提高CVD金刚石薄膜刀具膜—基附着力的工艺方法评述

提高金刚石薄膜与硬质合金基底之间的附着力是CVD金刚石薄膜刀具得以推广应用的关键因素。本文介绍了国内外采用CVD法制备金刚石薄膜刀具时提高膜—基附着力的典型工艺方法 ,评述了WC Co基底预处理及沉积工艺对CVD金刚石薄膜与基底之间附着力的影响     

在WC-TiC-Co硬质合金基体上制备金刚石薄膜的试验研究

通过采用Cu/Ti复合过渡层在WC TiC Co硬质合金基体上制备金刚石薄膜的试验 ,研究了沉积工艺对金刚石薄膜的质量、表面粗糙度及附着力的影响。研究结果表明 ,采用Cu/Ti复合过渡层有利于提高金刚石薄膜的附着力 ;适当降低沉积温度虽然会导致金刚石薄膜中非金刚石碳含量增加 ,但有利于增强膜层附着力。     

高性能复杂形状金刚石薄膜涂层刀具的制备和切削性能研究

通过偏压辅助增强热丝化学气相沉积法,采用螺旋形热丝排布方式以及优化的预处理方法和沉积工艺,在硬质合金印刷电路板铣刀的表面沉积了均匀的金刚石薄膜,采用扫描电镜和拉曼光谱研究了金刚石薄膜的表面特征.随后,通过铣削试验研究了金刚石涂层刀具的附着强度和切削性能.试验结果表明,复杂形状金刚石薄膜涂层铣刀既具有附着力强、耐磨性好的特点,同时又具备优异的切削性能,并且其制备无需后续抛光处理就能得到平整光滑的表面,这对于推动金刚石薄膜在复杂形状刀具上的产业化应用具有重要意义.     

光滑硬质合金衬底渗硼预处理对CVD金刚石薄膜性能的影响

提高金刚石薄膜的附着力和光洁度是实现CVD金刚石涂层在工模具和耐磨器件领域中广泛应用的关键因素。采用热丝CVD法在光滑WC—Co硬质合金基体表面沉积金刚石薄膜，研究了渗硼预处理新方法对光滑衬底表面抑制Co催石墨化作用和保证金刚石涂层附着力的效果。研究结果表明，采用渗硼预处理方法既能避免研磨、刻蚀和化学腐蚀等加工方法对光滑衬底表面的严重损伤，又能有效抑制Co对金刚石薄膜的不利影响，获得了满足附着力要求的光滑金刚石薄膜，对于拓宽金刚石薄膜的应用领域具有重要意义。     

偏压对掺钨含氢类金刚石碳膜摩擦学性能的影响

利用非平衡磁控溅射技术在单晶硅片及9Cr18基体表面制备不同偏压下的掺钨含氢类金刚石碳膜。采用Ra-man光谱分析薄膜结构,采用纳米硬度测试仪和纳米划痕仪研究薄膜的纳米硬度、弹性模量和膜基附着力,在球-盘摩擦试验机上测试薄膜在大气环境中的摩擦学性能,研究薄膜的摩擦学性能与偏压的关系。结果表明:制备的薄膜样品均具有典型的类金刚石碳膜结构;基体偏压强烈影响薄膜的力学和摩擦学性能,薄膜硬度和弹性模量在0～150 V范围内随着偏压增加而增大,薄膜的摩擦因数在偏压为100 V时最小,在此参数下的耐磨寿命也最长。     

高性能CVD金刚石薄膜涂层刀具的制备和试验研究

采用电子增强热丝EACVD法,以WC-Co硬质合金刀具为衬底制备金刚石涂层刀具,研究了提高涂层附着力的衬底预处理新方法,探讨了抑制Co催石墨化作用的有效措施,提出了改善金刚石薄膜表面粗糙度CVD后处理新工艺。研究结果表明,采用了Ar-H2微波等离子体刻蚀脱碳预处理方法对于提高金刚石薄膜涂层的附着力有明显效果,添加适量粘结促进剂,可有效地抑制CVD沉积过程中钴向表层扩散引起的催石墨化作用。采用分步沉积新工艺是减小金刚石薄膜表面粗糙度的有效方法。所制备的高附着力和低粗糙度的金刚石薄膜涂层刀具切削性能明显改善,对实现高效高精度切削加工具有十分重要的意义。     

金刚石涂层刀具的性能评价及应用试验综述

金刚石薄膜与硬质合金基体间的附着力较低一直制约着金刚石薄膜涂层工具的商业化生产和大规模应用。本文对研究中所用各种金刚石涂层刀具性能的评价方法和应用试验进行了综述 ,希望能对评价、提高和改进金刚石涂层刀具产品性能有指导意义。     

提高CVD薄膜涂层刀具附着力的研究

介绍了影响CVD金刚石涂层刀具附着力的因素,并重点对提高其附着力的工艺措施进行了较深入的研究,对解决刀具基体与金刚石薄膜之间的附着力过小问题有一定的指导意义。     

负偏压对含氢类金刚石薄膜性能的影响

为了解决类金刚石(DLC)薄膜与金属基材间的界面结合强度问题,本研究采用直流等离子体增强化学气相沉积(DC-PECVD)技术,以等时长、不同偏压条件在45钢基材上沉积复合DLC薄膜.采用扫描电镜、原子力显微镜观察薄膜形貌;采用拉曼光谱仪分析薄膜成分;采用涂层附着力自动划痕仪测定膜基结合强度.结果表明:制备偏压从-600...     

脉冲负偏压幅值对复合离子镀制备TiCN薄膜结构和性能的影响

采用复合离子镀技术,在不同脉冲负偏压幅值下于304不锈钢表面制备TiCN薄膜,研究了负偏压幅值对薄膜成分、结构、表面粗糙度、显微硬度及摩擦磨损性能的影响。结果表明:随着负偏压幅值升高,钛、碳与氮元素的原子比以及碳与钛元素的原子比先增大后减小,薄膜表面的颗粒及针孔、凹坑等缺陷尺寸减小,数量减少,表面形貌得到改善;薄膜主要由TiCN相组成,随着负偏压幅值增大出现(111)晶面择优取向,且薄膜的显微硬度先增大后减小,并在负偏压幅值为300V时达到最大,为2 690HV;薄膜的摩擦磨损性能优于基体的,随着负偏压幅值增加,薄膜的摩擦因数不断降低,在负偏压幅值为300V时约为0.355,此时薄膜的摩擦磨损性能最优。     

Cr过渡层沉积粘附型CVD金刚石膜的机理研究

研究了电沉积层作为过渡层沉积CVD金刚石膜的工艺，在硬质合金的Cr电沉积层上用热丝法沉积出CVD金刚石膜。利用SEM分析了电沉积层的形貌，利用EPMA分析了H等离子处理后电沉积层的断面，利用SEM和Raman分析了金刚石膜的表面形貌、成分，利用XRD分析了过渡层和CVD金刚石膜的结合面．利用压痕法研究了金刚石薄膜与基体的结合力。结果表明，H等离子处理使得硬质合全与Cr镀层成为冶金结合，提高了电沉积层的结合强度；在Cr过渡层与金刚石膜之间形成的Cr3C2和Cr7C3等碳化物有利于金刚石的成核和膜基结合强度的提高。     

CVD金刚石薄膜涂层铜线拉丝模的制备与应用

提高金刚石薄膜的表面质量和附着力是实现CVD金刚石涂层在耐磨器件领域中广泛应用的关键因素.本文通过优化沉积工艺参数,采用直拉丝化学气相沉积法在WC- Co硬质合金拉丝模内孔表面沉积金刚石薄膜.检测了该涂层的表面形貌、薄膜质量以及表面粗糙度,并把所制备的CVD金刚石薄膜涂层拉丝模具在拉拔铜线材生产线上进行了应用试验,结果...     

CVD金刚石薄膜涂层工具的研究概况

概述了CVD金刚石薄膜涂层工具的研究现状 ,分析了基体材料及其预处理方法对涂层工具膜基结合力的影响 ,并对影响工具切削性能的因素作了综述。     

应用CVD金刚石涂层工具研磨单晶蓝宝石

通过热丝化学气相沉积(HFCVD)法制备了具有球状晶结构、棱锥形晶结构和棱柱形晶结构等3种不同表面特征的化学气相沉积(CVD)金刚石涂层工具,以提高其研磨效率。通过正交实验法研究了金刚石涂层晶粒形态、载荷、工作台转速、研磨时间等4个工艺参数对蓝宝石材料去除率和表面粗糙度的影响。结果表明:金刚石涂层的晶粒形态对材料去除率和表面粗糙度影响较大;球状晶结构金刚石涂层切向力较小,棱柱形晶结构金刚石涂层切向力较大;选择棱柱形晶CVD金刚石涂层工具研磨蓝宝石,在研磨加工参数为载荷0.15 MPa、转速100 r/min、研磨时间3 min时,其材料去除率为0.397μm/min,表面粗糙度为0.354μm。结果表明:提出的CVD金刚石涂层工具可用于进一步加工、研磨蓝宝石切片,去除其表面划痕,从而改善工件表面质量。     

Friction and wear of diamondlike carbon on fine-graindiamond

Friction and wear behavior of ion-beam-deposited diamondlikecarbon (DLC) films coated on chemical-vapor-deposited (CVD),fine-grain diamond coatings were examined in ultrahigh vacuum,dry nitrogen, and humid air environments. The DLC films wereproduced by the direct impact of an ion beam (composed of a 3 :17 mixture of Ar and CH₄) at ion energies of 1500 and700 eV. Sliding friction experiments were conducted withhemispherical CVD diamond pins sliding on four differentcarbon-base coating systems: DLC films on CVD diamond; DLC filmson silicon; as-deposited, fine-grain CVD diamond; andcarbon-ion-implanted, fine-grain CVD diamond on silicon. Resultsindicate that in ultrahigh vacuum theion-beam-deposited DLC films on fine-grain CVD diamond (similarto the ion-implanted CVD diamond) greatly decrease both thefriction and wear of fine-grain CVD diamond films and providesolid lubrication. In dry nitrogen and in humid air,ion-beam-deposited DLC films on fine-grain CVD diamond films alsohad a lowsteady-state coefficient of friction and a low wear rate. Thesetribological performance benefits, coupled with a wider range ofcoating thicknesses, led to longer endurance life and improvedwear resistance for the DLC deposited on fine-grain CVD diamondin comparison to the ion-implanted diamond films. Thus, DLCdeposited on fine-grain CVD diamond films can be an effectivewear-resistant, lubricating coating regardless of environment.     

复杂形状金刚石薄膜涂层刀具的制备与试验研究

为了提高金刚石薄膜与衬底附着力,以整体式硬质合金麻花钻为例,对刀具衬底的预处理技术和ＣＶＤ涂层技术进行了研究;以碳化硅颗粒增强铝基复合材料的加工为例,对复杂形状金刚石薄膜涂层刀具的制备及应用技术提出了合理建议。     

Friction and Wear Performance of Boron Doped,Undoped Microcrystalline and Fine Grained Composite Diamond Films

Chemical vapor deposition(CVD) diamond films have attracted more attentions due to their excellent mechanical properties. Whereas as-fabricated traditional diamond films in the previous studies don’t have enough adhesion or surface smoothness, which seriously impact their friction and wear performance, and thus limit their applications under extremely harsh conditions. A boron doped, undoped microcrystalline and fine grained composite diamond(BD-UM-FGCD) film is fabricated by a three-step method adopting hot filament CVD(HFCVD) method in the present study, presenting outstanding comprehensive performance, including the good adhesion between the substrate and the underlying boron doped diamond(BDD) layer, the extremely high hardness of the middle undoped microcrystalline diamond(UMCD) layer, as well as the low surface roughness and favorable polished convenience of the surface fine grained diamond(FGD) layer. The friction and wear behavior of this composite film sliding against low-carbon steel and silicon nitride balls are studied on a ball-on-plate rotational friction tester. Besides, its wear rate is further evaluated under a severer condition using an inner-hole polishing apparatus, with low-carbon steel wire as the counterpart. The test results show that the BD-UM-FGCD film performs very small friction coefficient and great friction behavior owing to its high surface smoothness, and meanwhile it also has excellent wear resistance because of the relatively high hardness of the surface FGD film and the extremely high hardness of the middle UMCD film. Moreover, under the industrial conditions for producing low-carbon steel wires, this composite film can sufficiently prolong the working lifetime of the drawing dies and improve their application effects. This research develops a novel composite diamond films owning great comprehensive properties, which have great potentials as protecting coatings on working surfaces of the wear-resistant and anti-frictional components.     

CVD金刚石膜等离子体弧抛光的机理研究

提出了一种利用等离子体弧抛光CVD金刚石膜的新工艺。通过试验,对其抛光机理作了初步探讨,并对试样进行了实际抛光。结果表明,用等离子体弧加工金刚石膜确实具有抛光效果。粗糙度的降低可以认为有两种机制：一种是熔点以下的氧化刻蚀、石墨化、石墨氧化和溅射,石墨化是关键的因素;另一种是熔点以上的熔化流动、爆炸抛出和弧柱的吹力作用。