洞问题，本发明在溅射完Al后，不溅射Ti，用N2气等离子体处理Al表面，使其表面形成一层薄的AlN膜（缓解Al和TiN之间的应力），而后直接溅射TiN膜，金属层结构为Ti／TiN／Al／AlN／TiN；刻蚀后金属线无需退火，     

Microstructure and physical properties of PVD TiN/（Ti, Al）N multilayer coatings

Magnetron sputtered （Ti, Al） N monolayer and TiN/（Ti, Al） N multilayer coatings grown on cemented carbide substrates were studied by using energy dispersive X-ray spectroscopy （EDX）, scanning electron microscopy （SEM）, nanoindentation, Rockwell A indentation test, strength measurements and cutting tests. The results show that the （Ti, Al）N monolayer and TiN/（Ti, Al）N multilayer coatings perform good affinity to substrate, and the TiN/（Ti, Al）N multilayer coating exhibits higher hardness, higher toughness and better cutting performance compared with the （Ti, Al）N monolayer coating. Moreover, the strength measurement indicates that the physical vapour deposition （PVD） coating has no effect on the substrate strength.     

TiN涂层电化学腐蚀行为研究Ⅱ.添加Al对TiN涂层保护性能与失效机制的影响

利用电化学方法以及扫描电镜 (SEM)、扫描隧道显微镜 (STM )技术等 ,研究了添加Al对离子镀TiN薄膜涂层在 0 5mol/LNaCl和 1mol/LH2 SO4溶液中的保护性能和失效机制的影响 ,发现铝的添加使TiN涂层在中性和酸性溶液中的耐蚀性能明显改善 .Al元素对TiN涂层具有自修复作用     

nc-(Ti,Al)(C,N)/a-SiNx纳米复合薄膜的制备及性能研究

目的 研究Si、C单元素掺杂及其共同掺杂TiAlN涂层对涂层性能的影响.方法 基于阴极电弧+辉光放电技术,在SUS304不锈钢基体及硬质合金刀具上分别制备nc-(Ti,Al)N、nc-(Ti,Al)N/a-SiNx、nc-TiAlCN及nc-TiAlCN/a-SiNx/a-C纳米复合薄膜,通过SEM观察涂层的微观组织形貌,并借助EDS表征涂层的元素成分,用XRD分析涂层的物相构成,探究C、Si元素对涂层生长的影响.采用纳米硬度仪测试涂层的硬度,采用二维轮廓仪及三维形貌仪表征涂层的表面粗糙度及表面形貌,通过滑动摩擦磨损试验测定涂层的耐磨性,用纳米划痕仪表征涂层的摩擦系数及涂层与基体的结合强度,用铣削实验表征涂层的切削性能.结果 该技术制备的TiAlN涂层,内部晶相结构复杂,硬度为29.57 GPa,主要归因于Ti2AlN、Ti2N等硬质相及TiN0.3相的形成降低了涂层的晶格常数.此为首次报道通过物理气相沉积方法制备含TiN0.3相的涂层.TiAlSiN涂层的硬度最高,为37.69 GPa,且耐磨性最好,主要原因是Si的添加起到了细晶强化和晶界强化的作用.C掺杂TiAlN使涂层析出更多非晶相,涂层硬度降低.C、Si元素共同掺杂,使得nc-TiAlCN/a-SiNx/a-C涂层表现出较低的摩擦系数及表面粗糙度,但与基体的结合性能最差,nc-(Ti,Al)N/a-SiNx薄膜的结合强度最好.结论 涂层均提高了基体表面的显微硬度,Si、C元素的掺杂可使涂层的某些性能得以大幅提升,但在实际应用中,还需根据应用需求选择合适的涂层.     

Structure and wear resistance of TiN and TiAlN coatings on AZ91 alloy deposited by multi-arc ion plating

In order to investigate the microstructure of TiN and TiAlN coatings and their effect on the wear resistance of Mg alloy, TiN and TiAlN coatings were deposited on AZ91 magnesium alloy by multi-arc ion plating technology. TiN and Ti70Al30N coatings were prepared on the substrate, respectively, which exhibited dark golden color and compact microstructure. The microstructures of TiN and Ti70Al30N coatings were investigated by X-ray diffractometry (XRD) and scanning electron microscopy (SEM). The micro-hardness and wear resistance of TiN and Ti70Al30N coatings were investigated in comparison with the uncoated AZ91 alloy. The XRD peaks assigned to TiN and TiAlN phases are found. The hardness of TiN coatings is two times as high as that of AZ91 alloy, and Ti70Al30N coating exhibits the highest hardness. The wear resistance of the hard coatings increases obviously as result of their high hardness.     

离子镀Ti（Al）N涂层的结构与耐蚀性

用空心阴极离子镀制备了Ｔｉ（Ａｌ）Ｎ和ＴｉＮ涂层,０．５ｍｏｌ／Ｌ的Ｈ２ＳＯ４ 溶液中极化曲线结果表明,Ｔｉ（Ａｌ）Ｎ涂层的耐蚀性优于ＴｉＮ涂层。电子探针（ＥＰＭＡ）、Ｘ射 线衍射和扫描电镜等分析了Ｔｉ（Ａｌ）Ｎ涂层的元素分布特征及组织结构。     

等离子合成TiN渗镀层组织结构及耐蚀性研究

采用等离子合成TiN渗镀层方法,在碳钢表面形成TiN沉积层＋含TiN的扩散层组织,Ti和N原子由表及里呈梯度分布,表面是均匀、致密的TiN胞状组织,显微硬度在20 GPa～25 GPa之间;沉积层与基体之间有一扩散过渡区,结合力好,无剥落现象.X射线衍射结果表明：渗镀层表面为TiN层,(200)晶面的衍射峰最强,具有明显的择优取向.将TiN渗镀试样与不锈钢1Cr18Ni9Ti和Q235钢在1 mol/L H2SO4溶液中进行电化学腐蚀对比实验表明：TiN渗镀层的耐蚀性能比不锈钢和Q235钢基体分别提高了1.4和4.2倍.      

Mechanical Properties and Oxidation Behavior of a Graded (Ti,Al)N Coating Deposited by Arc-Ion Plating

A graded (Ti,Al)N coating was deposited on 1Cr–11Ni–2W–2Mo–V stainless steel for aero-engine compressor blades by arc-ion plating(AIP). The microstructure and the morphology of the graded coating were investigated using electron-probe microanalysis (EPMA), X-ray diffraction and scanning-electron microscopy. The mechanical properties of the graded coating were investigated and it was found that the microhardness and the wear resistance were similar to those of the monolithic (Ti,Al)N coating, but much better than those of a homogenous TiN coating. In addition, the adhesive strength and the thermal-shock resistance of the graded (Ti,Al)N coating were much better than those of the monolithic TiN and (Ti,Al)N coatings. The oxidation tests were performed at 600 and 700°C in air for 500 hr, and corrosion tests were carried out at 600°C under the synergistic effect of water vapor and NaCl for 20 hr. Compared to pure TiN, it was found that due to the incorporation of aluminum, a protective layer rich in alumina was formed on top of the graded (Ti,Al)N coating, which greatly improved the oxidation resistance and corrosion resistance of the coating.     

The electrochemical corrosion behavior of TiN and (Ti,Al)N coatings in acid and salt solution

In this study, the corrosion properties of TiN and (Ti,Al)N coatings fabricated by Hollow Cathode Ionic Plating (HCIP) were studied by electrochemical techniques such as electrochemical impedance spectroscopy (EIS) measurement and potentiodynamic measurement in acid and salt solution. It was found that both coatings showed an excellent corrosion resistance in acid and salt solutions at the beginning of long-term immersing test. The corrosion resistance of TiN coating deteriorated rapidly after nearly 100 h immersion in both acid and salt solutions. In the contrast, the corrosion rate of (Ti,Al)N coating decreased a little and then kept at a stable value. For the TiN coating, the corrosion initiated from pinholes and the underlying corrosion was very similar to pitting corrosion. With the addition of aluminum to the TiN coating, the corrosion resistance was improved, especially in salt solution. The test results demonstrated that the (Ti,Al)N coating seemed to posses certain self-repairing function. The corrosion mechanism took the form of denudation corrosion, owing to deterioration of the adhesion of the coating.     

PVD涂层刀具高速铣削CoCrMo合金的性能研究

目的为了提高涂层硬质合金刀具的切削性能,研究了物理气相沉积PVD法制备的涂层硬质合金铣刀在高速干式环境下的铣削性能。方法采用阴极电弧技术制备了TiN、TiAlN以及TiAlSiN涂层硬质合金铣刀刀头,通过一同沉积涂层的硬质合金圆片,间接测量得出涂层的显微硬度、厚度和平均摩擦系数,并以CoCrMo合金为切削对象,进行了PVD涂层与无涂层刀具高速铣削下的对比试验。结果TiAlSiN显微硬度最高达3800HV,摩擦系数达0.3,TiAlN涂层平均膜厚为2μm,间接测得TiN、TiAlN以及TiAlSiN涂层的结合力依次为60、58、42N。在三者的切削性能中,TiAlSiN涂层的切削性能比TiAlN和TiN涂层的好,同等切削参数时,TiN刀具的高速铣削时间最短,TiAlSiN涂层的平均磨损值为0.1895,TiN的平均磨损值为0.3047。结论涂层中添加Al、Si,极大地提高了刀具的使用性能,改善了刀具切削过程中的耐磨性、红硬性,极大地延长了刀具的使用寿命。TiAlSiN涂层的硬度高,耐磨损性好,切削性能好,适合高速铣削加工。