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针对光纤Bragg光栅(FBG)振动传感器在使用过程中存在横向干扰的问题,对传感器探头结构和配合尺寸进行了优化设计,达到了抗横向干扰的效果。ANSYS模态分析表明,传感器的2阶、3阶、4阶模态谐振频率远大于1阶模态谐振动频率,可以有效避免传感器在使用过程中的交叉敏感问题。振动加载实验结果表明:在同等大小加速度激励下,传感器的横向输出占轴向输出的比例不超过3.47%,说明传感器具有良好的抗横向干扰能力。 相似文献
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高g值加速度传感器动态线性测试描述了传感器的输入、输出以及频率三者之间的关系,反映了在某一特定频率下传感器的线性特性.基于霍普金森杆校准系统动态线性测试的一个关键技术是通过实现内弹外弹两粒弹丸的同步撞击,以此来实现两子弹作用于杆上的冲击加速度脉冲的频率相同,实现加速度传感器动态线性测试.本文基于动态线性测试方法,对子弹的同步撞击方法与子弹形状进行了仿真与实验研究.结果表明:实验室无法实现内外弹的同速异步撞击;将用于动态线性测试的内外弹绑定和改变内外弹截面积对第1次压缩波基本没有影响;该结论为利用霍普金森杆做加速度传感器动态校准提供了理论基础和现实依据. 相似文献
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为了实现微弱光信号的快速高精度检测,设计了一种基于FPGA的三通道高精度光学检测仪.该仪表利用灵敏度极高的光电转换模块作为感光元件,将光强信号转换为数字脉冲信号,之后利用FPGA对脉冲信号进行高频计数,通过脉冲频率反映光的强弱.在FPGA内部构建了NIOS Ⅱ作为整个仪表的控制核心,并移植了μC/OS-Ⅱ操作系统,实现对键盘、液晶、步进电机等模块的控制功能.系统采用了三通道设计,可以同时测量三种不同待测试剂,且三通道间相互干扰小,一致性好,系统噪声低,大大提高了检测效率.在实际发光检测应用中,该仪表灵敏度高,线性度好,检测时间短,成为现场快速光学检测的有效工具. 相似文献
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针对基于光弹效应的集成光学微腔悬臂梁式加速度计难以同时实现高灵敏度和高抗冲击性的问题,提出增加光学微腔周长的方案。经过详细的理论分析得出:通过增加微腔周长可以有效地增加惯性力下微腔谐振点波长偏移量,提高探测灵敏度。设计了多回路长直跑道型微腔结构,在100μm×600μm悬臂梁区域内集成出周长达5297μm的硅微谐振腔。利用MEMS工艺制作出所设计的微腔结构,测试品质因数达105。该结构应用于加速度等传感器中,在不减小传感器抗冲击性和量程的前提下,能有效提高探测灵敏度。 相似文献
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一种新结构硅微机械压阻加速度计 总被引:3,自引:3,他引:3
设计、制造并测试了一种新结构硅微机械压阻加速度计.器件结构是悬臂梁-质量块结构的一种变形.比较硬的主悬臂梁提供了一定的机械强度,并且提供了高谐振频率.微梁很细,检测时微梁沿轴向直拉直压.力敏电阻就扩散在微梁上,质量块很小的挠动就能在微梁上产生很大的应力,输出很大的信号.5 V条件下,灵敏度为14.80 mV/g,谐振频率为994 Hz,分别是传统结构压阻加速度计的2.487倍和2.485倍.加速度计用普通的N型硅片制造,为了刻蚀高深宽比的结构,使用了深反应离子刻蚀(DRIE)工艺. 相似文献
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Single- and Triaxis Piezoelectric-Bimorph Accelerometers 总被引:1,自引:0,他引:1
This paper describes the novel single- and triaxis piezoelectric-bimorph accelerometers that are built on parylene beams with ZnO films. The unamplified sensitivity and the minimum detectable signal of the fabricated single-axis accelerometer are measured to be 7.0 mV/g and 0.01 g, respectively, over a frequency range from 60 Hz to subhertz. The linearity of the sensitivity as a function of acceleration is measured to be 0.9% in the full scale. A highly symmetric quad-beam bimorph structure with a single proof mass is used for triaxis acceleration sensing and is demonstrated to produce high sensitivity, low cross-axial sensitivity, and good linearity, all in a compact size. The unamplified sensitivities of the X-, Y-, and Z-axis electrodes (of the triaxis accelerometer) in response to the accelerations in X-, Y-, and Z-axes are 0.93, 1.13, and 0.88 mV/g, respectively. The worst-case minimum detectable signal of the triaxis accelerometer is measured to be 0.04 g over a bandwidth ranging from subhertz to 100 Hz. The cross-axial sensitivity among the X-, Y-, and Z-axis electrodes is less than 15% in the triaxis accelerometer. The theoretical analyses of the charge sensitivities and resonant frequencies along with the effects of residual stress on the charge sensitivities are presented for both the single- and triaxis accelerometers. 相似文献
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A novel mercury-based capacitive accelerometer has been designed and fabricated. The accelerometer features a highly symmetrical cubic structure and capacitive coupling of the high-frequency input voltage, which uses a mercury drop for spring material and flexible interconnection layer between the capacitor plates. The device is mounted on a standard IC package with dimensions of 5 mm × 5 mm × 5 mm. The structure, working principle, fabrication, and mathematical model of the accelerometer are presented. Since the accelerometer uses a mercury drop as its sensitive electrode instead of a solid, which is commonly used in traditional accelerometers, the conflict between the requirements of high shock and high sensitivity is solved. The measurement results show a sensitivity of 0.2 mV (m s−2)−1 with a corresponding resolution of 0.01 ms−2, off-axis sensitivity of <5% and good linearity in the output voltage for accelerations up to at least 10 m s−2. 相似文献
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研究了一种主要应用于碰撞测试领域的硅微机械高性能压阻式加速度计,量程范围为2 000 gn.为满足技术性能要求,加速度计采用一种三梁-质量块结合梳齿阻尼器的新颖结构,从而可以同时具有高灵敏度及高动态特性(包括高谐振频率及精确阻尼控制).这种加速度计采用n型(100)普通硅片制作,主要工艺过程包括双面ICP深刻蚀和压阻集成工艺.振动台测试结果表明,加速度计的灵敏度为0.11 mV/gn/5 V,谐振频率为31 kHz,灵敏度±5%变化下平坦带宽大于5 kHz.采用落杆测试法测试了加速度计的冲击响应及0~2 000 gn满量程范围内的非线性度.封装后的加速度计承受15 000 gn的冲击测试后没有受到损坏. 相似文献
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基于FBG的新型加速度计研究 总被引:2,自引:0,他引:2
设计了一种新型的差动式光纤布拉格光栅(Fiber Bragg grating,FBG)加速度计,论述了其传感结构的设计原理、理论分析和有限元仿真。文中设计的主梁与微梁相结合的差动结构形式,克服了传统悬臂梁结构FBG加速度计存在的固有频率与灵敏度相互制约的矛盾,提高了固有频率和灵敏度。同时,为了解决单悬臂梁结构加速度计存在的温度补偿问题,设计了差动式光学检测系统,使该加速度计的灵敏度较传统单悬臂梁结构提高了一倍。理论分析结果表明,该加速度计灵敏度可达到52.7pm/gn,固有频率250Hz。实验结果表明,该结构提高了加速度计的灵敏度,有效解决了FBG加速度计应变和温度交叉敏感问题,实验结果与仿真数据具有很好的一致性。 相似文献
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Yulong Zhao Weizhong Wang Bian Tian Libo Zhao Zhuangde Jiang 《Microsystem Technologies》2012,18(3):283-294
This paper describes the design and characterization of an integrated sensor fabricated on the silicon on insulator wafer
by micro electro mechanical systems technology. The integrated sensor is comprised of a tri-axis accelerometer, an absolute
pressure sensor and a spreading-resistance temperature (SRT) sensor. The optimal size of the sensor structure, natural frequency
and cross interference of these three sensors were simulated and determined by finite element analysis. The accelerometer
with the cross structure has high sensitivity, good linearity and high response frequency proved by the static and dynamic
experiments. The zero-drift, thermal zero-drift and thermal sensitivity of the accelerometer and absolute pressure sensor
were also tested. The arrangement of SRT sensor with the wave structure was designed in detail. The optimal location of the
SRT sensor was at the edge of chip to avoid stress interference. The integrated sensor with low cost, low mutual interference,
smaller volume and good performance can be applied in mobile device, small military plane without driver and some other situations
for environmental monitoring. 相似文献
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针对高量程加速度测试需求,提出了一种基于光弹效应的新型光学加速度传感器;利用MATLAB软件和时域差分有限元(FDTD)对微环谐振腔悬臂梁加速度计的结构进行优化设计,详细分析了波导传输模态,传感器灵敏度以及工作带宽与波导尺寸、微悬臂梁尺寸的关系。在优化设计的基础上,通过ANSYS软件对悬臂梁的抗冲击性能进行仿真,其抗冲击可达104gn,灵敏度为10-2pm/gn,能有效满足高冲击、强烈振动场合的特殊测试要求,可以应用于侵彻系统,并为集成小型化高灵敏抗冲击微光机电系统(MOEMS)传感器提供理论参考。 相似文献