Design optimization of dome actuators

This paper reports the conceptual design, analysis, and modeling of the electromechanical behavior of dome actuators. The geometric parameters of the actuator (dome thickness, width, radius, and depth), poling direction, electric field, and material properties (elastic compliance, piezoelectric constants, and dielectric permittivity) have been taken into account in the modeling work. The results of the analysis indicate that a dome actuator with a tangentially alternating poling direction and electric field (Case C) exhibits much larger displacement and force responses than dome actuators with other poling directions and electric fields. The first mode of natural frequency of the Case C dome actuator also was investigated, and its predicted performance was compared with that of moonie and rainbow actuators. The findings of this research clearly demonstrate the merit of design optimization of electromechanical devices.     

晶体结构对压电陶瓷微位移驱动器特性的影响

对钙钛矿结构的ＰＺＴ－５和钨青铜结构的ＰＢＮＮ二种压电陶瓷制成的压电微位移器进行了电压－位移特性的比较和分析，发现我们所研制的ＰＢＮＮ压电微位移器具有线性好、回零好、等优点。     

Electric field dependence of the mode I energy release rate in single-edge cracked piezoelectric ceramics: effect due to polarization switching/dielectric breakdown

This study presents the results of the mode I energy release rate of a rectangular piezoelectric material with a single-edge crack under electromechanical loading. A crack was created normal or parallel to the poling direction, and electric fields were applied parallel and antiparallel to the poling. A nonlinear plane strain finite element analysis was carried out, and the effect of localized polarization switching on the energy release rate was discussed for the permeable, impermeable, open, and discharging cracks under a high-negative electric field. The effect of dielectric breakdown on the energy release rate was also examined under a high-positive electric field.     

Design and fabrication of a high performance multilayer piezoelectric actuator with bending deformation

A new bending mode multimorph actuator was designed and fabricated successfully by a multiple screen printing process. Unlike the conventional bimorph actuator in which the bend occurs in the thickness direction, the bend in the multimorph actuator occurs in the widthwise direction because of synchronistical deformation of each single monolithic layer in the multilayer structure. The theoretical analysis and experimental measurements were conducted to study the performance of this type of actuator, and a comparison was made with the conventional bimorph actuator. Larger displacement, higher resonance frequency, and much larger blocking force could be achieved with the multimorph actuator than with a bimorph actuator of similar dimensions. The multimorph actuator presented in this paper provides a valuable alternative for actuator applications beyond those available with the popular bimorph and longitudinal multilayer actuators.     

Three-dimensional analysis of an antiparallel piezoelectric bimorph

Summary Three-dimensional electromechanical responses of a piezoelectric bimorph are studied. The bimorph is antiparallel in the sense that it consists of two identical, plate-like piezoelectric elements with opposite poling directions. Both the top and bottom surfaces of the bimorph are fully covered with negligibly thin conductive electrodes. By introducing a small parameter and using the transfer matrix method it is shown that a three-dimensional solution of the problem can be readily constructed, provided the solution to a set of two-dimensional equations very similar to those in the classic plate theory is obtainable. The three-dimensional solution satisfies all the field equations as well as the boundary conditions on the major surfaces and at the interface between the two piezoelectric plates. In many special cases, the electric edge condition can be fulfilled point by point, and thus the solution is exact in Saint-Venant's sense. The formulation and new analytical results for a strip-shaped cantilever bimorph under the action of applied voltage and end moment are presented.     

应力对压电陶瓷驱动器位移性能的影响

在研制由钨青铜型压电陶瓷分立驱动器组装成特种圆环状压电驱动器中,发现组装后横向位移模圆环驱动器的位移量呈现异常的变化;它的位移量比分立器件的增加可达～３０％．对组成、器件制备等进行了大量实验,分析认为;分立器件在组装后处于严重的压应力中,它对逆压电效应的影响是上述结果的原因．它的主要机制是在压应力下通过９０°畴重新取向或钨青铜结构中基本组元－氧八面体的畸变使自发极化偏离于原压应力方向,一旦施加电场则造成位移量的大大增加．     

Electromechanical coupling and output efficiency of piezoelectric bending actuators

Electromechanical coupling mechanisms in piezoelectric bending actuators are discussed in this paper based on the constitutive equations of cantilever bimorph and unimorph actuators. Three actuator characteristic parameters, (e.g., electromechanical coupling coefficient, maximum energy transmission coefficient, and maximum mechanical output energy) are discussed for cantilever bimorph and unimorph actuators. In the case of the bimorph actuator, if the effect of the bonding layer is negligible, these parameters are directly related to the transverse coupling factor lest. In the case of the unimorph actuator, these parameters also depend on the Young's modulus and the thickness of the elastic layer. Maximum values for these parameters can be obtained by choosing proper thickness ratio and Young's modulus ratio of elastic and piezoelectric layers. Calculation results on four unimorph actuators indicate that the use of stiffer elastic material is preferred to increase electromechanical coupling and output mechanical energy in unimorph actuators.     

Theoretical modeling and equivalent electric circuit of a bimorph piezoelectric micromachined ultrasonic transducer

An electric circuit model for a circular bimorph piezoelectric micromachined ultrasonic transducer (PMUT) was developed for the first time. The model was made up of an electric mesh, which was coupled to a mechanical mesh via a transformer element. The bimorph PMUT consisted of two piezoelectric layers of the same material, having equal thicknesses, and sandwiched between three thin electrodes. The piezoelectric layers, having the same poling axis, were biased with electric potentials of the same magnitude but opposite polarity. The strain mismatches between the two layers created by the converse piezoelectric effect caused the membrane to vibrate and, hence, transmit a pressure wave. Upon receiving the echo of the acoustic wave, the membrane deformation led to the generation of electric charges as a result of the direct piezoelectric phenomenon. The membrane angular velocity and electric current were related to the applied electric field, the impinging acoustic pressure, and the moment at the edge of the membrane using two canonical equations. The transduction coefficients from the electrical to the mechanical domain and vice-versa were shown to be bilateral and the system was shown to be reversible. The circuit parameters of the derived model were extracted, including the transformer ratio, the clamped electric impedance, the spring-softening impedance, and the open-circuit mechanical impedance. The theoretical model was fully examined by generating the electrical input impedance and average plate displacement curves versus frequency under both air and water loading conditions. A PMUT composed of piezoelectric material with a lossy dielectric was also investigated and the maximum possible electroacoustical conversion efficiency was calculated.     

Efficient charge recovery method for driving piezoelectric actuators with quasi-square waves

In this paper, an efficient charge recovery method for driving piezoelectric actuators with low frequency square waves in low-power applications such as mobile microrobots is investigated. Efficiency issues related to periodic mechanical work of the actuators and the relationship among the driving electronics efficiency, the piezoelectric coupling factor, and the actuator energy transmission coefficient are discussed. The proposed charge recovery method exploiting the energy transfer between an inductor and a general capacitive load is compared with existing techniques that lead to inherent inefficiencies. A charge recovery method is then applied to piezoelectric actuators, especially to bimorph ones. Unitary efficiency can be obtained theoretically for purely capacitive loads while intrinsic losses such as hysteresis necessarily lower the efficiency. In order to show the validity of the method, a prototype driving electronics consisting of an extended H-bridge is constructed and tested by experiments and simulations. Preliminary results show that 75% of charge (i.e., more than 56% of energy) can be recovered for bending actuators such as bimorphs without any component optimization at low fields.     

Compact piezoelectric stacked actuators for high power applications

Small, hollow, multilayer actuators with a diameter of 3 mm were fabricated by the stacking method from piezoelectric hard lead zirconate titanate (PZT) ceramics. Langevin vibrators were also constructed with the hollow multilayer actuators. The performance capabilities of the actuator and Langevin vibrator samples were examined under high-power conditions. The high-power vibration level at a given sinusoidal drive voltage was significantly enhanced by using a multilayer structure under either a nonresonance or resonance condition. A maximum vibration velocity of 0.17 m/sec was obtained for the 9-layer actuator sample under nonresonance conditions. The vibration velocity was further improved with the Langevin vibrator driven at the resonance frequency. The temperature rise due to heat generation under high-power conditions was the immediate limitation on the maximum accessible vibration velocity for the stacked actuators.     

含压电片复合材料层合板的高阶计算模型

给出了一种分析含任意内埋压电片复合材料层合板的高阶耦合模型, 板的位移场采用三阶剪切理论, 并提出了压电片中电势场在厚度方向的三次分布模式, 可以更精确地描述力、电耦合作用下电场的非均匀分布。在平面应力的假设下给出了简化的压电材料本构方程, 推导了基于该模型的压电层合板有限元计算公式, 并对双压电片梁的弯曲和层合板的变形控制进行了计算, 压电梁的弯曲计算结果与解析结果吻合良好, 表明本文的模型和公式是精确有效的。     

Design and fabrication of functionally graded PZT/Pt piezoelectric bimorph actuator

A laminated piezoelectric bimorph actuator with a graded compositional distribution of PZT and Pt was fabricated, and its deflection characteristics were evaluated. Using experimentally determined compositional dependency of elastic and piezoelectric properties in the PZT/Pt composites, the modified classical lamination theory and the finite element method were applied to find the optimum compositional profile that will give a larger deflection and smaller stress, simultaneously. The miniature bimorph-type graded actuator that consists of a composite internal-electrode (PZT/30 vol% Pt) and three piezoelectric layers of different compositions (PZT/0–20 vol% Pt) were fabricated by powder stacking and sintering. The deflection of the actuator was measured using electric strain gages mounted on the top and bottom surfaces of the actuator. The deflection was found to strongly depend on the composition distribution profile. Under an applied electric field of 100 V m^–1, the actuator with an optimum composition profile exhibited a curvature of up to 0.03 m^–1, which is a satisfactory performance for this kind of actuators. The stress generated on actuation was estimated to be as low as 0.4 MPa, which is much smaller than those of conventional directly bonded actuators and will assure a long actuation life.     

A Viscoelastic Sandwich Finite Element Model for the Analysis of Passive,Active and Hybrid Structures

In this paper we present a finite element model for the analysis of active sandwich laminated plates with a viscoelastic core and laminated anisotropic face layers, as well as piezoelectric sensor and actuator layers. The model is formulated using a mixed layerwise approach, by considering a higher order shear deformation theory (HSDT) to represent the displacement field of the viscoelastic core and a first order shear deformation theory (FSDT) for the displacement field of the adjacent laminated anisotropic face layers and exterior piezoelectric layers. The dynamic problem is solved in the frequency domain with viscoelastic frequency dependent material properties for the core. Control laws are also implemented for the piezoelectric sensors and actuators. The model behaviour in dynamics is assessed with the few solutions found in the literature, including experimental data, and a laminated composite active sandwich application is proposed. In this numerical application, velocity feedback control law is implemented for active control, using co-located piezoelectric patch sensors and actuators.     

高控位精度横向模压电微位移器的研究

介绍了d31横向伸缩模式压电徽位移驱动器的制作过程,应用高稳定的填满钨青铜型压电陶瓷作为该器件制备的基料,利用P-F干涉仪原理测量了电场-位移特性曲线,由此计算了压电常数d31并进行了讨论。该器件具有电控应变(位移)线性度高、滞后量小以及结构简单、制作工艺方便等特点,它在精密光学等技术领域有一定应用价值。     

Inverse piezoelectric effect and electrostrictive effect in polarized poly(vinylidene fluoride) films

The piezoelectric stress coefficient and electrostriction coefficient for unpoled and poled films of polyvinylidene fluoride have been determined by applying a sinusoidal electric field and detecting stresses with the same and double frequency as the applied field, respectively. The piezoelectric coefficient shows a hysteresis with the cyclic change of the d.c. bias field. Under the poling field, the dipoles in polymers are preferentially oriented in the direction of the field, thus producing a residual polarization associated with a residual stress. Both coefficients increase with increasing temperature. A phenomenological interpretation for the piezoelectricity in poled polymers is given in terms of electrostriction and residual stress.     

Effects of electric field and poling on the mode I energy release rate in cracked piezoelectric ceramics at cryogenic temperatures

We discuss the mode I energy release rate of a rectangular piezoelectric material with a crack under electromechanical loading at cryogenic temperatures. A crack was created normal or parallel to the poling direction, and electric fields were applied parallel or normal to the poling. A plane strain finite element analysis was carried out, and the effects of electric field and localized polarization switching on the energy release rate were discussed for the piezoelectric ceramics at cryogenic temperatures.     

Composite piezoelectric transducer with truncated conical endcaps“cymbal”

This paper presents original results obtained in the development of the moonie-type transducers for actuator applications. The moonie-type actuators fill the gap between multilayer and bimorph actuators, but its position-dependent displacement and low generative force are unacceptable for certain applications. The moonie transducers were modified systematically by using finite element analysis combined with experimental techniques. A new transducer design, named “cymbal transducer”, was developed with larger displacement, larger generative forces, and more cost-effective manufacturing. The cymbal transducers consist of a cylindrical ceramic element sandwiched between two truncated conical metal endcaps and can be used as both sensors and actuators. The cymbal actuator exhibits almost 40 times higher displacement than the same size of ceramic element. Effective piezoelectric charge coefficient, Eff. d₃₃, of cymbal is roughly 40 times higher than PZT itself     

BiAlO3掺杂PZT陶瓷的高压电性能和低电场应变滞后

铅基压电陶瓷因其优异的压电性能, 被广泛应用于压电器件。其中, 压电驱动器要求压电陶瓷具有较高压电性能并且在电场下具有较高的电致应变和较小的应变滞后。本研究通过施主-受主共掺, 得到高压电性能和低电场应变滞后的PZT陶瓷。采用传统固相反应法制备了(1-x)(Pb_0.95Sr_0.05)(Zr₅₃Ti₄₇)O₃-xBiAlO₃+0.2%MnO₂陶瓷(掺杂量为质量百分数), 并对其微观结构和压电性能进行了研究。结果表明：BiAlO₃掺杂量较少时, 陶瓷中缺陷偶极子的“钉扎”效应使得陶瓷畴壁转动困难, 陶瓷压电性能较弱, 应变滞后也较小。随BiAlO₃掺杂量增加, 缺陷偶极子“钉扎”效应减弱, 陶瓷的压电性能和应变滞后随之提高。本实验得到的性能最优组分为x=1.75%, 该组份陶瓷的压电系数d₃₃=504 pC/N, 机电耦合系数k_p=0.71, 机械品质因数Q_m=281, 居里温度T_C=312 ℃, 在10 kV/cm电场下的应变滞后仅为15%, 并且还具有较好的温度稳定性, 是一种具有应用价值的压电驱动器用压电陶瓷材料。     

Experimental investigation on the piezo-composite actuator with piezoelectric single-crystal layer

Studies on muscle mimicking actuators have increased in the last two decades due to the possibility of various applications for compact lightweight actuators including small unmanned aircrafts, missile, and biomimetic robots. Piezoelectric materials have been used in a variety of applications ranging from shape control of structure and active vibration control of structure to noise suppression due to compact size and good frequency response. Conventional polycrystal piezoelectric ceramic materials, however, have limited actuating strains and displacement, hindering their use in actuators for small aerospace vehicles. In this study, the design and fabrication method of an actuator with a piezoelectric single-crystal layer were investigated to increase the actuation strain and displacement. From a comparison of the performance of the LIPCA-C2 and LIPCA-S prototypes, it was found that the new LIPCA-S2, which has much higher coefficient of the unimorph actuator, can generate an actuating displacement more than twice that of LIPCA-C2.     

压电复合梁热机电耦合有限元模型

压电材料应用于航天结构形状或振动控制时,可能会受到热场、力场和电场的共同作用。为分析处于热场、力场和电场共同作用下的压电复合结构,文中基于高阶剪切变形理论、高阶电势模型和线性温度分布假设,利用虚功原理建立了压电复合梁结构的热-机-电耦合有限元模型。该模型可应用于热机电耦合压电复合结构的形状与振动控制研究。利用本文模型对压电双晶片梁、压电复合悬臂梁进行了数值仿真,仿真结果与文献给出的理论结果和实验值吻合良好,表明本文模型是正确有效的。