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近年来红外探测技术在军事和民用领域得到了迅速的发展,非制冷红外探测器以其低成本、小型化、非制冷等优势在红外探测系统发展中占据着重要的地位。本文总结了国内外非制冷红外探测器的发展现状,分析了两种主要的非制冷红外探测器技术路线的特点及差异,并给出了这两种技术路线后续发展趋势。 相似文献
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This paper introduces a low-cost infrared absorbing structure for an uncooled infrared detector in a standard 0.5 m CMOS technology and post-CMOS process. The infrared absorbing structure can be created by etching the surface sacrificial layer after the CMOS fabrication, without any additional lithography and deposition procedures. An uncooled infrared microbolometer is fabricated with the proposed infrared absorbing structure.The microbolometer has a size of 6565 m2and a fill factor of 37.8%. The thermal conductance of the microbolometer is calculated as 1.3310 5W/K from the measured response to different heating currents. The fabricated microbolometer is irradiated by an infrared laser, which is modulated by a mechanical chopper in a frequency range of 10–800 Hz. Measurements show that the thermal time constant is 0.995 ms and the thermal mass is 1.3210 8J/K. The responsivity of the microbolometer is about 3.03104V/W at 10 Hz and the calculated detectivity is 1.4108cm Hz1=2/W. 相似文献