MOCVD生长GaV的喇曼散射谱

对在ＧａＡｓ、Ａｌ２Ｏ３和Ｓｉ等衬底上ＭＯＣＶＤ技术生长的ＧａＮ薄膜进行了背散射几何配置下的喇曼散射测试分析和比较，观察到α相ＧａＮｌ模，Ａｌ模Ｅｌ模和Ｅ２模，结合射线衍射谱，分析了因不同生长工艺导致ＧａＮ／ＧａＡｓ样品的不同结构相的喇曼谱的差异，发现ＧａＮ喇曼谱与ＧａＮ外延层的结构相，完整性及工艺条件有关，可利用其作为检测ＧａＮ外延层结构特性的一种有用手段。     

生长在尖晶石衬底上的GaN外延层的喇曼散射研究

在室温下测量了用ＭＯＶＰＥ方法生长在尖晶石（ＭｇＡｌ２Ｏ４）衬底上的ＧａＮ外延层的一阶喇曼光谱．应用各种背散射和９０°散射配置，测得了除低频Ｅ２模外所有ＧａＮ的喇曼活性光学声子模．并且在Ｘ（Ｚ，Ｘ）Ｚ和Ｘ（Ｙ，Ｙ）Ｚ配置下观测到了由Ａ１和Ｅ２模混合形成的准ＴＯ和准ＬＯ模．所得结果与群论选择定则预计的一致     

S钝化GaAs(100)衬底上分子束外延ZnSe薄膜的喇曼光谱研究

用分子束外延法（ＭＢＥ）分别在经（ＮＨ４）２Ｓｘ溶液和Ｓ２Ｃｌ２溶液钝化的ＧａＡｓ（１００）衬底上生长了ＺｎＳｅ薄膜．用室温喇曼光谱对不同处理方法的ＧａＡｓ上所长ＺｎＳｅ薄膜的晶体质量和ＺｎＳｅ／ＧａＡｓ界面进行对比研究．用喇曼散射的空间相关模型定量分析了一级喇曼散射的空间相关长度与晶体质量间的关系．根据ＧａＡｓ的ＬＯ－等离子激元耦合模喇曼散射强度的变化，分析了不同Ｓ钝化方法对ＺｎＳｅ／ＧａＡｓ界面以及ＺｎＳｅ薄膜质量的影响．结果表明，Ｓ２Ｃｌ２溶液钝化的ＺｎＳｅ／ＧａＡｓ样品具有较低的界面态密度和较好的     

静压下ZnS0.02Te0.98混晶的共振喇曼散射研究

在１５Ｋ和１～３ＧＰａ静压范围内研究了ＺｎＳ０．０２Ｔｅ０．９８混晶的共振喇曼散射，样品用ＭＢＥ方法生长在（００１）晶向的半绝缘ＧａＡｓ衬底上，利用静压调制带隙实现也４８８．０ｎｍ线的共振喇曼散射，观察到类ＺｎＴｅ和类ＺｎＳ两类ＬＯ声子模以及它们的倍频模和组合模－测得类ＺｎＴｅ的ＬＯ声子模的压力系数为４．５ｃｍ＾－１／ＧＰａ。     

［（Cdse）_m（ZnSe）_n］_p－Znse多量子阱中的多声子散射

对用原子层外延方法，在［００１］晶向ＧａＡｓ衬底上生长的［（Ｃｄｓｅ）ｍ（Ｚｎｓｅ）ｎ］ｐ－ＺｎＳｅ应变量子阱结构，在１０～３００Ｋ温度范围内测量了喇曼散射光谱，观察到两种类ＺｎＳｅＬＯ声子限制模．利用改变样品温度和入射光能量实现了共振喇曼散射，观察到高达７阶的类ＺｎＳｅＬＯ声子模．并讨论了多声子喇曼散射和热萤光过程的区别．     

IN1—x—yGaxAlyAs四元混晶的喇曼散射

报道了ＭＢＥ生长的Ｉｎ１－ｘ－ｙＧａｘＡｌｙＡｓ四元混晶中光学声子的喇曼散射实验结果．光学声子模的频率与强度的组分关系表明Ｉｎ１－ｘ－ｙＧａｘＡｌｙＡｓ四元混晶中有３种光学声子模，即类ＩｎＡｓ、类ＧａＡｓ和类ＡｌＡｓ模．喇曼光谱的偏振分析表明３种光学声子在退偏振条件下是喇曼活性的，而在偏振条件下是喇曼非活性的．由于混晶中的无序效应，可观察到泄漏的ＴＯ模叠加在ＬＯ的低能侧使喇曼峰显现出非对称形状．     

离子注入对分子束外延Hg0.68Cd0.32Te远红外振动模的影响

我们对用分子束外延（ＭＢＥ）技术生长出的Ｈｇ０．６８Ｃｄ０．３２Ｔｅ薄膜进行了Ｎ离子注入并退火,分别得到了其室温喇曼散射谱及在不同温度下的远红外透射谱．喇曼散射谱可以观察到类ＨｇＴｅ的ＬＯ模的散射和ＴＯ模的散射,原生样品及离子注入样品在９３ｃｍ－１附近有较弱的散射峰,经离子注入后该峰消失;远红外透射谱中分别可以观察到７８ｃｍ－１（Ｘ）、８６ｃｍ－１（Ｉ１）、９３ｃｍ－１（ＬＡ）、１０４ｃｍ－１（Ｐｄ）以及１２１ｃｍ－１（ＴＯ２）、１４３ｃｍ－１（ＴＯ１）、１５６ｃｍ－１（ＬＯ１）等吸收峰,讨论了离子注入及注入后退火对Ｘ、Ｉ１、ＬＡ、Ｐｄ等吸收峰的影响．     

离子注入对分子束外延Hg_(0.68)Cd_(0.32)Te远红外振动模的影响

我们对用分子束外延（ＭＢＥ）技术生长出的Ｈｇ０．６８Ｃｄ０．３２Ｔｅ薄膜进行了Ｎ离子注入并退火,分别得到了其室温喇曼散射谱及在不同温度下的远红外透射谱．喇曼散射谱可以观察到类ＨｇＴｅ的ＬＯ模的散射和ＴＯ模的散射,原生样品及离子注入样品在９３ｃｍ－１附近有较弱的散射峰,经离子注入后该峰消失;远红外透射谱中分别可以观察到７８ｃｍ－１（Ｘ）、８６ｃｍ－１（Ｉ１）、９３ｃｍ－１（ＬＡ）、１０４ｃｍ－１（Ｐｄ）以及１２１ｃｍ－１（ＴＯ２）、１４３ｃｍ－１（ＴＯ１）、１５６ｃｍ－１（ＬＯ１）等吸收峰,讨论了离子注入及     

分子束外延低温生长GaAs的Raman光谱研究

我们对从ＧａＡｓ衬底剥离下来的低温下分子束外延生长的ＧａＡｓ（ＬＴＧ－ＧａＡｓ）薄膜进行了喇曼光谱测量，研究了不同温度下生长的ＬＴＧ－ＧａＡｓ在退火前后晶体完整性的变化．我们首次观测到了１９０℃生长样品中Ａｓ沉淀物所引起的喇曼峰，并证明８００℃快速热退火３０秒后产生的Ａｓ沉淀物是无定形Ａｓ．     

(001)GaAs衬底上异质外延的立方GaN薄膜与界面

用电子回旋共振微波等离子体辅助金属有机化学气相沉积（ＥＣＲ－ＰＡＭＯＣＶＤ）法，在低温条件下，在（００１）ＧａＡｓ衬底上异质外延，生长了立方晶ＧａＮ薄膜．高分辩电镜（ＨＲＥＭ）观测与Ｘ射线衍射（ＸＲＤ）测量结果表明：ＧａＮ薄膜具有典型的闪锌矿结构；三种方法测得其晶格常数为０．４５１～０．４５７ｎｍ；在ＧａＮ／ＧａＡｓ界面处的生长模式为异质外延；ＧａＮ薄膜中的位错主要为堆垛层错与刃形位错；随着远离界面，ＧａＮ中位错密度与镶嵌组织迅速减少．     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.