微/纳机构抗粘附研究进展

粘附现象是微/纳机构中特有的现象,在构件材料强度满足要求的条件下,微/纳机构中的粘附和摩擦是造成其失效的主要原因.如何防止或减轻粘附已成为微/纳机电系统(MEMS/NEMS)领域的研究热点.介绍了微/纳机构中的粘附问题,分析了粘附机理和各种粘附接触模型,说明了表面能法和微凸体积分法防粘附设计微/纳机构的原理,最后阐述了释放干燥工艺、减少实际接触面积和降低表面能等各种抗粘附措施.     

分形接触干摩擦模型及在围带叶片受迫响应分析中的应用

为了研究含有围带接触面叶片的非线性振动响应,基于三维干摩擦微滑移模型,发展了一种分形接触干摩擦微滑移模型,用于计算考虑接触面形貌的摩擦力.在该模型中,摩擦接触面被离散成一系列接触单元,每个接触单元由一组接触点对来表征该接触单元的粘滞、滑移、分离的摩擦运动状态.采用分形几何模拟接触表面的形貌,基于分形理论和赫兹接触理论,建立接触面粗糙度、正压力、弹性模量、泊松比等参数与接触刚度和摩擦系数的关系.接触面摩擦力由接触刚度、摩擦系数和接触点对的相对位移确定.采用该发展的模型预测了真实围带叶片的受迫振动响应,研究了接触面形貌和初始正压力对围带叶片共振响应的影响.研究结果表明,本文模型能考虑接触面形貌对围带叶片非线性振动响应的影响;接触面形貌改变时,接触刚度和摩擦系数会发生变化,从而影响接触面摩擦力;在该模型中,接触刚度随着正压力的增加而增加,随着粗糙度的增加而减小;摩擦系数随着正压力增加而增加,随着粗糙度的增加,先增大后减小;接触面形貌和初始正压力对围带叶片受迫振动响应有显著影响.     

动物接触力测试系统的研制与应用

研究爬壁动物在爬壁运动时其足掌与接触面间的接触力学规律及其运动步态,可为爬壁机器的设计与控制提供重要启示.研制的动物接触力测试系统由三维力传感器、信号调理模块、数据采集与处理模块、动态图像的记录与分析等组成,可用于树蛙、壁虎等在不同表面状况下的足掌与接触面之间的接触力学测试.利用该系统进行了树蛙垂直表面爬行时的力学测试...     

新型微小力测试平台的研制

针对大量昆虫可以在光滑的树枝和树干上自由活动的自然现象,提出了采用离心分离机和高速摄像机的方法,测试在不同的外部扰动下蚂蚁的脚与其接触表面间的粘附力和蚂蚁与接触面保持吸附状态的持续时间;通过测试平台的研制以及对蚂蚁的试验,测得质量为0．327 mg的蚂蚁在垂直面上的最大吸附力为0．574 mN,证明此方法是有效的。     

一种新型仿壁虎爬行机器人的粘附阵列设计

分析了壁虎与表面间的微尺度粘附接触作用模型,在此基础上设计了一种具有主动控制能力的仿壁虎微纳米粘附阵列．给出了粘附阵列各设计参数,并介绍了微纳米阵列的加工工艺方法．     

微齿轮系统中接触齿廓间范德华力计算方法研究

为分析微齿轮系统中接触齿廓间范德华力,利用泰勒公式建立了微齿轮渐开线简化数学模型,然后根据Hamaker假设和Morse势函数,引入分子动力学中的截断半径,提出了一种计算齿廓刚刚接触时两接触齿廓间范德华力的连续介质方法.同时,采用此方法对实例进行计算并得到计算结果,证明了该方法的可行性.该计算方法的提出不仅有利于微齿轮接触齿廓间粘附分析,而且对微齿轮应力应变分析提供一种新思路.     

采用RIE沉积法研制微纳工艺中的防粘连层

摩擦和粘附问题已经成为影响微机电系统(MEMS)工艺性能和可靠性的主要因素.针对MEMS/NEMS中微构件表面改性问题,采用反应离子刻蚀(RIE)在硅片表面沉积氟化物薄膜,以达到降低硅片的表面能,减少其摩擦和粘附的目的.实验还将RIE沉积法制得的薄膜与自组装(SAMs)薄膜在浸润角、表面能、表面粗糙度等方面进行了对比.     

一种快速计算三维空间中物体碰撞接触面的方法

介绍了一种利用三维空间中物体运动的时空相关性 ,以碰撞检测取得的两物体碰撞三角面为计算域 ,快速寻找凸多面体发生碰撞时接触面的方法。该方法利用特征点来描述接触面 ;根据接触面的拓扑结构计算碰撞三角面间的点 -面、边 -边的最小距离 ,从而快速确定碰撞位置、接触面特征点及接触面的法线 ,并简要叙述了点 -面、边 -边接触的计算流程。该方法通过缩小接触面的计算范围 ,简化接触面法线 ,提高了碰撞测定的实时性。通过实际应用 ,证明了该方法的可行性 ,适用于三维游戏制作、虚拟现实中的物理仿真等各项应用研究。     

亚胺表面活性剂判别和活性预测

亚胺表面活性剂是1类新型的可逆表面活性剂,由于其可以通过调节pH和温度来控制其可逆过程,在药物缓释等领域中有潜在应用价值。用HyperChem计算了亚胺化合物的QSAR性质。通过聚类分析,可以判断某亚胺化合物是否是表面活性剂。利用逐步回归分析,得到了可以预测其表面性质的方程。醛基临界胶束浓度方程包含2个参数,Grid方法的范德华分子表面积,折射率,方程的相关系数为0.99992,标准差为0.14007。亚胺基临界胶束浓度方程包含2个参数,Grid方法的范德华分子表面积,极化率。方程的相关系数为0.99993,标准差为0.06169。水力直径方程包含2个参数,Approx方法的溶剂可接触部分分子表面积,Grid方法的溶剂可接触部分分子体积,方程的相关系数为1,标准差为0.00346。这些为进一步研究亚胺表面活性剂打下良好的基础。     

新型非硅薄膜网格压力传感器的研究

针对偏瘫病患者身体接触面间的压力分布检测,提出并研发了一种基于压阻效应的新型非硅薄膜网格压力传感器。它利用实心柱式压力传感器检测原理,通过丝网印刷工艺制作而成,具有准确、快速、高效、直观、超薄、耐用、可重复使用等特点;总测量厚度为0.32mm。制品测试分析表明该传感器能够快速直观地检测出接触面间的压力分布。同时,新型非硅薄膜网格压力传感器也为生物医疗、康复和汽车等领域提供了新的研究手段。     

The Effect of Adhesion on the Static Friction Properties of Sidewall Contact Interfaces of Microelectromechanical Devices

Static friction between sidewall contact surfaces of polycrystalline silicon micromachines was investigated under different contact pressures, vacuum conditions, relative humidity levels, and temperatures. The static coefficient of friction exhibited a nonlinear dependence on the external contact pressure. A difference between in-contact and pull-out adhesion forces was observed due to the elastic recovery of the deformed asperities at the contact interface. The true static coefficient of friction was determined by considering the effects of the dominant adhesion forces (i.e., van der Waals and capillary forces) on the normal force applied at the sidewall contact interface. The roles of van der Waals and capillary forces in the sidewall friction behavior were analyzed in light of results for the interfacial shear strength and the adhesion force. The major benefits of the present friction micromachine and the developed experimental scheme are discussed in the context of static coefficient of friction and adhesion force results obtained under different environmental and loading conditions     

An experimental study of sidewall adhesion in microelectromechanical systems

A surface micromachine was designed specifically for studying sidewall adhesion in microelectromechanical systems (MEMS). The dependence of surface adhesion on contact load and ambient conditions was investigated under quasistatic normal loading conditions. Insight was obtained into the relative contributions of van der Waals and capillary forces to the measured adhesion force. Several shortcomings in previous adhesion studies of MEMS were overcome, and measurement of the true adhesion force was achieved under different testing conditions. The present experimental procedure enables the isolation of the van der Waals component of the adhesion force and the determination of the contributions of both contacting and noncontacting asperities to the total adhesion force at the inception of surface separation. The major benefits of the developed experimental methodology and surface micromachine are discussed in the context of adhesion results obtained for different values of apparent contact pressure, ambient pressure, and relative humidity.     

Theoretical study of van der Waals dispersion force between macroscopic bodies with a periodic material distribution

A method has been developed for calculating the van der Waals dispersion force between a macroscopic body consisting of a uniform material and a macroscopic body with a spatially periodic material distribution. The periodic material distribution is one dimensional in the x-direction. The periodically distributed material property function is expanded as a Fourier series. The van der Waals forces for a distribution of two materials were then calculated as a typical example of a periodic material distribution. The effects of parameters such as the duty ratio of the material distribution, the refractive index ratio of the two materials, and the length of the uniform body on the van der Waals force were shown.     

Adhesive surface design using topology optimization

Tailoring adhesive properties between surfaces is of great importance for micro-scale systems, ranging from managing stiction in MEMS devices to designing wall-scaling gecko-like robots. A methodology is introduced for designing adhesive interfaces between structures using topology optimization. Structures subjected to external loads that lead to delamination are studied for situations where displacements and deformations are small. Only the effects of adhesive forces acting normal to the surfaces are considered. An interface finite element is presented that couples a penalty contact formulation and a Lennard–Jones model of van der Waals adhesive forces. Two- and three dimensional design optimization problems are presented in which adhesive force distributions are designed such that load-displacement curves of delaminating structures match target responses. The design variables describe the adhesive energy per area of the interface between the surfaces, as well as the geometry of the delaminating structure. A built-in length scale in the formulation of the adhesion forces eliminates the need for filtering to achieve comparable optimal adhesive designs over a range of mesh densities. The resulting design problem is solved by gradient based optimization algorithms evaluating the design sensitivities by the adjoint method. Results show that the delamination response can be effectively manipulated by the method presented. Varying simultaneously both adhesive and geometric parameters yields a wider range of reachable target load-displacement curves than in the case varying adhesive energy alone.     

Theoretical study of van der Waals dispersion pressures considering one-dimensional material distributions in the in-plane direction

The van der Waals dispersion pressures between a half-space consisting of a uniform material and a half-space with a one-dimensional material distribution in the in-plane direction have been theoretically derived. Two patterns of material distribution were considered: a periodic distribution of materials (Pattern 1) and a distribution of two materials with a single interface (Pattern 2). The van der Waals pressure for Pattern 1 was derived based on a Fourier series, while the van der Waals pressure for Pattern 2 was derived as elementary functions. Both of the van der Waals pressures derived consist of two terms: a conventional term between half-spaces made of uniform materials and a spatial fluctuation term due to the material distribution. The basic characteristics of these van der Waals pressures were quantitatively clarified. Furthermore, an approximate method for obtaining the van der Waals pressure of Pattern 1 from Pattern 2 was proposed.     

Effect of relative particle size on large particle detachment from a microchannel

The detachment of a single rigid sphere in a cylindrical PDMS microchannel has been investigated for systems where the particle occupies greater than 50% of the channel cross-sectional area. The fluid velocity required to detach a particle adhering to a microchannel wall is a function of many variables; however, only the effect of particle size is considered in this paper. Experiments were performed for Reynolds numbers less than 0.1, and the ratio of particle diameter, d _p, to channel dimension, D, was varied from 0.50 to 0.95 in a 230 μm channel. A nonionic surfactant (Tween 80) was used to minimize the effect of adhesive forces other than van der Waals forces. In addition, a simple force-balance model based on particle lift, buoyancy, drag, gravitational forces, and adhesion due to van der Waals forces has been developed to predict the velocity required for particle detachment. The predicted and experimentally measured velocities agree relatively well within the limit of experimental error. The detachment velocity was qualitatively found to increase with decreasing d _p /D.     

Lagrangian particle model for multiphase flows

A Lagrangian particle model for multiphase multicomponent fluid flow, based on smoothed particle hydrodynamics (SPH), was developed and used to simulate the flow of an emulsion consisting of bubbles of a non-wetting liquid surrounded by a wetting liquid. In SPH simulations, fluids are represented by sets of particles that are used as discretization points to solve the Navier-Stokes fluid dynamics equations. In the multiphase multicomponent SPH model, a modified van der Waals equation of state is used to close the system of flow equations. The combination of the momentum conservation equation with the van der Waals equation of state results in a particle equation of motion in which the total force acting on each particle consists of many-body repulsive and viscous forces, two-body (particle-particle) attractive forces, and body forces such as gravitational forces. Similar to molecular dynamics, for a given fluid component the combination of repulsive and attractive forces causes phase separation. The surface tension at liquid-liquid interfaces is imposed through component dependent attractive forces. The wetting behavior of the fluids is controlled by phase dependent attractive interactions between the fluid particles and stationary particles that represent the solid phase. The dynamics of fluids away from the interface is governed by purely hydrodynamic forces. Comparison with analytical solutions for static conditions and relatively simple flows demonstrates the accuracy of the SPH model.     

Particle Monte Carlo and lattice-Boltzmann methods for simulations of gas-particle flows

A numerical solution concept is presented for simulating the transport and deposition to surfaces of discrete, small (nano-)particles. The motion of single particles is calculated from the Langevin equation by Lagrangian integration under consideration of different forces such as drag force, van der Waals forces, electrical Coulomb forces and not negligible for small particles, under stochastic diffusion (Brownian diffusion). This so-called particle Monte Carlo method enables the computation of macroscopic filter properties as well the detailed resolution of the structure of the deposited particles. The flow force and the external forces depend on solutions of continuum equations, as the Navier-Stokes equations for viscous, incompressible flows or a Laplace equation of the electrical potential. Solutions of the flow and potential fields are computed here using lattice-Boltzmann methods. Essential advantage of these methods are the easy and efficient treatment of three-dimensional complex geometries, given by filter geometries or particle covered surfaces. A number of numerical improvements, as grid refinement or boundary fitting, were developed for lattice-Boltzmann methods in previous studies and applied to the present problem. The interaction between the deposited particle layer and the fluid field or the external forces is included by recomputing of these fields with changed boundaries. A number of simulation results show the influence of different effects on the particle motion and deposition.     

Investigation of anti-stiction coating for ohmic contact MEMS switches with thiophenol and 2-naphthalenethiol self-assembled monolayer

Anti-stiction coating with a conductive self-assembled monolayer (SAM) formed by π-conjugated bonds was investigated for ohmic contact microelectromechanical system (MEMS) switches with low-load contacts. SAMs of thiophenol (C₆H₅SH, TP) or 2-naphthalenethiol (C₁₀H₇SH, 2NT) were coated on Au samples with different surface roughness to investigate the effects of the surface asperities on the adhesion force and contact resistance. The adhesion force was measured using a silicon tipless cantilever in the relative humidity range of 10-85% and the contact resistance was measured in the contact force range of 0-70 μN using a conductive tipless cantilever coated with Au for the SAM coated samples and compared with those for a Au sample surface. The adhesion force measurements indicate that the TP and 2NT coatings can prevent a liquid meniscus from forming on device surfaces due to their hydrophobic character caused by the protruding aromatic group. In addition, it was confirmed that these coatings could reduce van der Waals forces more than Au coating. Contact resistance measurements revealed that an electric current begins to flow with smaller contact force for TP and 2NT coated samples than for Au coated samples. The measured contact resistances of the SAM and Au coated samples were comparable. Based on these results, SAMs of TP and 2NT have excellent potential as anti-stiction coating for MEMS switch contacts.     

noloco: An efficient implementation of van der Waals density functionals based on a Monte-Carlo integration technique

The treatment of van der Waals interactions in density functional theory is an important field of ongoing research. Among different approaches developed recently to capture these non-local interactions, the van der Waals density functional (vdW-DF) developed in the groups of Langreth and Lundqvist is becoming increasingly popular. It does not rely on empirical parameters, and has been successfully applied to molecules, surface systems, and weakly-bound solids. As the vdW-DF requires the evaluation of a six-dimensional integral, it scales, however, unfavorably with system size. In this work, we present a numerically efficient implementation based on the Monte-Carlo technique for multi-dimensional integration. It can handle different versions of vdW-DF. Applications range from simple dimers to complex structures such as molecular crystals and organic molecules physisorbed on metal surfaces.