微光机电陀螺微致动器设计与有限元分析

提出了一种锆钛酸铅(PZT)薄膜微致动器的结构模型。该致动器采用高d33特性的压电陶瓷材料,用于对空间谐振式微光机电(MOEMS)陀螺微镜进行位移和角度的精确定位。建立了该致动器的简化模型并利用有限元方法分析其驱动能力。结果显示,当采用双层结构的PZT薄膜微致动器时,在外加电压50V作用下,环形PZT位移控制器中心位移可达到0.345μm;十字形角度控制器偏转角度可达3.29″,增加PZT薄膜的层数可以进一步增加致动器对微镜位移和角度的控制能力。通过对仿真结果进行分析可以得出结论,选用多层PZT薄膜材料制成的微致动器能够满足调整微镜位移和角度所需的范围和精度要求。     

超磁致伸缩作动器激光干涉位移测量系统

由于超磁致伸缩作动器的位移在微米级,对其精确测量至关重要,针对激光干涉测量技术中分立元件迈克尔逊激光干涉仪存在环境要求高、调整烦琐和易受干扰等缺点,采用全光纤迈克尔逊干涉仪简化测量前的准备工作;并借助高性能动态信号采集卡,配合LabVIEW图形化编程工具,应用贝塞尔函数干涉条纹细分技术提高测量精度,开发了超磁致伸缩作动器位移测量系统。实验证明测量误差与理论计算相符,表明测量结果是准确可靠的。该系统适用于超磁致伸缩作动器位移的实验研究和现场测量,可为微位移的测量提供一种参考方法。     

柔性桥式微位移机构位移放大比特性研究

为了分析柔性桥式微位移放大机构的位移放大比特性,利用桥式微位移放大机构的结构全对称性,建立了微位移放大机构的1/4数学模型.采用矩阵法建立了其柔度矩阵,进而推导了桥式位移放大机构的输出位移公式及位移放大比公式.采用ANSYS 11.0软件进行了有限元仿真,并与理论模型进行了分析比较.最后,设计加工了一个实验样件,对理论...     

电活性聚合物致动器机电响应特性研究

电活性聚合物(EAP)致动器是一类极具发展潜力的智能材料。通过对尺寸为10 mm×2 mm离子型聚吡咯致动器施加阶跃电压、方波、正弦波、斜波电压,研究分析致动器位移响应与驱动电压波形、幅值和频率的关系。阶跃电压下,致动器位移响应经过5s左右达到稳定状态,仅1 V驱动电压就可使致动器稳态弯曲位移变化值达2. 22 mm。在幅值为±1 V方波驱动电压下,致动器稳定状态位移变化值则为1. 96 mm。试验结果表明:驱动电压增加,迁进迁出致动聚合物层的离子增多引起聚合物层的氧化还原加剧,致动器位移响应滞后于驱动电压变化;其位移响应幅值随驱动电压增加而增大,呈线性关系。当驱动电压波形与幅值相同时,致动器位移变化幅值随驱电压频率的增高而减小,且呈非线性关系。该致动器机电响应特性试验为微阀、微型机器人、生物医学设备、人工肌肉、电化学传感器、贮能材料等领域的实际应用提供了理论参考。     

面向大流量应用的硅微阀致动器优化设计

设计了一种面向大流量应用的硅微阀流控芯片,基于电热耦合理论对芯片中的V型电热致动器进行了优化设计.通过构建温度分布的优化模型,对硅微阀流控芯片中V型致动器进行了变截面设计,并对优化前后的致动器进行了多物理场模拟.结果表明:与恒定截面V型致动器相比,在致动位移相同的情况下,优化后的致动器所需的最高温升降低了7.14％,且温度和应力分布更为均匀,在保障致动性能的同时提高了热平衡稳定性和结构稳定性.     

偏置磁场对超磁致伸缩致动器输出特性的影响分析

采用Terfenol-D棒作为超磁致伸缩致动器GMA(Giant Magnetostrictive Actuator)的主要材料,研制了有偏置磁场和无偏置磁场两种超磁致伸缩致动器,分析了具有分段式永磁偏置和无偏置致动器的结构及性能.基于安培定律、磁路基尔霍夫定律、叠加原理对致动器的磁场进行理论分析.为进一步分析磁场分布,创建三维模型,利用有限元仿真软件对GMA内部磁场进行分析和比较,仿真结果表明:分段式永磁偏置结构致动器能够达到理想的偏置要求,无磁场偏置的致动器在电流作用下磁场分布更均匀.实验结果表明:超磁致伸缩致动器输出位移和力的大小分别与Terfenol-D棒长度、直径呈正相关,施加偏置磁场能够改善超磁致伸缩致动器的动静态输出特性,提高致动器静态输出位移和力的线性度,消除动态输出位移与输出力的倍频现象,提高其输出精度.     

基于BP神经网络的U型电热微致动器仿真分析

以BP神经网络、随机有限元法为基础,对u型电热微致动器进行了仿真分析．首先利用有限元分析软件ANSYS对u型电热微致动器进行有限元分析得到具体结构尺寸对微致动器最大位移的影响,然后通过建立的BP神经网络来拟合响应与输入之间的关系,根据蒙特卡罗模拟原理获得足够多的样本值对训练后的网络进行误差分析,结果证明本文提出的分析方法是可行有效的．     

基于新型压电致动器的微隔振平台系统

为实现微隔振平台的自适应控制,设计了具有驱动和传感功能的第三代压电致动器,针对其直接应用于微隔振系统隔振效果不是很理想的现状.从理论上分析了导致结果不理想的原因,提出一种改进方法,通过理论建模分析和试验研究,结果表明:该方法虽然降低了致动器位移增益.但具有较好的隔振效果.     

微致动器在流动控制中的应用研究

基于MEMS技术,研制了一种微气泡型致动器.对前缘布置有微致动器的三角翼进行了数值模拟和风洞实验,结果表明:微致动器可以改变三角翼前缘的旋涡流状态,扰动边界层,改变三角翼前缘分离涡位置,合理布置微致动器可以获得一定的滚转力矩,利用微致动器可以进行流动控制,进而改变飞行器的动力性能.     

软体仿蛙游动机器人关节式气动致动器研制

为实现仿蛙游动机器人的微小型化,增强其环境适应能力,结合软体材料的优势特点和青蛙划动推进的游动方式,提出了一种关节式气动软体致动器,该致动器在满足软体仿蛙机器人游动过程中的运动性能和力学性能的同时,使得其肢体结构更加紧凑、轻量．利用Yeoh本构模型和虚功原理,结合关节式气动软体致动器的几何参数,建立了致动器的形变分析模型．进而,在致动器总体尺寸受约束的情况下,以一定弯曲角度下致动器输出恢复力矩最大为目标,确定了致动器的具体结构参数．融合3D打印、模塑成型等加工工艺方法,加工制备了关节式气动软体致动器,并通过对比分析,确定了采用纤维线限制致动器径向凸起效应时纤维线的绕线形式和绕线密度．最后经过实验测试分析,该致动器质量约7.5 g,可实现由180°弯曲状态至伸直状态的形态变化,并且在弯曲角度一定时通过调整充入气压的大小可以匹配一定范围内不同大小的负载力矩,从而验证了针对软体仿蛙游动机器人设计的关节式气动软体致动器的可行性．     

Scratch drive actuator with mechanical links for self-assembly ofthree-dimensional MEMS

The self-assembling of three-dimensional (3-D) MEMS from polysilicon surface micromachined part is very attractive. To avoid risky external manipulation, the practical use of integrated actuator to perform the assembling task is required. To that goal, this paper presents detailed characteristics of the electrostatic surface micromachined scratch drive actuator (SDA). First, from numerous SDA tests, it is shown that this actuator is able to produce a threshold force of 30 μN, with a yield above 60%. With polysilicon devices consisting of SDA mechanically linked to buckling beam, a horizontal force of 63 mN has been demonstrated with ±112 V pulse, and up to 100 μN can be obtained with higher voltage. With buckling beams, displacements up to 150 μm have been obtained in the vertical direction. The generation of vertical force of 10 μN was confirmed with a 100 μm displacement producing 1 nJ work in the vertical direction. Finally, SDA overcomes the usual sticking of surface machined polysilicon by producing enough vertical force to completely release wide polysilicon plate (500 μm×50 μm) without external manipulation. The above characteristic, both in terms of structure releasing and vertical/horizontal forces and displacements provides the SDA with the capability of self-assembling complex 3-D polysilicon part, opening new integration capabilities and new application field of MEMS     

A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer

From a silicon-on-insulator (SOI) wafer, a microtranslation table with scratch-drive actuator (SDA) has been fabricated. The device Si layer of SOI wafer is etched to form the plate of SDA, which is partially connected to the handle Si substrate by the SiO₂ layer. Dicing the handle Si substrate, a microtranslation table with the SDA array has been fabricated. Placing the microtranslation table upside down on the other Si substrate on which a thin conductive film is patterned for the electrical connection, the microtranslation table is moved by the SDA without carrying a metal wire. The moving velocity of 45.5 μm/s has been obtained by applying the voltage of 120 V at the operating frequency of 500 Hz.     

A micromachined impact microactuator driven by electrostatic force

This paper presents a novel micromachined actuator which is developed to produce precise and unlimited displacement. The actuator is driven by impact force between a silicon micro-mass and a stopper. The suspended silicon micro-mass is encapsulated between two glass plates and driven by electrostatic force. When the mass hits the stopper which is fixed on glass plates, impact force is generated to drive the whole actuator in a nano size step (/spl sim/10 nm). The overall dimension of the device is 3 mm /spl times/3 mm. The driving voltage is 100 V and average speed is 2.7 /spl mu/m/s. The total thickness is 600 /spl mu/m.     

一种基于SMA的摆动式驱动器驱动原理及实验

在分析了形状记忆合金(SMA)弹簧电热驱动原理的基础上,对一种差动式关节型SMA驱动器进行了实验研究。实验结果表明:驱动电流和冷却条件对驱动器的摆动周期有很大的影响,增大电流会显著提高SMA驱动器的动作频率,但电流过大,易使SMA失去形状记忆功能,所以,电流应控制在一定的范围之内。驱动器的动作频率还受到冷却速度的制约,加快冷却速度也会提高驱动器的动作频率。     

Track-following control of a dual-stage hard disk drive using a neuro-control system

This paper describes the track-following control of a dual-stage hard disk drive system using neural-networks. A neural-network approach to on-line learning control, and a real-time implementation for a dual-stage hard disk drive, are presented. The use of the dual-stage actuator in hard disk drive systems has become a means of achieving increased servo actuator bandwidth. The dual-stage actuator presented here uses a voice-coil motor (VCM) as a coarse actuator, and a piezoelectric actuator (PZT) as a fine actuator. The control system consists of a series combination of both a plant with a feedback loop and a neural-network with a feedforward loop. The neural-network functions as the reference input filter, and it organizes a new reference signal to the closed-loop circuit. Numerical and experimental results for the track-following control system of the dual-stage hard disk drive show the validity of the proposed neuro-control system.     

Development of a single-wheeled inverted pendulum robot capable of climbing stairs

ABSTRACT

In this paper, we propose the design of a single-wheeled robot capable of climbing stairs. The robot is equipped with the proposed climbing mechanism, which enables it to climb stairs. The mechanism has an extremely simple structure, comprised of a parallel arm, belt, harmonic drive, and pulley. The proposed climbing mechanism has the advantage of not requiring an additional actuator because it can be driven by using a single actuator that drives the wheel. The robot is equipped with a control moment gyroscope to control the stability in a lateral direction. Experimental results demonstrate that the robot can climb stairs with a riser height of 12–13?cm and a tread depth of 39?cm at an approximate rate of 2 to 3 s for each step.     

Track following servo control for rotary piezoelectric motor based primary actuation in hard disk drives

In this paper, we show the tracking performance of a rotary piezoelectric motor based hard disk drive actuator. The actuator is built and modeled for positioning servo in disk drive systems. The Piezo motor replaces the voice-coil-motor based primary actuation. Simulation and experimental results for its servo system proves that it can help to achieve track density of more than 1000?KTPI.     

AUV电动舵机伺服控制与驱动研究

舵机系统设计是水下自主航行器实现精确制导与控制规律的基础.以高速MCU为平台,通过模拟量高线性光耦隔离、电机H桥功率驱动等关键功能模块的研究,实现了电动舵机伺服控制与驱动系统的一体化设计;基于比例积分的控制算法进行了性能预报仿真.分析表明,所设计的电动舵机伺服控制与驱动系统功能完备,性能满足要求.研究成果为水下自主航行器全电作动技术的发展奠定了基础.     

Bias in hard disk drive rotary actuator pivot bearings: measurements and lubrication phenomena

Bias in disk drive rotary actuator bearings exhibits complex behavior related to the history of the actuator movement. This paper investigates the hysteresis component of bias present after seeks. Measurements of bias during full stroke actuator movements composed of multiple seeks of fixed length reveal that the magnitude of the hysteresis decreases as the lengths of component seeks increase up to a critical seek length. When the lengths of the component seek lengths are larger than the critical seek length, the magnitude of the hysteresis remains essentially constant. We explain these phenomena using a hypothesis based on bearing lubrication theory and the relationship between actuator velocity and seek length. We demonstrate a good empirical fit to the data which is strikingly similar from drive to drive and strongly supports our hypothesis.