典型Sn基焊料凸点互连结构电迁移异同性

研究了Sn37Pb,Sn3.0Ag0.5Cu和Sn0.7Cu三种焊料BGA焊点在电迁移作用下界面的微观组织结构.在60℃,1×103 A/cm2电流密度条件下通电187h后,Sn37 Pb焊点阴极界面已经出现了空洞,同时在阳极有Pb的富集带;Sn3.0Ag0.5Cu焊点的阴极界面Cu基体大量溶解,阳极金属间化合物层明显比阴极厚;对于Sn0.7Cu焊料,仅发现阳极金属间化合物层厚度比阴极厚,阴极Cu基体的溶解不如SnAgCu明显,电迁移破坏明显滞后.     

SnAgCu焊点电迁移诱发IMC阴极异常堆积

为了研究电迁移过程中焊点与焊盘界面金属问化合物(IMC)的变化,在28℃下,对无铅Sn3.0Ag0.5Cu焊点进行了6.5A直流电下的电迁移实验.结果发现,通电144h后,阳极侧IMC层变厚,平均达到10.12 μm;阴极侧IMC层大部分区域变薄至0.86μm,局部出现Cu焊盘的溶解消失,但在界面边缘处出现Cu3Sn5...     

Sn3.8Ag0.7Cu和Sn37Pb焊点界面显微结构研究

利用扫描电子显微镜（SEM）和透射电子显微镜（TEM）研究了Sn3.8Ag0.7Cu（Sn37Pb）/Cu焊点在时效过程中的界面金属间化合物（IMC）形貌和成份。结果表明：150℃高温时效50、100、200、500h后,Sn3.8Ag0.7Cu（Sn37Pb）/Cu焊点界面IMC尺寸和厚度增加明显,IMC颗粒间的沟槽越来越小。50h时效后界面出现双层IMC结构,靠近焊料的上层为Cu6Sn5,邻近基板的下层为Cu3Sn。之后利用透射电镜观察了Sn37Pb/Ni和Sn3.8Ag0.7Cu/Ni样品焊点界面,结果显示,焊点界面清晰,IMC晶粒明显。     

SnAgCu无铅焊点原位电迁移IMC演变

在28℃.3.25A直流电下,对Cu/Sn3.0Ag0.5Cu/Cu对接无铅焊点进行原位电迁移实验,观察了通电120,168,384和504 h后焊点横截面的微观组织形貌.结果表明,电迁移初期,Cu<,6>Sn<,5>化合物遍布整个焊点截面,随时间延长,不断从阴极向阳极迁移聚集;当通电504 h后,焊点内已看不到金属间...     

电迁移对Sn3.0Ag0.5Cu无铅焊点剪切强度的影响

通过热风回流焊制备了Cu/Sn3.0Ag0.5Cu/Cu对接互连焊点,测试了未通电及6.5 A直流电下通电36 h和48 h后焊点的剪切强度.结果表明,电迁移显著地降低了焊点的剪切强度,电迁移36 h使剪切抗力降低约30%,电迁移48 h降低约50%.SEM观察断口和界面形貌表明,界面金属间化合物增厚使断裂由韧性向脆性...     

Sn3.8Ag0.7Cu焊料与Fe-Ni镀层的液固界面反应

在流动的还原性气氛中,研究了共晶Sn3.8Ag0.7Cu焊料与不同Fe含量的Fe-Ni合金层的液固界面反应行为。结果表明:低Fe含量的Fe-83Ni镀层与共晶Sn3.8Ag0.7Cu焊料具有较快的液固界面反应速率,高Fe含量的Fe-53Ni镀层与共晶Sn3.8Ag0.7Cu焊料具有较慢的液固界面反应速率,在界面处可以观察到致密的FeSn2白色化合物层。而Fe-74Ni镀层与共晶Sn3.8Ag0.7Cu焊料的液固界面反应速率介于二者之间。当共晶Sn3.8Ag0.7Cu焊料与Fe-Ni镀层反应时,界面处生成的致密的FeSn2白色化合物,可以有效地阻止Fe-Ni镀层的快速消耗。     

焦耳热效应引发的晶须生长机理研究

研究了Cu/Sn3.8Ag0.7Cu/Cu一维焊点在电流密度为5×103 A/cm2、环境温度为100℃作用下晶须的生长机理。研究结果表明,通电300 h后,在Cu/Sn3.8Ag0.7Cu/Cu焊点的阳极界面出现了一些小丘,而在焊点的阴极出现了一些裂纹;通电500 h后,焊点阴极界面的裂纹进一步扩展,而且在裂纹处发现了大量纤维状Sn晶须,其长度超过10μm;继续通电达到700 h后,Sn晶须的数量没有增加,同时停止生长。由于电迁移的作用,金属原子在电子风力的作用下由焊点的阴极向阳极进行了扩散迁移,进而在阴极处形成裂纹。随着裂纹逐渐扩展,导致该区域处的电流密度急剧增大,焦耳热聚集效应明显,为了释放应力,形成了纤维状的晶须。     

添加Sb和LaB6对Sn3.0Ag0.5Cu/Cu界面IMC生长的影响

研究了Sb和稀土化合物的添加对Sn3.0Ag0.5Cu无铅焊料焊接界面金属间化合物层生长的影响。研究结果表明,固态反应阶段界面化合物层的生长快慢排序如下:v(SAC0.4Sb0.1LaB6/Cu)v(SAC0.4Sb/Cu)v(SAC0.1LaB6/Cu)v(SAC/Cu)。计算各种界面IMC生长的激活能Q结果表明,Sn3.0Ag0.5Cu/Cu界面IMC生长的激活能最高,为92.789 kJ,其他焊料合金Sn3.0Ag0.5Cu0.4Sb0.1LaB6/Cu,Sn3.0Ag0.5Cu0.1LaB6/Cu和Sn3.0Ag0.5Cu0.4Sb/Cu界面IMC生长的激活能分别为85.14,84.91和75.57 kJ。在老化温度范围内(≤190℃),Sn3.0Ag0.5Cu0.4Sb0.1LaB6/Cu的扩散系数(D)最小,因而其界面化合物的生长速率最慢。     

回流次数对Sn3.8Ag0.7Cu-xNi/Ni焊点的影响

研究了复合无铅焊料Sn3.8Ag0.7Cu-xNi(x=0.5,1.0,2.0)与Au/Ni/Cu焊盘在不同回流次数下形成的焊点的性能.结果表明,Ni颗粒增强的复合焊料具有良好的润湿性能,熔点小于222℃;X为0.5的焊料界面IMC由针状(CuNi)6Sn5演化为双层IMC,即多面体状化合物(CuNi)6Sn5和回飞棒...     

电流密度对电-热耦合下微焊点界面形貌的影响北大核心CSCD

针对电子封装器件中Cu/焊料/Ni焊点结构的电-热耦合效应问题,通过回流焊工艺制备Cu/Sn3.0Ag0.5Cu-0.01BP/Ni微焊点,在焊点电-热耦合实验平台上进行了四种电流密度下的热电应力实验。采用SEM和EDS研究了电流密度对电-热耦合下微焊点界面形貌的影响,探讨了阴极和阳极两侧电迁移行为以及IMC层生长机制。结果表明,当电子从阴极Cu端流向阳极Ni端时,在电子流的作用下Cu原子的移动速度加快,并阻碍阳极界面Ni原子流向Cu端。单纯热时效状态下,阳极和阴极界面厚度增长缓慢,而高电流密度下则快速增厚。无电流时,阳极端生成(Cu_(x),Ni_(y))_(6)Sn_(5)的驱动力来源于Cu、Ni两端之间的温度梯度和浓度梯度;当电-热耦合产生效应时,相对于温度梯度和浓度梯度,电流应力逐步起主导作用,改变了阴极和阳极界面IMC层的主生长机制。     

热老化条件下SAC305焊点的界面反应

研究对比了BGA/SAC305/Cu双界面焊点和SAC305/Cu单界面焊点在150℃条件下经过不同时间的等温时效后界面化合物的形态,并对BGA/SAC305/Cu和SAC305/Cu焊点内部组织进行了观察。试验结果表明：随着时效时间的增加,焊点界面化合物的厚度逐渐增加,表面趋于平坦,且SAC305/Cu单界面焊点出现...     

Isothermal solidification of Cu/Sn diffusion couples to form thin-solder joints

Isothermal solidification of conventional Cu/Sn diffusional couples was performed to form thin (30 μm) joints consisting of Cu-Sn intermetallics. During initial stages of isothermal solidification, both Cu₆Sn₅ and Cu₃Sn phases grow, even though the former is the dominant. After consumption of all available Sn, the Cu₃Sn phase grows reactively at the expense of Cu and Cu₆Sn₅. Finally, we obtain solder joints that consist of only Cu₃Sn. Indentation fracture-toughness measurements show that Cu₃Sn is superior to Cu₆Sn₅. Furthermore, indentations of Cu₃Sn exhibit the presence of shear bands, which are not observed in Cu₆Sn₅, implying that the former is more ductile than the latter. Ductile intermetallic-based joints formed by isothermal solidification are promising candidates to form thin (as thin as 5–10 μm or less) solder joints, as they are thermally and thermodynamically stable compared to conventional solder joints. Excess copper in the interconnect provides ductility to the interconnect.     

Intermetallic formation in Sn3Ag0.5Cu and Sn3Ag0.5Cu0.06Ni0.01Ge solder BGA packages with immersion Ag surface finish

The intermetallic compounds formed in Sn3Ag0.5Cu and Sn3Ag0.5Cu0.06Ni0.01Ge solder BGA packages with Ag/Cu pads are investigated. After reflow, scallop-shaped η-Cu₆Sn₅ and continuous planar η-(cu_0.9Ni_0.1)₆Sn₅ intermetallics appear at the interfaces of the Sn3Ag0.5Cu and Sn3Ag0.5Cu0.06Ni0.01Ge solder joints, respectively. In the case of the Sn3Ag0.5Cu specimens, an additional ε-Cu₃Sn intermetallic layer is formed at the interface between the η-Cu₆Sn₅ and Cu pads after aging at 150°C, while the same type of intermetallic formation is inhibited in the Sn3Ag0.5Cu0.06Ni0.01Ge packages. In addition, the coarsening of Ag₃Sn precipitates also abates in the solder matrix of the Sn3Ag0.5Cu0.06Ni0.01Ge packages, which results in a slightly higher ball shear strength for the specimens.     

Phase identification and growth kinetics of the intermetallic compounds formed during in-49Sn/Cu soldering reactions

For the application of In-49Sn solder in bonding recycled-sputtering targets to Cu back plates, the intermetallic compounds formed at the In-49Sn/Cu interface are investigated. Scanning electron microscopy (SEM) observations show that the interfacial intermetallics consist of a planar layer preceded by an elongated scalloped structure. Electron-probe microanalyzer analyses indicate that the chemical compositions of the planar layer and the scalloped structure are Cu_74.8In_12.2Sn_13.0 and Cu_56.2In_20.1Sn_23.7, respectively, which correspond to the ε-Cu₃(In,Sn) and η-Cu₆(In,Sn)₅ phases. Kinetics analyses show that the growth of both intermetallic compounds is diffusion controlled. The activation energies for the growth of η- and ε-intermetallics are calculated to be 28.9 kJ/mol and 186.1 kJ/mol. Furthermore, the formation mechanism of intermetallic compounds during the In-49Sn/Cu soldering reaction is clarified by marking the original interface with a Ta-thin film. Wetting tests are also performed, which reveal that the contact angles of liquid In-49Sn drops on Cu substrates decline to an equilibrium value of 25°C.     

Solid-state annealing behavior of two high-Pb solders, 95Pb5Sn and 90Pb10Sn,on Cu under bump metallurgy

The solid-state annealing behavior of two high-lead solders, 95Pb5Sn and 90Pb10Sn (in wt.%), was examined. After reflow, Cu₃Sn intermetallics formed on the Cu under bump metallurgy (UBM) for both solder alloys. However, solidstate annealing produced significantly different reaction morphologies for the two solder compositions. The Cu₃Sn intermetallics spalled off faster at higher temperatures in the 95Pb5Sn solder. In the case of 90Pb10Sn solder, the Cu₃Sn intermetallics continued to grow even after 1500 h at 170°C. The difference was explained by a two-step phenomenon—Sn diffusion from the bulk solder region to the solder/Cu₃Sn interface (J_Sn), and subsequent intermetallic formation (I_Cu3Sn) by interdiffusion of Cu and Sn. For 95Pb5Sn, the relation, J_Sn < I_Cu3Sn was postulated because of insufficient supply of Sn. The relation, J_Sn > I_Cu3Sn was suggested for the continuous intermetallic growth of the 90Pb10Sn solder. Although a small difference was expected between the two quantities in both solder alloys, the difference in the solid-state annealing behavior was dramatic.     

Sn在Cu(111)上欠电位沉积的现场STM研究

本文用现场扫描隧道显微镜（in-situ STM)研究Sn在Cu(111）上的欠电位沉积（underpotential deposition UPD)过程,实验结果表明：Sn原子在Cu(111)表面上的UPD首先在晶面的边缘处发生,随后向晶面的其余地方发展并取代吸附在表面的SO4^2-,这一过程伴随着显著的台阶轮廓的变化,在Sn的UPD层溶出过程中,台阶边缘形状发生了更剧烈的变化。并且观察到凹洞的出现,表明Sn与Cu (111)基底形成了表面合金。     

Phase equilibria and solidification properties of Sn-Cu-Ni alloys

Ternary Sn-Cu-Ni alloys were prepared and annealed at 240°C. The annealed alloys were metallographically examined and the equilibrium phases formed were identified on the basis of compositional determinations and x-ray diffraction (XRD) analysis. The isothermal section of the ternary Sn-Cu-Ni system at 240°C was proposed on the basis of experimental results of this study and related information on phase equilibrium available in the literature. The binary compounds, Cu₆Sn₅, Ni₃Sn₂, and Ni₃Sn₄, have very extensive ternary solubility. Continuous solid solutions form between Cu and Ni as well as between Cu₃Sn and Ni₃Sn. In addition to the isothermal section, the liquidus projection of the Sn-Cu-Ni system was determined based on results from the existing literature. Interfacial reactions between Sn-Cu alloys and Ni substrate and the primary solidification phases of various Sn-Cu-Ni alloys were also examined in this study.