High performance humidity sensing properties of indium tin oxide (ITO) thin films by sol–gel spin coating method

The tin doped indium oxide (ITO) thin films prepared by sol–gel spin coating method with In(NO₃)3H₂O and SnCl₄·5H₂O as indium and tin sources respectively is presented. The as deposited samples were annealed at 500 °C for 2 h in order to improve the crystallinity. The structural, morphological and optical properties of the films were analysed by using X-ray diffraction, scanning electron microscope (SEM), UV–Vis transmission spectra and photoluminescence, spectra analysis. The SEM images ensure the uniform and smooth surface of the as prepared and annealed film. The optical transmittance of more than 85 % has been observed in the UV–Vis region with a band gap of 3.91 and 3.73 eV for the as prepared and annealed films of ITO respectively. The PL spectra reveal that the optical properties were significantly improved due to the annealing effect. The annealed film shows high sensitivity for humidity approximately two order changes in the resistance and the sensitivity increases for different relative humidity from 10 to 90 % due to the physisorption between the water molecules and the surface of the thin films.     

Correlation between microstructure and electrical,optical properties of thermal annealed ITO thin films

Indium tin oxide (ITO) thin films with the thickness of 300 nm were deposited on quartz substrates via electron beam evaporation. Five samples were post-annealed in air atmosphere for 10 min at five selected temperature points from 200 to 600 °C, respectively. X-ray diffractometer, Hall measurement system and UV–Vis spectrophotometer were adopted to characterize the ITO thin films. Influence of thermal annealing in air atmosphere on microstructure was investigated. Furthermore, the correlation between microstructure and electrical, optical properties of ITO thin films was discussed in detail. All of the ITO thin films had a polycrystalline structure and a preferred orientation of (222), no matter annealed or not. The intensity ratio of I₍₂₂₂₎/I₍₄₄₀₎ initially increased and then decreased, it reached the maximum of 7.37 after annealed at 400 °C for 10 min. The lattice expansion evidently reduced after annealed at 300 °C or even higher temperature. The variation of mean grain size was minor during thermal annealing process regardless of annealing temperature. The carrier concentration is predominant in electrical conductivity, and it is dependent on the activation of donors and the density of oxygen vacancies. Hall mobility is strongly dependent on the mean grain size, lattice distortion and defect density. The optical transmittance is influenced by the density of oxygen vacancies and the consistency of grain orientations.     

Effect of annealing temperature on structural,optical and humidity sensing properties of indium tin oxide (ITO) thin films

Tin doped indium oxide (ITO) thin films were prepared by sol–gel spin coating method with In (NO₃)·3H₂O and SnCl₄·5H₂O as indium and tin sources, respectively. The as deposited samples were annealed at various temperature such as, 300, 400, 500 and 600?°C for 2 h in ambient atmosphere. The grown ITO thin films are polycrystalline in nature with cubic structure of In₂O₃ with the space group La3 and the results are in good agreement with the standard JCPDS data (card no#06-0416). In addition crystalline size increases with increasing annealing temperature from 25 to 55 nm. Polycrystalline with uniform smooth surface was observed by SEM micrographs. The optical band gap energy was found to be decreased from 3.85 to 3.23 eV as the annealing temperature is increased from 300 to 600?°C. The humidity sensing performance (high sensitivity and fast response time) was significantly improved for 600?°C thin films samples, which is probably due to smaller energy band gap and physisorption between the water molecules and the surface of the thin films. The films were further characterized by PL and EDS analysis. The effect of temperature on humidity sensing mechanism of ITO thin films is also discussed.     

High thermal stability,electrical and optical properties of amorphous IGZO film by coating ultrathin amorphous ITO film as barrier layer

As one kind of well known amorphous transparent conductive oxide films, In–Ga–Zn–O (IGZO) based films were broadly used as electric functional layer in optoelectronic devices. As IGZO film is sensitive to temperature and oxygen, and its electrical and optical properties may probably be deteriorated after subsequent high temperature and air atmosphere. In this work, amorphous indium tin oxide (ITO) layer with two adjustable type of thickness were employed to improve the thermal stability of IGZO films. The doubled ITO/IGZO films were deposited on glass by magnetron sputtering and annealed at high temperatures subsequently to investigate its thermal stability. Accordingly, the crystal structure, optical and electrical properties of ITO/IGZO films were further studied. The XRD results demonstrated that the annealed IGZO films could keep amorphous structure, and the ITO/IGZO films were consisted of uniform small particles which showed comparable dense structure and closely integration with the glass substrate. Furthermore, the sheet resistance results indicated that the increased thickness of top ITO film could suppress oxygen and improve thermal stability of electrical property. Moreover, the transmittance in the visible range was about 85%, and showed a little increase after annealing. The protective ITO layer was found to keep improved thermal stability, good electrical and optical properties at temperatures up to 550 °C.     

Role of annealing temperature on microstructural and electro-optical properties of ITO films produced by sputtering

This study probes the effect of annealing temperature on electrical, optical and microstructural properties of indium tin oxide (ITO) films deposited onto soda lime glass substrates by conventional direct current (DC) magnetron reactive sputtering technique at 100 watt using an ITO ceramic target (In₂O₃:SnO₂, 90:10 wt%) in argon atmosphere at room temperature. The films obtained are exposed to the calcination process at different temperature up to 700 °C. X–ray diffractometer (XRD), ultra violet-visible spectrometer (UV–vis) and atomic force microscopy (AFM) measurements are performed to characterize the samples. Moreover, phase purity, surface morphology, optical and photocatalytic properties of the films are compared with each other. The results obtained show that all the properties depend strongly on the annealing temperature. XRD results indicate that all the samples produced contain the In₂O₃ phase only and exhibit the polycrystalline and cubic bixbite structure with more intensity of diffraction lines with increasing the annealing temperature until 400 °C; in fact the strongest intensity of (222) peak is obtained for the sample annealed at 400 °C, meaning that the sample has the greatest ratio I ₂₂₂/I ₄₀₀ and the maximum grain size (54 nm). As for the AFM results, the sample prepared at 400 °C has the best microstructure with the lower surface roughness. Additionally, the transmittance measurements illustrate that the amplitude of interference oscillation is in the range from 78 (for the film annealed at 400 °C) to 93 % (for the film annealed at 100 °C). The refractive index, packing density, porosity and optical band gap of the ITO thin films are also evaluated from the transmittance spectra. According to the results, the film annealed at 400 °C obtains the better optical properties due to the high refractive index while the film produced at 100 °C exhibits much better photoactivity than the other films as a result of the large optical energy band gap.     

Effect of annealing atmosphere (Ar vs. air) and temperature on the electrical and optical properties of spin-coated colloidal indium tin oxide films

Colloidal indium tin oxide (ITO) ~6 nm nanoparticles synthesized in-house were deposited by spin coating on fused silica substrates, resulting in high resistivity films due to the presence of passivating organics. These films were annealed at various temperatures ranging from 150 to 750 °C in air and argon atmospheres. The films are very transparent in the as-coated form, and they retain high transparency upon annealing, except the films annealed at 300 °C in argon, which became brown due to incomplete pyrolysis of the organics. Thermogravimetric analysis and Raman characterization showed that the removal of organics increases with an increase in the annealing temperature, and that this removal is more efficient in the oxidizing atmosphere of air, especially in the 300–450 °C temperature range than in Ar. Although ITO defect chemistry suggests that argon annealing should result in higher carrier concentration than air annealing, the faster removal of insulating organics upon annealing in air resulted in significantly lower film resistivity at intermediate annealing temperatures for films annealed in air than in Ar. At higher annealing temperatures, both Ar and air annealing, resulted in comparable film resistivities (the lowest achieved was ~10⁰ Ω cm).     

Thermal stability of indium tin oxide thin films co-sputtered with zinc oxide

The thermal stability of indium tin oxide (ITO) films and ITO co-sputtered with zinc oxide (ZnO) films at different zinc atomic ratios in various atmospheres are investigated. The resistivity of the annealed ITO films decreased with increased annealing temperatures. The improved electrical properties were attributed mainly to the increase in carrier concentration originating from the significant formation of oxygen vacancies in the ITO films. In contrast, due to the lower oxidation potential of zinc ions, the resistivity of the annealed co-sputtered films showed no significant reduction and an increase with annealing temperatures. The film decomposition due to the high degree outdiffusion of oxygen atoms and aggregation of In atoms observed from the metal-like In phase in the diffraction patterns was responsible for the drastic thermal degradation in the electrical and optical properties of the samples annealed at elevated temperatures in reducing gas atmosphere. In contrast, the superior thermal stability of the co-sputtered films, at an atomic ratio of 60% annealed in reducing gas atmospheres, was ascribed to the stable Zn₃In₂O₆ crystalline structure that appeared in the diffraction pattern. The absorption edge observed from the optical transmittance of these annealed films also showed evidence of carrier concentration evolution in various annealing atmospheres. The lower oxidation potential of the zinc atoms introduced into the ITO films was concluded to be efficient in compensating for the formation of oxygen vacancies resulting in the alleviated decomposition behavior during thermal annealing.     

Effect of sputtering power and annealing temperature on the properties of indium tin oxide thin films prepared from radio frequency sputtering using powder target

Indium tin oxide (ITO) thin films were deposited on quartz substrates by radio frequency (RF) sputtering with different RF power (100–250 W) using the powder target at room temperature. The effect of sputtering power on their structural, electrical and optical properties was systematically investigated. The intensity of (400) orientation clearly increases with the sputtering power increases, although the films have (222) preferred orientation. Increasing sputtering power is benefit for lower resistivity and transmittance. The films were annealed at different temperature (500–800 °C), then we explored the relationship between their electro-optical and structural properties and temperature. It has been observed that the annealed films tend to have (400) orientation and then show the lower resistivity and transmittance. The ITO thin film prepared by RF sputtering using powder target at 700 °C annealing temperature and 200 W sputtering power has the resistivity of 2.08 × 10^?4 Ω cm and the transmittance of 83.2 %, which specializes for the transparent conductive layers.     

Structural,optical and electrical characteristics of transparent bismuth vanadate films deposited on indium tin oxide coated glass substrates

Bismuth vanadate (BVO) thin films were fabricated on indium tin oxide (ITO) coated glass substrates using pulsed laser ablation technique and investigated their structural, optical and electrical properties. The use of the indium tin oxide coated glass substrate resulted in reducing the leakage current characteristics of crystalline BVO thin films. The X-ray diffraction (XRD) studies confirmed the monophasic nature of the post annealed (500 °C/1 h) films. The atomic force microscopy indicated the homogeneous distribution of crystallites in the as-deposited films. The as-deposited and the post annealed films were almost 90% transparent (380–900 nm) as confirmed by optical transmission studies. Dielectric constant of around 52 was attained accompanied by the low dielectric loss of 0.002 at 10 kHz for post annealed films. The leakage current of the post annealed BVO films on ITO coated glass substrates measured at room temperature was 8.1 × 10⁻⁸ A at an applied electric field of 33 kV/cm, which was lower than that of the films with platinum and SrRuO₃ as the bottom electrodes.     

Effect of annealing time on the structural,optical and electrical characteristics of DC sputtered ITO thin films

Using an Indium tin oxide (ITO) ceramic target (In₂O₃:SnO₂, 90:10 wt%), ITO thin films were deposited by conventional direct current magnetron sputtering technique onto glass substrates at room temperature. The obtained ITO films were annealed at 400 °C for different annealing times (1, 2, 5, 7, and 9 h). The effect of annealing time on their structural, optical and electrical properties was investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microcopy (AFM), ultra violet–visible (UV–Vis) spectrometer, and temperature dependence Hall measurements. XRD data of obtained ITO films reveal that the films were polycrystalline with cubic structure and exhibit (222), (400) and (440) crystallographic planes of In₂O₃. AFM and Scanning Electron Microscopy SEM have been used to probe the surface roughness and the morphology of the films. The refractive index (n), thickness and porosity (%) of the films were evaluated from transmittance spectra obtained in the range 350–700 nm by UV–Vis. The optical band gap of ITO film was found to be varying from 3.35 to 3.47 eV with the annealing time. The annealing time dependence of resistivity, carrier concentration, carrier mobility, sheet resistance, and figure of merit values of the films at room temperature were discussed. The carrier concentration of the films increased from 1.21 × 10²⁰ to 1.90 × 10²⁰ cm^?3, the Hall mobility increased from 11.38 to 18 cm² V^?1 s^?1 and electrical resistivity decreased from 3.97 × 10^?3 to 2.13 × 10^?3 Ω cm with the increase of annealing time from 1 to 9 h. Additionally, the temperature dependence of the carrier concentration, and carrier mobility for the as-deposited and 400 °C annealed ITO films for 2 and 9 h were analysed in the temperature range of 80–350 K.     

Structural, photoluminescence and optical properties of chemically deposited (Cd1−xBix)S thin films as a function of dopant concentration

In this study, (Cd_1?xBi_x)S thin films were successfully deposited on suitably cleaned glass substrate at 60 °C temperature, using the chemical bath deposition technique. After deposition, the films were also annealed at 400 °C for 2 min in air. The structural properties of the deposited films were characterized using X-ray diffraction and AFM. Formation of cubic structure with preferential orientation along the (111) plane was confirmed together with BiS second phase from structural analysis. The interplanar spacing, lattice constant, and crystallite size of (Cd_1?xBi_x)S thin films were calculated by the XRD. The crystallite size of the un-doped CdS thin films was found to be 7.84 nm, which increased to 11.1 nm with increasing Bi content from 0 to 10 %. The surface roughness of the films was measured by AFM studies. The photoluminescence spectra were observed at red shifted band edge peak with increasing doping concentration of Bi from 0 to 5 % in the un-doped CdS thin films. The optical properties of the films are estimated using optical absorption and transmission spectra in the range of 400–800 nm using UV–VIS spectrophotometer. The optical band gap energy of the films was found to be decreased from 2.44 to 2.23 eV with the Bi content being from 0 to 5 %. After annealing, the band gap of these films further decreased.     

Effects of annealing temperature on the structural,morphology, optical properties and resistivity of sputtered CCTO thin film

CaCu₃Ti₄O₁₂ (CCTO) thin films with a thickness of 200 nm were deposited on ITO substrates by RF magnetron sputtering using a pure CCTO target. After the deposition, thin films were annealed at 400, 450, 500 and 550?°C, respectively, for 1 h. The effects of annealing temperature on the structural, surface morphology, optical properties and resistivity of (CCTO) thin films were investigated. The X-ray diffractometer results show that the thin films are polycrystalline in nature and are assigned to body-centered cubic perovskite configuration with a space group of Im-3. The intensity of the peaks and crystallinity gradually increased with the increase in annealing temperature. Microstructural investigation through FESEM showed that the grain size increased with increase in annealing temperature from 32 to 85 nm. The root mean square and roughness (Ra) were also enhanced with higher annealing temperatures, from 3.8 to 6.2 nm and from 4.7 to 7.7 nm, respectively, as confirmed by AFM. Increase in annealing temperature also affected the optical transmittance values which decreased to almost 60% at the visible range (550–850), as well as the optical energy band gap which decreased from 3.86 to 3.39 eV. The relevance between resistance behaviors and film microstructure is discussed. Therefore, it can be concluded that the desirable crystallinity, surface roughness, energy band gap and resistivity for 200 nm thick CCTO thin films deposited by RF magnetron sputtering can be achieved through the annealing process.     

Effects of annealing on the structural properties of indium rich InGaN films

Indium rich (In-rich) InGaN films were grown on Ge (111) substrate by plasma assisted molecular beam epitaxy with thin GaN as a buffer layer. The effects of annealing temperature and annealing time on the structural properties of In-rich InGaN films were investigated by X-ray diffraction (XRD). XRD results indicate that the as-grown InGaN films annealed at different temperatures for 1 min and 1 h respectively did not improve the film crystalline quality. But with the annealing at 750 °C and 800 °C for 1 min respectively the metallic indium was desorbed from the InGaN structure. The InGaN films annealed at higher than 660 °C for 1 h also showed the indium desorption. The InGaN film has the best film quality after annealed at 660 °C for 6 h with the full-width at half-maximum of InGaN (002) peak to be 879 arcsec. The InGaN crystalline quality started to degrade after annealed at the temperatures higher than 660 °C for 6 h.     

The effect of post-annealing under CdCl<Subscript>2</Subscript> atmosphere on the properties of ITO thin films deposited by DC magnetron sputtering

Indium tin oxide (ITO) films deposited by DC magnetron sputtering were annealed under CdCl₂ atmosphere at different temperatures. The effects of CdCl₂ heat-treatment on the structural, electrical and optical properties of the films were investigated. The X-ray diffraction measurement proves the annealing results in a change of preferred orientation from (400) to (222). It is found the resistivity increases from 1.49 × 10⁻⁴ Ω cm of the as-deposited film to 6.82 × 10⁻⁴ Ω cm of the film annealed at 420 °C. The optical energy gap for the film varies from 3.97 to 3.89 eV. It is also found that the CdCl₂ heat-treatment results in narrowing the energy gap of ITO film.     

Formation of pyrite (FeS2) thin nano-films by thermal-sulfurating electrodeposition films at different temperature

The electrodeposition of iron disulfide pyrite (FeS₂) thin films on indium–tin oxide (ITO) substrate in aqueous solution containing Na₂S₂O₃·5H₂O, FeCl₂·4H₂O reagents was investigated. The deposited material is successively annealed in sulfur atmosphere. In this way, we successfully obtained pyrite thin films with good quality. The structure, optical and electrical property analysis for the resulted films was carried out and some special results have been concluded.     

ZnO@CdS core–shell thin film: fabrication and enhancement of exciton life time by CdS nanoparticle

In the present study photoluminescence behavior of ZnO and ZnO@CdS core–shell nanorods film has been reported. ZnO nanorods were grown on the glass coated indium tin oxide (ITO) surface by seeding ZnO particle followed with nanorods growth. These nanorods were coated with CdS by chemical bath deposition techniques to have ZnO@CdS thin film and further annealed at 200 °C for their adherence to the ITO surface. The coating was characterized for surface morphology using SEM and optical behavior using UV–visible spectrophotometer. Energy dispersive X-ray (EDX) was used for compositional analysis and time resolve photoluminescence decay for excitons life time measurement. The absorption spectrum reveals that the absorption edge of ZnO@CdS core–shell heterostructure shifted to 480 nm in the visible region whereas ZnO nanorods have absorption maxima at 360 nm. The excitons lifetime of ZnO@CdS was found to be increased with the thickness of the CdS layer on ZnO nanorod. These ZnO@CdS core–shell nanostructures will be of great use in the field of photovoltaic cell and photocatalysis in a UV–visible region.     

Annealing effect on structural, optical and electrical properties of pure and Mg doped tin oxide thin films

This study describes the effect of annealing at different temperatures (400–600 °C) on structural, optical and electrical behaviors of pure and Mg doped tin oxide thin films grown on the glass substrate by electron beam evaporation technique. The transformation of tetragonal to orthorhombic form due to annealing, introduced a change in the optical and electrical properties of pure and Mg doped tin oxide thin films. X-ray diffraction studies or analysis revealed the phase transformation and change in the crystalline size with increase in the annealing temperature. The morphology and roughness of the thin films were studied by Atomic force microscopy. Optical band gap increased with annealing temperature confirms the improvements of crystallinity. The quality of thin films transparency was investigated by UV/Vis-spectroscopy. Photoluminescence of pure and Mg doped tin oxide thin films shows two extra peaks one at 486 nm and other at 538 nm is due to the crystal defect created as a result of annealing temperature. These peaks became stronger and shifted to longer wavelength with increasing the annealing temperature. The complex plot (Nyquist plot) showed the data point laying on two semicircles and the resistance of grains and grain boundaries increases with the increase in annealing temperature for both pure and Mg doped tin oxide thin films.     

ITO substrate resistivity effect on the properties of CuInSe<Subscript>2</Subscript> deposited using two-electrode system

The purpose of this work is to deposit the CuInSe₂ films on the ITO substrate by electrodeposition technique using a simplified two electrodes system and to investigate the effect of ITO sheet resistance on the fundamental properties of the resulting films. The as deposited films were annealed under argon atmosphere at 300 °C during 30 min. The structural, morphological and electrical properties were characterized respectively by means of X-ray diffraction (XRD), scanning electron microscopy (SEM) and electrical resistivity measurements. The optical band gap of samples was estimated using the optical absorption technique. After annealing, the XRD spectra show diffraction peaks corresponding to the single-phase chalcopyrite CuInSe₂ with (112) as main reflection. The SEM images reveal a homogeneous surface and the estimated grain size was calculated from Scherrer’s Equation with (112) peak lay in the range of 165–272 Å. The band gap, E _g, is a decreasing function with the ITO sheet resistance.     

Nanostructured organic-inorganic photodiodes with high rectification ratio

High quality organic-inorganic heterojunction photodiodes based on nanostructured copper (II) phthalocyanine (CuPc) and intrinsic zinc oxide (i-ZnO) have been fabricated. The i-ZnO thin films/layers were grown by RF magnetron sputtering on clean indium tin oxide (ITO) coated glass substrates. These films have been characterized by optical absorption and field emission scanning electron microscopy (FESEM). CuPc thin films deposited at room temperature on i-ZnO have exhibited a change in their surface morphology with the post-deposition annealing temperature under normal atmosphere. The electrical dark conductivity and the photoconductivity of ITO/i-ZnO/CuPc/Au sandwich structures have been measured under various photoexcitation intensities using a xenon light source. The devices have shown excellent reproducibility of their electrical characteristics and high rectification ratios. The highest rectification ratio is nearly 831 calculated above the threshold voltage at room temperature for the sample annealed at 250?°C (i.e.?Pc 250). The effects of the annealing temperature of CuPc on the surface morphology, rectification ratio, and optical properties have been discussed.     

Effects of annealing and deposition temperature on the structural and optical properties of AZO thin films

Al-doped ZnO (AZO) thin films were deposited on p- type Si(100) substrate by r.f magnetron sputtering at 200, 300 and 400 °C substrate temperatures. The deposited films were annealed in air atmosphere for 1 h at temperatures of 700, 800 and 900 °C. The deposition temperature and post-deposition annealing effects on structural and optical properties of the AZO samples were analyzed using X-ray diffraction, atomic force microscope and photoluminescence (PL). After annealing, the value of full width half maximum of the diffraction peaks was decreased as well as, the intensity of visible and strong UV PL emission peaks were increased with temperature. However, the deep-level emission related with zinc point defects was removed by annealing of the samples. Results revealed that all of the as-deposited and annealed AZO films have hexagonal structure along (002) direction and their crystallinity were improved with the increased deposition and post-growth annealing temperatures. In addition, the surface roughness and the particle size of the films were increased with increased deposition and annealing temperatures.