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1.
对在GaAs、Al2O3和Si等衬底上MOCVD技术生长的GaN薄膜进行了背散射几何配置下的喇曼散射测试分析和比较,观察到α相GaNl模,Al模El模和E2模,结合射线衍射谱,分析了因不同生长工艺导致GaN/GaAs样品的不同结构相的喇曼谱的差异,发现GaN喇曼谱与GaN外延层的结构相,完整性及工艺条件有关,可利用其作为检测GaN外延层结构特性的一种有用手段。  相似文献   

2.
在室温下测量了用MOVPE方法生长在尖晶石(MgAl2O4)衬底上的GaN外延层的一阶喇曼光谱.应用各种背散射和90°散射配置,测得了除低频E2模外所有GaN的喇曼活性光学声子模.并且在X(Z,X)Z和X(Y,Y)Z配置下观测到了由A1和E2模混合形成的准TO和准LO模.所得结果与群论选择定则预计的一致  相似文献   

3.
用分子束外延法(MBE)分别在经(NH4)2Sx溶液和S2Cl2溶液钝化的GaAs(100)衬底上生长了ZnSe薄膜.用室温喇曼光谱对不同处理方法的GaAs上所长ZnSe薄膜的晶体质量和ZnSe/GaAs界面进行对比研究.用喇曼散射的空间相关模型定量分析了一级喇曼散射的空间相关长度与晶体质量间的关系.根据GaAs的LO-等离子激元耦合模喇曼散射强度的变化,分析了不同S钝化方法对ZnSe/GaAs界面以及ZnSe薄膜质量的影响.结果表明,S2Cl2溶液钝化的ZnSe/GaAs样品具有较低的界面态密度和较好的  相似文献   

4.
在15K和1~3GPa静压范围内研究了ZnS0.02Te0.98混晶的共振喇曼散射,样品用MBE方法生长在(001)晶向的半绝缘GaAs衬底上,利用静压调制带隙实现也488.0nm线的共振喇曼散射,观察到类ZnTe和类ZnS两类LO声子模以及它们的倍频模和组合模-测得类ZnTe的LO声子模的压力系数为4.5cm^-1/GPa。  相似文献   

5.
对用原子层外延方法,在[001]晶向GaAs衬底上生长的[(Cdse)m(Znse)n]p-ZnSe应变量子阱结构,在10~300K温度范围内测量了喇曼散射光谱,观察到两种类ZnSeLO声子限制模.利用改变样品温度和入射光能量实现了共振喇曼散射,观察到高达7阶的类ZnSeLO声子模.并讨论了多声子喇曼散射和热萤光过程的区别.  相似文献   

6.
报道了MBE生长的In1-x-yGaxAlyAs四元混晶中光学声子的喇曼散射实验结果.光学声子模的频率与强度的组分关系表明In1-x-yGaxAlyAs四元混晶中有3种光学声子模,即类InAs、类GaAs和类AlAs模.喇曼光谱的偏振分析表明3种光学声子在退偏振条件下是喇曼活性的,而在偏振条件下是喇曼非活性的.由于混晶中的无序效应,可观察到泄漏的TO模叠加在LO的低能侧使喇曼峰显现出非对称形状.  相似文献   

7.
姬荣斌  李标 《半导体学报》1999,20(7):569-572
我们对用分子束外延(MBE)技术生长出的Hg0.68Cd0.32Te薄膜进行了N离子注入并退火,分别得到了其室温喇曼散射谱及在不同温度下的远红外透射谱.喇曼散射谱可以观察到类HgTe的LO模的散射和TO模的散射,原生样品及离子注入样品在93cm-1附近有较弱的散射峰,经离子注入后该峰消失;远红外透射谱中分别可以观察到78cm-1(X)、86cm-1(I1)、93cm-1(LA)、104cm-1(Pd)以及121cm-1(TO2)、143cm-1(TO1)、156cm-1(LO1)等吸收峰,讨论了离子注入及注入后退火对X、I1、LA、Pd等吸收峰的影响.  相似文献   

8.
我们对用分子束外延(MBE)技术生长出的Hg0.68Cd0.32Te薄膜进行了N离子注入并退火,分别得到了其室温喇曼散射谱及在不同温度下的远红外透射谱.喇曼散射谱可以观察到类HgTe的LO模的散射和TO模的散射,原生样品及离子注入样品在93cm-1附近有较弱的散射峰,经离子注入后该峰消失;远红外透射谱中分别可以观察到78cm-1(X)、86cm-1(I1)、93cm-1(LA)、104cm-1(Pd)以及121cm-1(TO2)、143cm-1(TO1)、156cm-1(LO1)等吸收峰,讨论了离子注入及  相似文献   

9.
我们对从GaAs衬底剥离下来的低温下分子束外延生长的GaAs(LTG-GaAs)薄膜进行了喇曼光谱测量,研究了不同温度下生长的LTG-GaAs在退火前后晶体完整性的变化.我们首次观测到了190℃生长样品中As沉淀物所引起的喇曼峰,并证明800℃快速热退火30秒后产生的As沉淀物是无定形As.  相似文献   

10.
(001)GaAs衬底上异质外延的立方GaN薄膜与界面   总被引:7,自引:3,他引:4  
顾彪  徐茵  孙凯  秦福文 《半导体学报》1998,19(4):241-244
用电子回旋共振微波等离子体辅助金属有机化学气相沉积(ECR-PAMOCVD)法,在低温条件下,在(001)GaAs衬底上异质外延,生长了立方晶GaN薄膜.高分辩电镜(HREM)观测与X射线衍射(XRD)测量结果表明:GaN薄膜具有典型的闪锌矿结构;三种方法测得其晶格常数为0.451~0.457nm;在GaN/GaAs界面处的生长模式为异质外延;GaN薄膜中的位错主要为堆垛层错与刃形位错;随着远离界面,GaN中位错密度与镶嵌组织迅速减少.  相似文献   

11.
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.  相似文献   

12.
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.  相似文献   

13.
The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.  相似文献   

14.
The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.  相似文献   

15.
Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.  相似文献   

16.
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's.  相似文献   

17.
It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output(MIMO) communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.  相似文献   

18.
A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.  相似文献   

19.
A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.  相似文献   

20.
Call for Papers     
正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks  相似文献   

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